Transfer device

Abstract

The utility model discloses a transfer device used for transferring materials, the transfer device comprises a base, a rotating shaft, a first driving mechanism, a second driving mechanism and an elastic sealing pipe, and the rotating shaft is movably connected with the base; the first driving mechanism is installed on the base and connected with the rotating shaft, and the first driving mechanism drives the rotating shaft to move in the axial direction when started; the second driving mechanism is mounted on the base and connected with the rotating shaft, and the rotating shaft is driven to rotate when the second driving mechanism is started; the elastic sealing pipe is internally provided with a sealing cavity, at least part of the rotating shaft is located in the sealing cavity, one end of the elastic sealing pipe is connected with the base, and the other end is movably connected with the rotating shaft. According to the transfer device, the first driving mechanism and the second driving mechanism are used for driving the rotating shaft to ascend, descend and rotate correspondingly, so that the first driving mechanism and the second driving mechanism act on the same rotating shaft, the occupied space of the transfer device is reduced, and the structure of the transfer device is effectively simplified.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor circuit manufacturing, and particularly relates to a transfer device. BACKGROUND

[0002] In recent years, semiconductor devices have developed rapidly, involving semiconductors, integrated circuits, solar panels, flat panel displays, microelectronics, light-emitting diodes, and the like, and these devices are mainly composed of thin films of different thicknesses formed on a wafer. During wafer transmission, a robot needs to lift and rotate the wafer to another platform, which can be divided into rotation and lifting of the wafer.

[0003] Part of the robot separates the rotating part and the lifting part, resulting in a complex structure, a large space occupation, and a complex structure that affects the vacuum tightness of the robot. CONTENT OF THE UTILITY MODEL

[0004] Embodiments of the application provide a transfer device, aiming to simplify the structure of the transfer device.

[0005] Embodiments of the first aspect of the application provide a transfer device for transferring materials, the transfer device comprising a base, a rotating shaft, a first driving mechanism, a second driving mechanism, and an elastic sealing tube, the rotating shaft being movably connected to the base; the first driving mechanism being installed on the base, the first driving mechanism being connected to the rotating shaft, the first driving mechanism driving the rotating shaft to move along its axial direction when the first driving mechanism is started; the second driving mechanism being installed on the base, the second driving mechanism being connected to the rotating shaft, the second driving mechanism driving the rotating shaft to rotate when the second driving mechanism is started; the elastic sealing tube being internally provided with a sealed cavity, at least part of the rotating shaft being located in the sealed cavity, one end of the elastic sealing tube being connected to the base, and the other end of the elastic sealing tube being movably connected to the rotating shaft.

[0006] According to the embodiment of the first aspect of the application, the first driving mechanism comprises a first driving member, a first connecting rod, and a shaft coupling, the first driving member being installed on the base, the first connecting rod connecting the first driving member and the shaft coupling, the shaft coupling being sleeved on the rotating shaft and connecting the first connecting rod and the rotating shaft, the first driving member driving the rotating shaft to move along its axial direction through the first connecting rod and the shaft coupling when the first driving member is started.

[0007] According to the embodiment of the first aspect of the application, the rotating shaft is provided with a containing cavity on one of its end faces in the axial direction, the containing cavity comprising a cavity body and an opening communicating the inside and outside of the cavity body; the first driving mechanism comprising a first driving member and a first connecting rod, the first driving member being installed on the base, the first connecting rod comprising an extension part and a limiting part arranged in sequence, the limiting part being located in the cavity body and being clamped with the cavity body, the extension part passing through the opening and connecting the first driving member and the limiting part, the first driving member driving the rotating shaft to move along its axial direction through the first connecting rod when the first driving member is started.

[0008] According to an embodiment of the first aspect of the present application, the second driving mechanism comprises a second driving member, a driving wheel and a driven wheel, the second driving member is installed on the base, the driven wheel is sleeved on the rotating shaft and rotates synchronously with the rotating shaft, and the driving wheel is connected with the second driving member and engaged with the driven wheel, and the rotating shaft is driven to rotate by the driving wheel and the driven wheel when the second driving member is started.

