Vacuum pump transferring device

Abstract

The utility model discloses a vacuum pump transferring device, and relates to the technical field of transferring tools. The vacuum pump transferring device comprises a first supporting part and a second supporting part, the first supporting part is provided with a slope surface used for transferring a vacuum pump, and the lowest position of the slope surface is flush with the ground; the second supporting part is provided with a plane used for bearing the vacuum pump, the plane is flush with the highest position of the slope surface and abuts against the highest position of the slope surface, and the second supporting part is fixed to a moving mechanism so that the moving mechanism can drive the plane to be adjacently connected with a vacuum pump fixing base; one end of the connecting part is fixedly connected with the second supporting part, and when the plane is adjacently connected with a vacuum pump fixing base, the other end of the connecting part is detachably connected with the vacuum pump fixing base. The vacuum pump transferring device can remarkably improve safety of vacuum pump installation, saves labor, is suitable for pump bodies of various sizes and weights, has low requirements for installation space, and has good universality.

Description

TECHNICAL FIELD

[0001] The utility model discloses a vacuum pump moves and carries device relates to the technology field of moving and carrying frock. BACKGROUND

[0002] The vacuum pump all -in -one is widely used in semiconductor, chip, photovoltaic etc. industry, because it has the low installation and operation cost, stability and security etc. advantage. The vacuum pump as the important equipment of industrial production, its installation position needs accurate planning. For example, when the factory carries out the installation of new equipment or the layout optimization of production line, needs to move the vacuum pump from the storage area or the temporary point and places to the designated work position and installs.

[0003] At present, the traditional vacuum pump all -in -one installation solution mainly is to help the forklift or manual handling to the designated position and installs, however, the safety of manual handling is not high and very labor -intensive, and the forklift handling mode not only needs the larger installation space, and the forklift is short of the connecting fixed structure between the pump frame, can lead to the forklift platform stress inclination, and the vacuum pump is stuck on the platform and is difficult to move again, thus, the vacuum pump moving and carrying frock needs to be improved. CONTENT OF THE UTILITY MODEL

[0004] In order to solve the above problems existing in the installation of the traditional vacuum pump, the utility model provides a vacuum pump moving and carrying device with universality and safety.

[0005] The utility model provides a kind of vacuum pump moving and carrying device, the device includes:

[0006] First support part, the first support part is equipped with the slope for transferring vacuum pump, the lowest of the slope is flush with ground;

[0007] Second support part, the second support part is equipped with the plane for bearing vacuum pump, the plane is flush with and abuts the highest of the slope, and the second support part is fixed on moving mechanism, to make the moving mechanism drive the plane and vacuum pump fixed base abut;

[0008] Connecting portion, one end of the connecting portion is fixedly connected with the second support part, when the plane and vacuum pump fixed base abut, the other end of the connecting portion is detachably connected with the vacuum pump fixed base.

[0009] In some possible implementation modes, the connecting portion includes first end face, second end face and state retention piece;

[0010] The first end face is hinged with the second end face, and the first end face is fixed on the second support part;

[0011] The first end surface is parallel to the second end surface when the state holding piece is in the first state, and the first end surface is at a preset angle with the second end surface when the state holding piece is in the second state; the second end surface is fixed on the vacuum pump fixing base when the state holding piece is in the first state, and the second end surface is separated from the vacuum pump fixing base when the state holding piece is in the second state.

[0012] In some possible implementation manners, the connecting part further comprises a first hinge and a second hinge;

[0013] The shaft pins of the first hinge and the second hinge are arranged at intervals along the edge of the upper surface of the plane, a group of blades on the same side of the first hinge and the second hinge are fixed on the first end surface, another group of blades on the same side of the first hinge and the second hinge are fixed on the second end surface, and the holding piece is arranged in an interval formed by the first hinge and the second hinge.

