Clamp for assembling wafer boat

Abstract

The utility model relates to the technical field of clamps, and discloses a clamp for wafer boat assembly, which comprises a support frame, a bending plate, a thumb cylinder, a clamping jaw, a linear bearing, a guide shaft, a clamping block, a spring and a driving piece. During use, after a quartz disc is placed on the top surface of the second circular plate, the clamping blocks on the two sides can clamp the quartz disc under the elastic action of the springs on the two sides. The driving piece is controlled to work, the three bending plates can be made to be close to or separated from one another, then the distance between the three thumb air cylinders is adjusted, and finally the positions of the three sets of clamping jaws are changed. And then one ends of the three quartz rods are sequentially placed on the top surface of the clamped quartz disc and are positioned among the three groups of clamping jaws, and the three thumb cylinders are sequentially controlled to work, so that the fixing work of the three quartz rods can be completed. At the moment, the three quartz rods and the clamped quartz disc can be welded. In the welding process, the quartz rod and the quartz disc are clamped and fixed, so that position change can be prevented, and the welding effect is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of clamps, for example to a clamp for assembling a crystal boat. BACKGROUND

[0002] A quartz boat automatic welding machine is disclosed in the related technology (publication number: CN117798577B), which comprises a machine body, a support table is attached to the inner side of the end of the machine body, the two ends of the support table are slidably attached to the guide slots on the side walls of the machine body to form a sliding limiting structure, a power screw is threadedly connected to the bottom of the support table and arranged horizontally to form a transmission structure, a servo motor is arranged at the end of the power screw, and the shaft of the power screw penetrates through the machine body. It also includes a moving block, the vertical rod at the bottom of the moving block is slidably inserted into the support table, and a horizontal control member is rotatably inserted into the middle of the moving block. It also includes a first support frame and a second support frame, the grooves on the top surfaces of the first support frame and the second support frame are used to position the quartz rods.

[0003] In the process of implementing the above-mentioned embodiments, it is found that at least the following problems exist in the related technology:

[0004] The quartz boat automatic welding machine positions the quartz rods through the grooves on the first support frame and the second support frame, so as to facilitate the subsequent welding work. Moreover, the positions of the first support frame and the second support frame can be adjusted to adapt to the welding work of quartz boats of different sizes. However, due to the lack of corresponding limiting mechanisms, it is difficult to fix the positions of the quartz rods. During the welding process, the quartz rods are prone to move or roll in the grooves of the first support frame and the second support frame, thereby affecting the welding effect.

[0005] It should be noted that the information disclosed in the above background section is only used to strengthen the understanding of the background of the present application, and therefore can include information that does not constitute prior art known to those of ordinary skill in the art. CONTENT OF THE UTILITY MODEL

[0006] In order to have a basic understanding of some aspects of the disclosed embodiments, the following is a simple summary. The summary is not a general review, nor is it intended to determine the key / important components or to delineate the scope of protection of these embodiments, but as a prelude to the detailed description below.

[0007] The present application provides a clamp for assembling a crystal boat to ensure the welding effect.

[0008] In some embodiments, the one wafer boat assembly clamp comprises: a support frame, the support frame comprising a first circular plate and a second circular plate coaxially distributed, along the height direction of the support frame, the first circular plate being below the second circular plate; bending plates, slidably mounted on the top surface of the first circular plate along the radial direction of the first circular plate, and distributed around the second circular plate, the number of the bending plates being three, two of the three bending plates being symmetrically distributed on both sides of the other bending plate at 180°; thumb air cylinders, respectively mounted on the three bending plates along the height direction of the support frame; clamping jaws, respectively mounted on the two moving ends of each thumb air cylinder, along the height direction of the support frame, the six clamping jaws being above the second circular plate; linear bearings, respectively mounted on the top surface of the second circular plate along the radial direction of the second circular plate, and located on both sides of the second circular plate, the two linear bearings being symmetrically distributed at 180°; guide shafts, respectively slidably penetrating the two linear bearings; clamping blocks, respectively mounted on the opposite ends of the two guide shafts; springs, respectively sleeved on the two guide shafts, and respectively located between the two clamping blocks and the two linear bearings; and a driving member, mounted between the first circular plate and the three bending plates, configured to drive the three bending plates to move closer to or away from each other.

[0009] Optionally, the support frame further comprises: a first support rod, mounted between the opposite surfaces of the first circular plate and the second circular plate along the height direction of the support frame.

[0010] Optionally, the support frame further comprises: a second support rod, uniformly mounted around the bottom surface of the first circular plate along the height direction of the support frame.

