Self-adaptive vacuum chuck

Abstract

The utility model relates to a self-adaptation vacuum chuck, including chuck body, tube socket and connecting tube, wherein chuck body includes adsorption surface and first air passage, first air passage passes through chuck body, first air passage forms first interface and second interface on the outer surface of chuck body, first interface is provided at the adsorption surface, second interface is provided at the second interface, the first interface is provided at the adsorption surface, and the second interface is provided at the second interface. The second connector is formed in the position, deviating from the adsorption face, of the disc body. According to the self-adaptive vacuum chuck, due to the adoption of the deformable design of the connecting pipe, the connecting pipe can adjust the self deformation when the chuck and the pipe seat move relatively to adapt to the horizontal extension or contraction of a wafer caused by vertical leveling, so that the problem of stress concentration caused by horizontal strain is effectively solved, and adsorption failure or wafer damage is avoided; therefore, the dynamic adaptive capacity of the self-adaptive vacuum chuck under the complex surface condition remarkably improves the adsorption precision and reliability in the wafer carrying process, and the requirement of industrial production for high-precision adsorption equipment is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to a sucking disc, especially a self-adapting vacuum sucking disc. BACKGROUND

[0002] In the industrial production process, the sucking disc is widely used in the planar adsorption, carrying and positioning operation of various workpieces. Especially in the wafer manufacturing field, due to the high precision and thin sheet characteristics of the wafer material, the sucking disc is used as an important tool for wafer carrying.

[0003] The traditional sucking disc is usually composed of a disc body, an adsorption surface and an air channel, and the workpiece plane is adsorbed by negative pressure. Such a sucking disc has high stability and working efficiency when adsorbing a flat surface.

[0004] However, the wafer surface often has a micro concave-convex uneven distribution due to the manufacturing process. These irregular distributions are easy to cause local stress on the workpiece surface during the process of adsorbing and vertically flattening the wafer, accompanied by horizontal stretching or compression deformation. Therefore, when adsorbing a workpiece (such as a wafer) with an irregular concave-convex surface, due to the high rigidity of the overall structure of the existing sucking disc, the air channel is difficult to adjust dynamically according to the concave-convex surface of the wafer. During the process of vertically flattening the wafer, the stress concentration is easy to cause adsorption failure or wafer damage due to the horizontal extension or contraction of the adjacent concave-convex positions. Moreover, because the air channel design of the existing sucking disc is usually fixed, when the wafer is slightly displaced due to horizontal deformation, the air channel connectivity and the sealing performance of the disc body and the wafer are easily affected, and it is difficult to meet the reliable adsorption requirements in a complex stress environment. Therefore, a self-adapting vacuum sucking disc is needed to solve the above problems. SUMMARY

[0005] The purpose of the utility model is to provide a self-adapting vacuum sucking disc which can balance the horizontal deformation during the adsorption process and ensure reliable air channel connectivity and sealing performance during the process of vertically flattening the sucking disc.

[0006] The technical scheme adopted by the utility model to solve the above problems is: a self-adapting vacuum sucking disc for planar adsorption of a workpiece, comprising:

[0007] A disc body comprising an adsorption surface and a first air channel, the first air channel penetrating through the disc body, the first air channel forming a first interface and a second interface on the outer surface of the disc body, the first interface being opened at the adsorption surface, and the second interface being opened at the disc body away from the adsorption surface.

[0008] A tube seat comprising a second air channel.

[0009] A connecting pipe, one end of the connecting pipe is connected with the second interface on the disc body, the other end of the connecting pipe is connected with the pipe base, the inside of the connecting pipe is communicated with the second air channel, and the connecting pipe is configured to move relatively with the disc body and the pipe base when the disc body and the pipe base move relatively.

[0010] Preferably, the connecting pipe comprises a plurality of ring-shaped members and a plurality of connecting rings, and the ring-shaped members are connected with the connecting rings by the connecting rings.

[0011] Preferably, the connecting ring is made of flexible material.

[0012] Preferably, the connecting pipe is made of flexible material.

