Improved device for adjusting microwave coupling of ECR ion source

Abstract

The utility model discloses an improved device for adjusting microwave coupling of an ECR ion source, and relates to the technical field of microwave coupling of ECR ion source performance. Comprising a driving assembly, an adjusting and connecting assembly, an adjusting and fixing mechanism and a movable waveguide tube, the driving assembly is fixedly connected with one end of the adjusting and connecting assembly, the adjusting and connecting assembly is fixedly connected with one side of the adjusting and fixing mechanism, and the movable waveguide tube is movably connected to the bottom of the adjusting and fixing mechanism; the adjusting assembly is fixedly connected with the adjusting connecting assembly, the two fixing assemblies are located at the two ends of the bottom of the adjusting assembly, a third gear in the adjusting assembly is fixedly connected to one end of the adjusting connecting assembly, a second connecting rod is fixedly installed on the side edge of a first gear, and the third gear, the first gear and a second gear are meshed with one another. According to the utility model, the problem of angle adjustment of the movable waveguide tube is solved, the flexibility and convenience of adjustment are enhanced, the structural layout is optimized, and the adaptability of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the microwave coupling technical field of ECR ion source performance, specifically, it relates to an improved device for adjusting the microwave coupling of ECR ion source. BACKGROUND

[0002] ECR ion source has a wide range of applications in scientific research and industrial fields, including material surface treatment, thin film deposition, nanomaterial synthesis, radioisotope production, etc. Due to its high-density plasma characteristics, ECR ion source has important applications in material science and nuclear technology research. ECR ion source uses the principle of electron cyclotron resonance to generate high-density plasma, and its basic principle is to use microwave and electron in plasma to occur cyclotron resonance, thereby exciting plasma. This type of ion source has the advantages of compact structure, high-density plasma generation, stable performance, and good repeatability.

[0003] The application number CN202310551347.4 is an improved device for adjusting the microwave coupling of ECR ion source, which relates to the technical field of high-power microwave and plasma coupling adjustment device. The device includes a waveguide device, which forms a waveguide hole inside. The two ends of the waveguide device are input end and radiation end respectively. The input end is adapted to communicate with the microwave input pipe connected to the ECR ion source. The radiation end is configured as an asymmetric notch structure to feed the microwave from the ECR ion source into the ECR plasma at a preset angle, and the radiation end is adapted to move relative to the ECR plasma to adjust the microwave feeding position. In this invention, the waveguide device can directly feed the microwave into the ECR plasma, the radiation end is an asymmetric notch structure which can realize the microwave power radiating in a specific direction at a specific angle, and the movement of the radiation end can adjust the microwave feeding position, thereby improving the coupling efficiency of microwave and ECR plasma and improving the performance of ECR ion source.

[0004] Although the device has improved the coupling of microwave and ECR plasma, there are still some defects:

[0005] When the connecting rod is connected with the movable waveguide tube, it is fixed by multiple bolts, which is inconvenient to fix, and the movable waveguide tube is inconvenient to adjust the angle, which greatly reduces the flexibility during adjustment.

[0006] Although the cooling device in the existing device can perform basic cooling function, its cooling efficiency is not ideal, and it may not fully meet the heat dissipation demand during long-time high-load operation.

[0007] In summary, although the existing technology has improved the microwave coupling efficiency of ECR ion source to some extent, further optimization and improvement are still needed. UTILITY MODEL CONTENT

[0008] The utility model provides an improved device of adjusting ECR ion source microwave coupling, solved the angle adjustment problem of movable waveguide, enhanced the flexibility and convenience of adjustment, optimized the structure layout, improved the adaptability of device.

[0009] The utility model discloses a technical scheme as follows:

[0010] An improved device of adjusting ECR ion source microwave coupling, including drive assembly, adjustment connecting assembly, adjustment fixed mechanism and movable waveguide, drive assembly with adjustment connecting assembly one end fixed connection, adjustment connecting assembly other end with adjustment fixed mechanism one side fixed connection, movable waveguide swing joint is in the bottom of adjustment fixed mechanism,

[0011] Adjustment fixed mechanism includes adjustment assembly and fixed component, adjustment assembly with adjustment connecting assembly fixed connection, fixed component is equipped with two groups, and fixed component is located adjustment assembly bottom both ends,

[0012] Adjustment assembly includes second connecting rod, gear one, gear two and gear three, gear three fixed connection in adjustment connecting assembly one end, second connecting rod fixed mounting is in the lateral outer surface of gear one, gear three with gear one one side meshing connection, and the other side of gear one is connected with gear two.