[0014] In some possible implementation manners, the state holding piece comprises a positioning piece body and a positioning pin;

[0015] The positioning piece body is fixed on the first end surface, a positioning hole is formed in the positioning piece body, an axis line of the positioning hole is parallel to the plane, a pin insertion hole is formed in a corresponding position of the second end surface relative to the positioning piece body, the positioning pin penetrates through the pin insertion hole and cooperates with the positioning hole to adjust the included angle between the second end surface and the second end surface, and a mounting hole for inserting a mounting pin column on the vacuum pump fixing base is further formed in the second end surface.

[0016] In some possible implementation manners, the first supporting part extends along the slope surface and forms a right-angled triangle with a section perpendicular to the ground direction, an inclined side of the right-angled triangle is the slope surface of the first supporting part, and a short side of the right-angled triangle is perpendicular to the ground.

[0017] In some possible implementation manners, the second supporting part comprises a bottom plate, a first side plate and a second side plate;

[0018] A surface of the bottom plate away from the ground serves as the plane, the first side plate and the second side plate are both perpendicular to the bottom plate and extend away from the ground, a length direction of the first side plate and a length direction of the second side plate are both parallel to a reference direction, and a distance between the first side plate and the second side plate is adjustable; the reference direction is a moving direction of the vacuum pump on the bottom plate.

[0019] In some possible implementation manners, the bottom plate is provided with at least one first sliding groove perpendicular to the reference direction, and the first side plate and / or the second side plate is matched with the at least one first sliding groove through a sliding rod to adjust the interval.

[0020] In some possible implementation manners, the second support part further comprises a connecting piece corresponding to each first sliding groove.

[0021] The connecting piece is fixed on the surface of the bottom plate close to the ground, and the connecting piece is provided with a second sliding groove corresponding to the first sliding groove, and the sliding rod penetrates through the corresponding first sliding groove and second sliding groove.

[0022] In some possible implementation manners, the second support part further comprises a third side plate and / or a fourth side plate with adjustable length.

[0023] The first side plate and / or the second side plate is provided with a socket of the third side plate at the end part close to the first support part.

[0024] The first side plate and / or the second side plate is provided with a socket of the fourth side plate at the end part away from the first support part.

[0025] In some possible implementation manners, the moving mechanism is a forklift, and the forklift forks are fixed with the second support part through welding or bolts.

[0026] The vacuum pump moving device provided by the utility model provides the moving space required for height lifting when the first support part is installed to the moving mechanism, and the height lifting can be realized without bearing the whole pump body weight, so that the workload during installation can be reduced, and the safety is higher; in addition, the second support part connected with the moving mechanism enables the pump body to be freely moved to be close to the installation position, the connecting part can also provide the moving space when the vacuum pump fixing base needs to be pushed in, the safety during installation of the vacuum pump can be obviously improved, the labor is saved, the pump body of various volumes and weights is suitable, the requirement for the installation space is lower, and the better universality is obtained. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical scheme in the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating the creative labor.

[0028] Figure 1 It is a schematic view of the vacuum pump moving device for bearing the vacuum pump provided by the utility model;

[0029] Figure 2Is the schematic diagram of the vacuum pump transfer device of the unloaded vacuum pump according to the utility model;

[0030] Figure 3 Is the schematic diagram of the connecting part when the state holding piece is in the first state according to the utility model;

[0031] Figure 4 Is the schematic diagram of the connecting part when the state holding piece is in the second state according to the utility model;

[0032] Figure 5 Is one of the axonometric views of the vacuum pump transfer device according to the utility model;

[0033] Figure 6 Figure is Figure 5 The local schematic view of area A in it;

[0034] Figure 7 Is the top view of the vacuum pump transfer device according to the utility model;

[0035] Figure 8 Is the second axonometric view of the vacuum pump transfer device according to the utility model.

