Rapid cooling device for single crystal furnace

Abstract

The utility model discloses a rapid cooling device for a single crystal furnace, which comprises a cooling component, the cooling component comprises a cooling bin, a furnace body is arranged in the cooling bin, and the furnace body extends to the outside of the cooling bin; a furnace cover matched with the furnace body is arranged at the top end of the furnace body; a cooling space is formed between the furnace body and the inner wall of the cooling bin; a condenser is installed on the outer wall of the first cooling bin and connected with a conveying pump through a backflow pipe, and the conveying pump and the condenser are both communicated with the interior of the cooling bin through pipelines. A speed regulating motor is further arranged on the outer wall of the bottom of the cooling bin, a transmission shaft is connected to the top of the speed regulating motor, the end, away from the speed regulating motor, of the transmission shaft is a transmission end, the transmission end extends into the cooling bin and is provided with paddles, and a cover opening assembly used for assisting in opening a furnace cover is arranged on one side of the cooling bin. The uncovering assembly comprises a supporting frame, and the supporting frame is fixed to the outer wall of the top of the cooling bin.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace technical field especially relates to a single crystal furnace rapid cooling device. BACKGROUND

[0002] Single crystal furnace in the process of production, mainly inert gas is introduced to the inside of single crystal furnace, and through graphite heater polycrystalline material such as polysilicon is melted, single crystal furnace plays an important role in semiconductor manufacturing, is one of the first process equipment of semiconductor technology, needs to cool single crystal furnace after completing the melting of material, thereby facilitating its operation and taking out workpiece, the existing single crystal furnace can mostly only rely on natural cooling method very slowly complete cooling.

[0003] Through the retrieval, the patent with china patent application number 202320769894.5 discloses a straight pull type single crystal furnace rapid cooling hot field device, including furnace body, the top of furnace body is fixedly connected with cover, the inside of furnace body is provided with heat preservation assembly, the inside of furnace body is provided with cooling assembly, the heat preservation assembly includes heat preservation layer, the heat preservation layer is fixedly connected in the furnace body inner wall, the inner wall of heat preservation layer is provided with arc slot, the bottom of heat preservation layer is provided with sliding groove. The straight pull type single crystal furnace rapid cooling hot field device in the above patent has the following disadvantages: the cooling efficiency of the device is low during use, and no effective device is set to quickly complete the cooling, which can cause the operator to be scalded when operating the outside of the device due to the high temperature of the outside of the shell. UTILITY MODEL CONTENTS

[0004] The utility model aims at solving the shortcomings in the prior art and provides a single crystal furnace rapid cooling device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A single crystal furnace rapid cooling device, including cooling assembly, the cooling assembly includes cooling bin, the inside of cooling bin is provided with furnace body, and the furnace body extends to the outside of cooling bin;The top of furnace body is provided with the furnace cover matched therewith;The cooling space is formed between the furnace body and the inner wall of cooling bin;Condenser is installed on the outer wall of cooling bin, the condenser is connected with the delivery pump through the reflux pipe, and the delivery pump and the condenser are both communicated with the inside of cooling bin through the pipeline;The bottom outer wall of cooling bin is also provided with a speed regulating motor, the top of speed regulating motor is connected with a transmission shaft, the end, away from the speed regulating motor, of transmission shaft is a transmission end, the transmission end extends to the inside of cooling bin, and is provided with a paddle.

[0007] As a further scheme of the utility model: the cooling bin one side is provided with the unscrambling assembly for assisting opening furnace cover, the unscrambling assembly includes support frame, the support frame is fixed to the cooling bin top outer wall, the support frame top is installed with hydraulic lifting rod, and the telescopic end of hydraulic lifting rod bottom can slide and pass through the support frame setting, and the hydraulic lifting rod bottom end is fixed to the furnace cover top.

[0008] As a further scheme of the utility model: the cooling bin bottom outer wall is provided with support leg, the support leg is provided with multiple groups, and the support leg bottom is installed with universal wheel.

[0009] As a further scheme of the utility model: the support leg is also installed with the connecting frame extending along the first direction, the connecting frame top outer wall is fixed with hydraulic push rod through bolt, the telescopic end of hydraulic push rod bottom can slide and pass through the connecting frame setting, and the hydraulic push rod bottom end is installed with foot pad.

[0010] As a further scheme of the utility model: the foot pad bottom is provided with gasket, the gasket is of elastic material, and the gasket bottom is provided with anti-skid line.

