Temperature measuring device

Abstract

The utility model relates to a temperature measuring device, and belongs to the field of semiconductor manufacturing. According to the technical scheme, the temperature measuring device comprises a pyrometer probe and a support assembly, the support assembly comprises a basic part, the basic part is connected with a mounting part through a lifting structure, the mounting part is provided with an adjusting part, at least part of the outer surface of the adjusting part is an outer convex spherical surface, and the mounting part is provided with a first inner concave spherical surface; the outer convex spherical surface is attached to the first inner concave spherical surface, a mounting hole is formed in the adjusting part, and the pyrometer probe is mounted in the mounting hole; and a locking structure is also arranged between the mounting piece and the adjusting piece. According to the scheme, on the basis of manual adjustment, the pyrometer probe is installed through the spherical joint, universal adjustment can be conducted on the detection direction in the plane, meanwhile, the spherical surface is matched with the locking structure in a contact mode, damping of spherical surface rotation can be controlled, repeated loosening and locking are avoided, and lifting adjustment between the basic part and the installation part is matched; the adjusting process of the pyrometer probe is greatly simplified, and the pyrometer is more convenient and practical.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a temperature measuring device. BACKGROUND

[0002] Silicon carbide is one of indispensable raw materials in the semiconductor industry, and silicon carbide growth furnace is the main manufacturing equipment of silicon carbide. In the production process of crystal growth process, the real-time temperature of the material needs to be controlled, which is an important process parameter. Therefore, the convenience, flexibility and reliability of high-temperature measurement and its installation device have become a key component in the equipment manufacturing process.

[0003] In the existing many devices, basically all can be attributed to various combinations of X / Y / Z three-axis linear motion and rotation motion of corresponding shafts, some of which adopt manual adjustment, and some of which adopt motor-driven automatic adjustment.

[0004] Manual adjustment mode, that is, after unlocking the locking mechanism in a certain direction, the movement is adjusted to the vicinity of the target position and then locked, and then the movement in another direction is adjusted, so that the pyrometer temperature measuring point is closer to the measurement target and then locked, and then the adjustment and locking in other directions are carried out, so that the pyrometer temperature measuring point gradually approaches the measured temperature position, which is complicated to operate, time-consuming and laborious, and there are many unreliable factors such as low manufacturing precision and stability.

[0005] Electric control adjustment mode, that is, on the basis of the above structure, a driving motor is installed on each shaft that needs to move, and displacement movement and rotation movement are realized by motor operation. Each moving shaft is equipped with a driving motor, which causes the structure of the device to be complex, the electrical control to be complicated, the device to be prone to failure, and the manufacturing cost to be high. SUMMARY

[0006] The utility model discloses to the current crystal growth furnace temperature detection structure adjustment process complicated problem, provides a kind of more convenient adjustment operation's temperature measuring equipment.

[0007] In order to solve the above problems, the utility model adopts the technical scheme, a kind of temperature measuring device, including pyrometer probe and support assembly, the support assembly includes base piece, and installation piece is connected on base piece by lifting structure, and adjusting piece is equipped on installation piece, and the outer surface of adjusting piece is at least part of outer convex spherical surface, and first inner concave spherical surface is equipped on installation piece, and outer convex spherical surface and first inner concave spherical surface mutually adhere, and mounting hole is set in adjusting piece, and the pyrometer probe is installed in the mounting hole;Locking structure is further equipped between installation piece and adjusting piece.This scheme is based on manual adjustment, and pyrometer probe is installed using spherical joint, can be adjusted in plane in detection direction, and spherical surface contact cooperation locking structure, can control the damping of spherical surface rotation, avoid repeatedly relaxing and locking, cooperate the lifting adjustment between base piece and installation piece, greatly simplify the adjustment process of pyrometer probe, more convenient and practical.

[0008] Preferably, the installation piece is cylindrical, the side circumference of the cylinder is an outer convex spherical surface, and the mounting hole is arranged along the axis of the cylinder. The outer circumference of the installation piece cooperates with the installation piece, the pyrometer probe penetrates the adjusting piece up and down, the shape of the pyrometer probe does not affect the integrity of the outer convex spherical surface, and the movement range of the spherical surface connection is ensured.

[0009] Preferably, the installation piece includes a first flat plate, a base is provided on the first flat plate, and the first inner concave spherical surface is provided on the top surface of the base. A first window penetrating the first flat plate is provided at the center of the first inner concave spherical surface.

[0010] Preferably, the locking structure includes a locking cap. An inner concave cylindrical cavity is provided at the bottom of the locking cap. The top surface of the cavity is a second inner concave spherical surface. The diameter of the second inner concave spherical surface is matched with the diameter of the outer convex spherical surface. A second window penetrating the locking cap is provided at the center of the second inner concave spherical surface. An inner thread is provided on the inner circumferential wall of the cylindrical cavity. An outer thread is provided on the outer circumferential wall of the base. The locking cap is installed on the base through the threads. The adjusting piece is located between the base and the locking cap. The adjusting piece is clamped by the two inner concave spherical surfaces. The locking is firm, and the locking and unlocking are convenient. The friction damping adjustment is also convenient.