[0036] Explanation of reference signs

[0037] 100: first support part;

[0038] 200: second support part;

[0039] 210: bottom plate; 220: first side plate; 230: second side plate; 240: first sliding groove; 250: sliding rod; 260: insertion hole; 270: connecting piece; 271: second sliding groove;

[0040] 300: connecting part;

[0041] 310: first end face;

[0042] 320: second end face; 321: pin insertion hole; 322: mounting hole;

[0043] 330: state holding piece; 331: positioning piece body; 3311 positioning hole; 332 positioning pin;

[0044] 340: first hinge; 350: second hinge;

[0045] 400: vacuum pump;

[0046] 500: vacuum pump fixing base;

[0047] 600: forklift fork. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical scheme and advantages of the utility model clearer, the technical scheme of the utility model will be described clearly and completely in combination with the drawings in the utility model below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0049] The terms "first", "second" and the like in the description and claims of the utility model are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the utility model can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second" and the like are generally a kind, and the number of objects is not limited, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in a "or" relationship.

[0050] The drawings will be described below Figure 1 to the drawings Figure 8 A vacuum pump transfer device provided by the embodiments of the utility model will be described in detail through specific embodiments and application scenarios.

[0051] As Figure 1 shown, the utility model discloses a kind of vacuum pump transfer device, which mainly includes first support 100, second support 200, connecting portion 300, which will be described in detail as follows:

[0052] First support 100, the first support 100 is provided with the slope surface for bearing vacuum pump 400, the lowest of the slope surface is flush with ground level;

[0053] In the embodiment, at least one surface of the first support 100 has height difference to form a slope surface, which can be uniformly changed or stepped, and the slope of the slope surface can be set according to actual needs. In the specific implementation process, since the first support 100 needs to provide a space for the vacuum pump 400 to move from the ground to a certain height, a steel plate and a plate material with better bearing capacity can be used to build, for example, the plate materials are combined into a triangular slope by bolt or welding. Please refer to Figure 2 As shown in the drawing, the first support 100 can provide a height-changing space for the vacuum pump, so as to facilitate the installation of the pump body on the moving structure, avoid carrying operation, and reduce the risk of collision or dumping.

[0054] The second support part 200 is provided with a plane for bearing the vacuum pump 400, the plane is flush with the highest part of the slope and abuts against the second support part 200 is fixed on the moving mechanism so that the moving mechanism drives the plane to abut against the vacuum pump fixed base 500.

[0055] In the embodiment, the second support part 200 can be a plane built by sheet metal or other materials with good support characteristics, the moving mechanism (not shown in the figure) refers to a mechanical structure or device capable of moving an object from one position to another, for example, a forklift, a carrier, an AGV carrier, etc. The second support part 200 is fixed on the moving mechanism, so it can make various forms of motion under the drive of the moving mechanism, such as translation, lifting motion or rotation, etc.

[0056] It should be noted that the first support part 100 and the second support part 200 can be connected to each other, or not connected but only in contact, since the second support part 200 needs to move with the moving mechanism, in the specific implementation process, in order to facilitate production and manufacturing, the first support part 100 and the second support part 200 can be constructed as an integral structure, of course, they can also be designed as a split type for easy movement or storage, connected by a connecting piece, so that they can be detached.

[0057] The connecting part 300 is fixedly connected to the second support part 200 at one end, and is detachably connected to the vacuum pump fixed base 500 at the other end when the plane abuts against the vacuum pump fixed base 500.

[0058] In the embodiment, the connecting part 300 provides two states for the second support part 200, which are connected and not connected to the vacuum pump fixed base 500, respectively. Specifically, when the moving mechanism moves, the second support part is not restricted to move, so as to accurately move to the installation position of the vacuum pump fixed base 500. When the vacuum pump 400 does not need to move relative to the vacuum pump fixed base 500, the second support part 200 and the vacuum pump fixed base 500 are connected, providing a moving space for the vacuum pump to move to a specific position, and a translation space for the vacuum pump to move to the final installation position, avoiding manual carrying.

[0059] The vacuum pump moving device of the embodiment provides the moving space required for height lifting when the vacuum pump is installed to the moving mechanism by the first support part, and can realize height lifting without bearing the whole pump body weight, can reduce the workload during installation, has high safety, in addition, the second support part connected with the moving mechanism enables the pump body to move freely and move close to the installation position, the connecting part can also provide moving space when it is required to push the vacuum pump fixed base, can significantly improve the safety of installing the vacuum pump, save labor, suitable for pump bodies of various volumes and weights and has low requirement on installation space, has good universality.