[0009] According to an embodiment of the first aspect of the present application, the rotating shaft comprises a connecting section, and an outer contour of a cross-sectional shape of the connecting section comprises at least one straight edge; the second driving mechanism comprises a second driving member and a sleeve, the second driving member is installed on the base, and the sleeve is connected with the second driving member and sleeved outside the connecting section, so that the rotating shaft is driven to rotate by the sleeve when the second driving member is started.

[0010] According to an embodiment of the first aspect of the present application, a vacuum cavity is arranged in the base, and a part of the rotating shaft is located in the vacuum cavity and another part of the rotating shaft is located outside the vacuum cavity; the first driving mechanism and the second driving mechanism are both located outside the vacuum cavity, and the elastic sealing tube is located in the vacuum cavity.

[0011] According to an embodiment of the first aspect of the present application, further comprising: a picking mechanism located in the vacuum cavity and connected with the rotating shaft, and the picking mechanism is used for grabbing the material.

[0012] According to an embodiment of the first aspect of the present application, further comprising: a bearing member installed on the base, and the rotating shaft is movably connected with the base through the bearing member, the rotating shaft can move along the axial direction of the rotating shaft relative to the bearing member, and the bearing member is an oil-free bushing or a linear bearing.

[0013] According to an embodiment of the first aspect of the present application, further comprising: a fastening snap ring sleeved outside the rotating shaft and connected with the elastic sealing tube and the rotating shaft.

[0014] According to an embodiment of the first aspect of the present application, an annular groove is arranged on the circumferential surface of the rotating shaft; and the base is provided with positioning blocks, and at least part of the positioning blocks extends into the annular groove.

[0015] The transfer device of the embodiment of the present application is characterized in that the first driving mechanism and the second driving mechanism are respectively used for driving the rotating shaft to lift and rotate, so that the first driving mechanism and the second driving mechanism act on the same rotating shaft, the occupied space of the transfer device is reduced, and the structure of the transfer device is effectively simplified. By making the lifting and rotation of the transfer device realized by the same rotating shaft, the bias load on the rotating shaft can be reduced, the probability of the rotating shaft breaking can be reduced, and the service life of the rotating shaft can be improved. By arranging the elastic sealing tube to connect the base and the rotating shaft, and arranging a sealing cavity in the elastic sealing tube and at least part of the rotating shaft in the sealing cavity, the elastic sealing tube can move with the rotating shaft and ensure that at least part of the rotating shaft is in a vacuum environment. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly introduced as follows, and other drawings can be obtained by those of ordinary skill in the art without any creative effort on the premise that no creative effort is made.

[0017] Figure 1 A sectional structure schematic view of a transport device for some embodiments of the present application;

[0018] Figure 2 A sectional structure schematic view of an example transport device in the A-A cross section;

[0019] Figure 3 A sectional structure schematic view of another example transport device.

[0020] Reference signs:

[0021] 10, transport device;

[0022] 100, base; 110, vacuum cavity; 120, hollow magnetic fluid assembly; 130, positioning block;

[0023] 200, rotating shaft; 210, annular groove; 220, connecting section; 230, containing cavity; 231, cavity; 232, opening;

[0024] 300, first driving mechanism; 310, first driving piece; 320, first connecting rod; 321, extension; 322, limiting part; 330, shaft coupling;

[0025] 400, second driving mechanism; 410, second driving piece; 420, sleeve; 430, driving wheel; 440, driven wheel;

[0026] 500, elastic sealing tube; 510, sealing cavity;

[0027] 600, bearing piece;

[0028] 700, fastening clasp;

[0029] x, axis direction of the rotating shaft. DETAILED DESCRIPTION

[0030] The features and exemplary embodiments of the various aspects of the present application will be described in detail below with reference to the drawings. To make the purpose, technical solutions and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, but not to limit the present application. The present application can be implemented without some of these specific details for those skilled in the art. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0031] It should be noted that, in this paper, the relationship terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment. Without more limitations, the elements defined by the statement "include" do not exclude the presence of other identical elements in the process, method, article or equipment including the elements.

