Flatness detection equipment

Abstract

The utility model provides a flatness detection device. The flatness detection equipment is used for detecting the flatness of a crystal support, and comprises a support; the conveying device is used for conveying the crystal support and at least partially penetrates through the support; the flatness detection assembly comprises a mounting plate and a plurality of detection devices, and the plurality of detection devices are arranged on the mounting plate at intervals along the length direction and / or the width direction of the mounting plate; when the mounting plate is in contact with the crystal support, each detection device is used for detecting the distance between the detection device and the crystal support so as to judge whether the planeness of the crystal support is within a preset range or not according to detection values of all the detection devices; the adjusting assembly is arranged on the support and located above the conveying device, and at least part of the adjusting assembly is arranged in a lifting mode and connected with the mounting plate so as to drive the multiple detection devices to move towards or away from the conveying device through the mounting plate. According to the utility model, the problem of low detection efficiency of the planeness of the crystal support in the prior art is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, specifically, relate to a flatness detection equipment. BACKGROUND

[0002] At present, in the semiconductor processing process, the crystal holder is used as the platform of bearing sensitive materials such as silicon wafer, crystal bar, and the flatness of the crystal holder will directly affect the uniform distribution of the adhesive, the processing precision and the performance of the crystal bar or silicon wafer.

[0003] In the prior art, the flatness of the crystal holder is usually detected by using a probe to scan the surface of the crystal holder, recording the position change of the probe when it contacts the surface, and calculating the flatness of the crystal holder. However, the above contact measurement needs the probe to move on the surface of the crystal holder and collect data one by one, so the measurement speed is relatively slow, which affects the detection efficiency of the flatness of the crystal holder, and further affects the production efficiency. UTILITY MODEL CONTENTS

[0004] The main purpose of the utility model is to provide a flatness detection equipment to solve the problem of low detection efficiency of the flatness of the crystal holder in the prior art.

[0005] In order to achieve the above purpose, the utility model provides a flatness detection equipment for detecting the flatness of the crystal holder, which comprises a support, a conveying device for transporting the crystal holder, at least part of the conveying device passing through the support, a flatness detection assembly comprising a mounting plate and a plurality of detection devices, the plurality of detection devices being arranged on the mounting plate along the length direction and / or width direction of the mounting plate, each detection device being used to detect the distance between it and the crystal holder when the mounting plate contacts the crystal holder on the conveying device, so as to judge whether the flatness of the crystal holder is within the preset range according to the detection values of all the detection devices, and an adjusting assembly arranged on the support above the conveying device, at least part of the adjusting assembly being liftably arranged and connected with the mounting plate, so as to drive the plurality of detection devices to move towards or away from the conveying device through the mounting plate.

[0006] Further, the detection device is a laser ranging sensor.

[0007] Further, the flatness detection assembly further comprises a plurality of mounting racks, all the mounting racks being arranged on the mounting plate, the plurality of mounting racks being arranged one by one corresponding to the plurality of detection devices, each mounting rack being used to mount the detection device corresponding thereto, wherein the mounting plate has a plurality of first through holes, the plurality of first through holes being arranged one by one corresponding to the detection heads of the plurality of detection devices, when the mounting plate contacts the crystal holder, all the detection devices and the crystal holder are respectively located on both sides of the mounting plate, and the laser emitted by each detection device passes through the first through hole corresponding thereto and then shoots at the crystal holder.

[0008] Further, the adjusting assembly comprises a connecting assembly connected with the mounting plate, and a driving device drivingly connected with the connecting assembly to drive the connecting assembly to drive the mounting plate to perform the lifting movement.

[0009] Further, the connecting assembly comprises a connecting plate connected with the driving end of the driving device, and a connecting shaft penetrating through the connecting plate and connected with the connecting plate, and a floating connector arranged on a first end of the connecting shaft, and the connecting shaft is connected with the mounting plate through the floating connector.