[0060] In some possible implementations, the connecting part 300 includes a first end face 310, a second end face 320, and a state holding part 330.

[0061] The first end face 310 is hinged to the second end face 320, and the first end face 310 is fixed on the second support part 200; in the specific implementation process, the first end face 310 and the second end face 320 can be connected by any existing or future possible hinge structure, such as a hinge, a folding hinge, a buffer hinge, etc.

[0062] The state holding part 330 is in a first state when the first end face 310 is parallel to the second end face 320, and the state holding part 330 is in a second state when the first end face 310 is at a preset angle to the second end face 320, the second end face 320 is fixed on the vacuum pump fixed base 500 when the state holding part 330 is in the first state, and the second end face 320 is separated from the vacuum pump fixed base 500 when the state holding part 330 is in the second state.

[0063] In the specific implementation process, the state holding part 330 can enable the first end face 310 and the second end face 320 to ensure two specific angles, which are 180 degrees and a preset angle respectively; it should be noted that the preset angle can be any angle between 0-180°, and is usually set at about 90 degrees for more convenient operation.

[0064] Please refer to Figure 3 When in the first state, the included angle of the first end face 310 and the second end face 320 is equal to 180 degrees, at this time, the first end face 310 and the second end face 320 can provide a horizontal transition surface for the connection of the second support part 200 and the vacuum pump fixed base 500, and the transition surface enables the vacuum pump to be pushed horizontally from the second support part 200 to the vacuum pump fixed base 500. Please refer to Figure 4As shown, the included angle of the first end surface 310 and the second end surface 320 is equal to the preset angle when in the second state, at which time the second end surface 320 is raised relative to the vacuum pump fixed base 500, and the vacuum pump can be prevented from being knocked out of the second support plate due to the inertial movement or shaking of the second support portion 200.

[0065] The vacuum pump moving device of the embodiment adopts the connecting portion provided with the state maintaining member, and the first end surface and the second end surface fixed on the second support portion are rendered two angles by means of the state maintaining member, which provides a suitable operation surface for the docking and separation of the second support portion and the vacuum pump fixed base, and further ensures the safety of the vacuum pump on the second support portion in the separated state.

[0066] In some possible implementation manners, please refer to Figure 5 and Figure 6 As shown, the connecting portion 300 further comprises a first hinge 340 and a second hinge 350;

[0067] The shaft pins of the first hinge 340 and the second hinge 350 are arranged along the edges of the upper surface of the plane, and a group of blades on the same side of the first hinge 340 and the second hinge 350 are fixed on the first end surface 310, and another group of blades on the same side of the first hinge 340 and the second hinge 350 are fixed on the second end surface 320, and the maintaining member is arranged in the interval formed by the first hinge 340 and the second hinge 350.

[0068] In the specific implementation process, in order to ensure that the vacuum pump 400 can be smoothly moved from the second support portion 200 to the vacuum pump fixed base 500, the height of the connecting portion 300 can be designed according to the height difference of the suspended bottom of the vacuum pump or the roller, and it is only required to ensure that the height of the connecting portion 300 does not exceed the height of the suspended bottom of the vacuum pump or the roller.

[0069] The vacuum pump moving device of the embodiment utilizes the side-by-side and spaced arrangement of the two groups of hinges to enable the first end surface and the second end surface to be hinged, and when one of them is damaged, the other can still work normally, so that the two end surfaces can be stably connected, and the safety of pump installation is further improved, and in addition, the state maintaining member can be placed in the spaced area, which can save space.

