Hand-push type movable pump set

Abstract

The utility model discloses a hand-push type movable pump set, a molecular pump is used as a main suction pump, an air suction cover is connected with an air inlet of the molecular pump in a sealing manner, so that a vacuum chamber communicated with the air inlet of the molecular pump is formed in the air suction cover, a plurality of connecting ports communicated with the vacuum chamber are formed in the air suction cover, one connecting port is connected with a closed space through an angle valve, and the other connecting port is connected with an air inlet of the molecular pump. A gas outlet of the molecular pump is connected with a mechanical pump through a corrugated pipe, the mechanical pump is used as a booster pump, gas extraction is performed on the closed space before the molecular pump is started, and the vacuum degree in the vacuum chamber is collected through a vacuum gauge tube connected with one connecting port of the gas extraction cover; the molecular pump is started when the vacuum degree reaches the preset vacuum degree threshold value, the advantages of being fast in starting, high in vacuum degree and the like are achieved, the molecular pump and the mechanical pump are both fixedly installed on the rack, the size is small, the ground space is saved, adaptability is high, flexibility is ultrahigh, and customized configuration can be optimized, constructed and configured according to needs.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum pump technical field relates to a molecular pump, specifically is a hand -held formula mobile pump group. BACKGROUND

[0002] In the scientific research work in colleges and universities, scientific research institutions, laboratories, in the field of mass spectrometry, surface analysis, sputtering and evaporation plating, numerous analysis instrument, detection equipment, production process line etc. when realizing its function, need to have certain clean vacuum environment. Among them, mechanical vacuum pump or molecular pump can be used to create a vacuum environment.

[0003] Mechanical vacuum pump is a kind of machinery for manufacturing vacuum, it can discharge or absorb air in a closed or semi-closed space, achieve the relative vacuum of local space, start fast, low cost, economic and durable, but only meet the working requirements of low vacuum degree. And molecular pump is a kind of vacuum pump that uses high-speed rotating rotor to transmit momentum to gas molecules, so that it obtains directional velocity, and is compressed and driven to exhaust port for the front stage to be extracted, which realizes extremely low gas pressure and can be used to generate high vacuum environment.

[0004] Because the rotating speed of molecular pump rotor reaches 20000r / min, the molecular pump has a long starting time, and the gas in the molecular pump is in a molecular flow state, so a front stage pump is needed, and a mechanical pump is generally used as the front stage pump. Molecular pump unit is a series combination of molecular pump and front stage pump, which can integrate the advantages of the two pumps, and the pump works in a wide pressure range. However, the same type of unit products on the market only use the front stage mechanical pump and the molecular pump in series, and the structure is simple and the safety reliability is poor. CONTENT OF THE UTILITY MODEL

[0005] To solve the technical problems in the background art, the utility model provides a hand -held formula mobile pump group, which has an open structure rolling cart, easy to move and maintain.

[0006] The purpose of the utility model can be achieved by the following technical solutions:

[0007] A hand -held formula mobile pump group, comprising: rack, molecular pump, mechanical pump, gas extraction cover, vacuum gauge tube, angle valve, solenoid valve, molecular pump and mechanical pump are fixedly installed on the rack, the gas extraction cover is sealingly connected to the gas inlet of the molecular pump, to form a vacuum chamber in the gas extraction cover, which is communicated with the gas inlet of the molecular pump, a plurality of connecting ports are provided on the gas extraction cover and communicated with the vacuum chamber, the vacuum gauge tube and the angle valve are sealingly connected with two connecting ports respectively, the gas outlet of the molecular pump is connected with the mechanical pump through the corrugated pipe, and the solenoid valve is connected between the corrugated pipe and the mechanical pump.

[0008] Further, the rack comprises a first supporting plate of an upper layer and a second supporting plate of a lower layer, the second supporting plate is arranged directly below the first supporting plate, the molecular pump is fixedly installed on the first supporting plate, and the mechanical pump is fixedly installed on the second supporting plate, and a rubber gasket is arranged at the connection position of the mechanical pump and the second supporting plate.

[0009] Further, a plurality of heat dissipation holes are uniformly arranged at the connection position of the first supporting plate and the molecular pump, a first notch is arranged at one side of the heat dissipation hole, and the corrugated pipe passes through the first notch to connect the molecular pump and the mechanical pump.

