Slit adjusting device and quantum efficiency tester

Abstract

The utility model relates to the technical field of photoelectric device testing, particularly provides a slit adjusting device and a quantum efficiency tester, and aims to solve the problem that a slit of a quantum efficiency tester in the prior art cannot meet different requirements of different products to be tested on the shape and size of a test light spot. In order to achieve the purpose, the slit adjusting device comprises a square slit adjusting mechanism, the square slit adjusting mechanism comprises first shielding pieces arranged in pairs and second shielding pieces arranged in pairs, the first shielding pieces can move in the first direction, and the second shielding pieces can move in the second direction; a square slit is formed between the two first shielding pieces arranged in pairs and the two second shielding pieces arranged in pairs; and the circular slit adjusting mechanism comprises a third shielding piece, a circular slit is formed in the third shielding piece, and the circular slit adjusting mechanism is arranged to be capable of adjusting the size of the circular slit. According to the utility model, different requirements of different products to be tested on the shape and the size of the test light spot can be met.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoelectric device test technical field, specifically provide a kind of slit adjusting device and quantum efficiency tester. BACKGROUND

[0002] Quantum efficiency is an important parameter to describe the photoelectric conversion capability of photoelectric device, which is the ratio of the average number of photoelectrons generated per unit time to the number of incident photons at a certain wavelength.

[0003] Quantum efficiency tester is a kind of equipment for testing internal quantum efficiency and external quantum efficiency, commonly used in photovoltaic industry, to test the internal and external quantum efficiency of solar cell. Quantum efficiency tester generally includes monochromator, optical relay system, data acquisition and analysis module, power supply, etc., wherein the optical relay system is the core part of the equipment, mainly used to image the slit at the monochromator end to the surface of the product to be tested, to form the light spot required for testing, and the size and shape of the slit determine the size and shape of the light spot projected onto the product to be tested. With the rapid development of solar cell technology, the types of products to be tested are also becoming more and more diversified, so the requirements for the size and shape of the test light spot are also becoming more and more diversified, but the existing quantum efficiency tester slit is usually fixed in size and shape, which cannot meet the different requirements of different products to be tested for the shape and size of the test light spot. SUMMARY

[0004] The utility model aims at solving the above-mentioned technical problem, i.e. solving the problem that the slit of the quantum efficiency tester in the prior art cannot meet the different requirements of different products to be tested for the shape and size of the test light spot.

[0005] In the first aspect, the utility model provides a kind of slit adjusting device, the slit adjusting device includes: square slit adjusting mechanism, the square slit adjusting mechanism includes the first shielding piece of pair arrangement and the second shielding piece of pair arrangement, the first shielding piece is set as can move along first direction, the second shielding piece is set as can move along second direction, to form square slit between two pair arrangement first shielding piece and two pair arrangement second shielding piece;Circular slit adjusting mechanism, the circular slit adjusting mechanism includes third shielding piece, and circular slit is equipped on the third shielding piece, the circular slit adjusting mechanism is set as can adjust the size of the circular slit, the first shielding piece, the second shielding piece and the third shielding piece are arranged along third direction;Wherein, the first direction, the second direction and the third direction are perpendicular to each other.

[0006] In the technical scheme, the distance between the two first shielding members arranged in pairs can be adjusted to adjust the side length of the square slit along the first direction, the distance between the two second shielding members arranged in pairs can be adjusted to adjust the side length of the square slit along the second direction, thereby the size of the square slit can be adjusted, the size of the circular slit can be adjusted by the circular slit adjusting mechanism, and because the first shielding member, the second shielding member and the third shielding member are arranged along the third direction perpendicular to the first direction and the second direction, when the circular slit is needed, the size of the square slit is adjusted to a large size so as not to affect the imaging of the circular slit, at this time, the circular light spot can be obtained, when the square slit is needed, the size of the circular slit is adjusted to a large size so as not to affect the imaging of the square slit, at this time, the square light spot can be obtained, the switching of the slit shape and the adjustment of the slit size are realized by the above structure, thereby the light spots of different shapes and sizes can be obtained, and the different requirements of different to-be-tested products on the shape and size of the test light spot are met.

