Epitaxial furnace body

Abstract

The utility model provides an epitaxial furnace body which comprises an epitaxial furnace body and two sealing flanges which are connected to the two ends of the epitaxial furnace body respectively, and the inner side, connected with the epitaxial furnace body, of each sealing flange is provided with a first sealing ring and a second sealing ring surrounding the first sealing ring. An annular vacuum area is formed between the first sealing ring and the second sealing ring; and the vacuum pumping device is communicated with the annular vacuum area through a pipeline and is used for pumping air in the annular vacuum area to form vacuum. According to the utility model, the sealing performance of the cavity can be effectively improved, and potential hazards caused by leakage of the cavity are reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor process equipment, concretely relates to a epitaxial furnace body. BACKGROUND

[0002] The epitaxial furnace is a key equipment in semiconductor manufacturing process, and is mainly used for realizing epitaxial growth of semiconductor materials. The related content of the epitaxial furnace will be explained in detail below. The working principle of the epitaxial furnace is to control the growth environment, so that the single crystal growth of the semiconductor material on the substrate surface under certain conditions. It creates a high temperature, high cleanliness environment, so that the semiconductor material can be deposited on the substrate according to certain process parameters, such as temperature, pressure, gas flow, etc. The film has specific electrical properties and structural characteristics, which can meet the needs of semiconductor device manufacturing. The main components of the epitaxial furnace include reaction cavity, heating system, gas control system, etc. The reaction cavity is the core part of the epitaxial furnace, which provides a high temperature and clean environment for epitaxial growth; the heating system provides a suitable thermal environment for epitaxial growth by accurately controlling the temperature; the gas control system is responsible for accurately controlling the type, flow and proportion of gas according to the process requirements.

[0003] Silicon epitaxial deposition technology is a film forming method by chemical reaction between gas compounds to generate solid substances and deposit on the wafer surface, which can grow a layer of single crystal silicon film with certain thickness, certain resistivity and different conductivity type along the original crystal direction on the single crystal silicon substrate. The by-products are discharged into the tail gas treatment device through the exhaust pipe of the equipment for combustion and water washing treatment.

[0004] But in the actual use process still has following technical problem, for ASM Intrepid model epitaxial furnace, its cavity is for cuboid structure, the material of chamber is quartz, the whole chamber is sealed with front and rear flange through sealing ring, but in actual application, it is found that the sealing only relies on a sealing ring to seal, due to high temperature in the epitaxial cavity, the temperature is greater than 1000 DEG C, and there is a large amount of HCL in the process gas, which has strong corrosion, and the sealing ring is deformed due to aging and other reasons, which leads to the leakage of gas in the cavity, or the external air is sucked into the cavity, which has safety and product quality hidden danger,

[0005] Therefore, the utility model provides a structure to improve the sealing of the chamber, improve the safety of the equipment, reduce the risk of leakage, real-time monitoring, and handle in advance before the abnormality occurs. SUMMARY

[0006] In view of the problems in the prior art, the epitaxial furnace body of the utility model overcomes the difficulties of the prior art, and can effectively improve the sealing of the chamber and reduce the potential hidden danger of chamber leakage.

[0007] The embodiment of the utility model provides a kind of epitaxial furnace body, comprising:

[0008] An epitaxial furnace body,

[0009] Two sealing flanges are connected to the two ends of the epitaxial furnace body, respectively, and each of the inner sides of the sealing flanges connected to the epitaxial furnace body is provided with a first sealing ring and a second sealing ring surrounding the first sealing ring, forming an annular vacuum area between the first sealing ring and the second sealing ring.

[0010] A vacuum air extraction device is connected to the annular vacuum area through a pipeline to extract air from the annular vacuum area to form a vacuum.

[0011] Preferably, each of the inner sides of the sealing flanges connected to the epitaxial furnace body is provided with a first annular groove and a second annular groove surrounding the first annular groove.

[0012] Preferably, the first annular groove is a rounded rectangular groove, and the second annular groove is a rounded rectangular groove.

