Die bonding turret device and die bonding equipment

Abstract

The utility model is applicable to the technical field of semiconductor equipment, and provides a die bonding turret device and die bonding equipment, and the die bonding turret device comprises a rotation driving mechanism, a positioning disc group, a swing arm driving unit and a swing arm mechanism. The die bonding equipment comprises any one of the die bonding turret devices. Compared with a previous single-side single-arm / single-side two-arm structure, the number of the swing arm mechanisms is increased, the multiple first mounting faces are evenly provided with the multiple swing arm mechanisms around the first axis, the multiple swing arm mechanisms are connected to the first mounting faces in a sliding mode, the rotation angle of each swing arm mechanism each time can be the same, control over the swing arm assembly is more convenient, and the stability of the swing arm assembly is improved. The motion angle of a single swing arm mechanism is reduced, and vibration generated when the swing arm mechanism moves the chip is also reduced. In addition, a plurality of independent stations capable of continuously rotating are provided, and during working, a plurality of swing arm mechanisms can be used for continuously sucking chips at a chip supply position to a mounting substrate, so that the die bonding efficiency is effectively improved, and the die bonding efficiency is multiple times of that of conventional die bonding equipment.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor equipment technical field especially, it relates to a kind of fixed crystal tower device and fixed crystal equipment. BACKGROUND

[0002] The fixed crystal machine is one of the devices used in semiconductor device manufacturing, which functions to connect semiconductor wafers with other components. In the operation of the fixed crystal machine, the crystal ring is usually supported by the crystal supply platform, then the chip on the crystal ring is separated from the blue film by the needle device, and finally the nozzle structure is moved and the chip on the crystal ring is sucked by the swing arm structure, then the chip is transported and firmly connected with the solder joint of the packaging substrate to realize fixed crystal. However, the existing fixed crystal machine has the problem of low fixed crystal efficiency. SUMMARY

[0003] The utility model aims at providing a kind of fixed crystal tower device and fixed crystal equipment, to solve the technical problem of low fixed crystal efficiency of the fixed crystal equipment in prior art.

[0004] The utility model is realized as follows: in the first aspect, a fixed crystal tower device is provided, which comprises a rotary drive mechanism, a positioning disc set, a swing arm drive unit and a swing arm mechanism. The positioning disc set has a degree of freedom of rotation around a first axis. The positioning disc set has a plurality of first mounting surfaces. The first mounting surfaces are uniformly distributed around the first axis. The drive end of the rotary drive mechanism is connected to the positioning disc set to drive the positioning disc set to rotate around the first axis. The number of swing arm mechanisms is multiple. Each swing arm mechanism is slidably mounted on the first mounting surface and is used to suck or place a chip. The number of swing arm drive units is multiple and corresponds to the swing arm mechanisms one by one. Each swing arm drive unit is arranged on the positioning disc set and is used to drive the corresponding swing arm mechanism to reciprocate along the first axis direction.

[0005] In an optional embodiment, the swing arm mechanism comprises a nozzle structure, a swing arm body and a nozzle drive unit. The nozzle structure is used to suck a chip by negative pressure. The swing arm body has a fixed crystal end and a mounting end arranged oppositely. The mounting end is slidably connected to the first mounting surface. The nozzle structure is rotatably arranged at the fixed crystal end of the swing arm body. The nozzle drive unit is arranged at the area of the swing arm body close to the mounting end to drive the nozzle structure to rotate for adjusting the chip. A transmission unit is arranged between the nozzle drive unit and the nozzle structure.

[0006] In an alternative embodiment, the swing arm body comprises a bottom portion and two side portions, the bottom portion is connected between the two side portions, the two side portions and the bottom portion form a containing space, the drive unit and the drive end of the nozzle driving unit are located in the containing space, the bottom portion is a closed structure, the side portions are further provided with through holes, and the through holes are used to reduce the resistance when the swing arm body rotates horizontally.

[0007] In an alternative embodiment, the nozzle structure comprises a main sleeve, a working assembly and an elastic member, the main sleeve is rotatably arranged at the end of the swing arm body, the main sleeve has a first channel, the first channel has a first opening and a second opening, the working assembly comprises a nozzle guide rod and a nozzle body, the first end of the nozzle guide rod is movably inserted into the first channel, the second end of the nozzle guide rod extends out of the main sleeve through the first opening, the nozzle body is arranged at the second end of the nozzle guide rod, the nozzle body is used to adsorb a chip, the nozzle guide rod is provided with a second channel for connecting the nozzle body and the first channel, the elastic member is located in the first channel, the elastic member abuts against the first end of the nozzle guide rod, and the elastic member is used to deform when the nozzle body is pressed to buffer the working assembly.

[0008] In an alternative embodiment, the second opening is provided with an elastic force adjusting member, the elastic force adjusting member has a degree of freedom of movement along the axis of the first channel relative to the main sleeve, one end of the elastic member abuts against the elastic force adjusting member, and the other end of the elastic member abuts against the nozzle guide rod, the elastic force adjusting member is used to adjust the initial compression amount of the elastic member by changing its position, and the elastic force adjusting member is provided with a third channel for connecting the first channel and the outside.

[0009] In an alternative embodiment, the swing arm body is further provided with a mounting end cover, a sealing structure is arranged between the main sleeve and the mounting end cover, the main sleeve is sealingly connected with the mounting end cover through the sealing structure and can rotate relative to the mounting end cover, the mounting end cover is further provided with a fourth channel, and the fourth channel is used to connect the second opening and an external air path.

[0010] In an alternative embodiment, the swing arm mechanism and the positioning disc group are both provided with a sliding structure, the sliding structure comprises a sliding block and a sliding rail unit, the sliding block is slidably arranged on the first mounting surface through the sliding rail unit, the swing arm mechanism is fixedly installed on the sliding block, and the drive end of the swing arm driving unit is connected with the sliding block.

[0011] In an alternative embodiment, the positioning disc group is hollow, and the plurality of swing arm driving units are located in the positioning disc group, and at least part of the sliding block extends into the positioning disc group and is connected with the driving end of the swing arm driving unit.

[0012] In an alternative embodiment, the side of the positioning disc group away from the driving end of the rotary driving mechanism is provided with a mounting opening for communicating the internal space of the positioning disc group with the outside, and a sealing base is arranged on the mounting opening.

[0013] In a second aspect, a die bonding apparatus is provided, which comprises the die bonding turret device of any one of the above aspects.

[0014] The first aspect of the utility model has the following technical effects: the driving end of the rotary driving mechanism is connected with the positioning disc group, so that the positioning disc group can rotate around the first axis under the action of the rotary driving mechanism. Meanwhile, the positioning disc group has a plurality of first mounting surfaces uniformly distributed around the first axis, and the plurality of swing arm mechanisms are respectively slidably mounted on the first mounting surfaces, and a plurality of swing arm driving units are arranged on the positioning disc group in one-to-one correspondence with the swing arm mechanisms. The swing arm driving units can drive the swing arm mechanisms to reciprocate along the first axis direction while the positioning disc group and the plurality of swing arm mechanisms are driven by the rotary driving mechanism to rotate around the first axis. Compared with the prior art die bonding apparatus, the plurality of swing arm mechanisms are mounted on the positioning disc group, which realizes the cooperative and continuous work between the plurality of workstations. The number of swing arm mechanisms is increased compared with the previous single-bonding single-arm / single-bonding two-arm structure. The plurality of swing arm mechanisms are uniformly arranged around the first axis and are respectively slidably connected to the first mounting surfaces, so that the angle of rotation of each swing arm mechanism is the same each time, the control of the swing arm assembly is more convenient, the movement angle of a single swing arm mechanism is reduced, and the vibration of the swing arm mechanism when moving the chip is also reduced. In addition, the plurality of independent workstations can continuously rotate, and the plurality of swing arm mechanisms can continuously suck the chips from the die supply position to the mounting substrate during work, so that the efficiency of die bonding is effectively improved, and the die bonding efficiency is several times that of the conventional die bonding apparatus.

