Sample section preparation device for scanning electron microscope

Abstract

The utility model discloses a sample section preparation device for a scanning electron microscope, which comprises a substrate, a mounting groove is arranged on the substrate, a triangular prism device is arranged on the mounting groove and comprises a mounting seat body and a triangular prism body arranged on the mounting seat body, one side edge of the triangular prism body is arranged upwards, and the other side edge of the triangular prism body is arranged downwards. And a fastener for locking the mounting seat body is also arranged on the base. According to the sample section preparation device, through the arrangement of the substrate and the triangular prism device, a flat and clean section can be rapidly and effectively obtained, the problems of section damage, structural damage and the like caused by uneven stress are avoided, the problems that in the prior art, section samples are difficult to prepare, and the success rate is poor are solved, and the production efficiency is improved. And the observation efficiency of the scanning electron microscope is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to scanning electron microscope auxiliary tool technical field, concretely relates to a sample cross section preparation device for scanning electron microscope. BACKGROUND

[0002] Scanning electron microscope (SEM) is a kind of large-scale precision instrument for high-resolution micro-area topography analysis.With the continuous development of life science and material field, scanning electron microscope has become one of important means of material topography characterization, and is widely used in micro-area topography observation of metal, ceramic, mineral and food materials etc..Among them, cross section analysis of SEM can provide information such as film thickness, growth state, grain size and its combination or transition relationship with matrix of cross section, and plays a crucial role in current popular fields such as semiconductor, lithium ion battery, micro-nano processing and material synthesis etc..However, traditional cross section preparation methods such as liquid nitrogen brittle fracture, scissors or diamond knife fracture, pincers breaking etc. will inevitably cause cross section damage, pollution, and destroy crystalline morphology or layer structure of cross section, so cross section sample preparation is difficult, success rate is low, and electron microscope observation is difficult. SUMMARY

[0003] The utility model discloses a kind of sample cross section preparation devices for scanning electron microscope, can quickly and effectively realize the preparation of sample cross section, obtain the fracture section of clean and smooth and with complete internal structure, to improve the success rate of cross section preparation, and optimize the observation effect of scanning electron microscope.

[0004] To achieve the above object, the technical scheme adopted by the utility model is as follows:

[0005] A sample cross section preparation device for scanning electron microscope, comprising a substrate, the substrate is provided with a mounting groove, the mounting groove is provided with a triangular prism device, the triangular prism device includes a mounting seat body, and a triangular prism body is arranged on the mounting seat body, one side edge of the triangular prism body is arranged upward, and the substrate is further provided with a fastener for locking the mounting seat body.

[0006] The sample cross section preparation device can quickly and effectively obtain smooth and clean fracture section by the arrangement of the substrate and the triangular prism device, avoid cross section damage and structure damage caused by uneven stress, overcome the problems of difficult cross section sample preparation and poor success rate in the prior art, and further improve the observation efficiency of scanning electron microscope.

[0007] Further, the height of the mounting seat body is matched with the height of the mounting groove, and the triangular prism body is 1-5mm higher than the upper surface of the substrate.

[0008] Preferably, the triangular prism device has multiple models, so that the triangular prism is 1mm, 2mm or 3mm higher than the upper surface of the base, which can meet the preparation of block sample sections of different sizes.

[0009] Further, the base is a disc, and the mounting slot is arranged radially through the center; or the base is a square disc, and the mounting slot is arranged through the center point parallel to the side length.

[0010] Further, the mounting slot is a rectangular slot, and the mounting seat body is a rectangular body.

[0011] In some embodiments, the mounting slot can also be a T-shaped slot, a dovetail slot or a trapezoidal slot, and the cross section of the mounting seat body is a T-shaped cross section, a dovetail-shaped cross section or a trapezoidal cross section matching the mounting slot.

[0012] Further, the fastener is a locking screw, at least one side of the base is provided with a screw hole, the screw hole penetrates to the mounting slot, and the locking screw is arranged in the screw hole for clamping the mounting seat body. By turning the locking screw, the mounting seat body can be locked or released, which is convenient to use.

[0013] Further, the base is a stainless steel base, and the triangular prism device is an integrally formed stainless steel device, which can ensure the strength and hardness of the entire device.

[0014] Further, the length of the mounting slot is 20-30mm, the width is 1-2mm, and the depth is 4-6mm.

[0015] Further, one side of the triangular prism is arranged flat on the upper surface of the mounting seat body, and the cross section of the triangular prism is an equilateral triangle or an isosceles triangle, which can form a symmetrical arrangement structure.

