Water cooling furnace door structure
By using a water-cooled furnace door structure, the problem of sealing ring aging at high temperatures has been solved, improving equipment reliability and product quality while reducing maintenance costs.
Patent Information
- Application Number
- CN202423296110.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-30
AI Technical Summary
The sealing rings of the reaction chamber doors in existing vacuum equipment are prone to aging and damage under high temperatures, which affects production efficiency and product performance, and reduces the pass rate.
The furnace door adopts a water-cooled structure, including a water-cooled sealing flange and a water-cooled cavity. The high temperature of the sealing ring is reduced by cooling water, and the linear reciprocating motion of the furnace door is realized by a drive mechanism.
This improved equipment reliability, reduced maintenance costs, and ensured product qualification rates and performance indicators.
Smart Images
Figure CN223678239U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor technology, concretely is a water cooling furnace door structure. BACKGROUND
[0002] LPCVD (low pressure chemical vapor deposition), oxidation annealing furnace and the like are used for diffusion, oxidation, annealing, insulating layer film growth and the like processes of integrated circuits, discrete devices, MEMS and different size wafers, some special process high temperature oxidation, high temperature annealing process is carried out under high temperature vacuum state. SUMMARY
[0003] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides a water cooling furnace door structure.
[0004] A water cooling furnace door structure, comprising a furnace door body, the furnace door body covers the opening end of a quartz reaction chamber, a water cooling support flange is sleeved on the side wall of the end of the quartz reaction chamber, the water cooling support flange is fixedly connected with a water cooling sealing flange, one side of the water cooling sealing flange away from the water cooling support flange is tightly abutted with the furnace door body, a water cooling cavity is arranged on the side of the furnace door body close to the quartz reaction chamber, and a furnace door sealing ring is arranged at the contact position of the furnace door and the water cooling sealing flange.
[0005] Further, the water cooling cavity is provided with a water inlet and a water outlet, and the water inlet and the water outlet are connected with a water tank through a pipeline.
[0006] Further, the furnace door body is installed on a clamping frame, and the clamping frame is linearly reciprocated through a driving mechanism.
[0007] Further, the pipeline comprises a metal hose connected between the water inlet and the water outlet, the metal hose is connected with a high-temperature resistant water pipe, the high-temperature resistant water pipe penetrates into a drag chain, and the drag chain is fixed on the clamping frame.
[0008] Further, a flange sealing ring is arranged between the water cooling support flange and the water cooling sealing flange.
[0009] The utility model discloses an advantageous technical effect is: the utility model discloses a water cooling furnace door structure, including furnace door body 5, the furnace door body 5 cover in the opening end of quartz reaction cavity 1, the side wall of quartz reaction cavity 1's end portion is equipped with water cooling support flange 2, water cooling support flange 2 is fixedly connected with water cooling sealing flange 3, and the side away from water cooling support flange 2 of water cooling sealing flange 3 is closely contacted with furnace door body 5, and the water cooling cavity of furnace door body 5 is close to quartz reaction cavity 1 side, and the furnace door sealing ring 6 is equipped with in the contact place of furnace door and water cooling sealing flange 3. BRIEF DESCRIPTION OF DRAWINGS
[0010] Fig. 1 It is a kind of water cooling furnace door structure main view direction's cross section structure schematic diagram of the utility model;
[0011] Fig. 2 It is a kind of water cooling furnace door structure's plan view.
[0012] In the drawing, 1, quartz reaction cavity, 2, water cooling support flange, 3, water cooling sealing flange, 4, flange sealing ring, 5, furnace door body, 6, furnace door sealing ring, 7, metal hose, 8, high-temperature-resistant tube, 9, drag chain, 10, clamping frame, 11, transmission mechanism. DETAILED DESCRIPTION
[0013] In order to more clearly illustrate the technical scheme of the utility model, further description will be made to the utility model in conjunction with the drawings. Obviously, the drawings described below are only one embodiment of the utility model, and for ordinary skilled in the art, other embodiments can be obtained according to the drawings and the embodiment without creative labor, which belong to the protection scope of the utility model.
[0014] According to Figs. 1-2 As shown in the figure, a kind of water cooling furnace door structure, including furnace door body 5, the furnace door body 5 cover in the opening end of quartz reaction cavity 1, the side wall of quartz reaction cavity 1's end portion is equipped with water cooling support flange 2, water cooling support flange 2 is fixedly connected with water cooling sealing flange 3, and the side away from water cooling support flange 2 of water cooling sealing flange 3 is closely contacted with furnace door body 5, and the water cooling cavity of furnace door body 5 is close to quartz reaction cavity 1 side, and the furnace door sealing ring 6 is equipped with in the contact place of furnace door and water cooling sealing flange 3.