[0032] In order to solve the defects mentioned in the background, the present application provides a transfer device for transferring materials, the transfer device comprising a base, a rotating shaft, a first driving mechanism, a second driving mechanism and an elastic sealing tube, the rotating shaft being movably connected with the base; the first driving mechanism being installed on the base, the first driving mechanism being connected with the rotating shaft, the first driving mechanism driving the rotating shaft to move along its axial direction when the first driving mechanism is started; the second driving mechanism being installed on the base, the second driving mechanism being connected with the rotating shaft, the second driving mechanism driving the rotating shaft to rotate when the second driving mechanism is started; the elastic sealing tube being internally provided with a sealed cavity, at least part of the rotating shaft being located in the sealed cavity, one end of the elastic sealing tube being connected with the base, and the other end of the elastic sealing tube being movably connected with the rotating shaft.

[0033] The transfer device provided by the present application makes the first driving mechanism and the second driving mechanism respectively drive the rotating shaft to lift and rotate, so that the first driving mechanism and the second driving mechanism act on the same rotating shaft, reducing the occupied space of the transfer device and effectively simplifying the structure of the transfer device. By making the lifting and rotation of the transfer device realized by the same rotating shaft, the bias load on the rotating shaft can be reduced, the probability of the rotating shaft breaking can be reduced, and the service life of the rotating shaft can be improved. By providing the elastic sealing tube to connect the base and the rotating shaft, and by providing the sealed cavity in the elastic sealing tube and locating at least part of the rotating shaft in the sealed cavity, the elastic sealing tube can move with the rotating shaft and ensure that at least part of the rotating shaft is in a vacuum environment.

[0034] In order to better understand the present application, the transfer device provided by the present application is described below in conjunction with the accompanying drawings. In the description, the x direction in the drawings is the axial direction of the rotating shaft. In the drawings, the dimensions in the drawings are not necessarily proportional to the actual dimensions for the convenience of drawing.

[0035] Please refer to Figure 1 , Figure 1 The sectional structure schematic diagram of the transfer device of some embodiments of the present application.

[0036] As Figure 1 shown, the embodiments of the present application provide a transfer device 10 for transferring materials, the transfer device 10 comprising a base 100, a rotating shaft 200, a first driving mechanism 300, a second driving mechanism 400 and an elastic sealing tube 500, the rotating shaft 200 being movably connected with the base 100. The first driving mechanism 300 is installed on the base 100, the first driving mechanism 300 being connected with the rotating shaft 200, and the first driving mechanism 300 drives the rotating shaft 200 to move along its axial direction (x direction in the drawings) when the first driving mechanism 300 is started. The second driving mechanism 400 is installed on the base 100, the second driving mechanism 400 being connected with the rotating shaft 200, and the second driving mechanism 400 drives the rotating shaft 200 to rotate when the second driving mechanism 400 is started. The elastic sealing tube 500 is internally provided with a sealed cavity 510, at least a part of the rotating shaft 200 being located in the sealed cavity 510, one end of the elastic sealing tube 500 being connected with the base 100, and the other end of the elastic sealing tube 500 being movably connected with the rotating shaft 200.

[0037] Optionally, the material to be transferred is a wafer.

[0038] Optionally, the base 100 is internally provided with a vacuum cavity 110, a part of the rotating shaft 200 being located in the vacuum cavity 110 and the other part being located outside the vacuum cavity 110. The first driving mechanism 300 and the second driving mechanism 400 are both located outside the vacuum cavity 110. The elastic sealing tube 500 is located in the vacuum cavity 110, and the elastic sealing tube 500 is a bellows tube which will be stretched or compressed when the rotating shaft 200 moves axially, so that the volume of the sealed cavity 510 changes. The sealed cavity 510 can serve as a transition cavity between the vacuum cavity 110 and the external atmosphere, thereby reducing the risk of leakage of the vacuum cavity 110 when the rotating shaft 200 moves.