[0070] In some possible implementation manners, please refer to Figure 6 As shown, the state maintaining member 330 comprises a positioning member body 331 and a positioning pin 332;

[0071] The positioning member body 331 is fixed on the first end surface 310, the positioning hole 3311 is arranged on the positioning member body 331, the axis of the positioning hole 3311 is parallel to the plane, the pin insertion hole 321 is arranged on the corresponding position of the second end surface 320 and the positioning pin 332 penetrates through the pin insertion hole 321 and cooperates with the positioning hole 3211 to adjust the included angle between the first end surface 310 and the second end surface 320, and the mounting hole 322 for inserting the mounting pin column (not shown in the figure) on the vacuum pump fixing base 500 is further arranged on the second end surface 320.

[0072] In the specific implementation process, the positioning member body 331 should have a certain thickness and can be plate-shaped or plate-shaped, and preferably the positioning member body 331 adopts a U-shaped groove.

[0073] The vacuum pump moving device of the embodiment utilizes the positioning member body and the positioning pin with specific structures to enable the included angle between the first end surface and the second end surface to be switched between 90 degrees or 180 degrees, and the user can realize the switching operation by plugging and unplugging the positioning pin, which is safe and simple to operate.

[0074] In some possible implementation manners, please continue to refer to Figure 5 As shown in

[0075] In the specific implementation process, the first support part 100 and the second support part 200 can be connected by bolts, when the space near the vacuum pump fixing base 500 is limited, the first support part 100 can be detached from the second support part 200, at this time, the moving mechanism only needs to drive the second support part to move, which can save the operation space; when the space around the vacuum pump fixing base 500 is not limited, the first support part does not need to be detached, which helps to improve the installation efficiency.

[0076] The vacuum pump moving device of the embodiment adopts the first support part with a straight-angled triangular cross section, which can ensure that the pump body is pushed from the ground to the moving mechanism more safely, and can selectively detach the first support part and the second support part according to the space of the installation position, has good flexibility and reduces the demand for the installation environment.

[0077] In some possible implementation manners, please refer to Figure 2 and Figure 7 As shown in

[0078] The surface of the bottom plate 210 facing away from the ground is the plane, the first side plate 220 and the second side plate 230 are both perpendicular to the bottom plate 210 and extend away from the ground, the length direction of the first side plate 220 and the length direction of the second side plate 230 are both parallel to the reference direction, and the distance between the first side plate 220 and the second side plate 230 is adjustable; wherein the reference direction is the moving direction of the vacuum pump 400 on the bottom plate 210.

[0079] The vacuum pump moving device of the embodiment is configured by the first side plate and the second side plate to form a pump body accommodating space, so that the vacuum pump does not move a large range during movement with the moving mechanism, and the distance-adjustable side plates can also be flexibly changed according to the size of the pump volume, having good versatility.

[0080] In some possible implementations, referring again to Figure 5 As shown in the figure, the bottom plate 210 is provided with at least one first sliding groove 240 perpendicular to the reference direction, and the first side plate 220 and / or the second side plate 230 are adjusted in distance by cooperating with the at least one first sliding groove 240 through a sliding rod 250.

[0081] In the specific implementation process, the number of first sliding grooves 240 can be two, specifically, first sliding grooves 240 along the width direction of the bottom plate are respectively arranged at both ends of the length direction of the bottom plate, for each first sliding groove, the sliding rod can be one or two, for example, one of the two side plates can be arranged to move with the sliding rod, or both of the two side plates can be arranged to move with the sliding rod.

[0082] The vacuum pump moving device of the embodiment realizes the distance-adjustable side plates by the structure of the sliding grooves on the bottom plate, without occupying too much space, and the manufacturing process is simple.

[0083] In some possible implementations, referring to Figure 5 and Figure 8 As shown in the figure, the second support part 200 further comprises a connecting piece 270 corresponding to each first sliding groove 240;

[0084] The connecting piece 270 is fixed on the surface of the bottom plate 210 close to the ground, the connecting piece 270 is provided with a second sliding groove 271 corresponding to the first sliding groove 240, and the sliding rod 250 penetrates through the corresponding first sliding groove 240 and the second sliding groove 271.

[0085] The vacuum pump moving device of the embodiment is provided with a corresponding connecting piece for each sliding groove, and the same sliding groove is also arranged on the connecting piece, the connecting piece not only makes the bottom plate more firm, but also balances the stress when the sliding rod is fixed, is not easy to deform, and further improves the safety; the connecting piece is preferably a channel steel.