[0011] Preferably, the wiring end of the pyrometer probe penetrates the second window and is higher than the locking cap. The detection end of the pyrometer probe is located in the first window. The area of the first window and the second window is larger than the cross-sectional area of the mounting hole. The wiring end of the pyrometer probe can be used as a holding structure of the rotating adjusting piece, which is convenient for operation.

[0012] Preferably, the first window and the second window are circular and have a diameter larger than the diameter of the mounting hole. The adjusting piece and the pyrometer probe thereon have a large adjustable range.

[0013] Preferably, the mounting member further comprises a first vertical plate, the first vertical plate is connected with the first flat plate perpendicularly, the base member comprises a second vertical plate, the lifting structure comprises a sliding groove and a sliding tenon, one of the sliding groove and the sliding tenon is arranged on the first vertical plate, and the other is arranged on the second vertical plate, and the sliding tenon is capable of moving in the sliding groove.

[0014] Preferably, the base member further comprises a second flat plate, the second flat plate is connected with the second vertical plate perpendicularly, and the second flat plate is provided with a connecting structure.

[0015] Preferably, the sliding groove is a T-shaped groove, and the sliding tenon is T-shaped in cross section.

[0016] Preferably, the sliding groove is a dovetail groove, and the sliding tenon is a dovetail tenon.

[0017] Through the above technical scheme, it can be seen that the advantages of the utility model are as follows: the scheme adopts manual adjustment, the cost is lower, and the influence of a complex electrical system is eliminated; on this basis, the manual adjustment adopts a spherical joint to cooperate with a lifting structure, the universal adjustment of the pyrometer probe can be realized, the locking of the adjusting member is realized through the cooperation of the threaded cap and the spherical surface, the locking is firm, the unlocking is convenient, the friction damping is adjustable, the repeated loosening and locking is avoided, and the adjustment process is greatly simplified; the adjusting member adopts an outer peripheral spherical surface and a center mounting hole, the activity range is large, the continuity is strong, and the interference with other structures such as the mounting member and the locking cap is small. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the utility model, the following will briefly introduce the drawings needed to be used in the description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to the drawings without paying creative labor.

[0019] Figure 1 It is a structural schematic view of the embodiment of the utility model.

[0020] Explanation of main reference signs

[0021] 1. Pyrometer probe, 2. Base member, 3. Mounting member, 4. Adjusting member, 5. Locking cap, 6. Base, 7. Sliding tenon. EMBODIMENT

[0022] In order to make the purpose, characteristics and advantages of the utility model more obvious and easy to understand, the technical scheme of the utility model will be described clearly and completely in combination with the drawings in the specific embodiments. Obviously, the following described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the patent, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the scope of protection of the patent.

[0023] As shown in Figure 1 A temperature measuring device comprises a pyrometer probe 1 and a support assembly, the support assembly comprises a base piece 2, a mounting piece 3 and an adjusting piece 4, the pyrometer probe 1 is mounted on the adjusting piece 4, and specifically,

[0024] The base piece 2 is L-shaped and comprises a second flat plate and a second vertical plate, the second flat plate is provided with connecting structures such as connecting holes for connecting external equipment, the mounting piece 3 is L-shaped and comprises a first flat plate and a first vertical plate, the first vertical plate and the second vertical plate are arranged in parallel, and a lifting structure is arranged between the first vertical plate and the second vertical plate, in the embodiment, the lifting structure comprises a sliding groove and a sliding tenon 7, one of the sliding groove and the sliding tenon is arranged on the first vertical plate, and the other is arranged on the second vertical plate, the sliding tenon can move in the sliding groove, and the cross-sectional shape of the sliding tenon and the sliding groove can be T-shaped or dovetail-shaped, that is, the sliding groove is a T-shaped groove, and the cross section of the sliding tenon is T-shaped, or the sliding groove is a dovetail groove, and the sliding tenon is a dovetail tenon.

[0025] The sliding groove and the sliding tenon can be fixed in position by friction or be provided with locking structures such as locking bolts.

[0026] In Figure 1 The first flat plate is located at the upper part of the first vertical plate, the second flat plate is located at the lower part of the second vertical plate, the upper surface of the first flat plate is provided with a base 6, the upper surface of the base 6 is concave in the center to form a first concave spherical surface, a first window penetrating through the first flat plate is arranged at the center of the first concave spherical surface, the adjusting piece 4 is cylindrical, the lateral surface of the cylinder is an outer convex spherical surface, an installation hole is arranged at the adjusting piece axis, the pyrometer probe 1 is installed in the installation hole, the lower part of the outer convex spherical surface of the adjusting piece is attached to the first concave spherical surface, and the detection end of the pyrometer probe is located in the first window, and a locking structure is further arranged between the mounting piece 3 and the adjusting piece 4, in the embodiment, the locking structure comprises a locking cap 5, the bottom of the locking cap 5 is provided with an upwardly concave cylindrical cavity, the top surface of the cavity is a second concave spherical surface, the diameter of the second concave spherical surface is matched with the diameter of the outer convex spherical surface, a second window penetrating through the locking cap 5 is arranged at the center of the second concave spherical surface, the inner periphery wall of the cylindrical cavity is provided with an internal thread, the outer periphery wall of the base 6 is provided with an external thread, the locking cap 5 is installed on the base 6 through the threads, the adjusting piece 4 is located between the base 6 and the locking cap 5, and the wiring end of the pyrometer probe 1 penetrates through the second window and is higher than the locking cap 5.

