Quartz boat capable of preventing wafer from falling off

Abstract

The utility model provides a quartz boat capable of preventing a wafer from falling, which belongs to the technical field of quartz product processing, and comprises a quartz boat body and a limiting assembly, the quartz boat body comprises a frame body, a lower groove rod group and an upper groove rod group; the frame body is provided with two parallel end plates, a containing space is formed between the two end plates, and the lower groove rod set and the upper groove rod set are both located in the containing space and used for limiting wafers. The upper groove rod group comprises two upper groove rods which are symmetrically arranged, and a port area allowing a wafer to be inserted is arranged between the two upper groove rods; the limiting assembly comprises two limiting groove rods which are symmetrically arranged, the two limiting groove rods are located on the upper side of the port area, the distance between the two limiting groove rods is smaller than or equal to the width of the port area, and the limiting assembly is used for limiting the edge of the wafer. According to the quartz boat capable of preventing the wafer from falling off, the two limiting groove rods are additionally arranged on the outer side of the port area, the port area is covered and shielded while the wafer is allowed to pass through, and the wafer is prevented from falling off from the port area when rotating.

Description

TECHNICAL FIELD

[0001] The utility model belongs to quartz product processing technical field, more specifically, relate to a quartz boat that prevents wafer from falling. BACKGROUND

[0002] Quartz boat is mainly used in diffusion section, annealing section and other process sections of photovoltaic cell production, and is used as a semi-finished product cell wafer storage carrier. In the manufacturing process of photovoltaic cell, quartz boat is mainly used for carrying and transmitting silicon wafer. The existing boat body groove is narrow and shallow, generally quartz boat groove depth is 15-20mm, and the utilization rate of silicon wafer is low.

[0003] For vertical quartz boat, the vertical quartz boat will rotate during process treatment, and there is a risk of wafer falling off. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a quartz boat that prevents wafer from falling, and aims at preventing the problem of wafer falling off during rotation.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of providing a quartz boat that prevents wafer from falling, comprising:

[0006] Quartz boat body, the quartz boat body includes frame body, lower groove rod group and upper groove rod group, the frame body has two parallel end plates, the accommodating space is formed between the two end plates, the lower groove rod group and the upper groove rod group are located in the accommodating space for limiting wafer, the upper groove rod group includes two symmetrical upper groove rods, and the port area allowing wafer insertion is formed between the two upper groove rods.

[0007] Limiting assembly, the limiting assembly is located in the accommodating space, the limiting assembly includes two symmetrical limiting groove rods, the two limiting groove rods are located on the upper side of the port area, and the spacing of the two limiting groove rods is less than or equal to the width of the port area, for limiting the edge of wafer.

[0008] As another embodiment of the application, the included angle between the two limiting groove rods and the center line of the quartz boat body is greater than 180 °.

[0009] As another embodiment of the application, the upper groove rod has a plurality of first groove bodies arranged at intervals along the length direction, and the first groove bodies are towards the port area.

[0010] The limiting groove rod has a plurality of positioning grooves arranged at intervals along the length direction, the positioning grooves and the first groove bodies one-to-one correspond, and the depth direction of the positioning grooves and the first groove bodies is consistent.

[0011] As another embodiment of the present application, the opening end outer edge of the positioning slot is flush with the opening end outer edge of the first slot body.

[0012] As another embodiment of the present application, the depth of the positioning slot is less than the depth of the first slot body.

[0013] As another embodiment of the present application, the width of the positioning slot is less than the width of the first slot body.

[0014] As another embodiment of the present application, the diameter of the limiting slot rod is less than the diameter of the upper slot rod, and the depth of the positioning slot is greater than the radius of the limiting slot.

[0015] As another embodiment of the present application, the lower slot rod set comprises two lower slot rods, and the two lower slot rods are symmetrically arranged, and the lower slot rods are arranged in parallel and spaced apart from the upper slot rods, and the lower slot rods are used for bearing the bottom of the wafer, and the second slot body is arranged on the lower slot rod.