[0010] Further, the connecting plate has a mounting hole, and the connecting assembly further comprises a bushing penetrating through and connected with the mounting hole, and a limiting structure connected with a second end of the connecting shaft after penetrating through the bushing, and the limiting structure is used for limiting and stopping the connecting plate; wherein, the connecting shaft and the bushing have a preset gap therebetween.

[0011] Further, the connecting shaft is one; or the connecting shaft is multiple, and the multiple connecting shafts are arranged in the length direction and / or the width direction of the connecting plate; and the connecting assembly further comprises an elastic structure sleeved outside at least one connecting shaft to apply an elastic force to the mounting plate towards the side of the wafer holder.

[0012] Further, the planeness detection device further comprises a support plate on which the driving body of the driving device is arranged, the support plate has a second through hole for the driving end of the driving device to penetrate through, and a third through hole, and a guide shaft movably penetrating through the third through hole, the guide shaft is fixedly connected with the connecting plate to synchronously lift with the connecting plate; wherein, the extension direction of the guide shaft is consistent with the lifting direction of the connecting plate.

[0013] Further, the planeness detection device further comprises a linear bearing arranged in the third through hole, at least part of the guide shaft movably penetrating through the linear bearing to limit the guide shaft in the radial direction through the linear bearing, and a stopping structure arranged at an end of the guide shaft away from the connecting plate to limit and stop the support plate.

[0014] Further, the support plate is arranged on a support, the guide shaft is at least two, and the at least two guide shafts are respectively located on two sides of the support; and / or, the connecting shaft is at least two, and the guide shaft is located between the at least two connecting shafts.

[0015] The technical scheme of the utility model is applied to the plane degree detection equipment for detecting the plane degree of a crystal holder, the plane degree detection equipment comprises a support, a conveying device, a plane degree detection assembly and an adjusting assembly, the conveying device is used for transporting the crystal holder, and at least part of the conveying device passes through the support. The plane degree detection assembly comprises a mounting plate and a plurality of detection devices, the plurality of detection devices are arranged on the mounting plate in a length direction and / or a width direction of the mounting plate; when the mounting plate contacts the crystal holder on the conveying device, each detection device is used for detecting the distance between the detection device and the crystal holder, so as to judge whether the plane degree of the crystal holder is within a preset range according to the detection values of all the detection devices. The adjusting assembly is arranged on the support and above the conveying device, at least part of the adjusting assembly is arranged in a lifting mode and connected with the mounting plate, so as to drive the plurality of detection devices to move towards or away from the conveying device through the mounting plate. In this way, before the plane degree detection equipment detects the plane degree of the crystal holder, the plane degree detection assembly is used to measure and detect a standard crystal holder, so as to fit a theoretical fitting plane according to the detection values of all the detection devices; when the plane degree of the crystal holder needs to be detected, the crystal holder is placed on the conveying device, the conveying device transports the crystal holder until the crystal holder is transported to the position of the plane degree detection assembly. Then, the adjusting assembly drives the mounting plate of the plane degree detection assembly to move towards the crystal holder until the mounting plate contacts the crystal holder, at this time, all the detection devices detect the distance between the detection devices and the crystal holder, and the detection values of all the detection devices are compared with the theoretical fitting plane, so as to judge whether the plane degree of the crystal holder is within the preset range, thereby solving the problem of low detection efficiency of the plane degree of the crystal holder in the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0016] The drawings accompanying the specification of the present application form a part thereof, serve to provide further understanding of the present application, and together with the specification explain the application. The use of the same reference numerals in different drawings indicates similar or identical components.