[0013] Preferably, the first sealing ring is at least partially embedded in the first annular groove, and the second sealing ring is at least partially embedded in the second annular groove.

[0014] Preferably, the first sealing ring is a rounded rectangular sealing ring, and the second sealing ring is a rounded rectangular sealing ring.

[0015] Preferably, the inner side of the annular vacuum area, located between the first annular groove and the second annular groove, is provided with at least one vacuum extraction hole.

[0016] Preferably, the two sealing flanges are a front sealing flange and a rear sealing flange, respectively.

[0017] Preferably, the vacuum extraction holes of the front sealing flange and the rear sealing flange are connected to the vacuum air extraction device after converging through a pipeline.

[0018] Preferably, it further comprises a pipeline switch arranged in the pipeline after convergence.

[0019] Preferably, it further comprises a pressure detection unit arranged in the pipeline after convergence.

[0020] The epitaxial furnace body of the utility model improves the problems of the prior art, and can increase one more metal sealing groove on the basis of the original one sealing groove, realize double sealing of the cavity and the flange, and open a fine hole in the middle part of the two sealing rings to connect the vacuum air extraction device, realizing real-time monitoring of the vacuum pressure between the double sealing. BRIEF DESCRIPTION OF DRAWINGS

[0021] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings.

[0022] Figure 1 This is a cross-sectional view of the outer furnace body of this utility model.

[0023] Figure 2 This is a schematic diagram of the inner side of the sealing flange of the extended furnace body of this utility model.

[0024] Figure 3 This is a schematic diagram of the sealing ring installed on the inner side of the sealing flange of the extended furnace body of this utility model.

[0025] Figure 4 This is a schematic diagram of the sealing principle of the extended furnace body of this utility model.

[0026] Figure Labels

[0027] 1. Front sealing flange

[0028] 11 First sealing ring

[0029] 12 Second sealing ring

[0030] 13 Vacuum extraction port

[0031] 2. Rear sealing flange

[0032] 31 First annular groove

[0033] 32 Second annular groove

[0034] 33. Annular vacuum region

[0035] 4. Pipeline switch

[0036] 5 Pressure Detection Unit

[0037] 6. Vacuum pumping device

[0038] 10. Epitaxial Furnace Body Detailed Implementation

[0039] The following specific examples illustrate the implementation methods of this application. Those skilled in the art can easily understand the other advantages and effects of this application from the content disclosed herein. This application can also be implemented or applied through other different specific embodiments, and various details in this application can be modified or changed according to different viewpoints and application systems without departing from the spirit of this application. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0040] The embodiments of this application will now be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily implement the application. This application may be embodied in many different forms and is not limited to the embodiments described herein.

[0041] In this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics represented in connection with that embodiment or example, which are included in at least one embodiment or example of this application. Furthermore, the specific features, structures, materials, or characteristics represented may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate different embodiments or examples represented in this application, as well as features of different embodiments or examples.

[0042] Furthermore, the terms "first" and "second" are used for illustrative purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the representation of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0043] For the purpose of clearly describing this application, devices that are not relevant to the description are omitted, and the same or similar components throughout the specification are given the same reference numerals.

[0044] Throughout this specification, when it is said that a device is "connected" to another device, this includes not only "direct connection" but also "indirect connection" by placing other components in between. Furthermore, when it is said that a device "comprises" a certain constituent element, unless otherwise stated otherwise, this does not exclude other constituent elements, but rather implies that other constituent elements may be included.

[0045] When we say that a device is "above" another device, this can mean that it is directly above the other device, or it can mean that other devices are present in between. Conversely, when we say that a device is "directly" "above" another device, there are no other devices present in between.