[0016] As another embodiment of the present application, the width of the second slot body is consistent with the width of the first slot body, and the opening direction of the second slot body is towards the center of the quartz boat body.

[0017] As another embodiment of the present application, the slot bottom of the second slot body has a limiting chamfer, and the opening end of the second slot body has a guide chamfer.

[0018] The quartz boat for preventing wafer from falling has the advantages that compared with the prior art, the quartz boat for preventing wafer from falling of the utility model, the lower slot rod set and the upper slot rod set of the quartz boat body limit the wafer in the containing space, the port area between the upper slot rod set is used as the access port of the wafer, two limiting slot rods are added outside the port area, the spacing of the two limiting slot rods is less than or equal to the width of the port area, the covering and shielding of the port area are increased while the wafer is allowed to pass, so that the wafer is prevented from falling off from the port area when rotating. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without paying creative labor.

[0020] Figure 1 The longitudinal sectional view of the quartz boat for preventing wafer from falling provided in the embodiments of the utility model is shown in the drawings.

[0021] Figure 2 The sectional view along Figure 1 the line A-A in the drawings.

[0022] Figure 3 The slotting detail view of the upper slot bar provided by the embodiment of the utility model;

[0023] Figure 4 The slotting detail view of the upper slot bar provided by the embodiment of the utility model;

[0024] Figure 5 The slotting detail view of the lower slot bar provided by the embodiment of the utility model.

[0025] In the drawing: 1, end plate; 2, limiting slot bar; 3, upper slot bar; 4, lower slot bar; 5, positioning slot; 6, first slot body; 7, second slot body; 8, limiting chamfer; 9, guide chamfer. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical schemes and beneficial effects to be solved by the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and not to limit the utility model.

[0027] Please refer to Figures 1 to 5 The quartz boat for preventing wafers from falling provided by the utility model will be described. The quartz boat for preventing wafers from falling includes a quartz boat body and a limiting assembly, the quartz boat body includes a frame body, a lower slot bar group 4 and an upper slot bar group 3; the frame body has two parallel end plates 1, a containing space is formed between the two end plates 1, and the lower slot bar group 4 and the upper slot bar group 3 are both located in the containing space for limiting wafers; the upper slot bar group 3 includes two symmetrically arranged upper slot bars 3, and a port area allowing wafers to be inserted is formed between the two upper slot bars 3; the limiting assembly is located in the containing space, and the limiting assembly includes two symmetrically arranged limiting slot bars 2, the two limiting slot bars 2 are located on the upper side of the port area, and the spacing between the two limiting slot bars 2 is less than or equal to the width of the port area for limiting the edges of wafers.

[0028] Compared with the prior art, the lower slot bar group 4 and the upper slot bar group 3 of the quartz boat body limit wafers in the containing space, the port area between the upper slot bar group 3 serves as the access port of wafers, two limiting slot bars 2 are added on the outer side of the port area, the spacing between the two limiting slot bars 2 is less than or equal to the width of the port area, the covering and shielding of the port area are increased while allowing wafers to pass through, so that the wafers are prevented from falling off from the port area when rotating.

[0029] In some possible embodiments, please refer to Figure 2, the included angle between the center line of the two limiting groove rods 2 and the quartz boat body is greater than 180°. That is, the cross section of the limiting groove rod 2 is circular, the centers of the two limiting groove rods 2 are connected with the center of the quartz boat body, and the included angle between the two connecting lines is a, and the angle a is greater than 180°. The centers of the two upper groove rods 3 are connected with the center of the quartz boat body, and the included angle between the two connecting lines is also greater than 180°.

[0030] The included angle between the center line of the two limiting groove rods 2 and the center line of the quartz boat body is less than the included angle between the upper groove rod 3 and the center line of the quartz boat body.

[0031] In some possible embodiments, referring to Figures 1 to 4 The upper groove rod 3 has a plurality of first grooves 6 arranged along the length direction and spaced apart, and the first grooves 6 are towards the port area; the limiting groove rod 2 has a plurality of positioning grooves 5 arranged along the length direction and spaced apart, and the positioning grooves 5 and the first grooves 6 correspond one by one, and the depth direction of the positioning grooves 5 and the first grooves 6 is consistent.