[0013] Preferably, the suction disc further comprises a spring, the spring is sleeved on the outside of the connecting pipe to apply a resilient force to the side surface of the connecting pipe.

[0014] Preferably, the suction disc further comprises a spring, the spring is arranged in the inside of the connecting pipe, and the side surface of the spring abuts against the inner wall of the connecting pipe to apply a resilient force to the side surface of the connecting pipe.

[0015] Preferably, a layer is arranged between the outer surface and the inner wall of the connecting pipe, and the spring is arranged in the layer to apply a lateral resilient force to the connecting pipe.

[0016] Preferably, the connecting pipe is a corrugated pipe or a serpentine flexible pipe.

[0017] Preferably, the connecting pipe is an elastic pipe to contract when the disc body moves towards the pipe base or to elongate when the disc body moves away from the pipe base.

[0018] Preferably, the disc body is made of flexible material to elastically deform under external force.

[0019] The embodiment of the utility model has the advantages of:

[0020] The self-adaptive vacuum suction disc can adjust the deformation of the connecting pipe when the disc body and the pipe base move relatively, adapt to the extension or contraction of the wafer in the horizontal direction due to the vertical flattening, effectively solve the stress concentration problem caused by the horizontal strain, avoid the adsorption failure or wafer damage, and improve the adsorption precision and reliability in the wafer carrying process. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 is a schematic structural view of the suction cup in a non-working state according to an embodiment of the present application.

[0022] Fig. 2 is a schematic structural view of the suction cup in a working state according to an embodiment of the present application.

[0023] Fig. 3 is a partial sectional view of the suction cup according to an embodiment of the present application.

[0024] Among them: 100, the suction cup; 110, the disc body; 111, the adsorption surface; 112, the first air duct; 120, the pipe seat; 121, the second air duct; 130, the connecting pipe. DETAILED DESCRIPTION

[0025] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings and embodiments. The following embodiments are used to illustrate the present application, but not to limit the scope of the present application.

[0026] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the scope of protection of the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the present application, unless otherwise specified and limited, the term "a plurality of" means two or more.

[0027] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, and it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0028] Fig. 1 is a schematic structural view of the suction cup in a non-working state according to an embodiment of the present application. Fig. 2 is a schematic structural view of the suction cup in a working state according to an embodiment of the present application. Fig. 3is a partial sectional view of the suction cup in one embodiment of the utility model.

[0029] As Figs. 1 to 3 The application provides a self-adaptive vacuum suction cup 100 for adsorbing target objects.

[0030] The suction cup 100 comprises a disc body 110, wherein the disc body 110 comprises an adsorption surface 111 and a first air channel 112, the first air channel 112 penetrates through the disc body 110, the first air channel 112 forms a first interface and a second interface on the outer surface of the disc body 110, the first interface is arranged at the adsorption surface 111, and the second interface is arranged at the side of the disc body 110 away from the adsorption surface 111.

[0031] Specifically, the disc body 110 is composed of the adsorption surface 111 and the first air channel 112 penetrating through the disc body 110. The first interface is arranged at the adsorption surface 111 and is used for connecting with the workpiece plane, and the second interface is arranged at the side of the disc body 110 away from the adsorption surface 111 and is responsible for connecting the air pipe and communicating with the external air path. The disc body 110 is usually in the shape of a disc or other geometric shapes suitable for planar adsorption, and the surface of the adsorption surface 111 is designed to be smooth or slightly grooved to enhance the stability of contact with the workpiece surface. The first air channel 112 is usually a hollow structure penetrating through the disc body 110, and the shape and size of the first air channel 112 are considered to ensure smooth passage of air flow during design. The disc body 110 is usually made of high-elastic and flexible rubber or polyurethane materials to ensure good adsorption and sealing performance.

[0032] The main function of the disc body 110 is to provide structural support and air channel for the suction cup 100. It contacts the workpiece surface through the adsorption surface 111 and provides negative pressure to help adsorb the workpiece. Under the action of the first air channel 112, the disc body 110 ensures the stability of negative pressure through the guidance of air flow and can be connected with the external air pipe and the control system of the suction cup 100, thereby realizing the functions of adsorption and release.