[0010] Further, the gas extraction cover comprises a first flange, a first pipe body and an upper sealing plate, the first flange is connected to one end of the first pipe body, and the upper sealing plate is connected to the other end of the first pipe body to seal a vacuum chamber between the first flange and the upper sealing plate, and the first pipe body is sealingly connected to the gas inlet of the molecular pump through the first flange.

[0011] Further, a second pipe body is connected to the side wall of the first pipe body, one end of the second pipe body is welded to the first pipe body to form a connection port of the vacuum chamber, and the other end of the second pipe body is sealingly connected to the vacuum gauge pipe through a second flange.

[0012] Further, a third pipe body is connected to the side wall of the first pipe body, one end of the third pipe body is welded to the first pipe body to form a connection port of the vacuum chamber, and the other end of the third pipe body is sealingly connected to the angle valve through a third flange.

[0013] Further, a fourth pipe body is connected to the upper sealing plate, one end of the fourth pipe body is welded to the upper sealing plate to form a connection port of the vacuum chamber, and the other end of the fourth pipe body is sealingly connected to the sealing cover through a fourth flange.

[0014] Further, the controller is installed on the rack, and the molecular pump, the mechanical pump and the vacuum gauge pipe are in communication connection with the controller.

[0015] Further, when the pump group is turned on, the controller controls the mechanical pump to start, and the vacuum degree in the vacuum chamber is collected in real time through the vacuum gauge pipe, when the vacuum degree reaches a preset vacuum degree threshold, the controller controls the molecular pump to start, when the pump group is turned off, the controller controls the molecular pump to stop, and when the rotating speed of the molecular pump is 0, the controller controls the mechanical pump to stop.

[0016] The utility model discloses a beneficial effect: the utility model provides a hand -push formula mobile pump group, uses molecular pump as main pump, and the gas extraction cover is sealedly connected at the gas inlet of molecular pump, to form the vacuum chamber that communicates with the gas inlet of molecular pump in the gas extraction cover, and a plurality of connecting ports that communicate with the vacuum chamber are equipped on the gas extraction cover, and one connecting port is connected closed space through the angle valve, to discharge the gas in the closed space completely, and the gas outlet of molecular pump is connected mechanical pump through the bellows, and mechanical pump is as front -mounted pump, and carries out the air extraction to the closed space before the molecular pump starts, and gathers the vacuum degree in the vacuum chamber through the vacuum gauge pipe connected with one connecting port of the gas extraction cover, and starts the molecular pump when the vacuum degree reaches the preset vacuum degree threshold value, has quick start, vacuum degree height advantage, and molecular pump and mechanical pump are fixedly installed on the frame, and the volume is smaller, and the ground space is saved, and the adaptability is strong, has super -high flexibility, can optimize the construction custom configuration according to the demand, and the solenoid valve is connected between the bellows and mechanical pump, and the system is protected comprehensively, prevents the backflow when power failure fault, safe and reliable. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the structural schematic diagram of the utility model.

[0018] Figure 2 It is the structural schematic diagram of the utility model frame.

[0019] Figure 3 It is the structural schematic diagram of the utility model first supporting plate.

[0020] Figure 4 It is the structural schematic diagram of the utility model gas extraction cover. DETAILED DESCRIPTION

[0021] The technical scheme in the embodiment of the utility model will be described clearly and completely in the embodiment of the utility model below, and obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the scope of the utility model protection.

[0022] As Figure 1 The utility model discloses a hand -push formula mobile pump group, including: frame 1, molecular pump 2, mechanical pump 3, gas extraction cover 4, vacuum gauge pipe 5, angle valve 6, solenoid valve 7, controller 9.

[0023] The molecular pump 2 is fixedly installed on the rack 1, and the molecular pump 2 serves as a main pump. The gas inlet of the molecular pump 2 is connected to a sealed space requiring vacuumization, so that the gas in the sealed space is discharged to form a high vacuum environment meeting preset requirements. Specifically, the gas exhaust hood 4 is sealingly connected to the gas inlet of the molecular pump 2 to form a vacuum chamber 40 in the gas exhaust hood 4 in communication with the gas inlet of the molecular pump 2. The gas exhaust hood 4 is provided with a plurality of connection ports in communication with the vacuum chamber 40. One end of the angular valve 6 is sealingly connected to one of the connection ports, and the other end of the angular valve 6 is used to connect to the sealed space. The angular valve 6 is arranged to comprehensively protect the pump set and prevent backflow in the event of a power failure. The molecular pump 2 is a HiPace 300 series molecular pump.