[0039] Optionally, the transfer device 10 further comprises a pickup mechanism (not shown) for grabbing the material, the pickup mechanism being located in the vacuum cavity 110 and being connected with the rotating shaft 200. The rotating shaft 200 rotates and moves axially along its axial direction x, thereby driving the pickup mechanism to rotate and move axially synchronously. The pickup mechanism can comprise a suction cup or a mechanical claw.

[0040] The transport device 10 provided in the application, by making the first driving mechanism 300 and the second driving mechanism 400 respectively used for driving the rotating shaft 200 to lift and rotate, making the first driving mechanism 300 and the second driving mechanism 400 act on the same rotating shaft 200, reduces the occupied space of the transport device 10 and effectively simplifies the structure of the transport device 10. By making the lifting and rotation of the transport device 10 realized by the same rotating shaft 200, the bias load received by the rotating shaft 200 can be reduced, the probability of the rotating shaft 200 breaking can be reduced, and the service life of the rotating shaft 200 can be improved. By setting the first driving mechanism 300 and the second driving mechanism 400 outside the vacuum cavity 110, the control and maintenance of the first driving mechanism 300 and the second driving mechanism 400 are facilitated. By setting the elastic sealing pipe 500 connecting the base 100 and the rotating shaft 200, and setting the sealing cavity 510 in the elastic sealing pipe 500, at least part of the rotating shaft 200 is located in the sealing cavity 510, so that the elastic sealing pipe 500 can move with the rotating shaft 200 and ensure that at least part of the rotating shaft 200 is in a vacuum environment. At the same time, the sealing cavity 510 can also serve as a transition cavity between the vacuum cavity 110 and the external atmosphere, thereby reducing the risk of leakage of the vacuum cavity 110 when the rotating shaft 200 moves.

[0041] In some optional embodiments, the transport device 10 further comprises a bearing 600, the bearing 600 is installed on the base 100, the rotating shaft 200 is movably connected with the base 100 through the bearing 600, the rotating shaft 200 can move along the axial direction x of the rotating shaft 200 relative to the bearing 600, and the bearing is an oil-free bushing or a linear bearing.

[0042] Optionally, the base 100 is further provided with a hollow magnetic fluid assembly 120, and the bearing 600 is installed on the hollow magnetic fluid assembly 120.

[0043] The transport device 10 provided in the application, by setting the hollow magnetic fluid assembly 120 on the base 100, is used for realizing the sealed connection between the bearing 600 and the base 100. By setting the bearing 600 connecting the rotating shaft 200 and the base 100, the rotating shaft 200 can rotate relative to the base 100 through the bearing 600, and can move along the axial direction x of the bearing 600 and the base 100.

[0044] In some optional embodiments, the rotating shaft 200 is provided with an annular groove 210 on the circumferential surface, and the base 100 is provided with a positioning block 130, at least part of the positioning block 130 extends into the annular groove 210.

[0045] Optionally, the annular groove 210 extends along the axial direction x, and the positioning block 130 is used for limiting the rotation shaft 200. When the rotation shaft 200 moves to the limit position along the axial direction x, the profile surface of the annular groove 210 in the axial direction x abuts against the positioning block 130, and the positioning block 130 prevents the rotation shaft 200 from continuously moving along the axial direction x.

[0046] The transportation device 10 provided in the application is characterized in that the annular groove 210 is arranged on the rotation shaft 200, the positioning block 130 is arranged on the base 100, and at least part of the positioning block 130 extends into the annular groove 210, so that the positioning block 130 can limit the lifting movement range of the rotation shaft 200 and does not affect the rotation of the rotation shaft 200.

[0047] In some optional embodiments, the transportation device 10 further comprises a fastening snap ring 700, the fastening snap ring 700 is sleeved on the rotation shaft 200, and the fastening snap ring 700 is connected with the elastic sealing pipe 500 and the rotation shaft 200.

[0048] Optionally, the circumferential surface of the rotation shaft 200 in the vacuum cavity 110 is provided with an annular clamping groove, the fastening snap ring 700 is clamped in the annular clamping groove, and the fastening snap ring 700 can rotate relative to the rotation shaft 200. The two ends of the elastic sealing pipe 500 comprise two flanges, one of which is sealingly connected with the end surface of the bearing 600 on the side facing the vacuum cavity 110, and the other is located in the vacuum cavity 110 and sealingly connected with the annular clamping groove.