[0046] Although the terms first, second, etc., are used in some instances herein to refer to various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, first interface and second interface, etc., are used. Furthermore, as used herein, the singular forms “a,” “an,” and “the” are intended to also include the plural forms unless the context indicates otherwise. It should be further understood that the terms “comprising,” “including,” indicate the presence of features, steps, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups. The terms “or” and “and / or” as used herein are interpreted as inclusive, or mean any one or any combination thereof. Thus, “A, B, or C” or “A, B, and / or C” means “any one of: A; B; C; A and B; A and C; B and C; A, B, and C.” Exceptions to this definition will only occur if the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0047] The technical terms used herein are for reference only to specific embodiments and are not intended to limit the scope of this application. The singular form used herein includes the plural form unless the statement explicitly indicates otherwise. The word "comprising" as used in the specification means to specify a particular characteristic, region, integer, step, operation, element, and / or component, and does not exclude the presence or addition of other characteristics, regions, integers, steps, operations, elements, and / or components.

[0048] Although not explicitly defined, all terms, including technical and scientific terms used herein, shall have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. Terms defined in commonly used dictionaries shall be further interpreted as having a meaning consistent with the relevant technical literature and the content of this present application, and shall not be over-interpreted as having an ideal or overly formulaic meaning unless otherwise defined.

[0049] Figure 1 This is a cross-sectional view of the extensional furnace body of this utility model. (See image below.) Figure 1 As shown, the epitaxial furnace body of this utility model includes: an epitaxial furnace body 10, two sealing flanges, and a vacuum pumping device 6 (shown in...). Figure 4 (Middle). Two sealing flanges are respectively connected to both ends of the epitaxial furnace body 10, namely the front sealing flange 1 and the rear sealing flange 2. Figure 2 This is a schematic diagram of the inner side of the sealing flange of the extended furnace body of this utility model. Figure 3 This is a schematic diagram showing the sealing ring installed on the inner side of the sealing flange of the extended furnace body of this utility model. (See diagram for reference.) Figure 2 and 3As shown, in this utility model, two sealing flanges are respectively connected to both ends of the epitaxial furnace body 10. Each sealing flange has a first sealing ring 31 and a second sealing ring 32 surrounding the first sealing ring 31 on its inner side connected to the epitaxial furnace body 10. An annular vacuum region 33 is formed between the first sealing ring 31 and the second sealing ring 32. This utility model achieves a double sealing structure of the cavity by adding a sealing ring at each of the front and rear flanges of the cavity, and the two sealing rings are evacuated by a vacuum device, thereby enhancing the sealing effect of the front and rear flanges, but it is not limited thereto.

[0050] In a preferred embodiment, the vacuum pumping device 6 is connected to the annular vacuum region 33 through a pipeline to extract air from the annular vacuum region 33 to form a vacuum, but this is not a limitation.

[0051] In a preferred embodiment, each sealing flange has a first annular groove 11 and a second annular groove 12 surrounding the first annular groove 11 on its inner side where it connects to the epitaxial furnace body 10, but this is not a limitation.

[0052] In a preferred embodiment, the first annular groove 11 is a rounded rectangular groove, and the second annular groove 12 is a rounded rectangular groove. The first sealing ring 31 is at least partially embedded in the first annular groove 11, and the second sealing ring 32 is at least partially embedded in the second annular groove 12. The geometry of the first annular groove 11 and the second annular groove 12 can be set according to actual needs, but is not limited thereto.

[0053] In a preferred embodiment, the first sealing ring 31 is a rounded rectangular sealing ring, and the second sealing ring 32 is a rounded rectangular sealing ring. The geometry of the first sealing ring 31 and the second sealing ring 32 can be set according to actual needs, but is not limited thereto.

[0054] In a preferred embodiment, at least one vacuum hole 13 is provided on the inner side of each annular vacuum region 33, between the first annular groove 11 and the second annular groove 12, but this is not a limitation.

[0055] In a preferred embodiment, a plurality of vacuum holes 13 are provided along the annular extension trajectory of the annular vacuum region 33 to enhance the pumping effect, but this is not a limitation.