[0007] In the specific embodiment of the slit adjusting device, the circular slit adjusting mechanism further comprises a third frame, a plurality of wires and a rotating structure, the third shielding member is an elastic member, the rotating structure is rotatably connected with the third frame, the third frame is provided with a mounting hole, the third shielding member is arranged in the mounting hole, the outer periphery of the mounting hole is provided with a plurality of connecting holes, one end of the wire is connected with the third frame, the other end of the wire passes through the circular slit and the connecting hole and is wound on the rotating structure, so that the size of the circular slit can be adjusted when the rotating structure rotates.

[0008] In the specific embodiment of the slit adjusting device, the circular slit adjusting mechanism further comprises a third frame, a plurality of wires and a rotating structure, the third shielding member is an elastic member, the rotating structure is rotatably connected with the third frame, the third frame is provided with a mounting hole, the third shielding member is arranged in the mounting hole, the outer periphery of the mounting hole is provided with a plurality of connecting holes, one end of the wire is connected with the third frame, the other end of the wire passes through the circular slit and the connecting hole and is wound on the rotating structure, so that the size of the circular slit can be adjusted when the rotating structure rotates.

[0009] In the specific embodiment of the slit adjusting device, the first shielding member comprises a first rigid baffle and a first flexible shielding member connected with each other, and the first rigid baffle is used to form the square slit.

[0010] In the technical scheme, the first rigid baffle can make the edges of the square slit more even, and thus the light spot obtained by imaging is more uniform, thereby improving the accuracy of quantum efficiency testing; and the first flexible shielding piece can be folded in a smaller space when the first rigid baffle moves, thereby saving space and facilitating the movement of the first rigid baffle.

[0011] In the specific embodiment of the slit adjusting device, the second shielding piece comprises a second rigid baffle and a second flexible shielding piece connected with each other, and the second rigid baffle is used to form the square slit.

[0012] In the technical scheme, the second rigid baffle can make the edges of the square slit more even, and thus the light spot obtained by imaging is more uniform, thereby improving the accuracy of quantum efficiency testing; and the second flexible shielding piece can be folded in a smaller space when the second rigid baffle moves, thereby saving space and facilitating the movement of the second rigid baffle.

[0013] In the specific embodiment of the slit adjusting device, the square slit adjusting mechanism further comprises a first frame, the first frame is provided with a first sliding groove, the first shielding piece is provided with a first sliding block, and the first sliding block is slidably connected to the first sliding groove in the first direction.

[0014] In the technical scheme, the first sliding block and the first sliding groove are slidably connected, so that the first shielding piece can smoothly move along the first frame, thereby facilitating the adjustment of the square slit.

[0015] In the specific embodiment of the slit adjusting device, the first frame is further provided with a first scale arranged in the first direction; and / or the first sliding block is provided with a first locking structure, the first locking structure is threadedly connected with the first sliding block, and the first locking structure can abut against the first frame to lock the first sliding block.

[0016] In the technical scheme, the first scale can be used to accurately adjust the position of the first shielding piece, thereby accurately adjusting the size of the square slit. The first locking structure can fix the position of the first sliding block and the first frame, thereby fixing the position of the first shielding piece after the size of the square slit is adjusted, and preventing the size of the square slit from being changed accidentally.

[0017] In the specific embodiment of the slit adjusting device, the square slit adjusting mechanism further comprises a second frame, the second frame is provided with a second sliding groove, the second shielding piece is provided with a second sliding block, and the second sliding block is slidably connected to the second sliding groove in the second direction.

[0018] In the technical scheme, the second blocking piece can smoothly move along the second frame through the sliding connection between the second sliding block and the second sliding groove, and the square slit is conveniently adjusted.

[0019] In the specific embodiment of the slit adjusting device, the second frame is further provided with a second scale arranged along the second direction, and / or the second sliding block is provided with a second locking structure in threaded connection with the second sliding block, and the second locking structure can abut against the second frame to lock the second sliding block.

[0020] In the technical scheme, the second scale can be used to accurately adjust the position of the second blocking piece, and thus accurately adjust the size of the square slit. The second locking structure can fix the position of the second sliding block and the second frame, so that the position of the second blocking piece is fixed after the size of the square slit is adjusted, and the size of the square slit is prevented from changing accidentally.