[0049] The transportation device 10 provided in the application is characterized in that the elastic sealing pipe 500 and the rotation shaft 200 are connected through the fastening snap ring 700, so that when the rotation shaft 200 moves along the axial direction x, one end of the elastic sealing pipe 500 can be driven to move synchronously, and when the rotation shaft 200 rotates, the rotation shaft 200 and the elastic sealing pipe 500 directly rotate relative to each other. At the same time, the elastic sealing pipe 500 has a threshold value in terms of stretching and compression size, and the elastic sealing pipe 500 can also limit the lifting movement range of the rotation shaft 200.

[0050] In some optional embodiments, the first driving mechanism 300 comprises a first driving member 310, a first connecting rod 320 and a shaft coupling 330, the first driving member 310 is installed on the base 100, the first connecting rod 320 connects the first driving member 310 and the shaft coupling 330, the shaft coupling 330 is sleeved on the rotation shaft 200 and connects the first connecting rod 320 and the rotation shaft 200, and the first driving member 310 drives the rotation shaft 200 to move along the axial direction x through the first connecting rod 320 and the shaft coupling 330 when the first driving member 310 is started.

[0051] Optionally, the first driving member 310 is an electric motor or an air cylinder, which is used for driving the first connecting rod 320 to move along the axial direction x.

[0052] Optionally, the coupling 330 is an elastic coupling or a damping coupling. The elastic element in the elastic coupling can withstand certain bending deformation and torsional deformation, so that the first connecting rod 320 and the rotating shaft 200 can rotate relative to each other. The damping coupling can realize the function of different rotating speeds of the first connecting rod 320 and the rotating shaft 200 through a series of damping mechanism structures.

[0053] Optionally, the coupling 330 includes a locked state and a released state. In the locked state, the first connecting rod 320 and the rotating shaft 200 move synchronously, and in the released state, the first connecting rod 320 and the rotating shaft 200 can rotate relative to each other. The locked state and the released state of the coupling 330 can be switched by manual adjustment or by means of other mechanisms.

[0054] The transport device 10 provided in the present application includes the first driving mechanism including the first driving member 310, the first connecting rod 320 and the coupling 330. When the first driving member 310 is started, the first connecting rod 320 and the coupling 330 can drive the rotating shaft 200 to move along the axial direction x. The first connecting rod 320 and the rotating shaft 200 can rotate relative to each other, so that when the rotating shaft 200 is driven by the second driving mechanism 400, the first driving mechanism 300 will not be affected.

[0055] Please refer to Figure 1 and Figure 2 , Figure 2 A cross-sectional structure schematic view of an example transport device in A-A section is shown.

[0056] As shown in the drawings and Figure 2 , in some optional embodiments, the rotating shaft 200 includes a connecting section 220. The outer contour of the cross-sectional shape of the connecting section 220 includes at least one straight edge. The second driving mechanism 400 includes a second driving member 410 and a sleeve 420. The second driving member 410 is installed on the base 100. The sleeve 420 is connected with the second driving member 410 and is sleeved outside the connecting section 220, so that when the second driving member 410 is started, the sleeve 420 drives the rotating shaft 200 to rotate.

[0057] Optionally, the first driving member 310 is a motor or a pneumatic cylinder, which is used to drive the sleeve 420 to rotate.

[0058] Optionally, the connecting section 220 is located outside the vacuum cavity 110. The cross-sectional shape of the connecting section 220 can be a triangle, a quadrilateral or other polygon. In the present embodiment, the cross-sectional shape of the connecting section 220 is taken as an example of a pentagon.

[0059] Optionally, the inner circumferential surface of the sleeve 420 has the same cross-sectional shape as the connecting section 220.

[0060] Optionally, the profile of the cross-sectional shape of the connecting section 220 can include a combination of straight edges and arc edges, for example, the cross-sectional shape of the connecting section 220 is semicircular.