[0033] The suction cup 100 comprises a pipe seat 120, which comprises a second air channel 121. The pipe seat 120 provides support and connection functions for the installation of the suction cup 100.

[0034] Specifically, the pipe base 120 is another key component of the suction cup 100, which is structurally designed as a support part that fits and supports the suction cup 100. The pipe base 120 is internally provided with a second air channel 121, which can be communicated with the first air channel 112 of the disc body 110 through the connecting pipe 130 described later. The design of the first air channel 112 ensures smooth flow of air and stable transmission of pressure in the suction cup 100 system. The role of the pipe base 120 mainly lies in providing a fixed mounting platform to ensure that the suction cup 100 can be stably installed at the desired position. It carries the air channel system connected with the suction cup 100 and, through cooperation with the disc body 110, ensures effective transmission of negative pressure and supports the suction function between the suction cup 100 and the workpiece during work. The design of the pipe base 120 effectively improves the installation stability of the suction cup 100 and the reliability of the air connection. During use, the pipe base 120 makes the work of the suction cup 100 not easily affected by external vibration or impact, ensuring the continuity and precision of the suction operation.

[0035] In order to avoid the stress concentration caused by the horizontal extension or contraction of the suction cup 100 in the wafer vertical flattening process due to the adjacent concave-convex positions, the suction cup 100 further comprises a connecting pipe 130, one end of the connecting pipe 130 is connected with the second interface on the disc body 110, the other end of the connecting pipe 130 is connected with the pipe base 120, the inside of the connecting pipe 130 is communicated with the second air channel 121, and the connecting pipe 130 is configured to move relatively when the disc body 110 and the pipe base 120 move relatively.

[0036] The second interface of the connecting pipe 130 connects the disc body 110 and the pipe base 120, ensuring smooth communication of the air channel system between the disc body 110 and the pipe base 120. The connecting pipe 130 is connected with the second interface on the disc body 110 through one end and connected with the pipe base 120 through the other end, and the inside is communicated with the second air channel 121 of the pipe base 120. The design of the connecting pipe 130 enables the connecting end of the connecting pipe 130 to adjust the position when the disc body 110 and the pipe base 120 move relatively, so as to adapt to the dynamic changes between the suction cup 100 and the workpiece surface.

[0037] The shape of the connecting pipe 130 is generally pipe-shaped, with a certain flexibility or adjustability, which can maintain the continuity of the airflow passage when the disc body 110 and the pipe seat 120 move relatively. Its inner diameter is matched with the design of the air duct to ensure smooth airflow. The connecting pipe 130 is usually made of flexible materials such as high-strength plastic, rubber or other materials that are wear-resistant and have a certain elasticity, which can ensure its durability and stability when the disc body 110 and the pipe seat 120 move relatively. The material can adapt to the deformation requirements of the workpiece surface and prevent airflow obstruction or leakage caused by relative motion.

[0038] The connecting pipe 130 allows relative motion during the operation of the suction cup 100, which solves the displacement problem between the disc body 110 and the pipe seat 120 caused by changes in working conditions, effectively avoiding airflow interruption or pressure instability.

[0039] The design of the connecting pipe 130 effectively alleviates the impact of horizontal deformation caused by the irregular shape of the wafer surface. During the process of vertically flattening the wafer, the flexible connection of the connecting pipe 130 allows the disc body 110 and the pipe seat 120 to move relatively, thereby preventing adsorption failure or wafer damage caused by stress concentration or excessive deformation. This design improves the adaptability of the suction cup 100 to complex surface deformation during operation, ensuring the stability and reliability of adsorption.

[0040] In some embodiments, the connecting pipe 130 includes a plurality of ring-shaped members and a plurality of connecting rings, and the two ring-shaped members are connected by the connecting rings, so that each ring-shaped member is connected with each connecting ring to form the connecting pipe 130, wherein the connecting rings are made of flexible materials.

[0041] The connecting pipe 130 is composed of a plurality of ring-shaped members and connecting rings. The design of the ring-shaped member ensures the rigidity and stability of the pipe structure, and the connecting ring provides adaptability and flexibility by flexibly connecting the ring-shaped members. This structural design enables the connecting pipe 130 to maintain smooth airflow between the disc body 110 and the pipe seat 120 when they move relatively, avoiding airflow interruption or pressure instability caused by position changes.