[0021] In the specific embodiment of the slit adjusting device, the rotating structure is provided with a rotating handle.

[0022] In the technical scheme, the rotating handle can be conveniently operated by an operator to rotate the rotating structure.

[0023] In a second aspect, the utility model also provides a quantum efficiency tester, the quantum efficiency tester includes the slit adjusting device.

[0024] In the technical scheme, the quantum efficiency tester can meet different requirements of different products to be tested on the shape and size of the test light spot without replacing the slit adjusting device during use, improve the test efficiency, and save the cost.

[0025] Compared with the prior art, the slit adjusting device has the beneficial effects that: the distance between the two first shielding pieces arranged in pairs can be adjusted to adjust the side length of the square slit in the first direction, the distance between the two second shielding pieces arranged in pairs can be adjusted to adjust the side length of the square slit in the second direction, thereby the size of the square slit can be adjusted, the size of the circular slit can be adjusted through the circular slit adjusting mechanism, and because the first shielding piece, the second shielding piece and the third shielding piece are arranged in the third direction perpendicular to the first direction and the second direction, when the circular slit is needed, the size of the square slit is adjusted to a larger size, so as to not affect the imaging of the circular slit, at this time, a circular light spot can be obtained, when the square slit is needed, the size of the circular slit is adjusted to a larger size, so as to not affect the imaging of the square slit, at this time, a square light spot can be obtained; through the above structure, the switching of the slit shape and the adjustment of the slit size are realized, thereby different shape and size light spots can be obtained, and different requirements of different to-be-measured products on the shape and size of the test light spot are met. BRIEF DESCRIPTION OF DRAWINGS

[0026] The preferred embodiments of the utility model are described below in combination with the drawings, and the drawings are as follows:

[0027] Figure 1 It is the overall structure of the quantum efficiency tester of the utility model;

[0028] Figure 2 It is the overall structure schematic view of the slit adjusting device of the utility model;

[0029] Figure 3 It is the structure schematic view of the square slit adjusting mechanism of the utility model;

[0030] Figure 4 It is the schematic view of one kind of use state of the slit adjusting device of the utility model;

[0031] Figure 5 It is the schematic view of another use state of the slit adjusting device of the utility model;

[0032] Figure 6 It is the structure schematic view of the circular slit adjusting mechanism of the utility model.

[0033] Explanation of reference signs:

[0034] 1-monochromator, 2-slit adjusting device, 3-optical relay system, 4-object table, 5-bias light source, 6-product to be measured, 21-square-shaped slit adjusting mechanism, 22-circular-shaped slit adjusting mechanism, 211-first shielding piece, 212-second shielding piece, 213-first frame, 214-second frame, 215-square-shaped slit, 216-first scale, 217-first locking structure, 218-second scale, 219-second locking structure, 221-third shielding piece, 222-third frame, 223-wire, 224-rotating structure, 225-circular-shaped slit, 226-rotating handle, 2111-first rigid baffle, 2112-first flexible shielding piece, 2121-second rigid baffle, 2122-second flexible shielding piece, 2221-connection hole. DETAILED DESCRIPTION

[0035] Some embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application, and are not used to limit the protection scope of the present application. Those skilled in the art can make adjustments according to the needs in order to adapt to specific application occasions.

[0036] It should be noted that in the description of the present application, the terms "center", "upper", "lower", "left", "right", "front", "back", "top", "bottom", "vertical", "horizontal", "inner", "outer" and other terms indicating direction or positional relationship are based on the direction or positional relationship shown in the drawings. This is only for the convenience of description, and does not indicate or imply that the related devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, in the description of the present application, "a plurality of" means two or more, unless otherwise specified.

[0037] In addition, it should also be noted that in the description of the present application, the ordinal numbers "first", "second" and the like are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of the indicated technical features. In addition, in the description of the present application, unless otherwise specified and limited, the terms "mounting", "connecting", "connected" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] Based on the background art pointed out that the slit of the quantum efficiency tester in the prior art cannot meet the different requirements of different products to be tested on the shape and size of the test light spot, the utility model discloses a slit adjusting device, which realizes the switching of the shape of the slit and the adjustment of the size of the slit, thereby obtaining light spots of different shapes and sizes, and meets the different requirements of different products to be tested on the shape and size of the test light spot.