[0015] It can be understood that the beneficial effects of the second aspect described above can be referred to the related description in the first aspect described above, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiments of the utility model or the prior art description, obviously, the following described drawings are only some embodiments of the utility model, for those skilled in the art, under the premise of not paying the creative labor, other drawings can also be obtained according to these drawings.

[0017] Figure 1 is a structural schematic view of a fixed crystal tower device provided by an embodiment of the present application;

[0018] Figure 2 is a structural schematic view of a swing arm mechanism adopted by an embodiment of the present application Figure 1 ;

[0019] Figure 3 is a structural schematic view of a swing arm mechanism adopted by an embodiment of the present application Figure 2 ;

[0020] Figure 4 is a structural schematic view of a suction nozzle structure adopted by an embodiment of the present application;

[0021] Figure 5 is a sectional structural schematic view of the suction nozzle structure adopted by an embodiment of the present application;

[0022] Figure 6 is an exploded structural schematic view of the suction nozzle structure adopted by an embodiment of the present application;

[0023] Figure 7 is Figure 5 an enlarged structural schematic view of position A in FIG. 5;

[0024] Figure 8 is a structural schematic view of a positioning disc set provided by an embodiment of the present application;

[0025] Figure 9 is an exploded structural schematic view of the positioning disc set provided by an embodiment of the present application;

[0026] Figure 10 is a schematic view of the positioning disc set after a sealing bottom disc is removed, provided by an embodiment of the present application.

[0027] Mark explanation:

[0028] 100, swing arm mechanism; 200, positioning disc set; 300, swing arm driving unit; 400, rotary driving mechanism; 500, air path rotary joint; 600, wireless slip ring assembly; 700, fixed crystal support;

[0029] 11, swing arm body; 111, die bonding end; 112, mounting end; 113, side surface part; 114, bottom surface part; 115, through hole; 116, inclined rib; 117, mounting hole; 12, suction nozzle structure; 121, main sleeve body; 1211, first channel; 1212, first opening; 1213, second opening; 122, working assembly; 1221, suction nozzle guide rod; 1222, suction nozzle body; 1223, second channel; 1224, anti-dropping part; 123, elastic member; 124, elastic force adjusting member; 1241, third channel; 125, limiting member; 126, mounting end cover; 1261, fourth channel; 1262, pipeline connecting column; 127, rotation positioning sleeve; 128, sealing structure; 13, suction nozzle driving unit; 14, transmission unit; 141, first pulley; 142, second pulley; 143, transmission belt;

[0030] 21, main disc body; 22, main cylinder body part; 221, first mounting surface; 222, second mounting surface; 223, mounting groove; 224, heat dissipation hole; 23, mounting opening; 24, sliding structure; 241, sliding block; 2411, body part; 2412, connecting part; 242, sliding rail unit; 25, connecting handle part; 26, controller; 27, air path control group; 28, sealing base disc; 281, oil groove structure; 29, first axis. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0032] In the description of the present application, it is understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0033] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0034] In the utility model, unless another explicit provision and limitation, the terms "mount", "connect", "connect", "fix" and so on should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can pass through intermediate medium indirectly connected, can be two element internal communication or two element mutual action relation. For ordinary skilled in the art, can understand the concrete meaning of above-mentioned terms in the utility model according to specific circumstances.

[0035] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further detailed with the utility model with the drawings and examples.

[0036] Please refer to Figure 1 As shown in the figure, in the utility model embodiment, first, provide a kind of fixed crystal tower device, above-mentioned fixed crystal tower device includes rotary drive mechanism 400, positioning disc group 200, swing arm drive unit 300 and swing arm mechanism 100, positioning disc group 200 has the freedom of rotation around first axis, positioning disc group 200 has multiple first installation surfaces 221, multiple first installation surfaces 221 are evenly distributed around first axis, the driving end of rotary drive mechanism 400 is connected with positioning disc group 200, for driving positioning disc group 200 rotation around first axis, the number of swing arm mechanism 100 is multiple, multiple swing arm mechanism 100 is respectively slidably installed on first installation surface 221, and for suction or placement chip, the number of swing arm drive unit 300 is multiple, and it is one-to-one correspondence with swing arm mechanism 100 Settings, multiple swing arm drive unit 300 is all set on positioning disc group 200, and for driving corresponding swing arm mechanism 100 reciprocating motion along first axis direction.

[0037] Specifically, the rotating driving mechanism 400 refers to a component or assembly that can output torque and drive the rotation of the body, and the rotating driving mechanism 400 can be a motor or a hydraulic motor and the like, and a heat sink and an ion fan and the like heat dissipation assembly can also be arranged outside the rotating driving mechanism 400. The positioning disc group 200 refers to a component or assembly with a certain volume, and the positioning disc group 200 can be block-shaped, columnar or a combination of various shapes. The first mounting surface 221 refers to a surface structure arranged on the outer periphery of the positioning disc group 200, and the first mounting surface 221 can be a planar structure or a curved surface structure and the like. The swing arm mechanism 100 refers to a component structure with a certain length, and one end of the swing arm mechanism 100 can be connected to the first mounting surface 221 through a sliding structure 24, and the other end of the swing arm mechanism 100 can be provided with a crystal suction structure, for example, a chip can be sucked by negative pressure or placed by breaking the negative pressure. The swing arm driving unit 300 refers to a component that can drive the body to move along a straight line, and the swing arm driving unit 300 can be a gas cylinder, a hydraulic cylinder or a voice coil motor and the like.

[0038] The crystal fixed tower device provided by the embodiment of the utility model connects the driving end of the rotating driving mechanism 400 with the positioning disc group 200, so that the positioning disc group 200 can rotate around the first axis under the action of the rotating driving mechanism 400. Meanwhile, the positioning disc group 200 has a plurality of first mounting surfaces 221 uniformly distributed around the first axis, and a plurality of swing arm driving units 300 corresponding to the swing arm mechanisms 100 are arranged on the positioning disc group 200, and the swing arm mechanisms 100 are slidably mounted on the first mounting surfaces 221, so that the positioning disc group 200 and the plurality of swing arm mechanisms 100 can rotate around the first axis under the action of the rotating driving mechanism 400, and the swing arm mechanisms 100 can also reciprocate along the first axis direction under the action of the swing arm driving units 300. Compared with the crystal fixed device in the prior art, the plurality of swing arm mechanisms 100 are arranged on the positioning disc group 200, so that the plurality of workstations can work cooperatively and continuously, the number of swing arm mechanisms 100 is increased compared with the single-arm or two-arm structure, and the plurality of first mounting surfaces 221 are arranged around the first axis and are slidably connected to the first mounting surfaces 221, so that the swing angle of each swing arm mechanism 100 is the same, the control of the swing arm assembly is more convenient, the swing angle of the single swing arm mechanism 100 is reduced, and the vibration of the swing arm mechanism 100 when moving the chip is also reduced. In addition, the plurality of independent workstations can rotate continuously, so that the plurality of swing arm mechanisms 100 can continuously suck the chips from the crystal supply position to the mounting substrate during work, so that the efficiency of the crystal fixing is effectively improved, and the efficiency of the crystal fixing is several times that of the conventional crystal fixing device.