[0042] The ring-shaped member is usually circular or ring-shaped, with a regular geometric shape. Each connecting ring is arranged between the ring-shaped members to form a structure with adjustable length. Through the flexible design of the connecting ring, the connecting pipe 130 can maintain appropriate length and shape when vertically flattening or the workpiece surface deforms, avoiding excessive stretching or compression of the pipe.

[0043] The connecting ring is made of flexible material, usually high-elasticity, wear-resistant material such as rubber, silicone or other synthetic materials with good flexibility. The selection of flexible material enables the connecting ring to withstand the pressure fluctuations generated by the chuck 100 during work, and to maintain a stable air flow passage during relative movement.

[0044] In this embodiment, the flexible connecting ring enables the connecting pipe 130 to maintain the openness of the air passage when the disc body 110 and the pipe seat 120 move relatively. The flexible design of the connecting ring not only ensures the stability of the connecting pipe 130, but also allows it to adapt to the displacement and deformation that occurs during work, preventing the air passage of the chuck 100 from failing or sealing problems during operation.

[0045] In this embodiment, the flexibility of the connecting pipe 130 can effectively cope with the relative movement between the disc body 110 and the pipe seat 120, avoiding stress concentration or unstable air flow due to relative movement. The use of flexible connecting ring improves the ability of the chuck 100 to cope with surface irregularities during wafer vertical flattening, ensuring the stability and reliability of the chuck 100, and avoiding adsorption failure or wafer damage due to air passage blockage or leakage. Therefore, in this embodiment, the connecting pipe 130 can be embodied as a bellows or a serpentine hose in specific ways.

[0046] In some embodiments, the connecting pipe 130 is made of flexible material. The connecting pipe 130 is also provided with a spring (not shown in the figure), which is sleeved on the outside of the connecting pipe 130 to exert a resilient force on the side of the connecting pipe 130.

[0047] The connecting pipe 130 is made of flexible material to ensure its adaptability and stability when the disc body 110 and the pipe seat 120 move relatively. In addition, the spring on the outside of the connecting pipe 130 is tightly combined by sleeving, providing additional resilient force. The setting of the spring enhances the elasticity and recovery ability of the connecting pipe 130, so that the connecting pipe 130 can automatically adjust its shape during the operation of the chuck 100 to adapt to the relative movement between the disc body 110 and the pipe seat 120.

[0048] The spring usually has a spiral structure and is uniformly distributed on the outside of the connecting pipe 130 to ensure that a uniform resilient force is exerted on the side of the connecting pipe 130. The size and elastic design of the spring are carefully adjusted to adapt to the stress and displacement generated during the operation of the chuck 100.

[0049] The connecting pipe 130 is made of flexible material, such as rubber, silicone or other synthetic elastic materials, to provide sufficient flexibility and durability.

[0050] The main function of the spring is to exert a restoring force on the connecting pipe 130, maintaining its shape recovery and stability. When the disc body 110 moves relative to the pipe base 120, the connecting pipe 130 may be deformed. After the suction cup 100 is separated from the target object, the spring exerts a restoring force to restore the connecting pipe 130 to its original shape, preventing it from being excessively bent or relaxed.

[0051] The spring cooperates with the connecting pipe 130 made of flexible material to effectively resist external stress, enhancing the durability and adaptability of the connecting pipe 130. Especially when the disc body 110 moves relative to the pipe base 120, the restoring force of the spring ensures that the connecting pipe 130 always maintains the appropriate shape and tension, preventing the connecting pipe 130 from failing or relaxing due to long-term use or frequent movement. This design improves the stability and reliability of the suction cup 100 during operation, ensures the continuous communication of the air passage, reduces the risk of damage to the suction cup 100, and improves the overall work efficiency.