[0013] Further, the second connecting rod bottom is provided with a limiting groove.

[0014] Further, the adjustment assembly further includes a fixed rod and a lever, the gear one is provided with a through hole, one end of the fixed rod is fixedly connected with the gear three, the other end of the fixed rod passes through the through hole, the fixed rod penetrates the outer surface of the gear two, the end of the fixed rod is movably connected with the lever, and the fixed rod is threadedly connected with a fixed bolt at the connection position of the lever.

[0015] Further, each of the fixed components includes a rotating rod and a limiting fixed block, the rotating rod is movably connected to both ends of the bottom of the second connecting rod, and the bottom of the rotating rod is fixedly connected with the limiting fixed block.

[0016] Further, the fixed component further includes a spring, and the spring is sleeved on the top outer wall of the rotating rod.

[0017] Further, the drive assembly includes a non-magnetic elastic coupling and a drive rod, one end of the non-magnetic elastic coupling is movably connected with one end of the drive rod, and the drive rod is fixedly connected with the adjustment connecting assembly.

[0018] Further, the adjusting connecting assembly comprises an adjusting ball sleeve, an adjusting ball and a first connecting rod, the adjusting ball sleeve is fixedly connected with the driving assembly, the adjusting ball is movably connected in the inner cavity of the adjusting ball sleeve, the outer wall of the adjusting ball is fixedly connected with one end of the first connecting rod, and the other end of the first connecting rod is fixedly connected with one side of the gear three.

[0019] Further, the adjusting connecting assembly further comprises a bolt, and the bolt is threadedly connected above the outer wall of the adjusting ball sleeve.

[0020] Further, the heat dissipation cooling assembly is further provided, the heat dissipation cooling assembly is a hollow structure, and the heat dissipation cooling assembly is fixedly connected to one side of the bottom of the second connecting rod.

[0021] Further, the heat dissipation cooling assembly comprises a connecting block, the connecting block is fixedly connected to one side of the bottom of the second connecting rod, the upper and lower ends of the connecting block are fixedly connected with heat dissipation aluminum sheets, the heat dissipation aluminum sheets are provided with a plurality of cooling pipes fixedly installed between every two heat dissipation aluminum sheets, and the heat dissipation aluminum sheets and the cooling pipes are arranged around the movable waveguide pipe.

[0022] The microwave coupling device has the advantages that:

[0023] 1. The adjusting fixed mechanism is introduced, the adjusting assembly and the fixed assembly are provided, and the accurate fine adjustment and stable fixation of the angle of the movable waveguide pipe are realized.

[0024] 2. The adjusting assembly is connected through the meshing of the gears, the accurate adjustment of the angle of the movable waveguide pipe is realized, the gear three is fixedly connected with the adjusting connecting assembly, the meshing of the gear three and the gear one and the further meshing of the gear one and the gear two form a precise transmission system, the accurate adjustment and stable fixation of the angle of the movable waveguide pipe can be realized without complicated bolt tightening or loosening operation, the design greatly enhances the flexibility of adjustment, the device can adapt to the microwave coupling demand under different experimental conditions, and the convenience and adaptability of device operation are improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is an overall structural schematic view of the improved device for adjusting the microwave coupling of an ECR ion source.

[0026] Figure 2The utility model discloses an improved device for adjusting microwave coupling of ECR ion source, which belongs to the field of microwave coupling of ECR ion source.

[0027] Figure 3 The utility model discloses an improved device for adjusting microwave coupling of ECR ion source, which belongs to the field of microwave coupling of ECR ion source.

[0028] Figure 4 The utility model discloses an improved device for adjusting microwave coupling of ECR ion source, which belongs to the field of microwave coupling of ECR ion source.