[0027] From the above structural description, it can be known that the adjusting piece 4 is clamped between the first inner concave spherical surface and the second inner concave spherical surface, and the outer convex spherical surface thereof is in frictional contact with the first and second inner concave spherical surfaces, when the locking cap is tightened, the friction between the inner concave spherical surface and the outer convex spherical surface is increased to fix the position of the adjusting piece 4, and further fix the orientation angle of the pyrometer probe; when the angle of the pyrometer probe needs to be adjusted, the locking cap is loosened, so that the adjusting piece 4 can rotate under the condition of having a certain frictional damping, and further drive the angle of the pyrometer probe to change; further, the height of the mounting piece 3, i.e. the distance between the pyrometer probe and the measured surface, can be adjusted through the sliding groove cooperation between the base piece 2 and the mounting piece 3.

[0028] Based on the above action principle, it can be known that the detection end and the probe end of the pyrometer probe are located in the first window and the second window respectively, in order to expand the activity range of the pyrometer probe, the first window and the second window can be both set as a circular shape, and the diameter is greater than the diameter of the mounting hole, and further reduce the blockage to the two ends of the pyrometer probe.

[0029] From the above embodiments, it can be seen that the beneficial effects of the present application are that the present application adopts manual adjustment, has lower cost and eliminates the influence of complex electrical system; on this basis, the manual adjustment adopts spherical joint cooperation with the lifting structure, can realize the universal adjustment of the pyrometer probe, realizes the locking of the adjusting piece through the cooperation of the threaded cap and the spherical surface, is firm in locking, convenient in unlocking, and the frictional damping is adjustable, avoids repeated loosening and locking, greatly simplifies the adjustment process; the adjusting piece adopts the design of the outer peripheral spherical surface and the center mounting hole, has large activity range, strong continuity, and small interference with other structures such as the mounting piece and the locking cap.

[0030] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A pyrometer assembly comprising a pyrometer probe and a support assembly, characterized in that, The support assembly comprises a base, a mounting member connected to the base through a lifting structure, an adjusting member provided on the mounting member, an outer surface of the adjusting member being at least partially a convex spherical surface, a first concave spherical surface provided on the mounting member, the convex spherical surface and the first concave spherical surface being mutually fitted, an installation hole being provided in the adjusting member, and the pyrometer probe being installed in the installation hole; and a locking structure being further provided between the mounting member and the adjusting member.

2. The temperature measuring device according to claim 1, characterized in that The adjusting member is cylindrical, and a side circumferential surface of the cylinder is a convex spherical surface, and the installation hole is arranged along an axis of the cylinder.

3. The temperature measuring device according to claim 2, characterized in that The mounting member comprises a first flat plate, a base being provided on the first flat plate, and the first concave spherical surface being provided on a top surface of the base, and a first window being provided in a center of the first concave spherical surface and penetrating the first flat plate.

4. The temperature measuring device according to claim 3, characterized in that The locking structure comprises a locking cap, an inner concave cylindrical cavity being provided at a bottom of the locking cap, a top surface of the cylindrical cavity being a second concave spherical surface, a diameter of the second concave spherical surface being matched with a diameter of the convex spherical surface, a second window being provided in a center of the second concave spherical surface and penetrating the locking cap, an inner circumferential wall of the cylindrical cavity being provided with an internal thread, an outer circumferential wall of the base being provided with an external thread, the locking cap being threadedly mounted on the base, and the adjusting member being located between the base and the locking cap.

5. The temperature measuring device according to claim 4, characterized in that A wiring end of the pyrometer probe penetrates the second window and is higher than the locking cap, a detection end of the pyrometer probe is located in the first window, and an area of the first window and the second window is greater than a cross-sectional area of the installation hole.

6. The temperature measuring device according to claim 5, characterized in that The first window and the second window are circular and have a diameter greater than a diameter of the installation hole.

7. The temperature measuring device according to any one of claims 1 to 6, characterized in that The mounting member further comprises a first vertical plate, the first vertical plate being perpendicularly connected to the first flat plate, the base comprises a second vertical plate, the lifting structure comprises a sliding groove and a sliding tenon, one of the sliding groove and the sliding tenon being provided on the first vertical plate, and the other being provided on the second vertical plate, and the sliding tenon being movable in the sliding groove.

8. The temperature measuring device according to claim 7, characterized in that The base further comprises a second flat plate, the second flat plate being perpendicularly connected to the second vertical plate, and a connecting structure being provided on the second flat plate.

9. The temperature measuring device according to claim 7, wherein The sliding groove is a T-shaped groove, and a cross section of the sliding tenon is T-shaped.

10. The temperature measuring device according to claim 7, wherein The sliding groove is a dovetail groove, and the sliding tenon is a dovetail tenon.

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