Wafer laser repairing machine capable of rapidly positioning

Abstract

The utility model relates to the technical field of wafer repairing, and discloses a wafer laser repairing machine capable of quickly positioning, which comprises a support frame, a laser repairing device is fixedly mounted on the outer side of the support frame, a clamping assembly is arranged on the outer side of the support frame, the clamping assembly comprises a mounting plate, and the mounting plate is fixedly mounted on the support frame. And a mounting plate is fixedly mounted on the outer side of the supporting frame. According to the wafer laser repairing machine capable of rapidly positioning, in order to enable the device to better clamp a wafer when the wafer is maintained, a clamping assembly is arranged, the clamping assembly is matched with a fixing rod on a mounting plate to mount a large round wheel, a connecting plate on a square steel pipe is connected with a right-angle plate and a hydraulic rod, so that a push plate is pushed through the hydraulic rod, and the wafer is fixed through the hydraulic rod; the sliding plate slides on the sliding rod to drive the straight rod to move, so that the straight rod slides between the large round wheel and the small round wheel, a wafer is firmly clamped, and a stable working environment is provided for laser repairing.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer repair technical field, concretely is a wafer laser repair machine of quick positioning. BACKGROUND

[0002] The wafer laser repair machine of quick positioning is a high -end equipment for the accurate repair of the undesirable phenomenon in wafer packaging process. Its main function and purpose are to position and repair the defects on the wafer, such as inaccurate position, angle error, missing parts, multiple parts, offset, polarity, etc. through laser technology, so as to improve the yield of wafer and the stability of packaging process.

[0003] The wafer laser repair machine of quick positioning is mainly composed of CCD optical system, laser repair system, control system, etc. Its working principle is to automatically position the defects on the wafer through high-definition pixel CCD, and then the control system compares the defect shape with the preset CAM data and performs laser repair on the place where the defect exists.

[0004] However, the above-mentioned device is prone to shaking during the repair process during actual use, and some devices may cause damage to the wafer during clamping. Therefore, we propose a wafer laser repair machine of quick positioning. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a wafer laser repair machine of quick positioning to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a wafer laser repair machine of quick positioning, comprising a support frame, a laser repair device is fixedly installed outside the support frame, a clamping assembly is arranged outside the support frame, and the clamping assembly comprises:

[0007] A mounting plate is fixedly installed outside the support frame, a fixed rod is fixedly installed outside the mounting plate, a large round wheel is rotatably installed outside the fixed rod, a fixed plate is fixedly installed at one end of the fixed rod away from the mounting plate, a square steel tube is fixedly installed outside the fixed rod, and a connecting plate is fixedly installed outside the square steel tube.

[0008] A right-angle plate is fixedly installed outside the connecting plate, a hydraulic rod is fixedly installed outside the right-angle plate, a push plate is fixedly installed at the piston end of the hydraulic rod, a sliding plate is fixedly installed outside the push plate, and a mounting frame is fixedly installed outside the square steel tube.

[0009] The outer side of the mounting frame is fixedly provided with a slide rod, the outer side of the slide rod is slidably provided with a slide plate, the outer side of the slide plate is fixedly provided with a straight rod, the outer side of the fixed plate is fixedly provided with a supporting block, the outer side of the supporting block is rotatably provided with a small round wheel, and the outer side of the slide plate is fixedly provided with a fixed block.

[0010] Preferably, the mounting frame, slide rod, slide plate, straight rod, supporting block, small round wheel and fixed block are provided in multiple groups, and the mounting frame, slide rod, slide plate, straight rod and fixed block in the multiple groups are mirror images arranged on the outer side of the support frame with the vertical center line in the front-rear direction of the support frame as the mirror axis, and the supporting block and small round wheel in the multiple groups are mirror images arranged on the outer side of the support frame with the vertical center line in the left-right direction of the support frame as the mirror axis.

[0011] Preferably, the straight rod is slidably attached between the large round wheel and the small round wheel, and the large round wheel and the small round wheel are made of rubber.