[0029] In the drawings, the components represented by each reference numeral are listed as follows:

[0030] 1, no magnetic elastic coupling; 2, drive rod; 3, adjusting ball sleeve; 4, bolt; 5, adjusting ball; 6, first connecting rod; 7, adjusting fixed mechanism; 8, second connecting rod; 9, movable waveguide; 10, rotating rod; 11, limit fixed block; 12, limit groove; 13, gear one; 14, through hole; 15, gear two; 16, gear three; 17, fixed rod; 18, lever; 19, fixed bolt; 20, spring; 21, connecting block; 22, heat dissipation aluminum sheet; 23, cooling pipe. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0032] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0033] As Figures 1-4 shown, the embodiment provides an improved device for adjusting microwave coupling of ECR ion source, which comprises a driving assembly, an adjusting connecting assembly, an adjusting fixed mechanism 7, a heat dissipation and cooling assembly and a movable waveguide 9. The driving assembly is fixedly connected with one end of the adjusting connecting assembly. The other end of the adjusting connecting assembly is fixedly connected with one side of the adjusting fixed mechanism 7. The heat dissipation and cooling assembly is fixedly connected with one side of the bottom of the adjusting fixed mechanism 7. The movable waveguide 9 is movably connected with the bottom of the adjusting fixed mechanism 7.

[0034] Specifically, as Figure 1As shown, the driving assembly includes a non-magnetic elastic coupling 1 and a driving rod 2, and the adjusting connecting assembly includes an adjusting ball sleeve 3, a bolt 4, an adjusting ball 5, and a first connecting rod 6. One end of the outer surface of the non-magnetic elastic coupling 1 is movably connected with one end of the driving rod 2, the other end of the driving rod 2 is fixedly connected with the adjusting ball sleeve 3, the outer wall of the adjusting ball sleeve 3 is threadedly connected with the bolt 4, the adjusting ball 5 is movably connected in the inner cavity of the adjusting ball sleeve 3, the outer wall of the adjusting ball 5 is fixedly connected with one end of the first connecting rod 6, and the other end of the first connecting rod 6 is fixedly connected with one side of an adjusting and fixing mechanism 7.

[0035] The non-magnetic elastic coupling 1 is used as a connecting component of the improved device for coupling the microwave of the adjusting ECR ion source with an external driving source, which not only transmits torque and ensures smooth and interference-free transmission of power during the adjustment, but also avoids the introduction of magnetic interference during the transmission. The driving rod 2 is used for transmitting external power to the adjusting connecting assembly, and through the connection with the non-magnetic elastic coupling 1, the rotating motion is transmitted to the adjusting ball sleeve 3, so as to realize the adjustment of the position and angle of the movable waveguide 9. The adjusting ball sleeve 3 is internally provided with a spherical space for accommodating and supporting the adjusting ball 5. By rotating the adjusting ball sleeve 3, the angle of the adjusting ball 5 and the first connecting rod 6 connected therewith can be adjusted, the angle of the movable waveguide 9 is adjusted, and thus the feeding position and angle of the microwave are changed. The bolt 4 is used for adjusting and fixing the relative position between the adjusting ball sleeve 3 and the adjusting ball 5, so as to ensure that no looseness or displacement occurs after the adjustment, and the stable operation of the device is ensured.

[0036] The adjusting and fixing mechanism 7 is responsible for adjusting and fixing the position and angle of the movable waveguide 9. Specifically, as shown in Figure 2 and Figure 3 The adjusting and fixing mechanism 7 includes an adjusting assembly and a fixing assembly. The first connecting rod 6 is fixedly connected with one side of the adjusting assembly, and the fixing assembly is provided with two groups and located at the bottom of the adjusting assembly. The movable waveguide 9 is placed at the bottom of the adjusting assembly and between the two groups of the fixing assembly.

[0037] The adjusting assembly includes a second connecting rod 8, a gear one 13, a gear two 15, a gear three 16, a fixed rod 17, a lever 18, and a fixed bolt 19. The gear three 16 is fixedly connected with one end of the outer surface of the first connecting rod 6. The second connecting rod 8 is fixedly installed on the outer surface of the side of the gear one 13. The bottom of the second connecting rod 8 is provided with a limiting groove 12 for limiting the movable waveguide 9. The gear three 16 is meshingly connected with one side of the gear one 13. The other side of the gear one 13 is meshingly connected with the gear two 15. The gear one 13 is provided with a through hole 14. One end of the fixed rod 17 is fixedly connected with the gear three 16, and the other end penetrates through the through hole 14 and the outer surface of the gear two 15. The end of the fixed rod 17 is movably connected with the lever 18. The connection between the fixed rod 17 and the lever 18 is threadedly connected with the fixed bolt 19, so as to fix the lever 18 on the fixed rod 17.