[0017] Figure 1 A perspective structural schematic view of an embodiment of the plane degree detection equipment according to the utility model is shown;

[0018] Figure 2 A perspective structural schematic view of the plane degree detection equipment in Figure 1 after the support and the conveying device are removed and when the plane degree detection equipment moves towards the crystal holder is shown;

[0019] Figure 3 A perspective structural schematic view of the plane degree detection equipment in Figure 1 when the plane degree detection equipment detects the plane degree of the crystal holder is shown;

[0020] Figure 4 A perspective structural schematic view of the adjusting assembly and the support plate of the plane degree detection equipment in Figure 2 after assembly is shown.

[0021] Figure 5 As shown in Figure 2 the three-dimensional structure schematic diagram of the support plate, guide shaft, linear bearing, stop structure and connecting plate of the flatness detection device in

[0022] Figure 6 As shown in Figure 2 the three-dimensional structure schematic diagram of the adjusting assembly and mounting plate of the flatness detection device in

[0023] Figure 7 As shown in Figure 2 the three-dimensional structure schematic diagram of the flatness detection assembly of the flatness detection device in

[0024] Among them, the above drawings include the following reference signs:

[0025] 10, crystal holder;

[0026] 20, support;

[0027] 30, conveying device;

[0028] 40, flatness detection assembly; 41, mounting plate; 411, first through hole; 42, detection device; 43, mounting frame;

[0029] 50, adjusting assembly; 51, connecting assembly; 511, connecting plate; 512, connecting shaft; 513, floating connector; 514, bushing; 515, limiting structure; 516, elastic structure; 52, driving device;

[0030] 60, support plate; 61, second through hole;

[0031] 70, guide shaft;

[0032] 80, linear bearing;

[0033] 90, stop structure. DETAILED DESCRIPTION

[0034] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0035] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0036] In the utility model, in the case where no opposite statement is made, the orientation words such as ''up, down'' are usually directed to the direction shown in the drawing, or are directed to the vertical, perpendicular or gravity direction; similarly, for the convenience of understanding and description, ''left, right'' is usually directed to the left and right shown in the drawing; ''inner, outer'' refers to the inner and outer relative to the contour of each component itself, but the above orientation words are not used to limit the utility model.

[0037] In order to solve the problem of low detection efficiency of the plane degree of the crystal holder in the prior art, the utility model provides a kind of plane degree detection equipment.

[0038] As Figures 1 to 7 As shown in the plane degree detection equipment for detecting the plane degree of crystal holder 10, the plane degree detection equipment includes support 20, conveying device 30, plane degree detection component 40 and adjustment component 50. Wherein, conveying device 30 is used to transport crystal holder 10, and at least part of conveying device 30 passes through support 20. Plane degree detection component 40 includes mounting plate 41 and multiple detection devices 42, multiple detection devices 42 are arranged on mounting plate 41 along the length direction and / or width direction of mounting plate 41;When mounting plate 41 is in contact with crystal holder 10 on conveying device 30, each detection device 42 is used to detect the distance between it and crystal holder 10, so as to judge whether the plane degree of crystal holder 10 is within the preset range according to the detection value of all detection devices 42. Adjustment component 50 is arranged on support 20 and located above conveying device 30, at least part of adjustment component 50 is arranged in a lifting manner and connected with mounting plate 41, so as to drive multiple detection devices 42 to move towards or away from conveying device 30 through mounting plate 41.

[0039] The technical scheme of the embodiment is applied, before the plane degree detection equipment detects the plane degree of crystal holder, first use plane degree detection component 40 to measure and detect standard crystal holder, so as to fit out theoretical fitting plane according to the detection value of all detection devices 42;When the plane degree of crystal holder 10 needs to be detected, place crystal holder 10 on conveying device 30, conveying device 30 transports crystal holder 10, until crystal holder 10 is transported to the position where plane degree detection component 40 is located. After that, adjustment component 50 drives mounting plate 41 of plane degree detection component 40 to move towards crystal holder 10, until mounting plate 41 is in contact with crystal holder 10, at this time, all detection devices 42 detect the distance between them and crystal holder 10, and compare the detection value of all detection devices 42 with theoretical fitting plane, so as to judge whether the plane degree of crystal holder 10 is within the preset range, thereby solving the problem of low detection efficiency of the plane degree of crystal holder in the prior art.