[0061] Optionally, the base 100 is not necessarily a single component, but can also be multiple independent and fixed components. For example, the first driving member 310, the second driving member 410, the positioning block 130, and the hollow magnetic fluid assembly 120 are all connected with the base 100, but are respectively installed on different components.

[0062] The transport device 10 provided in the present application is characterized in that the outer profile of the cross-sectional shape of the connecting section 220 includes at least one straight edge, and the sleeve 420 is sleeved outside the connecting section 220, the inner circumferential surface of the sleeve 420 has the same cross-sectional shape as the connecting section 220, so that when the second driving member 410 drives the sleeve 420 to rotate, the flat profile on the inner circumferential surface of the sleeve 420 will abut against the flat surface on the connecting section 220 and drive the rotating shaft 200 to rotate synchronously. When the first driving mechanism 300 drives the rotating shaft 200 to move along the axial direction x, the connecting section 220 can move relative to the sleeve 420, so that the first driving mechanism 300 and the second driving mechanism 400 can both act on the rotating shaft 200 without affecting each other.

[0063] Please refer to Figure 3 , Figure 3 A cross-sectional structure schematic diagram of another example of a transport device is shown.

[0064] As Figure 3 shown, in some other embodiments, the rotating shaft 200 is provided with an accommodating cavity 230 on one of the end surfaces in the axial direction thereof, and the accommodating cavity 230 includes a cavity body 231 and an opening 232 communicating inside and outside the cavity body 231. The first driving mechanism 300 includes a first driving member 310 and a first connecting rod 320, and the first connecting rod 320 includes an extension part 321 and a limiting part 322 arranged in sequence. The limiting part 322 is located in the cavity body 231 and is clamped with the cavity body 231, and the extension part 321 passes through the opening 232 and connects the first driving member 310 and the limiting part 322. When the first driving member 310 is started, the rotating shaft 200 is driven to move along the axial direction x thereof through the first connecting rod 320.

[0065] Optionally, the accommodating cavity 230 is located outside the vacuum cavity 110.

[0066] Optionally, the cross-sectional shape of the extension part 321 is the same as that of the opening 232, and the cross-sectional shape of the limiting part 322 is the same as that of the cavity body 231.

[0067] Optionally, the cross-sectional shape of the extension 321, the cross-sectional shape of the opening 232, the cross-sectional shape of the limiting portion 322 and the cross-sectional shape of the cavity 231 are all circular, so that the first connecting rod 320 and the rotating shaft 200 can rotate relative to each other. The diameter of the extension 321, the diameter of the opening 232, the diameter of the limiting portion 322 and the diameter of the cavity 231 are arranged in ascending order.

[0068] Please continue to refer to Figure 3 In some optional embodiments, the second driving mechanism 400 comprises a second driving member 410, a driving wheel 430 and a driven wheel 440. The driven wheel 440 is sleeved on the rotating shaft 200 and rotates synchronously with the rotating shaft 200. The driving wheel 430 is connected with the second driving member 410 and engages with the driven wheel 440. When the second driving member 410 is started, the rotating shaft 200 is driven to rotate through the driving wheel 430 and the driven wheel 440.

[0069] Optionally, the second driving member 410 is configured to drive the driving wheel 430 to rotate. At least one of the driving wheel 430 and the driven wheel 440 is a long gear extending along the axial direction x, so that the driving wheel 430 and the driven wheel 440 can move relative to each other along the axial direction x while maintaining engagement. In this way, the first driving mechanism 300 and the second driving mechanism 400 can both act on the rotating shaft 200 without affecting each other.

[0070] The above merely describes a specific implementation of the present application. Those skilled in the art can clearly understand the specific working process of the system, modules and units described above for the convenience and brevity of description. Please refer to the corresponding process in the foregoing method embodiments, which will not be described here. It should be understood that the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed in the present application, and these modifications or replacements should be covered within the protection scope of the present application.