[0011] Optionally, the driving member comprises: a motor, mounted at the center of the bottom surface of the first circular plate, the rotating end of the motor penetrating the first circular plate; a disc, mounted on the rotating end of the motor; and connecting rods, respectively rotatably connected between the edges of the disc and the three bending plates.

[0012] Optionally, the driving member further comprises: pin shafts, respectively penetrating the connecting portions of the three connecting rods and the first circular plate and the three bending plates.

[0013] Optionally, the driving member further comprises: guide rails, respectively mounted on the top surface of the first circular plate along the radial direction of the first circular plate, and respectively located below the three bending plates along the height direction of the support frame; and sliding blocks, respectively slidably mounted on each guide rail, and respectively connected with the three bending plates.

[0014] Optionally, it further comprises: fixed rings, respectively mounted on the other ends of the two guide shafts.

[0015] Optionally, the first metal gasket is sleeved on the guide shafts and located between the springs and the linear bearings.

[0016] Optionally, the second metal gasket is sleeved on the guide shafts and located between the springs and the clamping blocks.

[0017] The crystal boat assembly jig provided by the embodiments of the present disclosure can achieve the following technical effects:

[0018] The crystal boat assembly jig provided by the embodiments of the present disclosure comprises a support frame, a bending plate, a thumb air cylinder, a clamping jaw, a linear bearing, a guide shaft, a clamping block, a spring and a driving member. The support frame is used for supporting the entire device. The support frame comprises a first circular plate and a second circular plate coaxially distributed. Along the height direction of the support frame, the first circular plate is located below the second circular plate, and the first circular plate and the second circular plate are respectively used for supporting the related parts of the jig. The bending plate is slidably mounted on the top surface of the first circular plate along the radial direction of the first circular plate and is distributed around the second circular plate. Each bending plate can slide along the radial direction of the first circular plate. The number of the bending plates is three, and two of the three bending plates are symmetrically distributed on the two sides of the other bending plate at an angle of 180°, matching the positions of the three quartz rods of the crystal boat. The thumb air cylinder is mounted on the three bending plates along the height direction of the support frame and is used for providing clamping force. The clamping jaw is mounted on the two moving ends of each thumb air cylinder along the height direction of the support frame. The six clamping jaws are located above the second circular plate and are used for abutting against the quartz rods. Each clamping jaw comprises a first groove matched with the quartz rod to serve as a positioning function. The linear bearing is installed on the top surface of the second circular plate along the radial direction of the second circular plate and is located on the two sides of the second circular plate. The two linear bearings are symmetrically distributed at an angle of 180° and are used for supporting the slidably installed guide shafts. The guide shafts are slidably penetrated into the two linear bearings and serve as a guide support together with the two linear bearings. The clamping block is installed on the opposite end of the guide shaft and is used for abutting against the quartz disc. Each clamping block is provided with a second groove matched with the quartz disc. The spring is sleeved on the guide shaft and is located between the clamping block and the linear bearing to provide elastic force. The driving member is installed between the first circular plate and the three bending plates to provide driving force and drive the three bending plates to move closer to each other or to separate.

[0019] In use, one quartz plate is placed on the top surface of the second circular plate, and under the guiding support of the two straight linear bearings and the two guide shafts and the elastic action of the two springs, the two clamping blocks can clamp the quartz plate and play the role of automatic centripetal positioning. Controlling the work of the driving member can make the three bending plates close to each other or separate, thereby adjusting the distance between the three thumb air cylinders, and finally changing the positions of the three sets of clamping jaws. Then, one end of each of the three quartz rods is placed on the top surface of the clamped quartz plate and between the three sets of clamping jaws, and the work of the three thumb air cylinders is controlled in sequence, so that the fixing work of the three quartz rods is completed. At this time, the three quartz rods and the clamped quartz plate can be welded. After welding is completed, the three quartz rods and the clamped quartz plate welded together can be disassembled. After disassembly is completed, another quartz plate can be clamped between the two clamping blocks. Then, the other end of each of the three quartz rods is placed on the top surface of the clamped quartz plate and clamped and fixed by the three sets of clamping jaws again. The three quartz rods and the clamped quartz plate can be welded again, thereby completing the welding work of the entire crystal boat. During the entire welding process, the three quartz rods and the two quartz plates are clamped and fixed, so that the position change during welding is prevented, and the welding effect is ensured.