[0040] In the embodiment, conveying device 30 is a line body, which is a device for supporting and conveying materials, and has high rigidity and stability.

[0041] In the embodiment, the detection devices 42 are four, two detection devices 42 are oppositely arranged and are spaced along the width direction of the mounting plate 41, and the other two detection devices 42 are respectively located on the two sides of the above-mentioned two detection devices 42 and are spaced along the length direction of the mounting plate 41.

[0042] It should be noted that the number of detection devices 42 is not limited to this, and can be adjusted according to the working conditions and use requirements. Alternatively, the detection devices 42 are three, or five, or six, or seven, or more.

[0043] In the embodiment, the detection devices 42 are laser ranging sensors. In this way, the laser ranging sensor has the characteristics of high precision, high efficiency and non-contact measurement, and can quickly and accurately detect the flatness of the crystal holder 10, avoiding the damage that may be caused by contact measurement. At the same time, the above-mentioned arrangement makes the structure of the detection device 42 more simple, easy to process and implement, and reduces the processing cost and difficulty of the detection device 42.

[0044] As shown in Figure 2 , Figure 3 and Figure 7 , the flatness detection assembly 40 further comprises a plurality of mounting racks 43, all of which are arranged on the mounting plate 41, and the plurality of mounting racks 43 are arranged one-to-one corresponding to the plurality of detection devices 42, and each mounting rack 43 is used to install the corresponding detection device 42. Among them, the mounting plate 41 has a plurality of first through holes 411, and the plurality of first through holes 411 are arranged one-to-one corresponding to the detection heads of the plurality of detection devices 42; when the mounting plate 41 is in contact with the crystal holder 10, all the detection devices 42 and the crystal holder 10 are respectively located on both sides of the mounting plate 41, and the laser emitted by each detection device 42 passes through the corresponding first through hole 411 and then shoots towards the crystal holder 10. In this way, through the above-mentioned arrangement of the mounting rack 43 and the first through hole 411, not only the stability and positioning accuracy of the detection device 42 are ensured, but also the laser emitted by the detection device 42 can be ensured to be vertically shot towards the crystal holder 10, so as to improve the detection accuracy of the detection device 42 on the crystal holder 10, and improve the accuracy and reliability of the detection device 42.

[0045] In the embodiment, the design of the mounting rack 43 and the first through hole 411 enables each detection device 42 to accurately align with the measurement point of the crystal holder 10, and even on the fast-moving production line, the measurement accuracy can be ensured, thereby improving the overall production efficiency and the quality control level of the wafer.

[0046] Specifically, the detection devices 42 are four, and the mounting racks 43 are four, which are arranged in one-to-one correspondence with the four detection devices 42. The mounting plate 41 has four first through holes 411 arranged in one-to-one correspondence with the detection heads of the four detection devices 42 to realize non-contact measurement of the detection devices 42 and prevent the detection devices 42 from scratching the wafer holder 10.

[0047] It should be noted that the number of mounting racks 43 is not limited to this, and can be adjusted according to the working conditions and use requirements. Alternatively, the mounting racks 43 are three, or five, or six, or seven, or more.

[0048] It should be noted that the number of first through holes 411 is not limited to this, and can be adjusted according to the working conditions and use requirements. Alternatively, the first through holes 411 are three, or five, or six, or seven, or more.

[0049] As shown in Figure 4 The adjustment assembly 50 includes a connecting assembly 51 and a driving device 52. The connecting assembly 51 is connected with the mounting plate 41. The driving device 52 is drivingly connected with the connecting assembly 51 to drive the connecting assembly 51 to drive the mounting plate 41 to move up and down. In this way, the above arrangement realizes automatic adjustment of the adjustment assembly 50, thereby improving the intelligent degree of the flatness detection equipment and reducing the labor intensity of the workers.

