Simple high-precision edge finder mechanism
By using a simple, high-precision edge-finding mechanism, wafer centering is achieved through mechanical precision and linkage mechanisms, solving the problems of complexity and high cost of existing equipment, and realizing efficient and accurate positioning and low-cost wafer processing.
Patent Information
- Application Number
- CN202423314417.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-31
AI Technical Summary
Existing wafer processing equipment is complex in structure, expensive, and requires vision cameras and algorithm correction and maintenance.
A simple, high-precision edge-finding mechanism is adopted to achieve wafer center positioning through mechanical precision. It utilizes a fixed stage, a negative pressure adsorption stage, a center clamping mechanism, and area sensors, combined with high-precision gears and linkage mechanisms, to achieve efficient and accurate positioning.
It reduces equipment costs, improves positioning accuracy and precision, is easy to operate, has high operating efficiency, and is adaptable to wafers of different sizes and specifications.
Smart Images
Figure CN223680083U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a simple high-precision edge searching machine mechanism. BACKGROUND
[0002] In order to ensure the consistency of the processing of the different pieces of wafers, the center positioning of the wafer needs to be carried out before processing, and the edge searching operation is carried out on the wafer. The existing standard machine generally adopts a visual camera to realize the center positioning through mechanical precision and algorithm. However, the device has a high cost and needs to be corrected and maintained.
[0003] In order to reduce the difficulty and cost of the device, the utility model discloses a simple high-precision edge searching machine mechanism which is directly realized through mechanical precision, and the actual data and efficiency are not inferior to those of the existing standard machine. CONTENT OF THE UTILITY MODEL
[0004] In view of the problems in the prior art, the utility model provides a simple high-precision edge searching machine mechanism, which aims at solving the problems of the complex device mechanism and high device cost.
[0005] To achieve the above-mentioned purpose, the technical scheme of the utility model is as follows: a simple high-precision edge searching machine mechanism comprises a fixed table, a negative pressure adsorption table, a plurality of center clamping mechanisms and area sensors; the negative pressure adsorption table is rotatably installed above the fixed table through an inner rotating shaft, the plurality of center clamping mechanisms are distributed in a ring shape along the axis of the negative pressure adsorption table on the fixed table and are synchronously moved towards the center; the area sensors are located on the side of the negative pressure adsorption table and are used for detecting whether the workpiece is rotated into position.
[0006] The fixed table is provided with an outer shaft disc coaxial with the negative pressure adsorption table, a plurality of connecting rod mechanisms connected with the center clamping mechanisms are distributed in a ring shape around the axis of the outer shaft disc and are used for pushing and pulling the center clamping mechanisms; the outer shaft disc is engaged with a positioning motor through a gear; and the inner rotating shaft is engaged with a rotating motor through a gear.
[0007] Preferably, the center clamping mechanism comprises a clamping rod, the clamping rod is rotatably installed on an installation block, the installation block is installed on a slide rail on the fixed table through a sliding block; an L-shaped connecting arm is fixed to the rear of the installation block, the L-shaped connecting arm is rotatably connected with a connecting rod 36 rotatably installed on the outer shaft disc to form a two-connecting-rod mechanism.
[0008] Preferably, the outer shaft disc is an outer rotating shaft rotatably installed at the bottom of the fixed table, and the outer rotating shaft is provided with a disc surface and a gear surface.
[0009] Preferably, the inner rotating shaft is installed on the fixed table and penetrates through the outer rotating shaft, and a gear 9 is installed at the bottom of the inner rotating shaft.
[0010] Preferably, the inner rotating shaft is a hollow shaft connected with the negative pressure adsorption table, and a negative pressure pipeline of the negative pressure adsorption table is located in the inner rotating shaft.
[0011] Preferably, the fixed table is fixed to the worktable by support columns.
[0012] Preferably, the area sensor adopts a photoelectric sensor, and photoelectric sensor assemblies are distributed above and below the negative pressure suction table and connected to a lateral driving device at the back.
[0013] Preferably, the fixed table is provided with a notch for accommodating the lower assembly of the photoelectric sensor.
[0014] Preferably, the surface of the clamping rod is rubber.
[0015] The utility model discloses the beneficial effects: through high-precision gear synchronous belt drive connecting rod mechanism and stable drive center clamping mechanism, center positioning is accurate and efficient. Compared with the existing edge finding equipment relying on visual algorithm, the cost is low, and the precision and accuracy are high, and the operation is simple. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is the structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0017] As Figure 1 shown, a simple high-precision edge finding machine mechanism, including fixed table 1, negative pressure suction table 2, a plurality of center clamping mechanisms 3 and area sensor 4, the fixed table 1 is fixed to the worktable by support column;The negative pressure suction table 2 is rotatably installed above the fixed table 1 by inner shaft 5, and a plurality of center clamping mechanisms 3 are distributed in the form of ring along the axis of the negative pressure suction table 2 on the fixed table 1 and move synchronously to the center;The area sensor 4 is located on the side of the negative pressure suction table 2 for detecting whether the workpiece is rotated in place;
[0018] The fixed table 1 is provided with the outer shaft disc 6 with the same axis as the negative pressure suction table 2, the outer shaft disc 6 is the outer shaft rotatably installed at the bottom of the fixed table 1, and the outer shaft is provided with disc surface and gear surface;The disc surface of the outer shaft disc 6 is annularly distributed with a plurality of connecting rod mechanisms connected with the center clamping mechanism 3 for pushing and pulling the center clamping mechanism 3;The outer shaft disc 6 is engaged with the positioning motor 7 through the gear surface.