[0011] As a further scheme of the utility model: the furnace cover top is connected with pressure relief port, and the pressure relief port one end is installed with the control valve matched with it.

[0012] As a further scheme of the utility model: the support frame one side outer wall is fixed with storage rack through bolt, and the storage rack inner wall is provided with multiple groups of partition plates.

[0013] As a further scheme of the utility model: the cooling bin one side outer wall is fixed with control panel through bolt, and the control panel outer wall is attached with protection film.

[0014] The utility model discloses the beneficial effect is:

[0015] 1. through the cooling bin can add water, after adding water, in the water of cooling bin is pumped out by the delivery pump after the furnace body processing is completed, and the water that is pumped out is transported to condenser through backflow pipe, is transported to the cooling bin after cooling through condenser, and the water flow after cooling can be contacted with the outer wall and the workpiece in the furnace body and is rapidly cooled, and the temperature is more uniform when the water flow is cooled simultaneously starting the speed regulation motor, and the water flow is made to flow in the cooling bin by the speed regulation motor control paddle rotation agitates the cooling bin, so that the temperature is more uniform, and the cooling efficiency is increased, the traditional mode cooling efficiency is slow, and the outer wall is not cooled, so the situation can be avoided, and the operator can be avoided when operating and touching the outer wall and being scalded.

[0016] 2. through the support frame starting control furnace cover and opening and closing, when closing, can increase the sealing property, and the furnace cover is avoided and is lifted by pressure, when opening, does not need to open manually, and can avoid being scalded by hot gas.

[0017] 3. After the device is moved, the device is lifted by the controllable foot pad falling through the hydraulic push rod, the universal wheel is lifted off the ground, unnecessary displacement is avoided, and stability is maintained. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A structural schematic view of a front view angle of a single crystal furnace rapid cooling device is provided for the utility model;

[0019] Figure 2 A structural schematic view of a support part of a single crystal furnace rapid cooling device is provided for the utility model;

[0020] Figure 3 A structural schematic view of a cooling part of a single crystal furnace rapid cooling device is provided for the utility model;

[0021] Figure 4 A structural schematic view of a stirring part of a single crystal furnace rapid cooling device is provided for the utility model.

[0022] In the figure: 1-cooling bin, 2-control panel, 3-support leg, 4-universal wheel, 5-gasket, 6-foot pad, 7-connection frame, 8-hydraulic push rod, 9-furnace body, 10-control valve, 11-pressure relief port, 12-hydraulic lifting rod, 13-support frame, 14-storage rack, 15-furnace cover, 16-condenser, 17-backflow pipe, 18-conveying pump, 19-speed regulating motor, 20-paddle, 21-transmission shaft. DETAILED DESCRIPTION

[0023] The technical solutions of the utility model will be further described in detail in combination with specific implementation manners.

[0024] The embodiments of the utility model will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as a limitation on the utility model.

[0025] Embodiment 1

[0026] A single crystal furnace rapid cooling device, such as Figures 1-4As shown, it comprises a cooling assembly, which comprises a cooling bin 1, the inside of which is provided with a furnace body 9, and the furnace body 9 extends to the outside of the cooling bin 1; the top end of the furnace body 9 is provided with a furnace cover 15 matched therewith; the furnace body 9 and the inner wall of the cooling bin 1 form a cooling space therebetween; a condenser 16 is mounted on an outer wall of the cooling bin 1, the condenser 16 is connected with a delivery pump 18 through a reflux pipe 17, and the delivery pump 18 and the condenser 16 are both in communication with the inside of the cooling bin 1 through pipelines; a speed regulating motor 19 is further provided on the bottom outer wall of the cooling bin 1, a transmission shaft 21 is connected to the top of the speed regulating motor 19, and the end of the transmission shaft 21 away from the speed regulating motor 19 is a transmission end which extends to the inside of the cooling bin 1 and is provided with a paddle 20;

[0027] In use, the top of the cooling bin 1 is provided with the furnace cover 15, the furnace cover 15 can be opened to add cooling water into the cooling bin 1, when the processing of the furnace body 9 is completed, the water in the cooling bin 1 can be pumped out through the delivery pump 18, the pumped-out water is delivered to the condenser 16 through the reflux pipe 17, and after being cooled by the condenser 16, the water is delivered into the cooling bin 1, the water flow after being cooled can quickly cool the outer wall and the internal workpiece of the furnace body 9, the transmission shaft 21 and the paddle 20 can be respectively controlled to rotate through the four speed regulating motors 19, the water in the cooling bin 1 can be stirred through the rotation of the paddle 20, the water flow in the cooling bin 1 is caused to flow through the stirring, so that the heat propagation is more uniform, the cooling can be more quickly and efficiently completed, and the situation that the cooling efficiency of the traditional method is slow and the outer wall cannot be cooled can be avoided, and the operator can be prevented from being scalded when operating by contacting the outer wall;