[0016] Compared with the prior art, the sample cross section preparation device has the advantages that: 1, the base and the three-prism device are arranged, so that the flat and clean cross section can be quickly and effectively obtained, the problems of cross section damage and structure damage caused by uneven stress are avoided, the problems of difficult sample cross section preparation and low success rate in the prior art are overcome, and the observation efficiency of the scanning electron microscope is further improved; moreover, the whole device has simple structure, is easy to manufacture, has low cost, and is convenient to use; 2, the three-prism body serves as the fulcrum of the block sample fracture, can provide a sharp and uniform contact surface, promotes the sample to form a flat cross section, ensures the integrity of the internal structure, and thus a sample cross section with high success rate, flatness, cleanliness and easy scanning electron microscope observation is obtained; 3, the installation groove is arranged to accommodate the mounting seat body below the three-prism device, the mounting seat body is limited, the base and the mounting seat body are fixed together through the screw in the base, the mounting seat body can be locked or released by rotating the locking screw, and the device is convenient to use. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic view of the sample cross section preparation device for the scanning electron microscope of the utility model;

[0018] Figure 2 It is a structural schematic view of the base of the sample cross section preparation device for the scanning electron microscope of the utility model;

[0019] Figure 3 It is a structural schematic view of the three-prism device of the sample cross section preparation device for the scanning electron microscope of the utility model;

[0020] Figure 4 It is a structural schematic view of the three-prism device of the utility model in multiple models;

[0021] Figure 5 It is a sectional view of the base of the utility model;

[0022] Figure 6 It is another connection structure schematic view of the sample cross section preparation device for the scanning electron microscope of the utility model;

[0023] In the drawing: 1, base; 2, installation groove; 3, three-prism device; 301, mounting seat body; 302, three-prism body; 4, screw hole; 5, locking screw. DETAILED DESCRIPTION

[0024] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0025] In the description of this utility model, it should be noted that the terms "middle", "upper", "lower", "left", "right", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] like Figures 1-5 As shown, a sample cross-section preparation device for scanning electron microscope includes a substrate 1, a mounting groove 2 on the substrate 1, a triangular prism device 3 on the mounting groove 2, the triangular prism device 3 including a mounting base 301 and a triangular prism 302 disposed on the mounting base 301, one side edge of the triangular prism 302 being arranged upwards, and a fastener for locking the mounting base 301 on the substrate 1.

[0027] This sample cross-section preparation device, through the arrangement of the substrate and the triangular prism device, can quickly and effectively obtain a flat and clean cross-section, avoiding problems such as cross-sectional damage and structural destruction caused by uneven stress. It overcomes the difficulties and low success rate of cross-sectional sample preparation in existing technologies, further improving the observation efficiency of scanning electron microscopy. Moreover, the entire device has a simple structure, is easy to manufacture, has a low cost, and is relatively convenient to use.

[0028] The base 1 can be used to install and support the triangular prism device 3, and can also support the block sample during sample cross-section preparation, allowing the block sample to be cut using the structure formed by the base and the triangular prism device to obtain a sample with the required cross-section.

[0029] The mounting groove 2 is designed to accommodate and limit the mounting base 301 below the triangular prism device 3. The triangular prism 302 above the mounting base 301 protrudes from the upper surface of the base 1, and one edge of the triangular prism 302 faces vertically upward, forming a fulcrum so that the block sample breaks under force at the fulcrum, resulting in a sample cross-section with a flat surface. The fasteners further lock the triangular prism device, fixing it to the base and preventing relative movement or sliding that could affect the preparation of the sample cross-section.

[0030] The use of the sample cross-section preparation device for scanning electron microscope is as follows: according to the size and thickness of the sample, select the appropriate triangular prism device 3, and place the triangular prism device 3 on the mounting groove 2 of the base and fix it. Place the block sample above the base 1, and use the triangular prism device 3 to achieve the overhanging of the block sample, and provide a firm and sharp fulcrum for the fracture of the sample. At this time, use tweezers to hold the block sample at one end of the base 1, and use tweezers to knock the other end of the block sample quickly and powerfully, so that the sample is broken at the fulcrum provided by the triangular prism 302, thereby obtaining a smooth, clean and clear structure cross-section, and achieving the rapid preparation of the sample cross-section. The triangular prism 302 as the fulcrum for the fracture of the block sample can provide a sharp and uniform contact surface, promote the sample to form a smooth cross-section, and ensure the integrity of the internal structure, thereby obtaining a sample cross-section with high success rate, smoothness, cleanliness and easy scanning electron microscope observation.

[0031] Further, the height of the mounting seat body 301 is matched with the height of the mounting groove 2, and the triangular prism 302 is 1-5 mm higher than the upper surface of the base 1.

[0032] Preferably, the triangular prism device 3 has multiple models, so that the triangular prism 302 is 1 mm, 2 mm or 3 mm higher than the upper surface of the base.

