Gluing unit and photoresist conveying system

Abstract

The utility model provides a gluing unit and photoresist delivery system, the gluing unit comprises a glue spraying pipeline, a circulation pipeline and an opening and closing structure, the two axial ends of the glue spraying pipeline are respectively a glue inlet end and a glue spraying end, the two ends of the circulation pipeline are communicated with different axial positions of the glue spraying pipeline, and the opening and closing structure is arranged at the glue spraying end. The pipe pressure of the glue spraying pipeline is used for driving the opening and closing structure to open or close the glue spraying end. Thus, when the wafer does not need to be glued, the photoresist in the glue spraying pipeline is isolated from air through the opening and closing structure, and generation of photoresist crystallization is avoided. Opening and closing of the glue spraying end by the opening and closing structure are controlled through pipe pressure in the glue spraying pipeline, certain automation is achieved, and the working efficiency of the device is improved. When the photoresist coating device is used for coating the photoresist, one part of the photoresist is sprayed out through the nozzle end, and the other part of the photoresist can flow back on the photoresist spraying pipeline through the circulating pipeline, so that the photoresist crystallization caused by the crosslinking of the photoresist due to the static photoresist is avoided, and the use amount of the photoresist can be saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, especially relate to a kind of gluing unit and photoresist conveying system. BACKGROUND

[0002] In photoetching process, photoresist assumes an important role. The coating of photoresist is completed in the glue applying unit of the uniform glue developing machine, and the existing glue applying unit includes a sample table that can rotate and a nozzle. The nozzle is composed of glue nozzle, conveying pipeline and water jacket pipe and other parts. In order to make the glue applying unit work normally, the uniform glue developing machine also configures corresponding subsystems to serve the process unit, such as the conveying system of photoetching material. It contains glue bottle, buffer container, pump, filter, back suction valve and nozzle. But photoresist will crystallize when it contacts with air for a certain time, and because photoresist cannot cut the glue instantly after spraying, the crystallization formed by its contact with air often accumulates in the nozzle. When applying glue, photoresist crystallization will drop onto the wafer surface, resulting in uneven photoresist coating and affecting etching, and ultimately affecting the performance of the device.

[0003] In the existing photoetching process, two methods are generally used to handle this photoresist crystallization phenomenon. One is to use the vacuum suction nozzle of the equipment to suck back the residual photoresist, thereby avoiding the nozzle from being blocked by photoresist crystallization. The second is to perform periodic empty spraying, specifically spraying the photoresist that has been in contact with air for a long time, to avoid the formation of crystallization. But each has its own shortcomings, the former shortcoming is that after the back suction operation, the glue in the nozzle can still contact with air to form crystalline particles, and the back suction position cannot be determined. The shortcoming of the latter is that periodic empty spraying will cause a lot of waste and cost soaring. SUMMARY

[0004] The purpose of the utility model is to provide a kind of gluing unit and photoresist conveying system, to solve the problem that photoresist crystallization is easy to produce in current photoetching process and affects the uniformity of glue application, ultimately affects the performance of the device.

[0005] To solve the above technical problems, based on one aspect of the utility model, the utility model provides a kind of gluing unit, which includes:

[0006] Glue spraying pipeline, the axial two ends of the glue spraying pipeline are glue inlet end and glue spraying end respectively;

[0007] Circulation pipeline, the two ends of the circulation pipeline are communicated with different axial positions of the glue spraying pipeline;

[0008] Opening and closing structure, the opening and closing structure is arranged at the glue spraying end, and the pipe pressure of the glue spraying pipeline is used to drive the opening and closing structure to open or close the glue spraying end.

[0009] Optionally, the opening and closing structure comprises an opening and closing blade and an elastic member, the opening and closing blade is movably arranged at the glue spraying end, one end of the elastic member is fixed relative to the glue spraying end, and the other end of the elastic member is connected with the opening and closing blade; the elastic member is used for resetting the opening and closing blade to close the glue spraying end.

[0010] Optionally, the movement mode of the opening and closing blade relative to the glue spraying end is rotation, and the other end of the elastic member is connected to a rotating shaft of the opening and closing blade.