[0039] Firstly refer to Figure 1 , the figure shows the overall structure of the quantum efficiency tester. As Figure 1 Indicated, the quantum efficiency tester includes monochromator 1, slit adjusting device 2, optical relay system 3, object table 4, bias light source 5, slit adjusting device 2 is arranged at the light source of monochromator 1, object table 4 is used for placing solar cell piece product 6 to be tested; bias light source 5 is used for emitting bias light to reduce measurement error and optimize test conditions; the light source emitted by monochromator 1 is projected onto the product 6 to be tested after the slit of slit adjusting device 2, and the required light spot for testing is obtained.

[0040] Then refer to Figures 2-5 , Figure 2 It is the overall structure schematic diagram of the slit adjusting device of the utility model, Figure 3 It is the structure schematic diagram of the square slit adjusting mechanism of the utility model, Figure 4 It is a kind of use state schematic diagram of the slit adjusting device of the utility model, Figure 5 It is another use state schematic diagram of the slit adjusting device of the utility model. As Figure 2 And Figure 3 Indicated, slit adjusting device 2 includes square slit adjusting mechanism 21 and circular slit adjusting mechanism 22, square slit adjusting mechanism 21 includes a pair of first shielding piece 211 and a pair of second shielding piece 212, first shielding piece 211 is arranged to be able to move along the first direction, second shielding piece 212 is arranged to be able to move along the second direction, to form square slit 215 between two pairs of first shielding piece 211 and two pairs of second shielding piece 212;Circular slit adjusting mechanism 22 includes third shielding piece 221, third shielding piece 221 is provided with circular slit 225, circular slit adjusting mechanism 22 is arranged to be able to adjust the size of circular slit 225, first shielding piece 211, second shielding piece 212 and third shielding piece 221 are arranged along the third direction;Wherein, the first direction, the second direction and the third direction are perpendicular to each other, for example, the specific direction of the first direction, the second direction, the third direction as Figure 2The distance between the two first shielding pieces 211 arranged in pairs can be adjusted to adjust the side length of the square slit 215 along the first direction, the distance between the two second shielding pieces 212 arranged in pairs can be adjusted to adjust the side length of the square slit 215 along the second direction, so that the size of the square slit 215 can be adjusted; the size of the circular slit 225 can be adjusted by the circular slit adjusting mechanism 22; and since the first shielding piece 211, the second shielding piece 212 and the third shielding piece 221 are arranged along the third direction perpendicular to the first direction and the second direction, when the circular slit 225 is needed, the size of the square slit 215 is adjusted to a larger size so as not to affect the imaging of the circular slit 225, at this time, a circular light spot can be obtained, and the state of the slit adjusting device is as shown in Figure 4 ; when the square slit 215 is needed, the size of the circular slit 225 is adjusted to a larger size so as not to affect the imaging of the square slit 215, at this time, a square light spot can be obtained, and the state of the slit adjusting device is as shown in Figure 5 ; through the above structure, the switching of the slit shape and the adjustment of the slit size are realized, and then light spots of different shapes and sizes can be obtained, which meets the different needs of different products 6 to be tested for the shape and size of the test light spot.

[0041] It should be noted that the movement of the first shielding piece 211 and the second shielding piece 212 can be manually controlled by artificial or automatically controlled, and the automatic control of the movement of the first shielding piece 211 and the second shielding piece 212 can be realized by adding a driving structure on the first shielding piece 211 and the second shielding piece 212 or on the first frame 213 and the second frame 214, such as setting a first motor and a first gear on the first sliding block, the first motor drives the first gear to rotate, setting a first rack on the first frame 213, and driving the first sliding block to move through the meshing transmission of the first gear and the first rack, and then driving the first shielding piece 211 to move.