[0033] In this embodiment, the shape and size of the mounting seat body are basically the same as those of the mounting groove (length, width and depth are the same), so that it can be perfectly embedded in the mounting groove; the length of the mounting groove is 25 mm, the width is 1 mm, and the depth is 5 mm. The length of the mounting seat body of the triangular prism device is also 25 mm, the width is 1 mm, and the depth is 5 mm. The triangular prism is provided with three models, and the vertical distance between the side edges and the side surface is 1 mm, 2 mm and 3 mm respectively, that is, after the triangular prism device is installed on the base, the triangular prism can be 1 mm, 2 mm and 3 mm higher than the surface of the base. By such arrangement, the preparation of the cross-section of the block sample of different sizes is satisfied.

[0034] Further, the base 1 is disc-shaped, and the mounting groove 2 is arranged radially through the center; or the base 1 is a square disc, and the mounting groove 2 is arranged parallel to the side length through the center point. Such arrangement can center the mounting groove, so that the triangular prism device is centrally arranged on the base, which is beneficial to the stable fracture of the sample.

[0035] Further, the mounting groove 2 is a rectangular groove, and the mounting seat body 301 is a rectangular body. In this case, the triangular prism device can be directly placed from above the base, and the operation is relatively simple.

[0036] In some other embodiments, the mounting groove 2 can also be a T-shaped groove, a dovetail groove or a trapezoidal groove, and the cross section of the mounting seat body 301 is a T-shaped cross section, a dovetail-shaped cross section or a trapezoidal cross section matching the mounting groove. Figure 6 As shown, when the mounting groove 2 is a T-shaped groove, the cross section of the mounting seat body 301 is a T-shaped cross section, and after assembly, the two can form a limit in multiple directions, reducing the up and down movement of the triangular prism device. At this time, the mounting seat body 301 can be inserted from the side of the mounting groove 2, and the operation is relatively simple.

[0037] Further, the fastener is a locking screw 5, one side of the base 1 is provided with a screw hole 4 with a hole diameter of about 3mm, the screw hole 4 is communicated to the mounting groove 2, and the locking screw 5 is arranged in the screw hole 4 for clamping the mounting seat body 301. By turning the locking screw 5, the mounting seat body 301 can be locked or released, which is convenient to use.

[0038] Further, the base 1 is a stainless steel base, and the triangular prism device 3 is an integrally formed stainless steel device. By using stainless steel material with high hardness and good electrical conductivity to manufacture the base and the triangular prism device, necessary conditions can be provided for the fracture of the sample.

[0039] Further, one side of the triangular prism body 302 is arranged flat on the upper surface of the mounting seat body 301, and the cross section of the triangular prism body 302 is an equilateral triangle or an isosceles triangle, so that one of the side edges forms an overhanging fulcrum (a line) and a cutting edge, and the two sides are symmetrical structures, which is beneficial to the formation of a flat and clear cross section.

[0040] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A sample cross-section preparation device for a scanning electron microscope, characterized by, The application relates to a three-prism device, which comprises a base provided with a mounting groove, and a three-prism device provided on the mounting groove, wherein the three-prism device comprises a mounting seat body and a three-prism body arranged on the mounting seat body, one side edge of the three-prism body is arranged upwards, and the base is further provided with a fastener for locking the mounting seat body.

2. A sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The height of the mounting seat body is matched with the height of the mounting groove, and the three-prism body is 1-5 mm higher than the upper surface of the base.

3. A sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The three-prism device has multiple types, so that the three-prism body is 1 mm, 2 mm or 3 mm higher than the upper surface of the base.

4. The sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The base is disc-shaped, and the mounting groove is arranged radially through the center; or the base is square-shaped, and the mounting groove is arranged through the center point and parallel to the side length.

5. The sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The mounting groove is a rectangular groove, and the mounting seat body is a rectangular body.

6. The sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The mounting groove is a T-shaped groove, a dovetail groove or a trapezoidal groove, and the cross section of the mounting seat body is a T-shaped cross section, a dovetail-shaped cross section or a trapezoidal cross section matched with the mounting groove.

7. The sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The fastener is a locking screw, at least one side of the base is provided with a screw hole, the screw hole penetrates to the mounting groove, and the locking screw is arranged in the screw hole for tightly pressing the mounting seat body.

8. A sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The base is a stainless steel base, and the three-prism device is an integrally-formed stainless steel device.

9. The sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, The length of the mounting groove is 20-30 mm, the width is 1-2 mm, and the depth is 4-6 mm.

10. A sample cross-section preparation device for a scanning electron microscope according to claim 1, characterized in that, One side surface of the three-prism body is arranged on the upper surface of the mounting seat body in a horizontal manner, and the cross section of the three-prism body is a regular triangle or an isosceles triangle.

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