[0039] In one embodiment, please refer to Figure 2 With Figure 3The swing arm mechanism 100 comprises a suction nozzle structure 12, a swing arm body 11 and a suction nozzle driving unit 13. The suction nozzle structure 12 is used to suck the chip by negative pressure. The swing arm body 11 has a flip chip end 111 and a mounting end 112 arranged oppositely. The mounting end 112 is in sliding connection with the first mounting surface 221. The suction nozzle structure 12 is rotatably arranged at the flip chip end 111 of the swing arm body 11. The suction nozzle driving unit 13 is arranged at the region of the swing arm body 11 close to the mounting end 112, and is used to drive the suction nozzle structure 12 to rotate to adjust the chip. The transmission unit 14 is arranged between the suction nozzle driving unit 13 and the suction nozzle structure 12.

[0040] Specifically, the suction nozzle structure 12 refers to a component or assembly used to suck and place the chip. The working principle of the suction nozzle structure 12 is that the vacuum system generates negative pressure at the suction nozzle head through the internal channel of the suction nozzle during work. This negative pressure enables the suction nozzle to firmly adsorb the chip, and when it is necessary to place the chip, the chip can be separated from the suction nozzle structure 12 by disconnecting the connection with the vacuum system. The swing arm body 11 refers to a component with a certain length. The swing arm body 11 can be plate-shaped, columnar or strip-shaped, etc. The swing arm body 11 can also be composed of multiple shapes. The flip chip end 111 and the mounting end 112 can respectively refer to the two ends of the swing arm body 11. The mounting end 112 can be connected with the driving end of the power unit by clamping, fastener connection or plug-in connection, etc. The power unit can be a voice coil motor, etc. The flip chip end 111 refers to the end of the swing arm body 11 away from the power unit. The mounting hole 117 can be arranged on the flip chip end 111, so that the suction nozzle structure 12 can be rotatably arranged in the mounting hole 117. The suction nozzle driving unit 13 refers to a component or assembly that can output torque. The suction nozzle driving unit 13 can be a servo motor, etc. The transmission unit 14 refers to a structure or assembly that transmits power and motion. The transmission unit 14 can adopt belt, chain or gear transmission mode, etc.

[0041] In the embodiment, the swing arm body 11 is provided with the crystal mounting end 111 and the mounting end 112, and the swing arm body 11 is driven to move by connecting the mounting end 112 with the driving end of the power unit. The suction nozzle structure 12 is arranged on the crystal mounting end 111 of the swing arm body 11, and the suction nozzle driving unit 13 is arranged on the swing arm body 11 near the mounting end 112. The transmission unit 14 is arranged between the driving end of the suction nozzle driving unit 13 and the suction nozzle structure 12. During the crystal mounting operation, the suction nozzle structure 12 is driven to rotate by the suction nozzle driving unit 13 while moving with the swing arm body 11, so that the deviation of the chip during the crystal mounting operation is corrected, thereby ensuring the precision of the crystal mounting operation. The suction nozzle driving unit 13 and the suction nozzle structure 12 are arranged on the swing arm body 11, so that the distance between the driving end of the suction nozzle driving unit 13 and the suction nozzle structure 12 does not change due to the movement or mounting of the swing arm body 11, thereby ensuring the transmission between the driving end of the suction nozzle driving unit 13 and the suction nozzle structure 12, and improving the rotation precision of the suction nozzle assembly during the operation and the precision of the crystal mounting operation.

[0042] In one embodiment, referring to Figure 2 With Figure 3 , the swing arm body 11 includes a bottom surface part 114 and two side surface parts 113 arranged at a distance from each other, the bottom surface part 114 is connected between the two side surface parts 113, and the two side surface parts 113 and the bottom surface part 114 surround a containing space, the transmission unit 14 and the driving end of the suction nozzle driving unit 13 are located in the containing space, the bottom surface part 114 is a closed structure, the side surface part 113 is provided with a through hole 115, and the through hole 115 is used to reduce the resistance when the swing arm body 11 rotates horizontally.

[0043] Specifically, the side surface part 113 and the bottom surface part 114 are plate-shaped parts with a certain thickness, and the bottom surface part 114 and the side surface part 113 can be an integral molding structure. The bottom surface part 114 and the side surface part 113 can also be a split structure, and the bottom surface part 114 and the side surface part 113 can be connected into a whole by welding, fasteners or clamping, etc. The through hole 115 refers to a via structure that can allow objects or airflow to pass through, and the through holes 115 on the two side surface parts 113 can be arranged correspondingly.

[0044] In the embodiment, the two side portions 113 are spaced apart and the bottom portion 114 is connected between the two side portions 113, the two side portions 113 and the bottom portion 114 enclose a containing space, the drive end of the transmission unit 14 and the nozzle driving unit 13 are located in the containing space, and the overall structure of the swing arm body 11 is more simple. Meanwhile, the bottom portion 114 is located at the bottom region of the swing arm body 11, the bottom portion 114 is a closed structure, and the through holes 115 are arranged on the side portions 113, when the swing arm body 11 swings in a direction parallel to the bottom portion 114 (usually horizontal direction), the swing arm body 11 can be subjected to less wind resistance, the swing arm body 11 is more convenient to rotate, the disturbance of the swing arm body 11 to the blue film is reduced, and the jitter of the wafer blue film is smaller.

[0045] In an optional embodiment, referring to Figure 2 and Figure 3 , the bottom portion 114 and the two side portions 113 are integrally formed. Specifically, the bottom portion 114 and the two side portions 113 can be integrally formed by machining, die casting or injection molding, and the overall strength of the swing arm body 11 is better, thereby improving the stability of die bonding.

[0046] In another optional embodiment, referring to Figure 2 , a support rib is arranged between the two side portions 113. Specifically, the support rib refers to a component with a certain volume, and the support rib can be block-shaped, plate-shaped or strip-shaped. The overall strength of the swing arm body 11 is better by arranging the support rib between the two side portions 113. Meanwhile, the support rib can be provided with a avoiding structure, which can avoid the support rib blocking between the through holes 115 arranged opposite on the two side portions 113, the gas flow at the through holes 115 is more smooth, thereby reducing the wind resistance of the swing arm body 11 in horizontal rotation and reducing the air flow generated by the swing arm body 11 in rotation.

[0047] In an embodiment, referring to Figure 2 , the bottom portion 114 has an inclined rib 116 arranged along the length direction of the swing arm body 11, and the inclined rib 116 is located in the containing space. Specifically, the inclined rib 116 refers to a component with a certain volume, and the inclined rib 116 can be block-shaped, plate-shaped or strip-shaped. The arrangement of the inclined rib 116 increases the strength of the swing arm body 11 at the bottom portion 114, and also enhances the overall strength of the swing arm body 11. Similarly, the inclined rib 116 can be provided with an avoiding structure, which can avoid the inclined rib 116 blocking between the through holes 115 arranged opposite on the two side portions 113, the gas flow at the through holes 115 is more smooth, and the wind resistance of the swing arm body 11 in movement is reduced.

[0048] In one embodiment, please refer to Figure 4 to Figure 7 The nozzle structure 12 comprises a main sleeve 121, a working assembly 122, and an elastic member 123. The main sleeve 121 is rotationally arranged at the end of the swing arm body 11. The main sleeve 121 has a first channel 1211 with a first opening 1212 and a second opening 1213. The working assembly 122 comprises a nozzle guide rod 1221 and a nozzle body 1222. The first end of the nozzle guide rod 1221 is movably inserted into the first channel 1211. The second end of the nozzle guide rod 1221 extends out of the main sleeve 121 through the first opening 1212. The nozzle body 1222 is arranged at the second end of the nozzle guide rod 1221. The nozzle guide rod 1221 is provided with a second channel 1223 for connecting the nozzle body 1222 and the first channel 1211. The elastic member 123 is located in the first channel 1211 and abuts against the first end of the nozzle guide rod 1221. The elastic member 123 is used to deform when the nozzle body 1222 is pressed to buffer the working assembly 122.