[0011] Optionally, the elastic member comprises a clockwork spring and is sleeved on the rotating shaft of the opening and closing blade.

[0012] Optionally, the circulation pipeline is arranged around the glue spraying pipeline.

[0013] Optionally, the number of the circulation pipelines is at least two, and the at least two circulation pipelines are arranged in sequence along an axial direction of the glue spraying pipeline; and / or, the at least two circulation pipelines are arranged in sequence along a circumferential direction of the glue spraying pipeline.

[0014] Optionally, the glue spraying pipeline comprises a first pipeline section and a second pipeline section, one end of the first pipeline section is a glue inlet end, the other end of the first pipeline section is communicated with one end of the second pipeline section, the other end of the second pipeline section is a glue spraying end, and a pipe diameter of the first pipeline section gradually decreases along a direction from the glue inlet end to the glue spraying end.

[0015] Optionally, two ends of the circulation pipeline are connected to different axial positions of the second pipeline section; or one end of the circulation pipeline is communicated with the first pipeline section, and the other end of the circulation pipeline is communicated with the second pipeline section.

[0016] Based on another aspect of the utility model, the utility model also provides a photoresist conveying system, which comprises a glue feeding pipeline, a pump body and the glue coating unit, the glue feeding pipeline is communicated with a glue inlet end of the glue spraying pipeline, and the pump body is arranged on the glue feeding pipeline.

[0017] Optionally, the photoresist conveying system further comprises a temperature control pipe sleeve, and the temperature control pipe sleeve is sleeved on the glue feeding pipeline.

[0018] The glue spraying unit as above, when the pipe pressure in the glue spraying pipe exceeds a certain value, will drive the opening and closing structure to open the glue spraying end of the glue spraying pipe, so as to spray glue on the surface of the wafer, when the pipe pressure in the glue spraying pipe does not exceed the value, the opening and closing structure will close the glue spraying end. When the wafer does not need to be sprayed, the opening and closing structure isolates the photoresist and air in the glue spraying pipe, avoiding the generation of photoresist crystals. Moreover, the opening and closing of the opening and closing structure to the glue spraying end is controlled by the pipe pressure in the glue spraying pipe, which has a certain automaticity and improves the working efficiency of the device. When spraying, part of the photoresist is sprayed through the nozzle end, and the other part of the photoresist can flow in the circulation pipe, so that this part of the photoresist flows back to the glue spraying pipe in the direction from the glue spraying end to the glue inlet end, or this part of the photoresist flows to the glue spraying pipe in the direction from the glue inlet end to the glue spraying end, avoiding the crosslinking of the photoresist itself caused by the static photoresist and the generation of photoresist crystals.

[0019] It should be noted that the photoresist conveying system includes the glue spraying unit, so it also has the technical effects brought by the glue spraying unit, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0020] Those skilled in the art should understand that the provided drawings are used to better understand the present application, and do not constitute any limitation on the scope of the present application. Among them:

[0021] Figure 1 is a schematic diagram of a glue spraying unit according to an embodiment of the present application;

[0022] Figure 2 is Figure 1 is an enlarged view of the axial section at A in FIG. 8;

[0023] Figure 3 is a schematic diagram of an opening and closing blade according to an embodiment of the present application;

[0024] Figure 4 is a schematic diagram of a circulation pipe arranged on a glue spraying pipe according to an embodiment of the present application;

[0025] Figure 5 is another schematic diagram of a circulation pipe arranged on a glue spraying pipe according to an embodiment of the present application

[0026] Figure 6 is still another schematic diagram of a circulation pipe arranged on a glue spraying pipe according to an embodiment of the present application.

[0027] In the drawings:

[0028] 10-glue spraying pipe; 11-first pipe section; 12-second pipe section; 20-circulation pipe; 30-opening and closing structure; 31-opening and closing blade; 310-rotation shaft; 32-elastic member; 40-glue feeding pipe; 50-temperature control pipe sleeve. Detailed Implementation

[0029] To make the objectives, advantages, and features of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the objectives of the embodiments of this utility model. Furthermore, the structures shown in the drawings are often part of the actual structure. In particular, different drawings may emphasize different aspects and sometimes use different scales.