[0024] The mechanical pump 3 is fixedly installed on the rack 1. The gas outlet of the molecular pump 2 is connected to the mechanical pump 3 through the corrugated pipe 8. The mechanical pump 3 serves as a pre-pump to perform air exhaust on the sealed space before the molecular pump 2 is started, so that the sealed space reaches a preset vacuum threshold. The electromagnetic valve 7 is connected between the corrugated pipe 8 and the mechanical pump 3 to control the connection and disconnection between the molecular pump 2 and the mechanical pump 3. When the working current of the mechanical pump 3 is abnormal, the electromagnetic valve 7 is disconnected to play an intelligent protection role. The mechanical pump 3 is a HiScroll 18 series scroll dry pump.

[0025] The vacuum gauge pipe 5 is sealingly connected to one of the connection ports of the gas exhaust hood 4 to collect the vacuum degree in the vacuum chamber 40 in real time and upload the vacuum degree data to the controller 9. The vacuum gauge pipe 3 is a PKR361 series vacuum gauge pipe. The controller 9 is installed on the rack 1. The molecular pump 2, the mechanical pump 3, and the vacuum gauge pipe 5 are in communication connection with the controller 9. When the pump set is turned on, the controller 9 controls the mechanical pump 3 to start and collects the vacuum degree in the vacuum chamber 40 in real time through the vacuum gauge pipe 5. When the vacuum degree reaches a preset vacuum threshold, the controller 9 controls the molecular pump 2 to start. When the pump set is turned off, the controller 9 controls the molecular pump 2 to stop. When the rotating speed of the molecular pump 2 is 0, the controller 9 controls the mechanical pump 3 to stop. The controller 9 is an Omnicontrol 200 controller.

[0026] As shown in Figure 2 The rack 1 includes a first supporting plate 11 at an upper layer and a second supporting plate 12 at a lower layer. The second supporting plate 12 is arranged directly below the first supporting plate 11. The molecular pump 2 is fixedly installed on the first supporting plate 11, and the mechanical pump 3 is fixedly installed on the second supporting plate 12. A rubber gasket 13 is arranged at the connection between the mechanical pump 3 and the second supporting plate 12 to reduce rigid collision between the mechanical pump 3 and the second supporting plate 12 when the mechanical pump 3 works. Figure 3As shown, multiple heat dissipation holes 14 are evenly distributed at the connection between the first support plate 11 and the molecular pump 2 to facilitate heat dissipation of the molecular pump 2. A first slot 15 is provided on one side of the heat dissipation hole 14, through which the corrugated pipe 8 connects the molecular pump 2 and the mechanical pump 3. A second slot 16 is provided on the other side of the heat dissipation hole 14, and the controller 9 is installed in the second slot 16. Four casters 17 are provided at the bottom of the frame 1, and a push handle 18 is provided on one side of the frame 1, forming a rolling trolley with an open structure, which is easy to move and maintain.

[0027] like Figure 4 As shown, the vacuum hood 4 includes: a first flange 41, a first tube 42, and an upper sealing plate 43. The first flange 41 is connected to one end of the first tube 42, and the upper sealing plate 43 is connected to the other end of the first tube 42, so as to seal a section of vacuum chamber 41 located between the first flange 41 and the upper sealing plate 43 on the first tube 42. The first tube 42 is sealed to the air inlet of the molecular pump 2 through the first flange 41.