[0049] Specifically, the main sleeve 121 refers to a component with a certain length. The main sleeve 121 can be columnar, rod-shaped, or block-shaped, etc. The first channel 1211 refers to a channel structure with a certain length. The first channel 1211 can be arranged along the axial direction of the main sleeve 121. The first channel 1211 can have a first opening 1212 and a second opening 1213 arranged opposite to the first opening 1212. The first opening 1212 and the second opening 1213 can be respectively located at the two ends of the main sleeve 121.

[0050] The working assembly 122 refers to an assembly or component for sucking chips. The working assembly 122 comprises a nozzle guide rod 1221 and a nozzle body 1222. The nozzle guide rod 1221 and the nozzle body 1222 can be a split structure and can be fixed by clamping, inserting, or bonding, etc. The nozzle guide rod 1221 and the nozzle body 1222 can also be an integral structure, i.e., two different parts of the same component. The nozzle guide rod 1221 refers to a component with a certain length. The nozzle guide rod 1221 can be columnar, rod-shaped, or block-shaped, etc. The nozzle body 1222 refers to a component or assembly for sucking objects. The nozzle body 1222 is usually provided with a suction port for sucking objects or new products by generating negative pressure (lower than atmospheric pressure) at the suction port. The second channel 1223 also refers to a channel structure with a certain length. The two ends of the second channel 1223 are open. The second channel 1223 can be arranged along the axial direction of the nozzle guide rod 1221. Connecting the nozzle body 1222 and the first channel 1211 refers to connecting the suction port on the nozzle body 1222 and the first channel 1211 through the second channel 1223.

[0051] The elastic member 123 refers to a component capable of elastic deformation when subjected to external force, and the elastic member 123 usually has a certain length. The elastic member 123 can be a metal spring, a rubber column, or a nitrogen spring, etc. At least part of the elastic member 123 abuts against the first end of the nozzle guide rod 1221, and the other part is fixed by clamping, abutting, or fastener connection, etc. so that the elastic member 123 can be compressed after being stressed to exert a counterforce on the nozzle guide rod 1221.

[0052] In the embodiment, the first channel 1211 is arranged along the axis direction of the main sleeve body 121, and the first channel 1211 has a first opening 1212 and a second opening 1213. When the working assembly 122 is assembled with the main sleeve body 121, the first end of the nozzle guide rod 1221 is movably inserted into the first channel 1211, the second end of the nozzle guide rod 1221 extends out of the main sleeve body 121 through the first opening 1212, and the nozzle body 1222 is installed at the second end of the nozzle guide rod 1221, and a second channel 1223 for connecting the nozzle body 1222 with the first channel 1211 is further arranged on the nozzle guide rod 1221. In addition, the elastic member 123 is arranged in the first channel 1211 and abuts against the first end of the nozzle guide rod 1221, which is deformed when the nozzle body 1222 is extruded, thereby buffering the movement of the working assembly 122 as a whole, making the crystal suction more secure.

[0053] When performing the crystal suction work, the second opening 1213 on the main sleeve body 121 can be connected with the external air path, at this time, the first channel 1211 and the second channel 1223 form a passage connecting the nozzle body 1222 with the external air path, so that negative pressure can be generated at the nozzle body 1222 to suck the chip. In addition, the elastic member 123 abutting against the first end of the nozzle guide rod 1221 is arranged in the first channel 1211, which can be deformed when the nozzle body 1222 is extruded by contacting the chip, so that the elastic member 123 can buffer the movement of the working assembly 122 as a whole, thereby avoiding the problem that the movement inertia of the swing arm body 11 causes the nozzle to easily damage the chip, and improving the quality and precision of the crystal fixing.

[0054] In addition, it should be noted that in the embodiment, the elastic member 123 is arranged in the first channel 1211, which can make the overall volume of the entire nozzle structure 12 smaller. At the same time, the elastic member 123 arranged in the first channel 1211 buffers the working assembly 122, so that there is no need to additionally arrange a buffering structure inside the working assembly 122, thereby making the overall structure of the working assembly 122 simpler and reducing the overall manufacturing cost and production cost of the working assembly 122.

[0055] In one embodiment, please refer toFigure 6 With Figure 7 The second opening 1213 is provided with an elastic force adjusting member 124, which has a freedom of movement along the axis of the first channel 121 relative to the main sleeve 121. One end of the elastic member 123 abuts against the elastic force adjusting member 124, and the other end abuts against the mouthpiece guide rod 1221. The elastic force adjusting member 124 is used to adjust the initial compression amount of the elastic member 123 by changing its position. The elastic force adjusting member 124 is provided with a third channel 1241 for connecting the first channel 121 with the outside. Specifically, the elastic force adjusting member 124 refers to a component with a certain volume. The elastic force adjusting member 124 can be located entirely within the first channel 121, or only partially within the first channel 121. The elastic force adjusting member 124 can be connected by sliding or screwing, etc., so as to have the freedom of movement along the axis of the main sleeve 121 while being installed.

[0056] In the working process, the elastic member 123 is generally in a compressed state. The initial compression amount of the elastic member 123 refers to the length of the compression of the elastic member 123 when the mouthpiece guide rod 1221 is not subjected to extrusion force. When the elastic member 123 is compressed by the same distance based on the initial compression amount, the force exerted by the elastic member 123 on the mouthpiece guide rod 1221 will also be different. When the mouthpiece body 1222 contacts the chip, the force exerted by the mouthpiece body 1222 on the chip will also be different. When the elastic force adjusting member 124 moves towards the mouthpiece guide rod 1221, the initial compression amount of the elastic member 123 increases, and the force exerted by the elastic member 123 on the mouthpiece guide rod 1221 also increases. When the elastic force adjusting member 124 moves away from the mouthpiece guide rod 1221, the initial compression amount of the elastic member 123 decreases, and the force exerted by the elastic member 123 on the mouthpiece guide rod 1221 also decreases. The third channel 1241 refers to a channel structure with a certain length, and the third channel 1241 penetrates through the elastic force adjusting member 124.

[0057] In the embodiment, the elastic force adjusting member 124 is arranged at the second opening 1213, and the elastic member 123 is located between the elastic force adjusting member 124 and the first end of the working assembly 122, and the elastic force adjusting member 124 has a degree of freedom of movement along the axis of the main sleeve 121 relative to the main sleeve 121. The position of the elastic force adjusting member 124 can be adjusted along the axis of the main sleeve 121, so that the initial compression amount of the elastic member 123 can be adjusted, and the elastic force of the elastic member 123 during work can be adjusted, so that the extrusion force of the suction nozzle on the chip when the suction nozzle contacts the chip, that is, the die bonding force, can be controlled, and the use of the suction nozzle structure 12 is more convenient. Meanwhile, the third channel 1241 is arranged on the elastic force adjusting member 124, and the second opening 1213 is communicated with the outside through the third channel 1241, so that the elastic force adjusting member 124 can adjust the torque of the elastic member 123, and the communication between the second opening 1213 and the external air path is not affected by the elastic force adjusting member 124.

[0058] In addition, by arranging the elastic force adjusting member 124 at the second opening 1213, the second opening 1213 is located at the end region of the main sleeve 121, and after the main sleeve 121 is installed, the second opening 1213 and the elastic force adjusting member 124 are usually located at the uppermost position of the main sleeve 121, so that the elastic force adjusting member 124 is not blocked by other components, and the adjustment of the elastic force of the elastic member 123 is more convenient.

[0059] In one embodiment, referring to Figure 7 , the elastic force adjusting member 124 is connected with the inner wall of the first channel 1211 through threads. Specifically, the elastic force adjusting member 124 is connected with the inner wall of the first channel 1211 through threads, so that the installation of the elastic force adjusting member 124 is more firm and reliable. When the position of the elastic force adjusting member 124 needs to be adjusted, the elastic force adjusting member 124 is rotated along the axis thereof, so that the elastic force adjusting member 124 moves along the axis of the main sleeve 121 under the action of the threads, and the position adjustment of the elastic force adjusting member 124 is more convenient and accurate.