[0019] The inner shaft 5 is installed in the fixed table 1 and penetrates the outer shaft, and the gear 9 is installed at the bottom of the inner shaft 5;The inner shaft 5 is engaged with the rotating motor 8 through the gear 9;The inner shaft 5 is a hollow shaft connected with the negative pressure suction table 2, and the negative pressure pipeline of the negative pressure suction table 2 is located in the inner shaft 5.
[0020] The center clamping mechanism 3 comprises a clamping rod 31 which is rotatably installed on a mounting block 32, the mounting block 32 is installed on a slide rail 34 on the fixed table 1 through a sliding block 33; an L-shaped connecting arm 35 is fixed behind the mounting block 32, and the L-shaped connecting arm 35 is rotatably connected with a connecting rod 36 rotatably installed on the outer shaft disc 6 to form a two-link mechanism.
[0021] The fixed table 1 of the utility model installs coaxial outer rotating shaft and inner rotating shaft 5 through the stepped setting size bearing hole; the connecting rod 36 on the disc surface rotates with the disc surface through the rotation of the positioning motor 7, drives the outer rotating shaft to rotate, pushes or pulls the L-shaped connecting arm 35 and the center clamping mechanism 3 to move centripetally through the sliding block 33 on the slide rail 34; no matter if the wafer is offset and placed, under the condition of synchronous centripetal movement, the center clamping mechanism 3 can accurately push it to the coaxial center of the negative pressure adsorption table 2.
[0022] Subsequently, the wafer is vacuum adsorbed, the center clamping mechanism 3 is reset, the rotating motor 8 is started to rotate, drives the wafer to rotate, the area sensor detects the wafer edge NOTCH after the second slow rotation, the motor is rotated by a certain angle, the second slow rotation, the second accurate positioning.
[0023] The above can ensure the product positioning accuracy and angle accuracy, and the operation efficiency is very high, and the equipment is relatively simple and practical, compared with the existing mechanical precision and visual algorithm combined standard machine, the equipment cost is low.
[0024] Preferably, the area sensor 4 adopts a photoelectric sensor, the fixed table 1 is provided with a notch for accommodating a lower assembly of the photoelectric sensor, the photoelectric sensor assembly is distributed on the upper and lower negative pressure adsorption table 2 and is connected with a transverse driving device at the rear.
[0025] The above only describes the preferred embodiment of the utility model, and does not limit the utility model, any modification, equivalent replacement or improvement made within the spirit and principle of the utility model should be included in the protection scope of the utility model.
Claims
1. A simple high-precision edge finding machine mechanism, comprising a fixed table (1), a negative pressure adsorption table (2), a plurality of center clamping mechanisms (3) and area sensors (4); the negative pressure adsorption table (2) is rotatably installed above the fixed table (1) through an inner rotating shaft (5), and a plurality of center clamping mechanisms (3) are distributed in a ring shape along the axis of the negative pressure adsorption table (2) on the fixed table (1) and move synchronously towards the center; the area sensors (4) are located on the side of the negative pressure adsorption table (2) for detecting whether the workpiece is rotated into position; characterized in that a coaxial outer shaft disc (6) is arranged below the fixed table (1) and coaxial with the negative pressure adsorption table (2), a plurality of connecting rod mechanisms connected with the center clamping mechanisms (3) are distributed in a ring shape around the axis of the outer shaft disc (6) for pushing and pulling the center clamping mechanisms (3); the outer shaft disc (6) is engaged with a positioning motor (7) through a gear (9); the inner rotating shaft (5) is engaged with a rotating motor (8) through the gear (9).
2. The simple high-precision edge finder mechanism of claim 1, wherein, The center clamping mechanism (3) comprises a clamping rod (31) rotatably installed on a mounting block (32), the mounting block (32) is installed on a slide rail (34) on the fixed table (1) through a sliding block (33); an L-shaped connecting arm (35) is fixed behind the mounting block (32), and the L-shaped connecting arm (35) is rotatably connected with a connecting rod (36) rotatably installed on the outer shaft disc (6) to form a two-link mechanism.
3. The simple high-precision edge finder mechanism of claim 1, wherein, The outer shaft disc (6) is an outer rotating shaft rotatably installed at the bottom of the fixed table (1), and a disc surface and a gear surface are arranged on the outer rotating shaft.
4. The simple high-precision edge finder mechanism of claim 3, wherein, The inner rotating shaft (5) is installed on the fixed table (1) and penetrates through the outer rotating shaft, and a gear (9) is installed at the bottom of the inner rotating shaft (5).
5. The simple high-precision edge finder mechanism of claim 4, wherein, The inner rotating shaft (5) is a hollow shaft connected with the negative pressure adsorption table (2), and a negative pressure pipeline of the negative pressure adsorption table (2) is located in the inner rotating shaft (5).
6. The simple high-precision edge finder mechanism of claim 1, wherein, The fixed table (1) is fixed on a worktable through support columns.
7. The simple high-precision edge finder mechanism of claim 1, wherein, The area sensors (4) are photoelectric sensors, and photoelectric sensor assemblies are distributed above and below the negative pressure adsorption table (2) and connected with a horizontal driving device at the back.
8. The mechanism of claim 7, wherein, The fixed table (1) is provided with a notch for accommodating the lower assembly of the photoelectric sensor.