[0056] Figure 4 This is a schematic diagram illustrating the sealing principle of the extended furnace body of this utility model. (For example...) Figure 4 As shown, in this utility model, the vacuum hole 13 of the front sealing flange 1 and the vacuum hole 13 of the rear sealing flange 2 are connected to the vacuum pumping device 6 through a pipeline, so that the vacuum pumping device 6 can simultaneously evacuate the annular vacuum area 33 of the front sealing flange 1 and the annular vacuum area 33 of the rear sealing flange 2, thereby enhancing the airtightness of the front sealing flange 1 and the rear sealing flange 2.

[0057] In a preferred embodiment, the present invention further includes a pipeline switch 4 and a pressure detection unit 5. The pipeline switch 4 is disposed in the pipeline after the confluence. The pressure detection unit 5 is disposed in the pipeline after the confluence. The vacuum pressure of the annular vacuum region 33 can be detected by the pressure detection unit 5. When vacuuming is required, the pipeline switch 4 is opened, allowing the vacuum pumping device 6 to pump air to achieve a vacuum. After a vacuum is achieved in the annular vacuum region 33, the pipeline switch 4 is closed.

[0058] In a preferred embodiment, the pressure detection unit 5 detects pressure and alarms, and is connected to the machine tool via a signal line. The pipelines are connected to the small holes of the front and rear flanges respectively to realize vacuum extraction and pressure monitoring between the sealing rings, but this is not a limitation.

[0059] In a preferred embodiment, the vacuum pumping device 6 can be replaced by a small vacuum pump, but is not limited thereto.

[0060] This invention adds a metal sealing groove to the existing sealing groove to achieve double sealing between the cavity and the flange. A small hole is made in the middle of the two sealing rings to connect a vacuum pumping device, enabling real-time monitoring of the vacuum pressure between the two seals.

[0061] The specific implementation method of this utility model is as follows:

[0062] Continue to refer to Figures 1 to 3 As shown, the epitaxial furnace body of this utility model includes: an epitaxial furnace body 10, two sealing flanges, and a vacuum pumping device 6 (shown in...). Figure 4(Middle). Two sealing flanges are respectively connected to both ends of the epitaxial furnace body 10. The two sealing flanges are the front sealing flange 1 and the rear sealing flange 2. In this utility model, the two sealing flanges are respectively connected to both ends of the epitaxial furnace body 10. Each sealing flange has a first sealing ring 31 and a second sealing ring 32 surrounding the first sealing ring 31 on its inner side connected to the epitaxial furnace body 10. An annular vacuum region 33 is formed between the first sealing ring 31 and the second sealing ring 32. The vacuum pumping device 6 is connected to the annular vacuum region 33 through a pipeline and pumps the air in the annular vacuum region 33 to form a vacuum. A unique vacuum hole 13 is provided on the inner side of each annular vacuum region 33, between the first annular groove 11 and the second annular groove 12. In this embodiment, the vacuum hole 13 is a fine hole. In this utility model, a fine hole is opened between the two sealing rings of the front and rear metal flanges to connect the vacuum pumping device, so as to realize the pressure detection between the two sealing rings and monitor the sealing status of the cavity in real time. Each sealing flange has a first annular groove 11 and a second annular groove 12 surrounding the first annular groove 11 on its inner side where it connects to the epitaxial furnace body 10. The first annular groove 11 is a rounded rectangular groove, and the second annular groove 12 is a rounded rectangular groove. The first sealing ring 31 is partially embedded in the first annular groove 11, and the second sealing ring 32 is partially embedded in the second annular groove 12. After the portion of the first sealing ring 31 protruding from the first annular groove 11 and the portion of the second sealing ring 32 protruding from the second annular groove 12 are pressed by the planes at both ends of the epitaxial furnace body 10, two surrounding sealing rings are formed between the sealing flange and the end face of the epitaxial furnace body 10. The annular three-dimensional space between the sealing rings forms an annular vacuum region 33. The first sealing ring 31 is a rounded rectangular sealing ring, and the second sealing ring 32 is a rounded rectangular sealing ring.