[0042] Please continue to refer to Figure 3 and Figure 4The square slit adjusting mechanism 21 further comprises a first frame 213 and a second frame 214. The first frame 213 is provided with a first sliding groove arranged along a first direction, and the first shielding piece 211 is provided with a first sliding block slidably connected to the first sliding groove along the first direction. The second frame 214 is provided with a second sliding groove arranged along a second direction, and the second shielding piece 212 is provided with a second sliding block slidably connected to the second sliding groove along the second direction. The first frame 213 is further provided with a first scale 216 arranged along the first direction. The first sliding block is provided with a first locking structure 217 threadedly connected to the second connecting frame of the first sliding block, and the first locking structure 217 can abut against the first frame 213 to lock the first sliding block. The second frame 214 is further provided with a second scale 218 arranged along the second direction. The second sliding block is provided with a second locking structure 219 threadedly connected to the second connecting frame of the second sliding block, and the second locking structure 219 can abut against the second frame 214 to lock the second sliding block.

[0043] With reference to Figure 2 , Figure 3 and Figure 4 , the first shielding piece 211 comprises a first rigid baffle 2111 and a first flexible shielding piece 2112 connected to each other. The first rigid baffle 2111 is used to form the square slit 215, and the first sliding block can be connected to the first rigid baffle 2111. The second shielding piece 212 comprises a second rigid baffle 2121 and a second flexible shielding piece 2122 connected to each other. The second rigid baffle 2121 is used to form the square slit 215, and the second sliding block can be connected to the second rigid baffle 2121. The first rigid baffle 2111 and the second rigid baffle 2121 can make the edges of the square slit 215 more flat, thereby making the light spot obtained by imaging more uniform, thereby improving the accuracy of the quantum efficiency test. The first flexible shielding piece 2112 and the second flexible shielding piece 2122 can be folded in a smaller space when the first rigid baffle 2111 and the second rigid baffle 2121 move, thereby saving space and facilitating the movement of the first rigid baffle 2111.

[0044] It should be noted that the first rigid baffle 2111, the first flexible shielding piece 2112, the second rigid baffle 2121 and the second flexible shielding piece 2122 all adopt a light-proof structure. For example, the first rigid baffle 2111 and the second rigid baffle 2121 can be made of aluminum plate, tungsten plate, etc., or a light-shielding coating can be coated on the plate to achieve the light-shielding effect. The first flexible shielding piece 2112 and the second flexible shielding piece 2122 can be made of polyurethane, polyester fiber, etc., or a light-shielding coating can be coated on the flexible material to achieve the light-shielding effect.

[0045] With reference to Figure 2 and Figure 6, Figure 6 is a structural schematic view of the circular slit adjusting mechanism. As shown in Figure 2 and Figure 6 , the circular slit adjusting mechanism 22 further comprises a third frame 222, a plurality of wires 223 and a rotating structure 224, the first frame 213, the second frame 214 and the third frame 222 are arranged along a third direction and connected, the third shielding piece 221 is an elastic piece, which can be made of opaque elastic materials such as polyurethane or neoprene, the rotating structure 224 is rotatably connected with the third frame 222, the third frame 222 is provided with a mounting hole, the third shielding piece 221 is arranged in the mounting hole, the outer periphery of the mounting hole is provided with a plurality of connecting holes 2221, one end of the wire 223 is connected with the third frame 222, the other end passes through the circular slit 225 and the connecting hole 2221 and is wound on the rotating structure 224, so that the rotating structure 224 can adjust the size of the circular slit 225 when rotating, and the wire 223 can be a steel wire or a glass filament. Since one end of the wire 223 is connected with the third frame 222, the other end passes through the circular slit 225 and the connecting hole 2221 and is wound on the rotating structure 224, therefore, the wire 223 can be wound more on the rotating structure 224 when the rotating structure 224 rotates forward, and the wire 223 can be released when the rotating structure 224 reversely rotates, when the rotating structure 224 rotates forward, the part of the wire 223 in the circular slit 225 tightens the edge of the circular slit 225, and the elastic third shielding piece 221 is deformed along the radial direction of the circular slit 225 to expand the diameter of the circular slit 225; when the rotating structure 224 reversely rotates, the part of the wire 223 in the circular slit 225 loosens the edge of the circular slit 225, and the elastic third shielding piece 221 reduces the diameter of the circular slit 225 under the action of its own elastic force, thereby realizing the adjustment of the size of the circular slit 225.