[0050] Alternatively, the driving device 52 is a driving cylinder, and the piston rod of the driving cylinder is connected with the connecting assembly 51 to drive the connecting assembly 51 to drive the mounting plate 41 to move up and down.

[0051] In this embodiment, the driving device 52 is a pneumatic cylinder.

[0052] As shown in Figure 2 and Figure 3 The connecting assembly 51 includes a connecting plate 511, a connecting shaft 512, and a floating connector 513. The connecting plate 511 is connected with the driving end of the driving device 52. The connecting shaft 512 is arranged through the connecting plate 511 and connected with the connecting plate 511. The floating connector 513 is arranged on the first end of the connecting shaft 512, and the connecting shaft 512 is connected with the mounting plate 41 through the floating connector 513. In this way, the first end of the connecting shaft 512 is connected with the connecting plate 511 through the floating connector 513, and the floating connector 513 can eliminate the influence of the movement of the connecting assembly 51 on the connecting shaft 512, thereby improving the lifting stability of the mounting plate 41.

[0053] In this embodiment, the extension direction of the connecting shaft 512 is consistent with the lifting direction of the mounting plate 41. The floating connector 513 is a floating joint for eliminating the angle difference caused by the different heights of the front and rear ends of the wafer holder 10.

[0054] As shown in Figure 6 The connecting plate 511 has a mounting hole, and the connecting assembly 51 further comprises a bushing 514 and a limiting structure 515. The bushing 514 is arranged in the mounting hole and connected with the mounting hole. The second end of the connecting shaft 512 passes through the bushing 514 and is connected with the limiting structure 515. The limiting structure 515 is used for limiting and stopping the connecting plate 511. The connecting shaft 512 and the bushing 514 have a preset gap. In this way, when the mounting plate 41 is attached to the upper end surface of the wafer holder 10, the preset gap can make the mounting plate 41 float in any direction, thereby adapting to all abnormal states of the wafer holder 10 and improving the adaptability of the connecting assembly 51.

[0055] In the embodiment, the limiting structure 515 comprises a gasket and a nut. The connecting shaft 512 comprises a connecting shaft body and a threaded segment. The threaded segment is arranged at the second end of the connecting shaft body. The floating connector 513 is arranged on the first end of the connecting shaft body. A stepped surface is formed between the connecting shaft body and the threaded segment. The nut is sleeved on the threaded segment and is threadedly connected with the threaded segment. The gasket is arranged between the nut and the connecting shaft body and is limited and stopped by the stepped surface. In this way, the limiting structure 515 is used for limiting the position of the connecting shaft 512 in the axial direction.

[0056] Alternatively, the connecting shaft 512 is one; or the connecting shaft 512 is multiple, and the multiple connecting shafts 512 are arranged in the length direction and / or the width direction of the connecting plate 511. In this way, when the connecting shaft 512 is one, the structure of the connecting assembly 51 is simpler, and the connecting assembly 51 is easier to process and implement, thereby reducing the processing cost and difficulty of the connecting assembly 51. When the connecting shaft 512 is multiple, the multiple connecting shafts 512 increase the stability of the connecting assembly 51 in driving the mounting plate 41 to move.

[0057] In the embodiment, the connecting shaft 512 is two, and the two connecting shafts 512 are arranged in the length direction of the connecting plate 511.

[0058] It should be noted that the number of the connecting shaft 512 is not limited to this, and can be adjusted according to the working conditions and use requirements. Alternatively, the connecting shaft 512 is three, or four, or five, or six, or multiple.

[0059] As shown in Figure 6 The connecting assembly 51 further comprises an elastic structure 516. The elastic structure 516 is sleeved on at least one connecting shaft 512, so as to apply an elastic force to the mounting plate 41 towards the side of the wafer holder 10. In this way, the above-mentioned arrangement of the elastic structure 516 makes the flatness detection assembly 40 more gently contact the wafer holder 10, avoids the damage caused by hard contact, and improves the detection accuracy.