[0020] The foregoing general description and the following description are merely exemplary and explanatory and are not intended to limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0021] One or more embodiments are illustrated by way of example with reference to the accompanying drawings, which are schematic and are not intended to be limiting of the embodiments, and in which like reference numerals designate similar elements in the figures and wherein:

[0022] Figure 1 is a structural schematic view of a crystal boat assembly clamp provided by the embodiment of the present disclosure;

[0023] Figure 2 is Figure 1 is an enlarged structural schematic view of position A in FIG. 1;

[0024] Figure 3 is Figure 1 is a structural schematic view of position B-B in FIG. 1;

[0025] Figure 4 is Figure 1 is a structural schematic view of position C-C in FIG. 1.

[0026] Reference Signs:

[0027] 10: support frame; 11: first circular plate; 12: second circular plate; 13: first supporting rod; 14: second supporting rod; 20: bent plate; 30: thumb cylinder; 40: clamping jaw; 50: linear bearing; 60: guide shaft; 70: clamping block; 80: spring; 90: driving member; 91: motor; 92: disc; 93: connecting rod; 94: pin shaft; 95: guide rail; 96: sliding block; 100: fixing ring; 110: first metal gasket; 120: second metal gasket. DETAILED DESCRIPTION

[0028] In order to enable persons skilled in the art to more fully understand the features and technical contents of the embodiments of the present disclosure, the implementation of the embodiments of the present disclosure is described in detail below with reference to the accompanying drawings, which are only used for reference and do not limit the embodiments of the present disclosure. In the following technical description, in order to facilitate explanation, a plurality of details are provided to provide a full understanding of the disclosed embodiments. However, one or more embodiments can still be implemented without these details. In other cases, well-known structures and devices can be simplified to facilitate the drawings.

[0029] The terms "first", "second", and the like in the specification and claims of the embodiments of the present disclosure and the above drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present disclosure described herein can be implemented. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion.

[0030] In the embodiments of the present disclosure, the terms "upper", "lower", "inner", "middle", "outer", "front", "back", and the like indicate the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the embodiments of the present disclosure and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation. In addition, in addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain attachment relationship or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in the embodiments of the present disclosure can be understood according to the specific circumstances.

[0031] In addition, the terms "set", "connected", "fixed" should be broadly understood. For example, "connected" can be fixedly connected, detachably connected, or integrally configured; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to the specific circumstances.

[0032] The term "multiple" represents two or more, unless otherwise specified.

[0033] In the embodiments of the present disclosure, the character " / " represents an "or" relationship between the preceding and following objects. For example, A / B represents: A or B.

[0034] The term "and / or" is a description of the association relationship between objects, which means that there can be three relationships. For example, A and / or B means: A or B, or, A and B, the three relationships.

[0035] It should be noted that the embodiments in the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0036] In combination with Figures 1 to 4As shown, the embodiment of the present disclosure provides a kind of jig for wafer boat assembly, including support frame 10, bending plate 20, thumb air cylinder 30, clamping jaw 40, linear bearing 50, guide shaft 60, clamping block 70, spring 80 and driving piece 90.Support frame 10 is used to support the whole device.Support frame 10 includes coaxial distribution first circular plate 11 and second circular plate 12, along the height direction of support frame 10, first circular plate 11 is located below second circular plate 12, first circular plate 11 and second circular plate 12 are used to support the relevant parts of installation jig respectively.Bending plate 20 is slidably installed in the top surface of first circular plate 11 along the radial direction of first circular plate 11, and is distributed around second circular plate 12, and each bending plate 20 can slide along the radial direction of first circular plate 11.The number of bending plate 20 is three, two of the three bending plate 20 are symmetrically distributed on the two sides of the other bending plate 20, which matches the position of the three quartz rods of wafer boat.Thumb air cylinder 30 is installed in three bending plate 20 along the height direction of support frame 10, respectively, and is used to provide clamping force.Clamping jaw 40 is installed in two moving ends of each thumb air cylinder 30, six clamping jaws 40 are located above second circular plate 12 along the height direction of support frame 10, and are used to abut quartz rod.Each clamping jaw 40 includes first recess matched with quartz rod to play the role of positioning.Linear bearing 50 is installed in the top surface of second circular plate 12 along the radial direction of second circular plate 12, and is located on the two sides of second circular plate 12, and the two linear bearings 50 are symmetrically distributed at 180 °, and the two linear bearings 50 are used to support the installation of slidable guide shaft 60.Guide shaft 60 is slidably penetrated in two linear bearings 50, and plays the role of guiding and supporting together with two linear bearings 50.Clamping block 70 is installed in opposite end of two guide shafts 60, and is used to abut quartz disc.Each clamping block 70 is provided with second recess matched with quartz disc, spring 80 is sleeved on two guide shafts 60, and is located between two clamping blocks 70 and two linear bearings 50, and is used to provide elastic force.Driving piece 90 is installed between first circular plate 11 and three bending plate 20, and is used to provide driving force, and drives three bending plate 20 to approach or separate each other.