[0046] It should be noted that the forward rotation of the rotating structure 224 can be clockwise rotation, and correspondingly, the reverse rotation is counterclockwise rotation; or the forward rotation is counterclockwise rotation, and the reverse rotation is clockwise rotation, as long as the diameter of the circular slit 225 increases when the rotating structure 224 rotates forward.

[0047] It should be further noted that the first frame 213, the second frame 214 and the third frame 222 can be arranged in any order, as long as they are arranged along the third direction, the three frames can be a split structure connected together, or can be set as one whole, and those skilled in the art can adjust according to needs.

[0048] Optionally, the rotating structure 224 is provided with a rotating handle 226, which can be conveniently operated by the operator to rotate the rotating structure 224. In addition, a third motor can also be arranged on the third frame 222, and the third motor is in transmission connection with the rotating structure 224 to drive the rotating structure 224 to rotate in the forward direction or the reverse direction.

[0049] It should be noted that the above embodiments are only used to illustrate the principles of the present application, and are not intended to limit the protection scope of the present application. Those skilled in the art can adjust the above embodiments without departing from the principles of the present application, so that the present application can be applied to more specific application scenarios.

[0050] So far, the technical scheme of the present application has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the present application, and the technical schemes after the changes or replacements will fall within the protection scope of the present application.

Claims

1. A slit adjustment device, characterized by, The slit adjusting device comprises: a square slit adjusting mechanism comprising a pair of first shielding members arranged to be movable in a first direction and a pair of second shielding members arranged to be movable in a second direction to form a square slit between the two pairs of first and second shielding members; a circular slit adjusting mechanism comprising a third shielding member provided with a circular slit, the circular slit adjusting mechanism being arranged to adjust the size of the circular slit, the first, second and third shielding members being arranged in a third direction; wherein the first, second and third directions are perpendicular to each other.

2. The slit adjusting device according to claim 1, wherein the circular slit adjusting mechanism further comprises a third frame, a plurality of wires and a rotating structure, the third shielding member being a flexible member, the rotating structure being rotatably connected to the third frame, the third frame being provided with a mounting hole, the third shielding member being arranged in the mounting hole, the outer periphery of the mounting hole being provided with a plurality of connecting holes, one end of the wires being connected to the third frame and the other end of the wires being arranged to pass through the circular slit and the connecting holes and be wound around the rotating structure, so that the rotating structure can adjust the size of the circular slit when rotated.

3. The slit adjusting device according to claim 1, wherein the first shielding member comprises a first rigid baffle and a first flexible shielding member connected to each other, the first rigid baffle being used to form the square slit.

4. The slit adjusting device according to claim 1, wherein the second shielding member comprises a second rigid baffle and a second flexible shielding member connected to each other, the second rigid baffle being used to form the square slit.

5. The slit adjusting device according to claim 1, wherein the square slit adjusting mechanism further comprises a first frame, the first frame being provided with a first sliding groove, the first shielding member being provided with a first sliding block, the first sliding block being slidably connected to the first sliding groove in the first direction.

6. The slit adjusting device according to claim 5, wherein the first frame is further provided with a first scale arranged in the first direction; and / or the first sliding block is provided with a first locking structure, the first locking structure being threadedly connected to the first sliding block, the first locking structure being capable of abutting against the first frame to lock the first sliding block.

7. The slit adjusting device according to claim 1, wherein the square slit adjusting mechanism further comprises a second frame, the second frame being provided with a second sliding groove, the second shielding member being provided with a second sliding block, the second sliding block being slidably connected to the second sliding groove in the second direction.

8. The slit adjusting device according to claim 7, wherein the second frame is further provided with a second scale arranged in the second direction; and / or The second slider is provided with a second locking structure, the second locking structure is in threaded connection with the second slider, and the second locking structure can abut against the second frame to lock the second slider.

9. The slit adjustment device of claim 2, wherein, The rotating structure is provided with a rotating handle.

10. A quantum efficiency tester characterized by, The quantum efficiency tester comprises the slit adjustment device according to any one of claims 1 to 9.

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