[0028] One side of the cooling bin 1 is provided with an uncovering assembly for assisting in opening the furnace cover 15; the uncovering assembly comprises a support frame 13, the support frame 13 is fixed to the top outer wall of the cooling bin 1, a hydraulic lifting rod 12 is mounted on the top of the support frame 13, the telescopic end of the bottom of the hydraulic lifting rod 12 can be slidably penetrated through the support frame 13, and the bottom end of the hydraulic lifting rod 12 is fixed to the top of the furnace cover 15;

[0029] In use, the movement of the telescopic end of the support frame 13 can be controlled by starting the support frame 13, the opening and closing of the furnace cover 15 can be controlled through the support frame 13, the sealing property is increased, and the situation that the operator is easily scalded by hot gas when manually opening the furnace cover 15 can be avoided, there is a certain pressure in the inside of the cooling bin 1, when the furnace cover 15 is opened, pressure relief occurs, causing hot gas to rush out, and direct contact with the hot gas can be avoided through the control of the support frame 13;

[0030] In order to facilitate the movement of the device, such as Figure 2 As shown, the bottom outer wall of the cooling bin 1 is fixedly provided with support legs 3 through bolts, a plurality of sets of support legs 3 are provided, and universal wheels 4 are mounted on the bottom of the support legs 3;

[0031] In use, the device can be pushed or pulled when needed to move, and the movement of the device can be completed by rotating the universal wheel 4 in contact with the ground, so that the position of the device can be conveniently adjusted;

[0032] In order to support the device, as shown, Figure 2 The support leg 3 is also provided with a connecting frame 7 extending in the first direction, and the outer wall of the top of the connecting frame 7 is provided with a hydraulic push rod 8 fixed by bolts, and the telescopic end of the bottom of the hydraulic push rod 8 can slide through the connecting frame 7, and the bottom end of the hydraulic push rod 8 is provided with a foot pad 6;

[0033] In use, after the device is moved, the foot pad 6 can be controlled to fall by the hydraulic push rod 8 to support the device, and the device can be kept stable by supporting the device, and the universal wheel 4 can be kept off the ground to avoid unnecessary displacement caused by the universal wheel 4; here, the first direction is the horizontal direction.

[0034] In order to facilitate pressure relief, as shown, Figure 1 The top of the furnace cover 15 is connected with a pressure relief port 11, and one end of the pressure relief port 11 is provided with a control valve 10 matched therewith;

[0035] In use, the pressure relief can be performed by the pressure relief port 11 through the control valve 10, and the safety can be increased by pressure relief to avoid danger when the furnace cover 15 is opened without pressure relief;

[0036] In order to prevent displacement, as shown, Figure 2 The bottom of the foot pad 6 is provided with a gasket 5, the gasket 5 is made of elastic material, and the bottom of the gasket 5 is provided with anti-skid lines;

[0037] In use, the friction force when contacting with the ground can be increased by the gasket 5 made of rubber material and the annular lines at the bottom thereof, so as to increase the anti-skid property and avoid sliding displacement of the device;

[0038] In order to facilitate control, as shown, Figure 1 The outer wall of one side of the cooling bin 1 is provided with a control panel 2 fixed by bolts, and the outer wall of the control panel 2 is attached with a protective film;

[0039] In use, the control panel 2 is connected with each component of the device through a circuit, and the device can be conveniently controlled through the control panel 2, and the start and stop and power adjustment can be conveniently controlled, and the control panel 2 can be prevented from being scratched by the protective film.

[0040] Based on the above description, the application provides a single crystal furnace rapid cooling device, and the working principle is as follows: when the cooling device is used, first, the appropriate stagnation position is selected according to the scene, and after the position is determined, the hydraulic push rod 8 is started to move to the ground to ensure that the cooling device is stably parked; then the top cover 15 at the top of the cooling bin 1 is opened, and the recyclable cooling water is added to the inside, so that the cooling water can cool the furnace body 9 inside the cooling bin 1, and the circulation and cooling of the cooling water are realized through the delivery pump 18 and the condenser 16 on the side wall of the cooling bin 1. The delivery pump 18 can make the cooling water circulate, and the condenser can cool the cooling water, thereby ensuring the heat absorption capacity of the cooler; during the operation stage, the speed regulating motor 19 can also be started to drive the paddle 20 inside the cooling space to stir the cooling water, so that the heat propagation is more uniform, and the cooling effect of the cooling device is improved.