[0063] Continue to refer to Figure 4 In this invention, the vacuum holes 13 of the front sealing flange 1 and the rear sealing flange 2 converge through a pipeline, then pass through a pipeline switch 4 and a pressure detection unit 5, and are connected to a vacuum pumping device 6. The pressure detection unit 5 is located in the pipeline after the convergence. The vacuum pressure of the annular vacuum region 33 can be detected by the pressure detection unit 5. When vacuuming is required, the pipeline switch 4 is opened, allowing the vacuum pumping device 6 to pump air to achieve a vacuum. After a vacuum is achieved in the annular vacuum region 33, the pipeline switch 4 is closed. This invention's cavity sealing device achieves a double-sealed cavity structure by adding a sealing ring at each of the front and rear flanges. A vacuum device is used to evacuate the space between the two sealing rings, and a vacuum pressure sensor is used to detect the pressure between the two sealing rings. An alarm value is set for real-time monitoring, thereby ensuring the sealing performance of the cavity and eliminating safety hazards. This invention adds a metal sealing groove to the existing sealing groove to achieve a double seal between the cavity and the flange, and a small hole is made in the middle of the two sealing rings to connect the lower... Figure 4 The vacuum pumping device 6 enables real-time monitoring of the vacuum pressure between the two seals.

[0064] In summary, the extended furnace body of this utility model can add a metal sealing groove on the basis of the original sealing groove to achieve double sealing between the cavity and the flange, and a fine hole is opened in the middle of the two sealing rings to connect the vacuum pumping device, so as to realize the function of real-time monitoring of vacuum pressure between the double seals.

[0065] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. An epitaxial furnace body, characterized in that, include: An epitaxial furnace body (10); Two sealing flanges are respectively connected to the two ends of the epitaxial furnace body (10). Each sealing flange has a first sealing ring (31) and a second sealing ring (32) surrounding the first sealing ring (31) on its inner side connected to the epitaxial furnace body (10). An annular vacuum region (33) is formed between the first sealing ring (31) and the second sealing ring (32). as well as A vacuum pumping device (6) is connected to the annular vacuum region (33) through a pipeline to extract air from the annular vacuum region (33) to form a vacuum.

2. The epitaxial furnace body as described in claim 1, characterized in that, Each of the sealing flanges has a first annular groove (11) and a second annular groove (12) surrounding the first annular groove (11) on its inner side where it connects to the epitaxial furnace body (10).

3. The epitaxial furnace body as described in claim 2, characterized in that, The first annular groove (11) is a rounded rectangular groove, and the second annular groove (12) is a rounded rectangular groove.

4. The epitaxial furnace body as described in claim 2, characterized in that, The first sealing ring (31) is at least partially embedded in the first annular groove (11), and the second sealing ring (32) is at least partially embedded in the second annular groove (12).

5. The epitaxial furnace body as described in claim 1, characterized in that, The first sealing ring (31) is a rounded rectangular sealing ring, and the second sealing ring (32) is a rounded rectangular sealing ring.

6. The epitaxial furnace body as described in claim 2, characterized in that, At least one vacuum hole (13) is provided on the inner side of the annular vacuum region (33) between the first annular groove (11) and the second annular groove (12).

7. The epitaxial furnace body as described in claim 6, characterized in that, The two sealing flanges are the front sealing flange (1) and the rear sealing flange (2).

8. The epitaxial furnace body as described in claim 7, characterized in that, The vacuum port (13) of the front sealing flange (1) and the vacuum port (13) of the rear sealing flange (2) are connected to the vacuum pumping device (6) through a pipeline.

9. The epitaxial furnace body as described in claim 1, characterized in that, Also includes: A pipeline switch (4) is installed in the pipeline after the confluence.

10. The epitaxial furnace body as described in claim 1, characterized in that, Also includes: A pressure detection unit (5) is installed in the pipeline after the confluence.

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