[0052] In other embodiments, the spring is arranged inside the connecting pipe 130, or a sandwich layer is provided between the outer surface of the connecting pipe 130 and the inner wall, and the spring is arranged in the sandwich layer. In both cases, the side surface of the spring abuts against the inner wall of the connecting pipe 130 to exert a restoring force on the side surface of the connecting pipe 130.

[0053] Specifically, in this embodiment, the installation position of the spring has changed. The spring can be arranged inside the connecting pipe 130 or in the sandwich layer between the outer surface of the connecting pipe 130 and the inner wall. Regardless of which way, the side surface of the spring will be in close contact with the inner wall of the connecting pipe 130, so that when the disc body 110 moves relative to the pipe base 120, the spring exerts a restoring force on the connecting pipe 130. This design further enhances the shape stability and recovery of the connecting pipe 130.

[0054] The sandwich layer design provides additional space to accommodate the spring, so that the outer diameter and inner diameter of the spring can match the inner and outer surfaces of the connecting pipe 130. The size and shape of the spring are optimized to ensure that it can effectively exert appropriate restoring force on the side surface of the connecting pipe 130, while avoiding excessive friction between the spring and the inner wall of the connecting pipe 130.

[0055] By being installed inside the connecting pipe 130 or in the sandwich layer, the spring can more uniformly exert a restoring force on the connecting pipe 130, avoiding deformation or relaxation of the connecting pipe 130 when the disc body 110 moves relative to the pipe base 120. When the connecting pipe 130 is subjected to external pressure or force, the restoring force provided by the spring can restore the connecting pipe 130 to its original shape, maintain its structural stability, prevent excessive bending or stretching, ensure the smoothness of the working air passage of the suction cup 100, and avoid affecting the air flow passage between the suction cup 100 and the pipe base 120.

[0056] To accommodate the movement of the disc body 110 towards or away from the tube base 120, in some embodiments, the connecting tube 130 is an elastic tube that contracts when the disc body 110 moves towards the tube base 120 or expands when the disc body 110 moves away from the tube base 120.

[0057] The connecting tube 130 is an elastic tube with flexibility and stretchability, which can deform according to the movement direction of the disc body 110 when the disc body 110 and the tube base 120 move relative to each other. The material of the elastic tube allows it to stretch and contract under external force, ensuring that the connection between the connecting tube 130, the disc body 110 and the tube base 120 is not affected.

[0058] The shape of the elastic tube is usually cylindrical or similar geometric shape, and the wall thickness is moderate to ensure that it can exhibit ideal elastic response when the disc body 110 moves. At one end and the other end close to the tube base 120, the structure of the elastic tube can adapt to the deformation when the disc body 110 moves, providing a moderate contraction and expansion space.

[0059] The elastic tube is generally made of materials with high elasticity, such as silicone, rubber or other synthetic elastic materials, which have excellent stretchability, wear resistance and corrosion resistance, and can withstand repeated stretching and compression while maintaining stable performance.

[0060] When the disc body 110 moves towards the tube base 120, the elastic tube will contract due to external force, thereby maintaining connectivity and adapting to the movement of the disc body 110. When the disc body 110 moves away from the tube base 120, the elastic tube will expand to accommodate the relative displacement of the disc body 110. This stretch function allows the connecting tube 130 to remain flexible and adjust its length in different working conditions, avoiding pipe disconnection or airflow passage affected by relative movement.

[0061] The elastic tube design in this embodiment can effectively adapt to the movement of the disc body 110 towards or away from the tube base 120 during operation, ensuring that the deformation of the connecting tube 130 is synchronized with the movement of the disc body 110, thereby ensuring the stability and reliability of the suction disc 100 system in different working environments. This design not only improves the adaptability of the suction disc 100, but also reduces the problem of unstable airflow or poor sealing caused by the movement of the disc body 110, thereby improving the overall working efficiency and adsorption effect.

[0062] In some embodiments, the disc body 110 is made of flexible material to allow the disc body 110 to elastically deform under external force.

[0063] The disc body 110 is made of flexible material and has certain elasticity and toughness, so that it can elastically deform when subjected to external force (such as adsorption force or workpiece contact force). Such deformation is manifested as slight bending or compression of the surface or the whole of the disc body 110, but after the external force is removed, the disc body 110 will return to its original state, ensuring the stability of the adsorption process.