[0030] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to include the meaning of “and / or”; the term “a number” is generally used to include the meaning of “at least one”; and the term “at least two” is generally used to include the meaning of “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “far end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two elements or the interaction between two elements. Furthermore, as used in this invention, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements. This connection, coupling, cooperation, or transmission can be direct or indirect through an intermediate element, and should not be construed as indicating or implying a spatial positional relationship between the two elements. That is, one element can be located arbitrarily inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0031] See Figure 1The utility model discloses an embodiment schematically provides a kind of gluing unit, and gluing unit includes glue spraying pipeline 10, circulation pipeline 20 and open-close structure 30.The axial both ends of glue spraying pipeline 10 are glue inlet end and glue spraying end respectively, photoresist enters glue spraying pipeline from glue inlet end, and it sprays from glue spraying end, and the surface of wafer is glued.Circulation pipeline 20 is communicated at different axial positions of glue spraying pipeline 10 at both ends, in this way, one end of circulation pipeline 20 is close to glue inlet end, and the other end is close to glue spraying end.Open-close structure 30 is arranged at glue spraying end, and the pressure of glue spraying pipeline 10 is used to drive open-close structure 30 to open or close glue spraying end.When needing to glue, the pressure in glue spraying pipeline 10 is controlled to increase, and open-close structure 30 is driven to open glue spraying end, so that photoresist sprays, when not needing to glue, the pressure in glue spraying pipeline 10 is controlled to reduce, and open-close structure 30 can be reset to position based on the mechanical property of itself, to close glue spraying end.In an embodiment, the mode of controlling glue spraying pipeline 10 can be realized by pump body, for example, the glue inlet end of glue spraying pipeline 10 is communicated glue feeding pipeline 40, and glue feeding pipeline 40 is used to deliver photoresist to glue spraying pipeline 10, and pump body is arranged on glue feeding pipeline 40, and the pressure in pipeline is changed by pump body, on the one hand, the flow of photoresist is realized, and when the pressure exceeds certain value, open-close structure 30 will be driven to open glue spraying end.Preferably, temperature control pipe sleeve 50 is set on glue feeding pipeline 40, and temperature control pipe sleeve 50 can control the temperature of photoresist in glue feeding pipeline 40 based on water cooling principle.

[0032] As above, when the pressure in glue spraying pipeline 10 exceeds certain value, open-close structure 30 will be driven to open the glue spraying end of nozzle pipeline, to glue the surface of wafer, when the pressure in glue spraying pipeline 10 does not exceed the value, open-close structure 30 closes glue spraying end, and residual glue liquid in glue spraying end can be sheared off.When wafer is not needed to be glued, the setting of open-close structure 30 isolates photoresist and air in glue spraying pipeline 10, to avoid the generation of photoresist crystal.And, the opening and closing of open-close structure 30 to glue spraying end is controlled by the pressure in glue spraying pipeline 10, with certain automaticity, to improve the working efficiency of device.When gluing, part of photoresist sprays through glue spraying end, and another part of photoresist flows in circulation pipeline 20, so that the part of photoresist in circulation pipeline 20 backflows to glue spraying pipeline 10 along the direction of glue spraying end to glue inlet end, or makes the part of photoresist in circulation pipeline 20 flows to glue spraying pipeline 10 along the direction of glue inlet end to glue spraying end, to avoid the crosslinking of glue itself caused by photoresist static, and then generate photoresist crystal.

[0033] Reference Figure 2 And Figure 3In an embodiment, the opening and closing structure 30 comprises an opening and closing blade 31 movably arranged at the glue injection end and a resilient member 32, one end of which is fixed relative to the glue injection end and the other end of which is connected to the opening and closing blade 31; the resilient member 32 is used to reset the opening and closing blade 31 to close the glue injection end. When the opening and closing blade 31 is reset, the glue injection end is closed; when the pressure in the glue injection pipeline 10 exceeds a certain value, the pipe pressure of the glue injection pipeline 10 will drive the opening and closing blade 31 to move, thereby opening the glue injection end; the resilient member 32 will increase the stress between the opening and closing blade 31 at the same time; when the pressure in the glue injection pipeline 10 does not exceed the corresponding value, the opening and closing blade 31 will be reset under the stress of the resilient member 32. In addition, the opening and closing blade 31 is used to open or close the entire glue injection end, or a sheet-shaped member can be fixedly arranged at the glue injection end to close a part of the glue injection end, and the other part of the glue injection end is opened or closed by the opening and closing blade 31.