Claims

1. A transfer device for transferring material, characterized by The utility model relates to a kind of rotary device, including: Base (100); Rotary shaft (200), with the base (100) active connection; First drive mechanism (300), installed on the base (100), the first drive mechanism (300) is connected with the rotary shaft (200), the first drive mechanism (300) drives the rotary shaft (200) to move along its axial when starting; Second drive mechanism (400), installed on the base (100), the second drive mechanism (400) is connected with the rotary shaft (200), the second drive mechanism (400) drives the rotary shaft (200) to rotate when starting; Elastic sealing tube (500), inside is equipped with sealed cavity (510), at least part of the rotary shaft (200) is located in the sealed cavity (510), one end of the elastic sealing tube (500) is connected with the base (100), the other end is connected with the rotary shaft (200) active.

2. The transfer device of claim 1, wherein, The first drive mechanism (300) includes first driving part (310), first connecting rod (320) and shaft coupling (330), the first driving part (310) is installed on the base (100), the first connecting rod (320) connects the first driving part (310) and the shaft coupling (330), the shaft coupling (330) is set on the rotary shaft (200) and is connected with the first connecting rod (320) and the rotary shaft (200), the first driving part (310) drives the rotary shaft (200) to move along its axial through the first connecting rod (320) and the shaft coupling (330) when starting.

3. The transfer device of claim 1, wherein, The rotary shaft (200) is equipped with accommodating cavity on one end surface in its axial direction, and the accommodating cavity includes a cavity (231) and an opening (232) communicating inside and outside of the cavity (231); The first drive mechanism (300) includes first driving part (310) and first connecting rod (320), the first driving part (310) is installed on the base (100), the first connecting rod (320) includes extension (321) and limiting portion (322) arranged in sequence, the limiting portion (322) is located in the cavity (231) and is connected with the cavity (231), the extension (321) passes through the opening (232) and is connected with the first driving part (310) and the limiting portion (322), the first driving part (310) drives the rotary shaft (200) to move along its axial through the first connecting rod (320) when starting.

4. The transfer device of claim 1, wherein, The second drive mechanism (400) includes second driving part (410), driving wheel (430) and driven wheel (440), the second driving part (410) is installed on the base (100), the driven wheel (440) is set on the rotary shaft (200) and is synchronous with the rotary shaft (200) rotation, the driving wheel (430) is connected with the second driving part (410) and is engaged with the driven wheel (440), the second driving part (410) drives the rotary shaft (200) to rotate through the driving wheel (430) and the driven wheel (440) when starting.

5. The transfer device of claim 1, wherein, The rotating shaft (200) comprises a receiving cavity (230) (220), and an outer contour of a cross-sectional shape of the receiving cavity (230) (220) comprises at least one straight edge; The second driving mechanism (400) comprises a second driving member (410) and a sleeve (420), the second driving member (410) is installed on the base (100), the sleeve (420) is connected with the second driving member (410) and is sleeved outside the receiving cavity (230) (220), so that the second driving member (410) drives the rotating shaft (200) to rotate through the sleeve (420) when the second driving member (410) is started.

6. The transfer device of claim 1, wherein, The base (100) is provided with a vacuum cavity (110), and the rotating shaft (200) is partially located in the vacuum cavity (110) and partially located outside the vacuum cavity (110); the first driving mechanism (300) and the second driving mechanism (400) are both located outside the vacuum cavity (110), and the elastic sealing tube (500) is located in the vacuum cavity (110).

7. The transfer device of claim 6, wherein, Further comprising: A pickup mechanism located in the vacuum cavity (110) and connected with the rotating shaft (200), the pickup mechanism is used for grabbing materials.

8. The transfer device of claim 1, wherein, Further comprising: A carrier (600) installed on the base (100), the rotating shaft (200) is movably connected with the base (100) through the carrier (600), the rotating shaft (200) can move along the axial direction of the rotating shaft (200) relative to the carrier (600), and the carrier (600) is an oil-free bushing or a linear bearing.

9. The transfer device of claim 1, wherein, Further comprising: A fastening clasp (700) sleeved outside the rotating shaft (200) and connected with the elastic sealing tube (500) and the rotating shaft (200).

10. The transfer device of claim 1, wherein, An annular groove (210) is arranged on the circumferential surface of the rotating shaft (200); The base (100) is provided with a positioning block (130), and at least part of the positioning block (130) extends into the annular groove (210).

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