[0038] Each fixed component includes a rotating rod 10, a limiting fixed block 11 and a spring 20, the rotating rod 10 is movably connected to the bottom of the second connecting rod 8, the bottom of the rotating rod 10 is fixedly connected with the limiting fixed block 11, and the outer wall of the top of the rotating rod 10 is sleeved with the spring 20.

[0039] The second connecting rod 8 is used for connecting the fixed adjusting assembly and the movable waveguide tube 9, and ensures the accurate control of the adjusting assembly on the movable waveguide tube 9; the limiting groove 12 is arranged at the bottom of the second connecting rod 8 and is used for accommodating and limiting the position of the movable waveguide tube 9; the gear one 13 is meshed with the gear two 15 and the gear three 16, and the angle of the second connecting rod 8 and the movable waveguide tube 9 can be adjusted by rotating the gear one 13; the gear three 16 is connected with the adjusting connecting assembly, is responsible for transmitting external power to the adjusting assembly, and is connected with the lever 18 through the fixed rod 17, the fixed rod 17 ensures the stable connection between the gears and allows the lever 18 to lock the position of the gear one 13 when needed, so that the gear one 13 is prevented from rotating accidentally during operation; the fixed bolt 19 is used for fixing the lever 18 on the fixed rod 17, and the stability and reliability of the lever 18 during adjustment are ensured; the rotating rod 10 in the fixed component is used for operating the limiting fixed block 11, and the position of the limiting fixed block 11 can be conveniently adjusted by rotating the rotating rod 10, so that the movable waveguide tube 9 is fixed and released; the spring 20 is arranged on the rotating rod 10 and is used for providing elastic connection between the limiting fixed block 11 and the movable waveguide tube 9, so that the limiting fixed block 11 can maintain appropriate pressure and stability when fixing the movable waveguide tube 9.

[0040] Specifically, as shown in the figure, Figure 4 The heat dissipation and cooling assembly includes a connecting block 21, heat dissipation aluminum sheets 22 and cooling pipes 23, the connecting block 21 is fixedly connected to one side of the bottom of the second connecting rod 8, the upper and lower ends of the connecting block 21 are fixedly connected with the heat dissipation aluminum sheets 22, the heat dissipation aluminum sheets 22 are provided with a plurality of cooling pipes 23, and the cooling pipes 23 are fixedly installed between every two heat dissipation aluminum sheets 22, the heat dissipation and cooling assembly forms a hollow structure, so that after the movable waveguide tube 9 is placed, the heat dissipation aluminum sheets 22 and the cooling pipes 23 can be sleeved around the movable waveguide tube 9, and the heat dissipation and cooling effect is achieved.

[0041] The working principle of the utility model is as follows:

[0042] The improved device for adjusting microwave coupling of an ECR ion source, in use, first, through the adjusting and fixing mechanism 7 arranged, the movable waveguide 9 is placed in the limiting groove 12 first, then the limiting fixing block 11 is rotated, the limiting fixing block 11 is rotated to the lower side of the movable waveguide 9, the movable waveguide 9 is limited and fixed at the lower end of the second connecting rod 8 through the two groups of limiting fixing blocks 11, so that the movable waveguide 9 can be conveniently and quickly fixed at the bottom of the second connecting rod 8, and the operation is simple and fast.

[0043] After being fixed, through the gear one 13 and the gear two 15 and the gear three 16 engaged with each other, the gear one 13 is manually rotated, the second connecting rod 8 and the movable waveguide 9 are rotated to a specified angle, then the lever 18 is clamped on the upper end outer surface of the gear two 15, the gear one 13 cannot be rotated relative to the gear two 15 and the gear three 16 any more, so that the movable waveguide 9 can be conveniently and quickly angle fine-tuned and fixed, and the movable waveguide 9 is more flexible and changeable in the adjusting process.

[0044] The heat dissipation aluminum sheet 22 arranged at the bottom of the adjusting and fixing mechanism 7 and the cooling pipe 23 can heat-dissipate the movable waveguide 9, reduce the operating temperature of the movable waveguide 9, make the movable waveguide 9 high-power and long-term stable operation, and the adjusting ball 5 and the adjusting ball sleeve 3 arranged can conveniently adjust the up-down angle of the movable waveguide 9.