[0060] In one embodiment, referring to Figure 6 , the second end of the suction nozzle guide rod 1221 is detachably connected with the suction nozzle body 1222. By detachably connecting the suction nozzle body 1222 with the suction nozzle guide rod 1221, only the suction nozzle body 1222 which is prone to wear needs to be replaced after the working assembly 122 is used for a long time, so that the cost loss in the production process is reduced.

[0061] In one embodiment, referring to Figure 5 and Figure 6The limiting piece 125 is arranged at the first opening 1212 and is disassembled, the limiting piece 125 is provided with a avoiding structure, the avoiding structure is used for the suction nozzle guide rod 1221 to penetrate the limiting piece 125, the first end of the suction nozzle guide rod 1221 is provided with an anti-off part 1224, the anti-off part 1224 is used for cooperating with the limiting piece 125 to avoid the first end of the suction nozzle guide rod 1221 from being taken out of the first channel 1211. Specifically, the limiting piece 125 refers to a component with a certain volume, and the limiting piece 125 can be block-shaped, columnar or rod-shaped. The avoiding structure refers to a structure for avoiding other objects, which can be an avoiding hole, an avoiding groove or an avoiding space. The anti-off part 1224 also refers to a component with a certain volume, which can be block-shaped, columnar or plate-shaped. In the embodiment, by disassembling and arranging the limiting piece 125 at the first opening 1212, and providing the avoiding structure on the limiting piece 125, and providing the anti-off part 1224 at the first end of the suction nozzle guide rod 1221, the suction nozzle guide rod 1221 can be penetrated through the avoiding structure to realize the relative movement between the suction nozzle guide rod 1221 and the limiting piece 125 during installation. Then the limiting piece 125 is installed at the first opening 1212, so as to block the anti-off part 1224 by the limiting piece 125, without affecting the movement of the suction nozzle guide rod 1221, to avoid the first end of the suction nozzle guide rod 1221 from being taken out of the first channel 1211, so that the installation of the suction nozzle guide rod 1221 is more stable, and the stability of the suction nozzle structure 12 is improved.

[0062] In one embodiment, referring to Figure 5 With Figure 6 The mounting end cover 126 is further fixed on the swing arm body 11, the sealing structure 128 is arranged between the main sleeve body 121 and the mounting end cover 126, the main sleeve body 121 is sealingly connected with the mounting end cover 126 through the sealing structure 128 and can rotate relative to the mounting end cover 126, the fourth channel 1261 is further arranged on the mounting end cover 126, and the fourth channel 1261 is used for connecting the second opening 1213 with an external gas path. Specifically, the mounting end cover 126 refers to a component with a certain volume, which can be fixedly installed on the swing arm body 11 by clamping, welding or fastener connection. The fourth channel 1261 refers to a channel structure with a certain length, one end of the fourth channel 1261 is open and can be communicated with the second opening 1213, and the other end is open and used for external gas path communication. The sealing structure 128 refers to a structure or assembly that can seal the connection area of two components, and the sealing structure 128 can be a sealing ring, a sealing bearing or a sealing gasket.

[0063] In the embodiment, by rotating the main sleeve body 121 arranged on the swing arm body 11, the angle of the crystal can be finely adjusted by rotating the main sleeve body 121 when the crystal suction work is performed, so that the position and posture of the chip during die bonding are more accurate, and the die bonding is more accurate. At the same time, the mounting end cover 126 is fixedly arranged on the swing arm body 11, and the fourth channel 1261 is further arranged on the mounting end cover 126. The fourth channel 1261 is used to connect the second opening 1213 with the external air path, so that the main sleeve body 121 can still communicate with the external air path through the fourth channel 1261 while rotating. In addition, the sealing structure 128 is arranged between the main sleeve body 121 and the mounting end cover 126, so that the main sleeve body 121 can be sealingly connected with the mounting end cover 126 during rotation, and the sealing between the fourth channel 1261 and the second opening 1213 is better.

[0064] In an optional embodiment, referring to Figure 7 The sealing structure 128 includes a sealing ring arranged around the axis of the main sleeve body 121. Specifically, the sealing ring is a ring-shaped component with a certain elasticity, and the sealing ring can be made of rubber. The sealing ring can be sleeved on the outside of the main sleeve body 121. At the same time, the extrusion surfaces are arranged on the outside of the main sleeve body 121 and the mounting end cover 126. The sealing ring is pressed and fixed by the two extrusion surfaces, so as to realize the static sealing connection and dynamic sealing connection between the main sleeve body 121 and the mounting end cover 126.

[0065] In another optional embodiment, referring to Figure 7 The mounting end cover 126 is further provided with a containing groove. The first end of the main sleeve body 121 can be inserted into the containing groove, and the second opening 1213 is arranged at the first end of the main sleeve body 121. One end of the fourth channel 1261 is arranged at the bottom of the containing groove. At the same time, the sealing ring can be arranged around the mouth of the containing groove, so that the connection between the first channel 1211 and the fourth channel 1261 is more convenient, and the sealing between the second opening 1213 and the fourth channel 1261 is better, so that the mounting of the main sleeve body 121 and the mounting end cover 126 is more stable.

[0066] In an embodiment, referring to Figure 6The pipeline connecting column 1262 is arranged on the mounting end cover 126, and is used for plug-in cooperation with the connecting pipeline. The fourth channel 1261 penetrates the mounting end cover 126 and the pipeline connecting column 1262, and is arranged along the axis direction of the pipeline connecting column 1262. Specifically, the pipeline connecting column 1262 refers to a component with a certain height, which can be columnar, rod-shaped or block-shaped, etc. In the embodiment, the pipeline connecting column 1262 is arranged on the mounting end cover 126, and the fourth channel 1261 penetrates the mounting end cover 126 and the pipeline connecting column 1262. When the fourth channel 1261 is connected with the external air path, the pipeline in the external air path can be sleeved outside the pipeline connecting column 1262, so that the connection between the fourth channel 1261 and the external air path is more firm and stable, and the stability and safety of the suction nozzle structure 12 are improved.

[0067] In one embodiment, referring to Figure 2 With Figure 4 The transmission unit 14 includes a first pulley 141, a second pulley 142, and a transmission belt 143. The first pulley 141 is arranged on the main sleeve 121 and coaxially arranged with the main sleeve 121. The second pulley 142 is arranged on the driving end of the suction nozzle driving unit 13. The transmission belt 143 is arranged around the outside of the first pulley 141 and the second pulley 142. Specifically, the first pulley 141 and the second pulley 142 both refer to disc-shaped components with a certain diameter size. The transmission belt 143 refers to a flexible component that is annular as a whole. In the embodiment, the first pulley 141 is coaxially arranged with the main sleeve 121, the second pulley 142 is arranged on the driving end of the suction nozzle driving unit 13, and the transmission belt 143 is arranged around the outside of the first pulley 141 and the second pulley 142. The torque output by the suction nozzle driving unit 13 can be transmitted to the main sleeve 121 through the transmission belt 143, so as to drive the main sleeve 121 to rotate, and the overall adjustment of the suction nozzle structure 12 is more convenient.

[0068] In one optional embodiment, referring to Figure 4 The first pulley 141 and the main sleeve 121 are integrally formed. By integrally forming the first pulley 141 and the main sleeve 121, the structure of the main sleeve 121 can be reasonably arranged, and the length of the suction nozzle face swing arm body 11 can be reduced, so as to improve the accuracy of the suction nozzle structure 12 during crystal suction and crystal mounting.