[0064] The disc body 110 generally has a disc shape or a similar shape, and the edge can be designed with a curve or a certain degree of curvature. The use of flexible material enables the edge of the disc body 110 to flexibly adapt to the surface of workpieces of different shapes and make fine adjustments during the adsorption process to adapt to irregular surfaces.

[0065] The flexible material used by the disc body 110 generally includes silica gel, rubber or other synthetic materials with elasticity and wear resistance. These materials not only have good elastic recovery ability, but also can maintain long-term stable performance in high-load or complex working environments. In addition, flexible materials can also provide a certain buffering effect to reduce damage caused by uneven stress on the surface of the workpiece.

[0066] Flexible material enables the disc body 110 to make closer contact with the surface of the workpiece during the working process. Even if there are slight irregularities on the surface of the workpiece, the elastic deformation of the disc body 110 can help it adapt to different surface shapes, thereby achieving more stable adsorption effect. In addition, the flexible disc body 110 can relieve stress concentration that may occur during the adsorption process, reducing the risk of damage to the surface of the workpiece.

[0067] The disc body 110 made of flexible material in this embodiment can effectively disperse stress when adsorbing workpieces with irregular surfaces, reducing the possibility of adsorption failure or damage to the workpiece caused by insufficient rigidity. Due to the elastic deformation characteristics, the disc body 110 can adapt to the actual shape of the surface of the workpiece, ensuring uniform distribution of adsorption force, thereby improving work efficiency, prolonging the service life of the equipment, and ensuring the integrity of the workpiece.

[0068] The above described in the specification of the present application is only an example of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, as long as they do not deviate from the content of the specification of the present application or exceed the scope defined by the claims, and should belong to the protection scope of the present application.

Claims

1. An adaptive vacuum chuck for suctioning against a planar surface of a workpiece, characterized by, The application relates to a disc body, a pipe base and a connecting pipe. The disc body comprises an adsorption surface and a first air channel, the first air channel penetrating through the disc body, the first air channel forming a first interface and a second interface on the outer surface of the disc body, the first interface being arranged at the adsorption surface, and the second interface being arranged at the position away from the adsorption surface. The pipe base comprises a second air channel. One end of the connecting pipe is connected with the second interface on the disc body, the other end of the connecting pipe is connected with the pipe base, the inner part of the connecting pipe is communicated with the second air channel, and the connecting pipe is configured to be relatively moved at the connecting end of the connecting pipe with the disc body and the connecting end of the connecting pipe with the pipe base when the disc body and the pipe base are relatively moved.

2. A self-adapting vacuum chuck according to claim 1, characterized in that The connecting pipe comprises a plurality of ring-shaped members and a plurality of connecting rings, and the ring-shaped members are connected with the connecting rings. The connecting rings are made of flexible material.

3. The self-adapting vacuum chuck according to claim 1, wherein, The connecting pipe is made of flexible material.

4. A self-adapting vacuum chuck according to claim 3, characterized in that A spring is arranged on the outer part of the connecting pipe to apply a rebound force to the side surface of the connecting pipe.

5. The self-adapting vacuum chuck according to claim 3, wherein, A spring is arranged on the inner part of the connecting pipe, and the side surface of the spring is abutted with the inner wall of the connecting pipe to apply a rebound force to the side surface of the connecting pipe.

6. A self-adapting vacuum chuck according to claim 4, characterized in that A spring is arranged in the interlayer between the outer surface and the inner wall of the connecting pipe to apply a lateral rebound force to the connecting pipe.

7. The self-adapting vacuum chuck according to claim 1, wherein, The connecting pipe is a corrugated pipe or a serpentine flexible pipe.

8. A self-adapting vacuum chuck according to any of claims 1-7, characterized in that, The connecting pipe is an elastic pipe to be contracted when the disc body is moved towards the pipe base and to be elongated when the disc body is moved away from the pipe base.

9. A self-adapting vacuum chuck according to any one of claims 1-7, characterized in that, The disc body is made of flexible material to be elastically deformed under external force.

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