[0045] The above has carried out the detailed description to one embodiment of the utility model, but the content described can only be the preferred embodiment of the utility model, and cannot be considered for limiting the implementation scope of the utility model. Any equivalent change and improvement made according to the utility model application scope should still belong to the patent coverage scope of the utility model.

Claims

1. An improved device for adjusting the microwave coupling of an ECR ion source, characterized in that, Including drive assembly, adjusting connecting assembly, adjusting fixed mechanism (7) and movable waveguide (9), the drive assembly is fixedly connected with one end of the adjusting connecting assembly, the other end of the adjusting connecting assembly is fixedly connected with one side of the adjusting fixed mechanism (7), the movable waveguide (9) is movably connected at the bottom of the adjusting fixed mechanism (7), The adjusting fixed mechanism (7) comprises an adjusting assembly and a fixed assembly, the adjusting assembly is fixedly connected with the adjusting connecting assembly, the fixed assembly is provided with two groups, and the fixed assembly is located at the bottom of the adjusting assembly, The adjusting assembly comprises a second connecting rod (8), a gear one (13), a gear two (15) and a gear three (16), the gear three (16) is fixedly connected with one end of the adjusting connecting assembly, the second connecting rod (8) is fixedly installed on the side outer surface of the gear one (13), the gear three (16) is meshedly connected with one side of the gear one (13), and the other side of the gear one (13) is meshedly connected with the gear two (15).

2. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 1, wherein, The bottom of the second connecting rod (8) is provided with a limiting groove (12).

3. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 2, wherein, The adjusting assembly further comprises a fixed rod (17) and a lever (18), the gear one (13) is provided with a through hole (14), one end of the fixed rod (17) is fixedly connected with the gear three (16), the other end of the fixed rod (17) penetrates through the through hole (14), the fixed rod (17) penetrates through the outer surface of the gear two (15), the tail end of the fixed rod (17) is movably connected with the lever (18), and the connecting position of the fixed rod (17) and the lever (18) is screwedly connected with a fixed bolt (19).

4. The improvement which adjusts the microwave coupling of an ECR ion source according to claim 1 or 3, characterized in that, Each group of the fixed assembly comprises a rotating rod (10) and a limiting fixed block (11), the rotating rod (10) is movably connected with both ends of the bottom of the second connecting rod (8), and the bottom of the rotating rod (10) is fixedly connected with the limiting fixed block (11).

5. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 4, wherein, The fixed assembly further comprises a spring (20), and the spring (20) is sleeved on the top outer wall of the rotating rod (10).

6. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 1, wherein, The drive assembly comprises a non-magnetic elastic coupling (1) and a driving rod (2), one end of the outer surface of the non-magnetic elastic coupling (1) is movably connected with one end of the driving rod (2), and the driving rod (2) is fixedly connected with the adjusting connecting assembly.

7. The improvement which adjusts the microwave coupling of an ECR ion source according to claim 1 or 6, characterized in that, The adjusting connecting assembly comprises an adjusting ball sleeve (3), an adjusting ball (5) and a first connecting rod (6), the adjusting ball sleeve (3) is fixedly connected with the drive assembly, the adjusting ball (5) is movably connected in the inner cavity of the adjusting ball sleeve (3), the outer wall of the adjusting ball (5) is fixedly connected with one end of the first connecting rod (6), and the other end of the first connecting rod (6) is fixedly connected with one side of the gear three (16).

8. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 7, wherein, The adjusting connecting assembly further comprises a bolt (4), and the bolt (4) is screwedly connected above the outer wall of the adjusting ball sleeve (3).

9. The improvement which adjusts the coupling of the microwave in the ECR ion source as defined in claim 1, wherein, It also comprises a heat dissipation cooling assembly, the heat dissipation cooling assembly is a hollow structure, and the heat dissipation cooling assembly is fixedly connected to one side of the bottom of the second connecting rod (8).

10. The improvement which adjusts the microwave coupling of an ECR ion source of claim 9, wherein The heat dissipation cooling assembly comprises a connecting block (21) fixedly connected to one side of the bottom of the second connecting rod (8), the upper and lower ends of the connecting block (21) are fixedly connected with heat dissipation aluminum sheets (22), a plurality of heat dissipation aluminum sheets (22) are arranged, a cooling pipe (23) is fixedly installed between every two heat dissipation aluminum sheets (22), and the heat dissipation aluminum sheets (22) and the cooling pipe (23) are sleeved around the movable waveguide pipe (9).

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