[0012] Preferably, the straight rods in the multiple groups are respectively arranged at both ends of the large round wheel.

[0013] Preferably, the outer side of the support frame is provided with an elastic assembly, the elastic assembly comprises a clamping block, the outer side of the fixed block is fixedly provided with a clamping block, the outer side of the clamping block is provided with a circular groove, the inner side of the circular groove is fixedly provided with a threaded spring, the outer side of the threaded spring is fixedly provided with a circular rod, the outer side of the circular rod is fixedly provided with a pressing block, the outer side of the support frame is provided with a sliding groove, and the outer side of the fixed block is fixedly provided with a dustproof plate.

[0014] Preferably, the clamping block, circular groove, threaded spring, circular rod, pressing block, sliding groove and dustproof plate are provided in multiple groups, and the clamping block, sliding groove and dustproof plate in the multiple groups are mirror images arranged at both ends of the support frame with the vertical center line in the front-rear direction of the support frame as the mirror axis, and the circular groove, threaded spring, circular rod, pressing block and the like in the multiple groups are linearly arranged at equal intervals on the outer side of the clamping block.

[0015] Preferably, the circular rod is slidably arranged in the circular groove, and the pressing block is made of rubber.

[0016] Preferably, the dustproof plates in the multiple groups are attached to each other, and the dustproof plates are slidably arranged in the sliding groove.

[0017] Compared with the prior art, the wafer laser repair machine provided by the utility model has the following beneficial effects:

[0018] 1. The wafer laser repair machine of quick positioning, in order to make the device to the wafer maintenance to the wafer better clamping, through the setting up clamping assembly, the assembly cooperation installation plate on the fixed rod installation big round, square steel pipe on the connecting plate connects right angle plate and hydraulic rod, thereby through the hydraulic rod push plate, make the slide plate on the slide rod slide, drive straight rod moves, thereby make straight rod slide between big round and small round, thereby firmly clamps wafer, provide stable working environment for laser repair.

[0019] 2. The wafer laser repair machine of quick positioning, in order to make the device to the wafer clamping provides certain elastic buffer will not cause damage to the wafer, through the setting up elastic assembly, the assembly cooperation fixed block on the clamping block through the thread spring in the round groove and round rod connects extrusion block, the extrusion block of rubber can avoid damage wafer, simultaneously cooperation dustproof board mutually pastes and slides in the sliding groove, prevent dust from entering the device inside. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is an overall structure of the utility model and the schematic diagram of top view;

[0021] Figure 2 It is the schematic diagram of top view of partial structure of the utility model;

[0022] Figure 3 It is the utility model Figure 2 The enlarged structure schematic diagram of A area in;

[0023] Figure 4 It is the schematic diagram of top view of partial structure of the utility model;

[0024] Figure 5 It is the schematic diagram of side view of partial structure of the utility model;

[0025] Figure 6 It is the utility model Figure 5 The enlarged structure schematic diagram of B area in.

[0026] In the drawing: 1, support frame;2, laser repair device;3, clamping assembly;31, installation plate;32, fixed rod;33, big round;34, fixed plate;35, square steel tube;36, connecting plate;37, right angle plate;38, hydraulic rod;39, push plate;310, mounting bracket;311, slide rod;312, slide plate;313, straight rod;314, support block;315, small round;316, fixed block;4, elastic assembly;41, clamping block;42, round groove;43, thread spring;44, round rod;45, extrusion block;46, sliding groove;47, dustproof board. DETAILED DESCRIPTION

[0027] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0028] Please refer to Figures 1-6 The utility model provides a kind of technical scheme of wafer laser repair machine of quick positioning, including support frame 1, support frame 1 outside fixed installation has laser repair device 2.