[0032] The length direction of the first groove 6 extends to the outer side wall of the upper groove rod 3 at both ends, forming a through groove structure; correspondingly, the length direction of the positioning groove 5 extends to the outer side wall of the limiting groove rod 2 at both ends, also forming a through groove structure.

[0033] The opening end of the first groove 6 of the upper groove rod 3 is towards the direction of the port area, and the two upper groove rods 3 are symmetrically arranged, so that the openings of the two first grooves 6 are opposite. The positioning groove 5 on the limiting groove rod 2 is parallel to the first groove 6, and the opening direction is also towards the port area. And the positioning groove 5 and the first groove 6 correspond one by one, and are spaced apart up and down. In the process of placing the wafer, the wafer passes through the gap between the two opposite positioning grooves 5, the gap between the two first grooves 6 and enters the containing space in sequence, until the lower end of the wafer abuts against the two lower groove rods 4, and the upper end of the wafer is limited by the two symmetric first grooves 6 on both sides.

[0034] Optionally, the distance between the two limiting groove rods 2 is equal to the width of the port area, and there is a gap between the limiting groove rod 2 and the upper groove rod 3. When the distance between the two limiting groove rods 2 is equal to the width of the port area, the outer edge of the opening end of the positioning groove 5 is flush with the outer edge of the first groove 6. In order to facilitate the limiting of the wafer, the depth of the positioning groove 5 is less than the depth of the first groove 6, so that the groove bottom of the positioning groove 5 is higher than the groove bottom position of the first groove 6; the width of the positioning groove 5 is less than the width of the first groove 6.

[0035] In some possible embodiments, referring to Figures 2 to 4 The diameter of the limiting groove rod 2 is less than the diameter of the upper groove rod 3, and the depth of the positioning groove 5 is greater than the radius of the limiting groove.

[0036] Since the end plate 1 of the quartz boat body is circular, a limiting slot bar 2 with a diameter smaller than that of the upper slot bar 3 can be used during installation to reduce the installation space of the limiting slot bar 2. In addition, since the limiting slot bar 2 is only used for auxiliary limiting here, the force it bears is smaller than that of the upper slot bar 3 and the lower slot bar 4, so selecting a smaller diameter limiting slot bar 2 can save costs.

[0037] The groove depth of the positioning groove 5 formed on the limiting slot bar 2 is greater than the radius of the limiting slot bar 2; the groove depth of the first groove body 6 formed on the upper slot bar 3 is equal to the radius of the upper slot bar 3. In this way, the edge of the limiting slot bar 2 is flush with the edge of the upper slot bar 3 on the side close to the port area, while the groove bottom of the positioning groove 5 exceeds the groove bottom of the first groove body 6.

[0038] In some possible embodiments, referring to Figure 1 and Figure 2 , the lower slot bar 4 group includes two lower slot bars 4, which are symmetrically arranged, and are arranged in parallel and spaced apart from the upper slot bar 3. The lower slot bar 4 is used to carry the bottom of the wafer, and the second groove body 7 is formed on the lower slot bar 4.

[0039] The two lower slot bars 4 are arranged in parallel and symmetrically, and the two lower slot bars 4 are arranged in parallel with the upper slot bar 3. The centers of the two lower slot bars 4 are respectively connected with the center of the quartz boat body, and the included angle between the two lines is greater than or equal to 90°, and the included angle is not more than 120°.

[0040] Optionally, the second groove body 7 formed on the lower slot bar 4 is used to limit the wafer; the width of the second groove body 7 is consistent with the width of the first groove body 6, and the second groove body 7 corresponds to the first groove body 6 one by one. A corresponding group of first groove bodies 6 and second groove bodies 7 are located in the same plane.

[0041] The groove bottom of the second groove body 7 is a plane, and the groove bottom of the second groove body 7 is perpendicular to the radial direction of the quartz boat body, so as to ensure that the opening direction of the second groove body 7 is towards the center of the quartz boat body.