[0069] In one embodiment, referring to Figure 6The mounting hole 117 is arranged on the swing arm body 11, the main sleeve body 121 is rotationally arranged in the mounting hole 117, the outer sleeve of the main sleeve body 121 is sleeved and arranged with the rotary positioning sleeve 127, the outer ring of the rotary positioning sleeve 127 abuts against the inner wall of the mounting hole 117, the number of the rotary positioning sleeve 127 is two, and the two rotary positioning sleeves 127 are respectively located on the two sides of the first belt pulley 141. Specifically, the rotary positioning sleeve 127 refers to a sleeve-shaped component with a certain length, the mounting hole 117 for mounting and containing the main sleeve body 121 is usually arranged on the swing arm body 11, the rotary positioning sleeve 127 is located between the inner wall of the mounting hole 117 and the outer surface of the main sleeve body 121, the rotary positioning sleeve 127 can limit the position of the main sleeve body 121 in the radial direction of the main sleeve body 121, so that the installation position of the main sleeve body 121 in the radial direction of the main sleeve body 121 is more accurate. The two rotary positioning sleeves 127 are respectively located on the two sides of the transmission structure, and the main sleeve body 121 is limited in the axial direction of the main sleeve body 121, so that the installation of the main sleeve body 121 in the axial direction of the main sleeve body 121 is more stable, and the stability of the suction nozzle structure 12 is improved.

[0070] In an optional embodiment, referring to Figure 5 With Figure 6 The rotary positioning sleeve 127 can be a rotary bearing, the inner ring of the rotary bearing is sleeved on the outer surface of the main sleeve body 121, and the outer ring of the rotary bearing abuts against the inner wall of the mounting hole 117 on the swing arm body 11. Through the rotary bearing, the rotation of the main sleeve body 121 is more flexible and convenient.

[0071] In an embodiment, referring to Figure 1 With Figure 8, the sliding structure 24 is arranged between the swing arm mechanism 100 and the positioning disc set 200, the sliding structure 24 comprises a sliding block 241 and a sliding rail unit 242, the sliding block 241 is slidably arranged on the first mounting surface 221 through the sliding rail unit 242, the swing arm mechanism 100 is fixedly installed on the sliding block 241, and the driving end of the swing arm driving unit 300 is connected with the sliding block 241. Specifically, the sliding structure 24 refers to an assembly for connecting two objects and enabling the two objects to slide relative to each other. The sliding block 241 refers to a component with a certain volume, and the sliding block 241 can be block-shaped, plate-shaped or a combination of various shapes. The sliding rail unit 242 refers to a component or assembly for connecting two components and enabling the two components to slide relative to each other, for example, the sliding rail unit 242 can adopt a cross rail, which is a high-precision linear motion guide device composed of two guide rails with V-shaped rails, roller retainer, cylindrical rollers and the like. In the embodiment, the sliding structure 24 is arranged between the swing arm mechanism 100 and the first mounting surface 221 of the positioning disc set 200, the sliding structure 24 comprises the sliding block 241 and the sliding rail unit 242, and the driving end of the swing arm driving unit 300 is connected with the sliding block 241, so that the swing arm mechanism 100 can slide along the first axis direction more conveniently.

[0072] In one embodiment, referring to Figure 8 to Figure 10 , the interior of the positioning disc set 200 is a hollow structure, the plurality of swing arm driving units 300 are located in the interior of the positioning disc set 200, and at least part of the sliding block 241 extends into the interior of the positioning disc set 200 and is connected with the driving end of the swing arm driving unit 300. Specifically, the interior of the positioning disc set 200 is a hollow structure, which means that a containing space is further arranged in the interior of the positioning disc set 200, so that the interior of the positioning disc set 200 can contain objects. The swing arm driving unit 300 can be connected to the inner wall of the positioning disc set 200 by means of clamping or fastener connection. In the embodiment, the interior of the positioning disc set 200 is arranged as a hollow structure, the plurality of swing arm driving units 300 are located in the interior of the positioning disc set 200, and at least part of the sliding block 241 extends into the interior of the positioning disc set 200 and is connected with the driving end of the swing arm driving unit 300, so that the swing arm driving unit 300 can be installed as close to the first axis as possible, thereby the overall weight of the positioning disc set 200 and the swing arm driving unit 300 can be concentrated in the direction close to the first axis, the rotational inertia of the positioning disc set 200 is reduced, the stop position of the swing arm mechanism 100 is more accurate, and the die bonding precision of the die bonding equipment is improved.

[0073] In an optional embodiment, referring to Figure 10The sliding block 241 includes a body portion 2411 and a connecting portion 2412. The body portion 2411 is slidably connected to the first mounting surface 221, and the connecting portion 2412 is connected between the body portion 2411 and the driving end of the swing arm drive unit 300. Specifically, both the body portion 2411 and the connecting portion 2412 refer to components with a certain volume. The body portion 2411 and the connecting portion 2412 can be block-shaped, plate-shaped, or a combination of various shapes. The body portion 2411 and the connecting portion 2412 can be an integral structure, for example, made by machining or casting. The body portion 2411 and the connecting portion 2412 can also be a separate structure, for example, the body portion 2411 and the connecting portion 2412 can be connected by plugging, welding, or fastener connection. In this embodiment, a clearance opening for avoiding the connecting part 2412 can be provided on the positioning disk assembly 200. When the main body 2411 needs to be connected to the drive end of the swing arm drive unit 300, the connecting part 2412 can pass through the clearance opening and be connected to the drive structure.

[0074] In one embodiment, see Figure 9 and Figure 10 The positioning disk assembly 200 has a mounting opening 23 on its side opposite to the drive end of the rotary drive mechanism 400. The mounting opening 23 connects the internal space of the positioning disk assembly 200 to the outside. A sealing base 28 is also detachably mounted on the mounting opening 23. Specifically, the mounting opening 23 refers to an opening structure with a certain area, and its shape can be circular, regular polygonal, or other shapes. The sealing base 28 refers to a plate-like component with a certain area, and its shape can match the shape of the mounting opening 23. The sealing base 28 can be detached and connected to the positioning disk assembly 200 through snap-fit, plug-in, or fastener connection. In this embodiment, by providing an installation opening 23 on the positioning disk assembly 200, it is easier to install the swing arm drive unit 300 into the interior of the positioning disk assembly 200. At the same time, a sealing base 28 is also removed and installed at the installation opening 23. After the components inside the positioning disk assembly 200 are installed, the sealing base 28 can seal the installation opening 23, preventing other components from entering the interior of the positioning disk assembly 200 through the installation opening 23, thus making the use of the positioning disk assembly 200 safer.

[0075] In an optional embodiment, please refer to Figure 9Supporting connecting blocks are arranged between the sealing base plate 28 and the positioning disc set 200. Specifically, the supporting connecting blocks refer to components with certain volumes, which can be block-shaped, column-shaped or plate-shaped structures. By arranging the supporting connecting blocks between the sealing base plate 28 and the positioning disc set 200, a clearance is formed between the sealing base plate 28 and the positioning disc set 200 after installation of the sealing base plate 28, so that at least part of the sliding block 241 can extend into the positioning disc set 200 through the clearance and be connected to the driving end of the swing arm driving unit 300, thereby avoiding damage to the strength of the positioning disc set 200 caused by the arrangement of the clearance structure on the positioning disc set 200, and ensuring the strength of the positioning disc set 200 under the premise of more convenient connection of the sliding block 241 and the swing arm driving unit 300.