[0086] In some possible implementation manners, referring to Figure 2 , the second support part 200 further comprises a third side plate (not shown in the figure) and / or a fourth side plate (not shown in the figure) with adjustable length;

[0087] The first side plate 220 and / or the second side plate 230 are provided with the insertion hole 260 of the third side plate close to the end part of the first support part 100;

[0088] The first side plate 220 and / or the second side plate 230 are provided with the insertion hole 260 of the fourth side plate away from the end part of the first support part 100.

[0089] In the specific implementation process, only one of the third side plate and the fourth side plate can be provided, for example, one is provided on the side of the bottom plate opposite to the connecting part 300, and of course, the third side plate and the fourth side plate can also be respectively provided on the end part adjacent to the connecting part and the end part adjacent to the first support part on the bottom plate, so as to limit the movement of the vacuum pump in the reference direction. In the specific implementation process, the third side plate and the fourth side plate can be first detached before the pump body is moved to the appropriate position, and then assembled to the first side plate and the second side plate when the pump body is moved to the appropriate position on the bottom plate.

[0090] The vacuum pump moving device of the embodiment limits the movement of the vacuum pump in the moving direction by means of the third side plate and the fourth side plate, avoids the front and back movement in the relative movement direction when the moving mechanism drives the movement of the vacuum pump, and ensures the safety of the movement of the pump body with the moving mechanism.

[0091] In some possible implementation manners, the moving mechanism is a forklift, and the forklift fork 600 is fixed to the second support part 200 by welding or bolts.

[0092] In some possible implementation manners, in order to facilitate the understanding of the working principle of the vacuum pump moving device, the forklift is taken as an example of the moving mechanism, and the specific use process of the device will be described in detail as follows:

[0093] In the specific implementation process, the first support part 100, the second support part 200 and the connecting part 300 can be assembled in the manner shown in Figure 2 ;

[0094] Then, the vacuum pump 400 is pushed to the plane of the second support part 200 through the first support part 100, and the vacuum pump is fixed through the opening of the connecting part 300, as shown in Figure 1 ;

[0095] When the connecting part 300 is folded to 90 degrees, the connecting part 300 not only plays a limiting role, but also can prevent the vacuum pump 400 from being pushed out of the second support part, as shown in Figure 4 ;

[0096] Then, the forklift body is transferred to the position of the pump mounting rack (i.e. the vacuum pump fixing base) for vacuum pump assembly. The forklift is operated to drive the second support part to be raised to the same height as the vacuum pump fixing base. At this time, the positioning pin 332 can be taken out of the positioning hole 3311 and hung in the pin insertion hole 321, so that the connecting plate 300 is in an unfolded state. The mounting pin column of the vacuum pump fixing base 500 is inserted through the mounting hole 322 of the connecting plate 300, and is fixed by a nut. Thus, the second support part and the vacuum pump fixing base are connected together, as shown in Figure 3 ;

[0097] Finally, the vacuum pump 400 is pushed to the vacuum pump fixing base 500, and the fixing of the two is completed. At this time, the mounting pin column of the vacuum pump fixing base 500 can be taken out of the mounting hole 322, and the second support part can leave the installation area with the forklift.

[0098] The vacuum pump transfer device of the embodiment has at least the following beneficial technical effects: first, the folding and unfolding of the hinge not only blocks the vacuum pump, but also connects and fixes the pump panel; second, the device does not occupy too much space, can work in a small space, has low environmental requirements, and has high versatility; third, the actual test is especially suitable for semiconductor users. Limited by the small operation space, the use of the hinge structure can effectively improve the stability of the installation platform and the safety of the maintenance of the vacuum pump on the user site.

[0099] The technical features of the above embodiments can be combined in any way. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, but as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the description.