[0060] In the embodiment, the elastic structures 516 are two, and the two elastic structures 516 are arranged in one-to-one correspondence with the two connecting shafts 512, and each elastic structure 516 is sleeved outside the connecting shaft 512 corresponding thereto.

[0061] Optionally, the elastic structure 516 is a compression spring, and the compression spring can automatically adapt to the difference between the positions of the two connecting shafts 512.

[0062] As shown in Figure 5 The flatness detection device further includes a support plate 60 and a guide shaft 70. The driving body of the driving device 52 is arranged on the support plate 60, the support plate 60 has a second through hole 61 for the driving end of the driving device 52 to pass through and a third through hole. The guide shaft 70 is movably arranged in the third through hole, and the guide shaft 70 is fixedly connected with the connecting plate 511 to synchronously lift with the connecting plate 511. The extension direction of the guide shaft 70 is consistent with the lifting direction of the connecting plate 511. In this way, the above arrangement of the guide shaft 70 ensures the stability and accuracy of the lifting movement of the flatness detection assembly 40, and improves the stability and detection efficiency of the device. At the same time, the above arrangement makes the disassembly and replacement of the driving device 52 easier and more convenient, and reduces the labor intensity of the workers.

[0063] Specifically, the guide shaft 70 is fixedly connected with the connecting plate 511, which can ensure the stability of the flatness detection assembly 40 during the lifting movement, so as to reduce the detection error caused by vibration or instability of the device.

[0064] Optionally, the guide shaft 70 is one; or the guide shaft 70 is multiple, and the multiple guide shafts 70 are arranged at intervals along the length direction of the support plate 60. In this way, the above arrangement makes the number of guide shafts 70 more flexible to select, so as to meet different use requirements and working conditions, and also improves the processing flexibility of the workers.

[0065] In the embodiment, the guide shaft 70 is two, and the two guide shafts 70 are arranged at intervals along the length direction of the support plate 60. The third through hole is two, and the two third through holes are arranged in one-to-one correspondence with the two guide shafts 70.

[0066] It should be noted that the number of guide shafts 70 is not limited to this, and can be adjusted according to the working condition and use requirement. Optionally, the guide shaft 70 is three, or four, or five, or six, or multiple.

[0067] As shown in Figure 5As shown, the flatness detection device further comprises a linear bearing 80 and a stop structure 90. The linear bearing 80 is arranged in the third through hole, and at least a part of the guide shaft 70 is arranged in the linear bearing 80 in a liftable manner, so that the guide shaft 70 is limited in the radial direction by the linear bearing 80. The stop structure 90 is arranged at an end of the guide shaft 70 away from the connecting plate 511, and is used for limiting stop with the support plate 60. In this way, the linear bearing 80 and the stop structure 90 are used in cooperation, which further improves the accuracy and stability of the lifting movement of the flatness detection assembly 40. Meanwhile, the above arrangement of the linear bearing 80 can guide the movement of the guide shaft 70, so as to ensure the stability of the lifting movement of the guide shaft 70, and the stop structure 90 ensures that the guide shaft 70 does not move out of the linear bearing 80 when moving in the linear bearing 80.

[0068] Optionally, the support plate 60 is arranged on the support 20, the guide shaft 70 is at least two, and the at least two guide shafts 70 are respectively located on two sides of the support 20; and / or, the connecting shaft 512 is at least two, and the guide shaft 70 is located between the at least two connecting shafts 512. In this way, through the cooperation of the multiple guide shafts 70 and the multiple connecting shafts 512, the stability and balance of the flatness detection assembly 40 are improved, and the detection accuracy and reliability are ensured.