[0076] In one embodiment, referring to Figure 9 The side of the sealing base plate 28 facing the positioning disc set 200 is provided with a plurality of oil groove structures 281 for accommodating foreign matter falling from the slide rail unit 242. The plurality of oil groove structures 281 are respectively located in the lower region of the slide rail unit 242 along the first axis direction. Specifically, the oil groove structure 281 refers to a certain space accommodating structure, which can be a groove structure, a flow guide groove, etc. In the present embodiment, by arranging the cross rail between the sliding block 241 and the first mounting surface 221, the sliding of the sliding block 241 is more convenient, stable and accurate. At the same time, the side of the sealing base plate 28 facing the positioning disc set 200 is provided with a plurality of oil groove structures 281 for accommodating foreign matter falling from the slide rail unit 242, such as lubricating oil, etc. The plurality of oil groove structures 281 are all located in the lower region of the slide rail unit 242 along the first axis direction, i.e. directly below the slide rail unit 242. This can avoid oil stains or foreign matter from falling onto the chip during work, making the die bonding of the die bonder more secure and reliable.

[0077] In an optional embodiment, referring to Figure 9 to Figure 10A plurality of mounting grooves 223 are arranged on the outer periphery of the positioning disc set 200, the plurality of mounting grooves 223 are uniformly distributed around the first axis, and the depth direction of the plurality of mounting grooves 223 is arranged in a direction perpendicular to the first axis, and the first mounting surface 221 is located on the bottom surface of the mounting groove 223. Specifically, the mounting groove 223 refers to a groove structure with a certain depth. By arranging a plurality of mounting grooves 223 on the outer periphery of the positioning disc set 200, the first mounting surface 221 is located on the bottom surface of the mounting groove 223, so that the position of the mounting after the sliding block 241 and the slide rail unit 242 can be as close to the first axis as possible, so that the overall weight of the entire positioning disc mechanism can be concentrated in the direction close to the first axis, thereby reducing the inertia when the positioning disc set 200 rotates, and further making the stop position of the swing arm mechanism 100 more accurate after moving to the position, thereby improving the accuracy of die bonding.

[0078] In one embodiment, referring to Figure 10 , the positioning disc mechanism further comprises a controller 26 for controlling the working state of the electrical element on the positioning disc set 200, and the controller 26 is fixedly arranged on the inner wall of the positioning disc set 200, and the center of gravity of the controller 26 is located on the first axis. Specifically, the controller 26 refers to a device for controlling the operation of other equipment or electrical components, and in this embodiment, it refers to the physical controller 26, and the controller 26 itself has a certain volume and weight. The controller 26 can be a PLC (Programmable Logic Controller), an MCU (Micro-Controller Unit) or a DCS (Distributed Control System). The controller 26 can be fixed in the interior of the positioning disc set 200 by clamping, bonding or fastener connection and the like. By locating the center of gravity of the controller 26 on the first axis, the overall focus of the positioning disc set 200 and the controller 26 can be close to the first axis after the controller 26 is installed, so that the rotation of the positioning disc set 200 is more stable, and the rotational inertia of the positioning disc set 200 is also reduced, thereby improving the accuracy of die bonding.

[0079] In one embodiment, referring to Figure 8 and Figure 9The outer periphery of the positioning disc set 200 is provided with a second mounting surface 222, the second mounting surface 222 is located between the two first mounting surfaces 221, the number of the second mounting surfaces 222 is multiple, and the multiple second mounting surfaces 222 are also uniformly distributed around the first axis. Specifically, the second mounting surface 222 refers to a surface structure with a certain area, and the second mounting surface 222 can be a plane structure, or a curved surface structure. In this embodiment, by providing multiple second mounting surfaces 222 on the outer periphery of the positioning disc set 200, other components such as the air path control group 27 can be installed on the second mounting surface 222 while the swing arm mechanism 100 is installed on the first mounting surface 221, so that the integration of the entire positioning disc mechanism is higher. And the multiple second mounting surfaces 222 are also uniformly distributed around the first axis, and the second mounting surfaces 222 are located between the two first mounting surfaces 221, which are arranged alternately. The components installed on the second mounting surface 222 can also be uniformly distributed around the first axis, thereby improving the stability of the positioning disc set 200 during rotation.

[0080] In an optional embodiment, referring to Figure 10 The second mounting surface 222 can also be provided with a heat dissipation hole 224 for air flow, and the sealing base plate 28 is provided with a heat dissipation hole 224 for air flow. The heat dissipation hole 224 refers to a through hole structure penetrating through an object, and the number of the heat dissipation hole 224 is usually multiple, and the multiple heat dissipation holes 224 are uniformly distributed in a specified area. By providing the heat dissipation hole 224 on the second mounting surface 222 and the sealing base plate 28, the interior of the positioning disc set 200 can exchange air with the outside, avoiding overheating of the components installed in the interior of the positioning disc set 200 due to heat accumulation, making the components located in the interior of the positioning disc set 200 safer to use, thereby making the entire positioning disc mechanism safer and more reliable to use.

[0081] In an embodiment, referring to Figure 8 With Figure 9 The second mounting surface 222 is provided with an air path control group 27, and the air path control group 27 is used to control the communication and disconnection of the air path at the suction nozzle structure 12. Specifically, the air path control group 27 refers to a component or assembly for controlling the communication and disconnection of the air path, and the air path control group 27 can include components such as solenoid valves. In this embodiment, by arranging the air path control group 27 on the second mounting surface 222, and connecting the control end of the air path control group 27 with the controller 26, the control of the suction nozzle structure 12 on each swing arm mechanism 100 is more convenient, and the weight distribution of the positioning disc set 200 after installation of the air path control group 27 is balanced in the direction around the first axis, thereby making the rotation of the positioning disc set 200 more stable.

[0082] In an embodiment, referring to Figure 8The positioning disc set 200 comprises a main disc body 21 and a main cylinder part 22. The main disc body 21 is arranged at the end of the main cylinder part 22. The first mounting surface 221 is arranged on the outer periphery of the main cylinder part 22 and is uniformly distributed around the axis of the main cylinder part 22. Specifically, the main disc body 21 is a plate-shaped structure with a certain area. One side of the main disc body 21 is connected to the driving end of the rotary driving mechanism 400. The other side of the main disc body 21 abuts against one opening of the main cylinder part 22. The main cylinder part 22 is a cylindrical part with a certain height, which is formed by surrounding a plate-shaped part. The main disc body 21 and the main cylinder part 22 can be integrally formed, for example, by pressure casting, machining or casting, so that the overall strength of the positioning disc set 200 is better. The main disc body 21 and the main cylinder part 22 can also be a split structure. The main disc body 21 and the main cylinder part 22 can be connected to each other by welding, fasteners or clamping, which can reduce the manufacturing cost. In this embodiment, the main disc body 21 is arranged at the end of the main cylinder part 22 to form the positioning disc set 200. The first mounting surface 221 is arranged on the outer periphery of the main cylinder part 22 and is uniformly distributed around the axis of the main cylinder part 22, so that the structure of the entire positioning disc set 200 is simpler.

[0083] In an optional embodiment, referring to Figure 8 and Figure 9 The side of the main disc body 21 away from the main cylinder part 22 is further provided with a connecting handle part 25. The first end of the connecting handle part 25 is connected to the driving end of the rotary driving mechanism 400. The second end of the connecting handle part 25 is connected to the side of the main disc body 21. The second end of the connecting handle part 25 can be connected to the main disc body 21 by clamping, inserting or fasteners. Specifically, the connecting handle part 25 is a part with a certain length, which can be columnar or block-shaped. The connecting handle part 25 is arranged on the side of the main disc body 21 away from the main cylinder part 22, so that the connection between the positioning disc set 200 and the rotary driving mechanism 400 is more convenient and firm.