[0037] This embodiment of the invention provides a jig for assembling a crystal boat. In use, a quartz disk is placed on the top surface of a second circular plate 12. Under the guiding support of linear bearings 50 and guide shafts 60 on both sides, and the elasticity of springs 80 on both sides, the clamping blocks on both sides clamp the quartz disk, achieving automatic centripetal positioning. Controlling the drive unit 90 causes the three bending plates 20 to move closer together or separate, thereby adjusting the spacing of the three thumb cylinders 30 and ultimately changing the position of the three sets of clamping jaws 40. Then, one end of each of the three quartz rods is placed on the top surface of the clamped quartz disk between the three sets of clamping jaws 40, and the three thumb cylinders 30 are sequentially activated to fix the three quartz rods. At this point, the three quartz rods and the clamped quartz disk can be welded together. After welding, the welded quartz rods and the clamped quartz disk can be disassembled. After disassembly, another quartz disk can be clamped between the clamping blocks on both sides. Then, the other ends of the three quartz rods are placed on the top surface of the clamped quartz disk and clamped again by the three sets of jaws 40. The three quartz rods and the clamped quartz disk can then be welded again, completing the welding of the entire crystal boat. Throughout the welding process, the three quartz rods and two quartz disks are clamped and fixed, thus preventing positional changes during welding and ensuring the welding effect.

[0038] Optionally, combined Figure 1 As shown, the support frame 10 also includes a first support rod 13. The first support rod 13 is installed between the opposing surfaces of the first circular plate 11 and the second circular plate 12 along the height direction of the support frame 10.

[0039] In this embodiment of the present disclosure, the first support rod 13 is used to determine the relative position of the first circular plate 11 and the second circular plate 12, and to form a spatial region between the first circular plate 11 and the second circular plate 12 to accommodate the relevant components of the fixture.

[0040] Optionally, combined Figure 1 As shown, the support frame 10 also includes a second support rod 14. The second support rod 14 is evenly installed around the bottom surface of the first circular plate 11 along the height direction of the support frame 10.

[0041] In this embodiment, the second support rod 14 is used to abut against a tabletop or the ground, thereby supporting the entire device. The second support rod 14 can also be connected to other devices, allowing the clamp to work in conjunction with other devices.

[0042] Optionally, combined Figure 1 and Figure 3As shown, the driving member 90 comprises a motor 91, a disc 92 and links 93. The motor 91 is installed at the center of the bottom surface of the first disc plate 11, and the rotating end of the motor 91 penetrates the first disc plate 11, for providing driving force to realize the rotating motion function. The disc 92 is installed at the rotating end of the motor 91, and rotates under the driving of the motor 91. The links 93 are rotatably connected between the edges of the disc 92 and the three bending plates 20 respectively, and the three links 93 can rotate relative to the disc 92 and the three bending plates 20 respectively.

[0043] In the embodiments of the present disclosure, the motor 91 is controlled to work, so as to drive the disc 92 to rotate. Then, under the guiding and supporting of the three guide rails 95 and the three sliding blocks 96, and under the pulling or pushing of the three links 93, the three bending plates 20 can automatically move close to or away from each other, so as to realize the automatic adjustment function of the three thumb cylinders 30.

[0044] Optionally, as shown in Figure 1 , Figure 3 and Figure 4 , the driving member 90 further comprises pin shafts 94. The pin shafts 94 penetrate the connection positions of the three links 93, the disc and the three bending plates 20 respectively.

[0045] In the embodiments of the present disclosure, the pin shafts 94 are used as connecting members to realize the hinging, so that the three links 93 can rotate relative to the disc 92 and the three bending plates 20 respectively.

[0046] Optionally, as shown in Figure 1 , the driving member 90 further comprises guide rails 95 and sliding blocks 96. The guide rails 95 are installed on the top surface of the first disc plate 11 along the radial direction of the first disc plate 11, and are located below the three bending plates 20 along the height direction of the support frame 10. The sliding blocks 96 are slidably installed on each guide rail 95, and are connected with the three bending plates 20 respectively.

[0047] In the embodiments of the present disclosure, the guide rails 95 and the sliding blocks 96 jointly play the guiding and supporting role, so that the three bending plates 20 can move along the axial direction of the first disc plate 11 respectively.

[0048] Optionally, as shown in Figure 1 and Figure 4 , the device further comprises fixing rings 100. The fixing rings 100 are installed on the other ends of the two side guide shafts 60 respectively.