[0100] The above embodiments only express several implementation manners of the utility model, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the utility model patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the utility model, a number of modifications and improvements can be made, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A vacuum pump transfer device, characterized by, The device comprises: a first support part provided with a slope surface for transferring a vacuum pump, the lowest part of the slope surface being flush with the ground; a second support part provided with a plane surface for bearing the vacuum pump, the plane surface being flush with and abutting against the highest part of the slope surface, the second support part being fixed on a moving mechanism so that the moving mechanism drives the plane surface to abut against a vacuum pump fixed base; a connecting part, one end of which is fixedly connected with the second support part, the other end of which is detachably connected with the vacuum pump fixed base when the plane surface abuts against the vacuum pump fixed base.

2. The vacuum pump transfer device according to claim 1, characterized in that The connecting part comprises a first end surface, a second end surface and a state holding member; the first end surface is hinged with the second end surface, and the first end surface is fixed on the second support part; wherein the first end surface is parallel to the second end surface when the state holding member is in a first state, and the first end surface is at a preset angle with the second end surface when the state holding member is in a second state, the second end surface is fixed on the vacuum pump fixed base when the state holding member is in the first state, and the second end surface is separated from the vacuum pump fixed base when the state holding member is in the second state.

3. The vacuum pump transfer device according to claim 2, characterized in that The connecting part further comprises a first hinge and a second hinge; the shaft pins of the first hinge and the second hinge are arranged along the edge of the upper surface of the plane, one set of leaves on the same side of the first hinge and the second hinge is fixed on the first end surface, and the other set of leaves on the same side of the first hinge and the second hinge is fixed on the second end surface, and the holding member is arranged in the interval formed by the first hinge and the second hinge.

4. The vacuum pump transfer device according to claim 2, characterized in that The state holding member comprises a positioning member body and a positioning pin; the positioning member body is fixed on the first end surface, a positioning hole is formed on the positioning member body, the axis of the positioning hole is parallel to the plane, a pin insertion hole is formed on the corresponding position of the second end surface, the positioning pin penetrates through the pin insertion hole and cooperates with the positioning hole to adjust the included angle between the first end surface and the second end surface, and a mounting hole for inserting a mounting pin column on the vacuum pump fixed base is further formed on the second end surface.

5. The vacuum pump transfer device of claim 1, wherein The first support part extends along the slope surface and the section perpendicular to the ground direction is a right triangle, the slope surface of the first support part is located on the hypotenuse of the right triangle, the short side of the right triangle is perpendicular to the ground, and the first support part is detachably connected with the second support part.

6. The vacuum pump transfer device of claim 1, wherein, The second support part comprises a bottom plate, a first side plate and a second side plate; the surface of the bottom plate away from the ground serves as the plane surface, the first side plate and the second side plate are both perpendicular to the bottom plate and extend away from the ground, the length direction of the first side plate and the length direction of the second side plate are both parallel to a reference direction, and the interval between the first side plate and the second side plate is adjustable; wherein the reference direction is the moving direction of the vacuum pump on the bottom plate.

7. The vacuum pump transfer device according to claim 6, characterized in that At least one first sliding groove perpendicular to the reference direction is formed on the bottom plate, and the first side plate and / or the second side plate is adjusted in interval by cooperating with the at least one first sliding groove through a sliding rod.

8. The vacuum pump transfer device according to claim 7, characterized in that The second support part further comprises a connecting piece corresponding to each first sliding slot; The connecting piece is fixed on the surface of the bottom plate close to the ground, and a second sliding slot corresponding to the first sliding slot is formed on the connecting piece, and the sliding rod penetrates through the corresponding first sliding slot and second sliding slot.

9. The vacuum pump transfer device of claim 6, wherein, The second support part further comprises a third side plate and / or a fourth side plate with adjustable length; The first side plate and / or the second side plate is provided with the insertion hole of the third side plate close to the end part of the first support part; The first side plate and / or the second side plate is provided with the insertion hole of the fourth side plate away from the end part of the first support part.

10. The vacuum pump transfer device of claim 1, wherein, The moving mechanism is a forklift, and the forklift forks are fixed with the second support part by welding or bolts.

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