[0029] In an embodiment of the utility model, support frame 1 outside is provided with clamping assembly 3, clamping assembly 3 includes mounting plate 31, support frame 1 outside fixed installation has mounting plate 31, mounting plate 31 outside fixed installation has fixed link 32, fixed link 32 outside rotationally installed has large round wheel 33, the end of fixed link 32 away from mounting plate 31 is fixedly installed with fixed plate 34, fixed link 32 outside fixed installation has square steel pipe 35, square steel pipe 35 outside fixed installation has connecting plate 36, connecting plate 36 outside fixed installation has right angle plate 37, right angle plate 37 outside fixed installation has hydraulic rod 38, hydraulic rod 38 piston end fixed installation has push plate 39, push plate 39 outside fixed installation has sliding plate 312, square steel pipe 35 outside fixed installation has mounting bracket 310, mounting bracket 310 outside fixed installation has slide 311, slide 311 outside slidingly installed has sliding plate 312, sliding plate 312 outside fixed installation has straight bar 313, fixed plate 34 outside fixed installation has support block 314, support block 314 outside rotationally installed has small round wheel 315, sliding plate 312 outside fixed installation has fixed block 316, mounting bracket 310, slide 311, sliding plate 312, straight bar 313, support block 314, small round wheel 315 and fixed block 316 are provided with multiple groups, and multiple groups mounting bracket 310, slide 311, sliding plate 312, straight bar 313 and fixed block 316 are mirror image axes with the vertical center line of support frame 1 front and back direction, mirror image is set on the outside of support frame 1, and multiple groups support block 314 and small round wheel 315 are mirror image axes with the vertical center line of support frame 1 left and right direction, mirror image is set on the outside of support frame 1, straight bar 313 is slidingly attached between large round wheel 33 and small round wheel 315, large round wheel 33 and small round wheel 315 are made of rubber, multiple groups straight bar 313 are respectively arranged at both ends of large round wheel 33, first, wafer is placed on the surface of support frame 1, so as to cooperate fixed link 32 on mounting plate 31 to install large round wheel 33, so that connecting plate 36 on square steel pipe 35 connects right angle plate 37 and hydraulic rod 38, so as to push push plate 39 by hydraulic rod 38, make sliding plate 312 slide on slide 311, drive straight bar 313 to move, so that straight bar 313 slides between large round wheel 33 and small round wheel 315.

[0030] In an embodiment of the utility model, support frame 1 outside is provided with elastic component 4, elastic component 4 includes clamping block 41, fixed block 316 outside fixed mounting has clamping block 41, clamping block 41 outside is set up with round groove 42, round groove 42 inside fixed mounting has screw spring 43, screw spring 43 outside fixed mounting has round rod 44, round rod 44 outside fixed mounting has extrusion block 45, support frame 1 outside is set up with sliding slot 46, fixed block 316 outside fixed mounting has dustproof board 47, clamping block 41, round groove 42, screw spring 43, round rod 44, extrusion block 45, sliding slot 46 and dustproof board 47 are provided with multiple groups, and multiple groups clamping block 41, sliding slot 46 and dustproof board 47 with support frame 1 front and back direction vertical midline are mirror image axle, mirror image is set in support frame 1 left and right two ends, and multiple groups round groove 42, screw spring 43, round rod 44, extrusion block 45 are linear array with the equal spacing at clamping block 41 outside, round rod 44 is slidably installed in round groove 42 inside, extrusion block 45 is made of rubber, multiple groups dustproof board 47 mutually adhere, dustproof board 47 slides in sliding slot 46 inside, to cooperate with the clamping block 41 on fixed block 316 through the screw spring 43 and round rod 44 in round groove 42 to connect extrusion block 45, the extrusion block 45 made of rubber can avoid damaging wafer, simultaneously cooperate with dustproof board 47 mutually adhere and slide in sliding slot 46, prevent dust from entering the inside of device.

[0031] Working principle: first, the wafer is placed on the surface of support frame 1, to cooperate with the fixed rod 32 on the mounting plate 31 to install the large round wheel 33, to make the connecting plate 36 on the square steel pipe 35 connect the right angle plate 37 and the hydraulic rod 38, to make the sliding plate 312 slide on the sliding rod 311 by the hydraulic rod 38 to push the push plate 39, drive the straight rod 313 to move, to make the straight rod 313 slide between the large round wheel 33 and the small round wheel 315, to cooperate with the clamping block 41 on the fixed block 316 through the screw spring 43 and round rod 44 in round groove 42 to connect extrusion block 45, the extrusion block 45 made of rubber can avoid damaging wafer, simultaneously cooperate with dustproof board 47 mutually adhere and slide in sliding slot 46, prevent dust from entering the inside of device.