[0069] In the embodiment, the guide shaft 70 is two, and the two guide shafts 70 are respectively located on two sides of the support 20. The connecting shaft 512 is two, and the guide shaft 70 is located between the two connecting shafts 512.

[0070] In the embodiment, the flatness detection device further comprises a photoelectric switch, which is arranged above the conveying device 30, and is used for detecting whether the crystal holder 10 moves to the position.

[0071] Specifically, the working principle of the flatness detection device is as follows:

[0072] When the conveying device 30 normally operates, the cylinder is retracted, as shown in FIG. 6. Figure 6 As shown, the flatness detection assembly 40 is above the crystal holder 10. When the front end of the crystal holder 10 moves below the flatness detection assembly 40, the photoelectric switch is triggered, and it is judged that the crystal holder 10 moves to the position. The cylinder is extended, as shown in FIG. 7. Figure 7 As shown, the mounting plate 41 is completely attached to the upper end surface of the crystal holder 10, and the flatness detection assembly 40 fits the actual plane according to the values detected by the four detection devices 42. The actual plane is compared with the theoretical plane, and the flatness value of the crystal holder 10 is output, so as to judge whether the crystal holder 10 meets the use requirement. If the flatness of the crystal holder 10 does not meet the requirement, the crystal holder 10 is subjected to the off-line processing, so as to ensure the success rate of the adhesive.

[0073] From the above description, it can be seen that the above-mentioned embodiments of the utility model realize the following technical effects:

[0074] The flatness detection device is used for detecting the flatness of a wafer boat, and comprises a support, a conveying device, a flatness detection assembly and an adjusting assembly. The conveying device passes through the support for transporting the wafer boat. The flatness detection assembly comprises a mounting plate and a plurality of detection devices, which are arranged on the mounting plate in a length direction and / or a width direction of the mounting plate. When the mounting plate contacts the wafer boat, each detection device is used for detecting the distance between the detection device and the wafer boat, so as to determine whether the flatness of the wafer boat is within a preset range according to the detection values of all the detection devices. The adjusting assembly is arranged on the support and above the conveying device. At least part of the adjusting assembly is arranged in a liftable manner and connected with the mounting plate, so as to drive the plurality of detection devices to move towards or away from the conveying device through the mounting plate. In this way, before the flatness detection device detects the flatness of the wafer boat, the flatness detection assembly is used for measuring a standard wafer boat, so as to fit a theoretical fitting plane according to the detection values of all the detection devices. When the flatness of the wafer boat needs to be detected, the wafer boat is placed on the conveying device, and the conveying device transports the wafer boat until the wafer boat is transported to the position of the flatness detection assembly. Then, the adjusting assembly drives the mounting plate of the flatness detection assembly to move towards the wafer boat until the mounting plate contacts the wafer boat. At this time, all the detection devices detect the distance between the detection devices and the wafer boat, and the detection values of all the detection devices are compared with the theoretical fitting plane, so as to determine whether the flatness of the wafer boat is within the preset range, thereby solving the problem of low detection efficiency of the flatness of the wafer boat in the prior art.

[0075] Obviously, the above-described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the protection scope of the present application.

[0076] It should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should also be understood that, when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, work, device, component and / or combination thereof.

[0077] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0078] The above merely describes preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A flatness testing device for testing the flatness of a crystal holder (10), characterized in that, The flatness testing equipment includes: Scaffold (20); A conveying device (30) for transporting a crystal tray (10), at least a portion of which passes through the support (20); A flatness detection component (40) includes a mounting plate (41) and a plurality of detection devices (42). The plurality of detection devices (42) are spaced apart on the mounting plate (41) along the length direction and / or width direction. When the mounting plate (41) contacts the crystal tray (10) located on the conveying device (30), each detection device (42) is used to detect the distance between itself and the crystal tray (10) so as to determine whether the flatness of the crystal tray (10) is within a preset range based on the detection values ​​of all the detection devices (42). An adjustment assembly (50) is disposed on the bracket (20) and located above the conveying device (30). At least a portion of the adjustment assembly (50) is vertically and vertically disposed and connected to the mounting plate (41) so as to drive a plurality of the detection devices (42) to move toward or away from the conveying device (30) via the mounting plate (41).