[0028] A second pipe 44 is connected to the side wall of the first pipe 42. One end of the second pipe 44 is welded to the first pipe 42 to form a connection port to the vacuum chamber 41. The other end of the second pipe 44 is sealed to the vacuum gauge tube 5 via a second flange 45. A third pipe 46 is connected to the side wall of the first pipe 42. One end of the third pipe 46 is welded to the first pipe 42 to form a connection port to the vacuum chamber 41. The other end of the third pipe 46 is sealed to the angle valve 6 via a third flange 47. A fourth pipe 48 is connected to the upper sealing plate 43. One end of the fourth pipe 48 is welded to the upper sealing plate 43 to form a spare connection port to the vacuum chamber 41. The other end of the fourth pipe 48 is connected to a sealing cover via a fourth flange 49. When the connection port of the second pipe 44 or the third pipe 46 fails, the sealing cover can be opened, and the fourth flange 49 can be sealed to the vacuum gauge tube 5 or the angle valve 6.

[0029] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.

Claims

1. A hand-propelled mobile pump set, characterized in that The utility model relates to a kind of vacuum pumping system, including: rack (1), molecular pump (2), mechanical pump (3), exhaust hood (4), vacuum gauge tube (5), angle valve (6), solenoid valve (7), molecular pump (2) and mechanical pump (3) are fixedly installed on rack (1), exhaust hood (4) is sealingly connected in the gas inlet of molecular pump (2), to form vacuum chamber with the gas inlet of molecular pump (2) in exhaust hood (4) inside, exhaust hood (4) is equipped with multiple connection ports with vacuum chamber (40) communication, vacuum gauge tube (5) and angle valve (6) are sealingly connected with two connection ports respectively, the gas outlet of molecular pump (2) is connected with mechanical pump (3) by bellows (8), solenoid valve (7) is connected between bellows (8) and mechanical pump (3). Rack (1) includes the first supporting plate (11) of upper layer and the second supporting plate (12) of lower layer, the second supporting plate (12) is arranged directly below the first supporting plate (11), molecular pump (2) is fixedly installed on the first supporting plate (11), mechanical pump (3) is fixedly installed on the second supporting plate (12), and mechanical pump (3) is equipped with rubber washer (13) at the junction with the second supporting plate (12).

2. The pump set of claim 1, wherein, First supporting plate (11) is uniformly distributed with multiple heat dissipation holes (14) at the junction with molecular pump (2), and first notch (15) is arranged on one side of heat dissipation hole (14), and bellows (8) passes through first notch (15) and connects molecular pump (2) and mechanical pump (3).

3. The pump set of claim 2, wherein, Exhaust hood (4) includes: first flange (41), first tube body (42), upper sealing plate (43), first flange (41) is connected at one end of first tube body (42), and upper sealing plate (43) is connected at the other end of first tube body (42), to block out a section of vacuum chamber (40) between first flange (41) and upper sealing plate (43) on first tube body (42), and first tube body (42) is sealingly connected with the gas inlet of molecular pump (2) by first flange (41).

4. The pump set of claim 1, wherein, Second tube body (44) is connected on the side wall of first tube body (42), one end of second tube body (44) is welded with first tube body (42), to form a connection port communicating with vacuum chamber (40), and the other end of second tube body (44) is sealingly connected with vacuum gauge tube (5) by second flange (45).

5. The pump set of claim 4, wherein, Third tube body (46) is connected on the side wall of first tube body (42), one end of third tube body (46) is welded with first tube body (42), to form a connection port communicating with vacuum chamber (40), and the other end of third tube body (46) is sealingly connected with angle valve (6) by third flange (47).

6. The pump set of claim 4, wherein, Fourth tube body (48) is connected on upper sealing plate (43), one end of fourth tube body (48) is welded with upper sealing plate (43), to form a connection port communicating with vacuum chamber (40), and the other end of fourth tube body (48) is connected sealing cover by fourth flange (49).

7. The pump set of claim 4, wherein, Still include controller (9), controller (9) is installed on rack (1), molecular pump (2), mechanical pump (3), vacuum gauge tube (5) are connected with controller (9) in communication.

8. The pump set of claim 1, wherein, ​ 9. The pump set of claim 8, wherein, When the pump group is opened, the controller (9) controls the mechanical pump (3) to start, and the vacuum degree in the vacuum chamber (40) is collected in real time through the vacuum gauge (5), and when the vacuum degree reaches the preset vacuum degree threshold, the controller (9) controls the molecular pump (2) to start; when the pump group is closed, the controller (9) controls the molecular pump (2) to stop, and when the rotating speed of the molecular pump (2) is 0, the controller (9) controls the mechanical pump (3) to stop.

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