[0042] The two ends of the length direction of the second groove body 7 are extended to the outer edge of the lower slot bar 4, so that the second groove body 7 forms a through groove structure.

[0043] In some possible embodiments, referring to Figures 1 to 5 , the groove bottom of the second groove body 7 has a limiting chamfer 8, and the opening end of the second groove body 7 has a guide chamfer 9.

[0044] In order to facilitate the wafer to smoothly enter the second groove body 7, a guide chamfer 9 is arranged at the opening end of the second groove body 7, and the guide chamfer 9 is C0.5, that is, a 45° chamfer, and the length of the right angle side is 0.5mm. Similarly, a guide chamfer 9 is arranged at the opening of the first groove body 6 and the opening of the positioning groove 5, and the guide chamfer 9 is C0.5.

[0045] The second groove body 7 has a limiting chamfer 8 for fitting a wafer at the groove bottom, the limiting chamfer 8 is located between the groove bottom and the sidewall of one side, the limiting chamfer 8 is C1, that is, a 45° chamfer, and the length of the right angle side is 1mm.

[0046] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A quartz boat for preventing a wafer from falling, characterized by, The utility model relates to a quartz boat body, the quartz boat body includes frame body, lower slot stick (4) group and upper slot stick (3) group, the frame body has two parallel end plate (1), the space of containing is formed between two end plate (1), and the lower slot stick (4) group and the upper slot stick (3) group are located in the space of containing for limiting wafer, the upper slot stick (3) group includes two symmetrical upper slot stick (3), and the port area that admits wafer insertion is between two upper slot stick (3). The utility model relates to a limiting assembly, the limiting assembly is located in the space of containing, the limiting assembly includes two symmetrical limiting slot stick (2), and two limiting slot stick (2) are located on the upside of port area, and the interval of two limiting slot stick (2) is less than or equal to the width of port area, for limiting the edge of wafer. The included angle of two limiting slot stick (2) and the center line of the quartz boat body is greater than 180 DEG.

2. The quartz boat for preventing a wafer from falling according to claim 1, wherein The upper slot stick (3) has a plurality of first slot body (6) that are spaced apart along the length direction, and the first slot body (6) is towards the port area.

3. The wafer falling prevention quartz boat according to Claim 1, wherein The limiting slot stick (2) has a plurality of positioning slot (5) that are spaced apart along the length direction, the positioning slot (5) and the first slot body (6) one-to-one correspondence, and the depth direction of the positioning slot (5) and the first slot body (6) is consistent. The opening end outer edge of the positioning slot (5) is flush with the opening end outer edge of the first slot body (6).

4. The wafer falling prevention quartz boat according to Claim 3, wherein The depth of the positioning slot (5) is less than the depth of the first slot body (6).

5. The wafer falling prevention quartz boat according to Claim 4, wherein The width of the positioning slot (5) is less than the width of the first slot body (6).

6. The wafer falling prevention quartz boat according to claim 4, wherein The diameter of the limiting slot stick (2) is less than the diameter of the upper slot stick (3), and the depth of the positioning slot (5) is greater than the radius of the limiting slot.

7. The wafer falling prevention quartz boat according to Claim 3, wherein The lower slot stick (4) group includes two lower slot stick (4), and two lower slot stick (4) are symmetrically arranged, the lower slot stick (4) is parallel to the upper slot stick (3) and is spaced apart, the lower slot stick (4) is used for bearing the bottom of wafer, and the second slot body (7) is formed in the lower slot stick (4).

8. The wafer falling prevention quartz boat according to Claim 3, wherein The width of the second slot body (7) is consistent with the width of the first slot body (6), and the opening direction of the second slot body (7) is towards the center of the quartz boat body.

9. The wafer falling prevention quartz boat according to Claim 8, wherein The slot bottom of the second slot body (7) has a limiting chamfer (8), and the opening end of the second slot body (7) has a guide chamfer (9).

10. The wafer falling prevention quartz boat according to Claim 8, wherein ​

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