[0041] Embodiment 2

[0042] In order to place tools, refer to Figure 2 A single crystal furnace rapid cooling device, compared with embodiment 1, the following improvements are made, one side of the support frame 13 is provided with a storage rack 14 through bolt fixing, and the inner wall of the storage rack 14 is provided with a plurality of partitions;

[0043] When in use, the space of the storage rack 14 can be separated by the partitions, and the commonly used tools can be placed in the separated spaces, so that they can be quickly taken when needed.

[0044] The above is only a preferred specific embodiment of the present application, and the part of the circuit control, signal control transmission and the like without creative labor can refer to the prior art, but the protection scope of the present application is not limited to this, any skilled person in the technical field can replace or change the technical solution and the inventive concept of the present application according to the technical range disclosed in the present application, which should be covered in the protection scope of the present application.

Claims

1. A rapid cooling device for a single crystal furnace comprising a cooling assembly, characterized by, The cooling assembly comprises a cooling bin (1), a furnace body (9) is arranged inside the cooling bin (1), and the furnace body (9) extends to the outside of the cooling bin (1); a furnace cover (15) is arranged at the top end of the furnace body (9) and is matched with the furnace body (9); a cooling space is formed between the furnace body (9) and the inner wall of the cooling bin (1); a condenser (16) is arranged on one outer wall of the cooling bin (1), the condenser (16) is connected with a delivery pump (18) through a reflux pipe (17), and the delivery pump (18) and the condenser (16) are both communicated with the inside of the cooling bin (1) through pipelines; a speed regulating motor (19) is further arranged on the bottom outer wall of the cooling bin (1), a transmission shaft (21) is connected to the top of the speed regulating motor (19), one end of the transmission shaft (21) away from the speed regulating motor (19) is a transmission end, the transmission end extends to the inside of the cooling bin (1), and a paddle (20) is arranged on the transmission end.

2. The rapid cooling device for a single crystal furnace according to claim 1, wherein One side of the cooling bin (1) is provided with an opening cover assembly for assisting in opening the furnace cover (15); the opening cover assembly comprises a support frame (13), the support frame (13) is fixed to the top outer wall of the cooling bin (1), a hydraulic lifting rod (12) is arranged on the top of the support frame (13), and the telescopic end of the bottom of the hydraulic lifting rod (12) is slidably arranged through the support frame (13); and the bottom end of the hydraulic lifting rod (12) is fixed to the top of the furnace cover (15).

3. The rapid cooling device for a single crystal furnace according to claim 1, wherein A support leg (3) is arranged on the bottom outer wall of the cooling bin (1), and a plurality of groups of support legs (3) are arranged.

4. The rapid cooling device for a single crystal furnace according to claim 3, wherein A connecting frame (7) extending in a first direction is further arranged on the support leg (3), a hydraulic push rod (8) is fixedly arranged on the top outer wall of the connecting frame (7) through bolts, the telescopic end of the bottom of the hydraulic push rod (8) is slidably arranged through the connecting frame (7), and a foot pad (6) is arranged on the bottom end of the hydraulic push rod (8).

5. The rapid cooling device for a single crystal furnace according to claim 4, wherein A gasket (5) is arranged on the bottom of the foot pad (6), the gasket (5) is made of elastic material, and an anti-skid pattern is arranged on the bottom of the gasket (5).

6. The rapid cooling device for a single crystal furnace according to claim 2, wherein A pressure relief port (11) is arranged on the top of the furnace cover (15), and a control valve (10) matched with the pressure relief port (11) is arranged on one end of the pressure relief port (11).

7. The rapid cooling device for a single crystal furnace according to claim 2, wherein A storage rack (14) is fixedly arranged on one side outer wall of the support frame (13) through bolts, and a plurality of partition plates are arranged on the inner wall of the storage rack (14).

8. The rapid cooling device for a single crystal furnace according to claim 1, wherein A control panel (2) is fixedly arranged on one side outer wall of the cooling bin (1) through bolts, and a protective film is attached to the outer wall of the control panel (2).

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