[0015] In the above specific technical scheme, by setting water cooling sealing flange 3, the sealing property of quartz reaction cavity 1 and furnace door body 5 connection is increased, and the influence of high temperature on furnace door sealing ring 6 is reduced, in addition, water cooling cavity is equipped on furnace door body 12, and cooling water is filled in water cooling cavity, so that the aging damage of furnace door sealing ring 6 due to high temperature is avoided, the reliability of equipment is greatly improved, the equipment maintenance cost is reduced, and the product qualification rate and performance index are guaranteed.
[0016] It is worth mentioning that the water-cooled support flange 2 and the water-cooled sealing flange 3 are fixedly connected through bolts.
[0017] The water-cooled cavity is provided with a water inlet and a water outlet, the water inlet and the water outlet are connected with a water tank through pipelines, and the circulation of water in the water-cooled cavity is ensured through the water inlet and the water outlet, so that the water-cooled cavity is continuously provided with cooling water.
[0018] The furnace door body 12 is installed on the clamping frame 10, and the clamping frame 10 is linearly reciprocated through a driving mechanism. It is worth mentioning that the driving mechanism can be a lead screw and light rod mechanism installed on the clamping frame 10, which drives the clamping frame 10 to move linearly through a motor, or the mounting frame is connected with the output end of a fluid cylinder to drive the clamping frame 10 to move linearly, thereby driving the furnace door body 5 to reciprocate in the linear direction.
[0019] The pipeline comprises a metal hose 7 connected between the water inlet and the water outlet, the metal hose 7 is connected with a high-temperature-resistant water pipe, the high-temperature-resistant water pipe penetrates into a drag chain 9, the drag chain 9 is fixed on the clamping frame 10, and the metal hose 7 can ensure that it will not be bent and damaged during the movement of the furnace door body 12, the high-temperature-resistant water pipe penetrates into the drag chain 9, so that it can bend with the drag chain 9, thereby ensuring that it will not be damaged and leak.
[0020] The water-cooled support flange 2 and the water-cooled sealing flange 3 are provided with a flange sealing ring 4, the water-cooled support flange 2 and the water-cooled sealing flange 3 are both internally connected with cooling water, and the quartz reaction cavity 1 is sealed by compressing the flange sealing ring 4, and the flange sealing ring 4 is cooled at the same time.
[0021] The above examples are only exemplary embodiments of the present application and are not used to limit the present application, the protection scope of the present application is defined by the claims, and those skilled in the art can make various modifications or equivalent replacements to the present application within the spirit and protection scope of the present application, and such modifications or equivalent replacements should also be considered to fall within the protection scope of the present application.
Claims
1. A water cooled furnace door structure comprising a furnace door body (5), characterized in that, The furnace door body (5) covers the opening end of the quartz reaction cavity (1), the end side wall of the quartz reaction cavity (1) is sleeved with a water-cooled support flange (2), the water-cooled support flange (2) is fixedly connected with a water-cooled sealing flange (3), the side of the water-cooled sealing flange (3) away from the water-cooled support flange (2) is tightly abutted with the furnace door body, the water-cooled cavity on the side of the furnace door body (5) close to the quartz reaction cavity (1), the furnace door sealing ring (6) is arranged at the contact position of the furnace door and the water-cooled sealing flange (3).
2. A water cooled door structure according to claim 1, wherein The water-cooled cavity is provided with a water inlet and a water outlet, and the water inlet and the water outlet are connected with a water tank through pipelines.
3. A water cooled door structure according to claim 2, wherein The furnace door body (5) is installed on the clamping frame (10), and the clamping frame (10) is linearly reciprocated through a driving mechanism.
4. A water cooled door structure according to claim 3, wherein The pipeline comprises a metal hose (7) connected between the water inlet and the water outlet, the metal hose (7) is connected with a high-temperature resistant water pipe, the high-temperature resistant water pipe penetrates into a drag chain (9), and the drag chain (9) is fixed on the clamping frame (10).
5. A water cooled door structure according to claim 4, wherein The water-cooled support flange (2) and the water-cooled sealing flange (3) are provided with a flange sealing ring (4).