[0084] In an embodiment, referring to Figure 8 The cross section of the main cylinder part 22 is a regular polygon, and the shape of the main disc body 21 matches the cross section shape of the main cylinder part 22. Specifically, the regular polygon can be a hexagon. By arranging the cross section of the main cylinder part 22 as a regular polygon and matching the shape of the main disc body 21 with the cross section shape of the main cylinder part 22, the first mounting surface 221 and the second mounting surface 222 can be arranged on the outside of the main cylinder part 22, so that the first mounting surface 221 and the second mounting surface 222 can be planar structures, thereby making the installation of the swing arm structure or other components more convenient. The cross section of the main cylinder part 22 as a regular polygon also makes the overall strength of the main cylinder part 22 better.

[0085] In an optional embodiment, referring to Figure 1 The die bonding turntable device can further comprise an air path rotary joint 500 and a wireless slip ring assembly 600, so that the air path on the positioning disc set 200 and the swing arm mechanism 100 can be connected with the outside while the positioning disc set 200 and the swing arm mechanism 100 are rotating, and the electrical components (such as the controller 26 or the electromagnetic valve, etc.) on the positioning disc set 200 and the swing arm mechanism 100 can be electrically connected with the external main control unit through the wireless slip ring assembly 600, so that the use and control of the die bonding turntable device are more convenient. The specific structures of the air path rotary joint 500 and the wireless slip ring assembly 600 are conventional technical means in the prior art, and will not be described here.

[0086] In a second aspect, a die bonding device is provided, comprising the die bonding turntable device of any one of the above. It can be understood that the beneficial effects of the second aspect can be referred to the related description in the first aspect.

[0087] In an optional embodiment, the die bonding turntable device can be arranged on a base, and an image acquisition unit can also be arranged on the base, the image acquisition unit being located on the movement path of the suction nozzle structure 12 of the swing arm mechanism 100, the image acquisition unit being used for shooting the state of the chip in the transportation process, wherein the state of the chip comprises the rotation angle of the chip, and the state data of the chip is transmitted to the controller 26, so that the angle of the suction nozzle and the rotation angle of the chip are adjusted through the suction nozzle driving unit 13, and the accuracy of die bonding is improved.

[0088] The image acquisition unit can adopt a CCD (Charge-coupled Device) camera, and adopts a static flying shot mode, so that the shooting efficiency is improved and the image is clearer.

[0089] The above is only a preferred embodiment of the present application, and only the technical principle of the present application is specifically described, and these descriptions are only for explaining the principle of the present application, and cannot be explained as a limitation on the protection scope of the present application in any way. Based on the above explanation, any modification, equivalent replacement and improvement within the spirit and principle of the present application, and other specific embodiments of the present application which can be thought by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A flip chip bonder tower apparatus, comprising: The application relates to a chip suction device, which comprises a rotating driving mechanism, a positioning disc set, a swing arm driving unit and a swing arm mechanism, the positioning disc set has the freedom of rotating around a first axis, a plurality of first mounting surfaces are arranged on the positioning disc set and are uniformly distributed around the first axis, the driving end of the rotating driving mechanism is connected with the positioning disc set and is used for driving the positioning disc set to rotate around the first axis, the swing arm mechanism is in a plurality of numbers, the swing arm mechanism is slidably arranged on the first mounting surface, and is used for sucking or placing a chip, the swing arm driving unit is in a plurality of numbers and is arranged in one-to-one correspondence with the swing arm mechanism, the swing arm driving unit is arranged on the positioning disc set and is used for driving the corresponding swing arm mechanism to reciprocate along the first axis direction.

2. The flip chip bonder of claim 1, wherein the first and second stages are configured to move in a direction perpendicular to the first and second stages. The swing arm mechanism comprises a suction nozzle structure, a swing arm body and a suction nozzle driving unit, the suction nozzle structure is used for sucking a chip through negative pressure, the swing arm body has oppositely arranged die bonding ends and mounting ends, the mounting end is slidably connected with the first mounting surface, the suction nozzle structure is rotatably arranged on the die bonding end of the swing arm body, the suction nozzle driving unit is arranged on the region of the swing arm body close to the mounting end and is used for driving the suction nozzle structure to rotate to adjust the chip, and a transmission unit is arranged between the suction nozzle driving unit and the suction nozzle structure.

3. The flip chip bonder of claim 2 wherein the first and second stages are movable in a direction parallel to the first and second stages. The swing arm body comprises a bottom surface part and two mutually spaced side surface parts, the bottom surface part is connected between the two side surface parts, the two side surface parts and the bottom surface part surround a containing space, the transmission unit and the driving end of the suction nozzle driving unit are located in the containing space, the bottom surface part is a closed structure, and a through hole is further arranged on the side surface part and is used for reducing the resistance when the swing arm body horizontally rotates.

4. The flip chip bonder of claim 2 wherein the first and second stages are each a linear motor stage. The suction nozzle structure comprises a main sleeve body, a working assembly and an elastic piece, the main sleeve body is rotatably arranged on the end of the swing arm body, the main sleeve body has a first channel, the first channel has a first opening and a second opening, the working assembly comprises a suction nozzle guide rod and a suction nozzle body, the first end of the suction nozzle guide rod is movably inserted into the first channel, the second end of the suction nozzle guide rod extends to the outside of the main sleeve body through the first opening, the suction nozzle body is arranged on the second end of the suction nozzle guide rod, the suction nozzle body is used for adsorbing a chip, a second channel is arranged on the suction nozzle guide rod and is used for connecting the suction nozzle body with the first channel, the elastic piece is located in the first channel, the elastic piece abuts against the first end of the suction nozzle guide rod, and the elastic piece is used for deforming when the suction nozzle body is extruded to buffer the working assembly.

5. The flip chip bonder of claim 4, wherein the first and second electrodes are formed of a material selected from the group consisting of platinum, gold, silver, copper, aluminum, and alloys thereof. A elastic force adjusting piece is arranged at the second opening, the elastic force adjusting piece has the freedom of moving along the axis of the first channel relative to the main sleeve body, one end of the elastic piece abuts against the elastic force adjusting piece and the other end abuts against the suction nozzle guide rod, the elastic force adjusting piece is used for adjusting the initial compression amount of the elastic piece by changing the position of the elastic force adjusting piece, and the elastic force adjusting piece has a third channel which is used for connecting the first channel with the outside.

6. The flip chip bonder of claim 5, wherein the first and second electrodes are formed of a material selected from the group consisting of gold, silver, copper, aluminum, and alloys thereof. The swing arm body is further provided with a mounting end cover, a sealing structure is arranged between the main sleeve body and the mounting end cover, the main sleeve body is sealingly connected with the mounting end cover through the sealing structure and can rotate relative to the mounting end cover, a fourth channel is further arranged on the mounting end cover, and the fourth channel is used for connecting the second opening with an external air path.

7. The flip chip bonder of claim 1, wherein the capillary is formed of a material having a surface energy of 30 to 50 dyne / cm. The swing arm mechanism and the positioning disc group are both provided with a sliding structure, the sliding structure comprises a sliding block and a sliding rail unit, the sliding block is slidingly arranged on the first mounting surface through the sliding rail unit, the swing arm mechanism is fixedly installed on the sliding block, and the driving end of the swing arm driving unit is connected with the sliding block.

8. The flip chip bonder of claim 7 wherein the first and second stages are movable in a direction parallel to the first and second stages. The positioning disc group is internally hollow, a plurality of swing arm driving units are located in the positioning disc group, and at least part of the sliding block extends into the positioning disc group and is connected with the driving end of the swing arm driving unit.

9. The flip chip bonder of claim 8 wherein the first and second stages are movable in a direction parallel to the first and second stages. The side of the positioning disc group away from the driving end of the rotary driving mechanism is provided with a mounting opening, the mounting opening is used for connecting the internal space of the positioning disc group with the outside, and a sealing base plate is arranged on the mounting opening.

10. A die bonding apparatus, characterized in that, A device for transferring a die-bonding tower as claimed in any one of claims 1 to 9 is included.

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