[0032] The utility model has been described in detail above, but on the basis of the utility model, some modifications or improvements can be made, which is obvious to the general technical personnel in the technical field. Therefore, the modification or improvement without departing from the utility model's ideological spirit is within the protection scope of the utility model.

Claims

1. A wafer laser repair machine capable of rapid positioning, comprising a support frame (1), a laser repair device (2) is fixedly installed outside the support frame (1), characterized in that: The support frame (1) is provided with a clamping assembly (3) outside, the clamping assembly (3) comprises: The mounting plate (31) is fixedly installed outside the support frame (1), the fixed rod (32) is fixedly installed outside the mounting plate (31), the large round wheel (33) is rotatably installed outside the fixed rod (32), the fixed plate (34) is fixedly installed at one end of the fixed rod (32) away from the mounting plate (31), the square steel pipe (35) is fixedly installed outside the fixed rod (32), and the connecting plate (36) is fixedly installed outside the square steel pipe (35); The right-angle plate (37) is fixedly installed outside the connecting plate (36), the hydraulic rod (38) is fixedly installed outside the right-angle plate (37), the push plate (39) is fixedly installed at the piston end of the hydraulic rod (38), the sliding plate (312) is fixedly installed outside the push plate (39), and the mounting bracket (310) is fixedly installed outside the square steel pipe (35); The sliding rod (311) is fixedly installed outside the mounting bracket (310), the sliding plate (312) is slidably installed outside the sliding rod (311), the straight rod (313) is fixedly installed outside the sliding plate (312), the support block (314) is fixedly installed outside the fixed plate (34), the small round wheel (315) is rotatably installed outside the support block (314), and the fixed block (316) is fixedly installed outside the sliding plate (312).

2. The wafer laser repair machine capable of fast positioning according to claim 1, wherein: The mounting bracket (310), the sliding rod (311), the sliding plate (312), the straight rod (313), the support block (314), the small round wheel (315) and the fixed block (316) are provided with multiple groups.

3. The wafer laser repair machine capable of fast positioning according to claim 1, wherein: The straight rod (313) is slidably attached between the large round wheel (33) and the small round wheel (315), and the large round wheel (33) and the small round wheel (315) are made of rubber.

4. The wafer laser repair machine capable of fast positioning according to claim 1, wherein: Multiple straight rods (313) are respectively arranged at both ends of the large round wheel (33).

5. The wafer laser repair machine capable of fast positioning according to claim 1, wherein: The support frame (1) is provided with an elastic assembly (4) outside, the elastic assembly (4) comprises a clamping block (41), the clamping block (41) is fixedly installed outside the fixed block (316), a circular groove (42) is formed in the outer side of the clamping block (41), a threaded spring (43) is fixedly installed in the inner side of the circular groove (42), a circular rod (44) is fixedly installed outside the threaded spring (43), an extrusion block (45) is fixedly installed outside the circular rod (44), a sliding groove (46) is formed in the outer side of the support frame (1), and a dustproof plate (47) is fixedly installed outside the fixed block (316).

6. The wafer laser repair machine capable of fast positioning according to claim 5, wherein: The clamping block (41), the circular groove (42), the threaded spring (43), the circular rod (44), the extrusion block (45), the sliding groove (46) and the dustproof plate (47) are provided with multiple groups.

7. The wafer laser repair machine capable of fast positioning according to claim 5, wherein: The circular rod (44) is slidably installed in the inner side of the circular groove (42), and the extrusion block (45) is made of rubber.

8. The wafer laser repair machine capable of fast positioning according to claim 5, wherein: Multiple dustproof plates (47) are attached to each other, and the dustproof plates (47) are slidably installed in the inner side of the sliding groove (46).

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