2. The flatness testing device according to claim 1, characterized in that, The detection device (42) is a laser rangefinder sensor.

3. The flatness testing device according to claim 1, characterized in that, The flatness detection component (40) also includes: Multiple mounting brackets (43) are provided on the mounting plate (41). The multiple mounting brackets (43) are provided one-to-one with the multiple detection devices (42). Each mounting bracket (43) is used to install the detection device (42) corresponding to it. The mounting plate (41) has a plurality of first through holes (411), and the plurality of first through holes (411) are arranged one-to-one with the detection heads of the plurality of detection devices (42); when the mounting plate (41) is in contact with the crystal holder (10), all the detection devices (42) and the crystal holder (10) are located on both sides of the mounting plate (41), and the laser emitted by each detection device (42) passes through the corresponding first through hole (411) and is directed toward the crystal holder (10).

4. The flatness testing device according to claim 1, characterized in that, The adjustment component (50) includes: The connecting component (51) is connected to the mounting plate (41); A drive device (52) is driven to connect with the connecting component (51) to drive the connecting component (51) to move the mounting plate (41) up and down.

5. The flatness testing device according to claim 4, characterized in that, The connection component (51) includes: The connecting plate (511) is connected to the driving end of the driving device (52); A connecting shaft (512) passes through the connecting plate (511) and is connected to the connecting plate (511); A floating connector (513) is disposed on the first end of the connecting shaft (512), and the connecting shaft (512) is connected to the mounting plate (41) through the floating connector (513).

6. The flatness testing device according to claim 5, characterized in that, The connecting plate (511) has a mounting hole, and the connecting assembly (51) further includes a bushing (514) and a limiting structure (515). The bushing (514) passes through the mounting hole and is connected to the mounting hole. The second end of the connecting shaft (512) passes through the bushing (514) and is connected to the limiting structure (515). The limiting structure (515) is used to limit and stop the connecting plate (511). There is a preset gap between the connecting shaft (512) and the bushing (514).

7. The flatness testing device according to claim 5, characterized in that, The connecting shaft (512) is one; or, the connecting shaft (512) is multiple, and the multiple connecting shafts (512) are spaced apart along the length direction and / or width direction of the connecting plate (511); the connecting assembly (51) further includes: An elastic structure (516) is sleeved outside at least one of the connecting shafts (512) to apply an elastic force to the mounting plate (41) to move toward the crystal holder (10).

8. The flatness testing device according to claim 5, characterized in that, The flatness testing equipment also includes: The support plate (60) has a second through hole (61) and a third through hole, the second through hole (61) being used for the drive end of the drive device (52) to pass through. A guide shaft (70) is movably inserted into the third through hole. The guide shaft (70) is fixedly connected to the connecting plate (511) so as to rise and fall synchronously with the connecting plate (511). The extension direction of the guide shaft (70) is consistent with the lifting direction of the connecting plate (511).

9. The flatness testing device according to claim 8, characterized in that, The flatness testing equipment also includes: A linear bearing (80) is disposed in the third through hole, and at least a portion of the guide shaft (70) is vertically and vertically inserted in the linear bearing (80) to radially limit the guide shaft (70) by means of the linear bearing (80); A stop structure (90) is provided at one end of the guide shaft (70) away from the connecting plate (511) for limiting and stopping against the support plate (60).

10. The flatness testing device according to claim 8, characterized in that, The support plate (60) is mounted on the bracket (20), and there are at least two guide shafts (70), with at least two guide shafts (70) located on both sides of the bracket (20); and / or, there are at least two connecting shafts (512), with the guide shafts (70) located between at least two connecting shafts (512).

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