[0049] In the embodiments of the present disclosure, the two fixing rings 100 are used to limit the positions of the two side guide shafts 60, so as to prevent the two side guide shafts 60 from falling out of the two side linear bearings 50.

[0050] Optionally, as shown in Figure 1 , Figure 2 and Figure 4As shown, the first metal gaskets 110 are sleeved on the two side guide shafts 60 and are respectively located between the two side springs 80 and the two side linear bearings 50.

[0051] In the embodiments of the present disclosure, the two first metal gaskets 110 are used for protection to prevent the surface of the two side linear bearings 50 from being damaged by the two side springs 80.

[0052] Optionally, in combination with Figure 1 , Figure 2 and Figure 4 As shown, the second metal gaskets 120 are sleeved on the two side guide shafts 60 and are respectively located between the two side springs 80 and the two side clamping blocks 70.

[0053] In the embodiments of the present disclosure, the two second metal gaskets 120 are also used for protection to prevent the surface of the two side clamping blocks 70 from being damaged by the two side springs 80.

[0054] The above description and drawings suffice to fully illustrate the embodiments of the present disclosure to enable a person skilled in the art to practice them. Other embodiments can include structural and other changes. The embodiments only represent possible variations. Unless explicitly required, individual components and functions are optional, and the order of operations can be changed. Some embodiments can include or replace parts and features of other embodiments. The embodiments of the present disclosure are not limited to the structures that have been described above and shown in the drawings, and various modifications and changes can be made without departing from the scope thereof. The scope of the present disclosure is only limited by the appended claims.

Claims

1. A jig for assembling a crystal boat, characterized in that, The support frame comprises a first circular plate and a second circular plate arranged coaxially, the first circular plate being arranged below the second circular plate along the height direction of the support frame. The support frame further comprises three bending plates slidably arranged on the top surface of the first circular plate along the radial direction of the first circular plate and distributed around the second circular plate, two of the three bending plates being symmetrically arranged on the two sides of the other bending plate. The support frame further comprises three thumb air cylinders arranged on the three bending plates along the height direction of the support frame. The support frame further comprises six clamping jaws arranged on the two moving ends of the three thumb air cylinders along the height direction of the support frame, the six clamping jaws being arranged above the second circular plate. The support frame further comprises two linear bearings arranged on the top surface of the second circular plate along the radial direction of the second circular plate and symmetrically arranged on the two sides of the second circular plate. The support frame further comprises two guide shafts slidably arranged in the two linear bearings. The support frame further comprises two clamping blocks arranged on the opposite ends of the two guide shafts. The support frame further comprises two springs sleeved on the two guide shafts and arranged between the two clamping blocks and the two linear bearings. The support frame further comprises a driving member arranged between the first circular plate and the three bending plates and configured to drive the three bending plates to move towards or away from each other. The support frame further comprises a first support rod arranged between the opposite surfaces of the first circular plate and the second circular plate along the height direction of the support frame.

2. The wafer boat assembly jig of claim 1, wherein, The support frame further comprises a second support rod uniformly arranged around the bottom surface of the first circular plate along the height direction of the support frame. The driving member comprises a motor arranged at the center of the bottom surface of the first circular plate, the rotating end of the motor being arranged in the first circular plate.

3. The wafer boat assembly jig of claim 2, wherein, The driving member further comprises a disc arranged at the rotating end of the motor. The driving member further comprises three connecting rods rotatably connected between the edges of the disc and the three bending plates.

4. The wafer boat assembly jig of claim 1, wherein, The driving member further comprises three pin shafts arranged in the connecting positions of the three connecting rods, the disc and the three bending plates. The driving member further comprises two guide rails arranged on the top surface of the first circular plate along the radial direction of the first circular plate and arranged below the three bending plates along the height direction of the support frame. The driving member further comprises two sliding blocks slidably arranged on the two guide rails and connected with the three bending plates. The support frame further comprises a fixed ring arranged on the other end of the two guide shafts.

5. The wafer boat assembly jig of claim 4, wherein, The support frame further comprises a first metal gasket sleeved on the two guide shafts and arranged between the two springs and the two linear bearings. The support frame further comprises a second metal gasket sleeved on the two guide shafts and arranged between the two springs and the two clamping blocks.

6. The wafer boat assembly jig of claim 5, wherein, ​ ​ ​ 7. The wafer boat assembly jig of any one of claims 1 to 6, wherein, ​ ​ 8. The wafer boat assembly jig of any one of claims 1 to 6, wherein, ​ ​ 9. The wafer boat assembly jig of any one of claims 1 to 6, wherein, ​ ​

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