[0034] In an embodiment, the opening and closing blade 31 moves relative to the glue injection end in a rotating manner, one end of the resilient member 32 is fixed relative to the glue injection end (for example, one end of the resilient member 32 is fixed on a spring seat, and the spring seat is fixedly arranged at one side of the glue injection end), and the other end of the resilient member 32 is connected to the rotating shaft 310 of the opening and closing blade 31. In this way, when the pressure in the glue injection pipeline 10 exceeds a certain value, the pipe pressure of the glue injection pipeline 10 will drive the opening and closing blade 31 to rotate (specifically, to rotate away from the glue injection end), thereby opening the glue injection end; when the pressure in the glue injection pipeline 10 does not exceed the corresponding value, the rotating shaft 310 of the opening and closing blade 31 will rotate back to reset under the resilient stress of the resilient member 32, thereby driving the opening and closing blade 31 to rotate back to reset, thereby closing the glue injection end. For example, the resilient member 32 comprises a clockwork spring and is sleeved on the rotating shaft 310 of the opening and closing blade 31.

[0035] In other embodiments, the opening and closing blade 31 moves relative to the glue injection end in a moving manner, specifically, the opening and closing blade 31 moves along the radial direction of the glue injection pipeline 10, thereby opening or closing the glue injection end. In specific implementation, the pressure in the glue injection pipeline 10 can be converted into a driving force along the radial direction of the glue injection pipeline 10 through a force conversion structure; when the pressure in the glue injection pipeline 10 exceeds a certain value, the driving force drives the opening and closing blade 31 to move, and the stress of the resilient member 32 increases at the same time, thereby opening the glue injection end; when the pressure in the glue injection pipeline 10 does not exceed the corresponding value, the opening and closing blade 31 moves back to reset under the stress of the resilient member 32, thereby closing the glue injection end.

[0036] Continuing to refer to Figure 1The glue spraying pipe 10 comprises a first pipe section 11 and a second pipe section 12. One end of the first pipe section 11 is a glue inlet end, and the other end of the first pipe section 11 is in communication with one end of the second pipe section 12. The other end of the second pipe section 12 is a glue spraying end. The pipe diameter of the first pipe section 11 gradually decreases in the direction from the glue inlet end to the glue spraying end. In this way, the second pipe section 12 is trapezoidal, which can increase the pipe pressure in the glue spraying pipe 10. Further, the two ends of the circulation pipe 20 can be connected to different axial positions of the second pipe section 12, Figure 1 、 Figure 4 and Figure 5 as shown. Alternatively, one end of the circulation pipe 20 is in communication with the first pipe section 11, and the other end of the circulation pipe 20 is in communication with the second pipe section 12, Figure 6 as shown.

[0037] The number and arrangement of the circulation pipes 20 are not specifically limited in the embodiment. For example, the circulation pipes 20 are arranged around the glue spraying pipe 10, and specifically, the circulation pipes 20 can be arranged around the second pipe section 12, Figure 1 as shown. In this way, when glue needs to be sprayed, part of the photoresist is sprayed from the glue spraying end, and another part of the photoresist can flow in the circulation pipe 20 in the direction from the glue spraying end to the glue inlet end, thereby achieving backflow in the glue spraying pipe 10. For another example, the number of the circulation pipes 20 is at least two. The at least two circulation pipes 20 can be arranged in sequence along the axial direction of the glue spraying pipe 10, Figure 4 as shown. Alternatively, the at least two circulation pipes 20 can be arranged in sequence along the circumferential direction of the glue spraying pipe 10, Figure 4 、 Figure 5 and Figure 6 as shown. In the embodiment, Figure 4 the multiple circulation pipes 20 arranged along the axial direction of the glue spraying pipe 10 form a group, and multiple groups of the circulation pipes 20 are arranged along the circumferential direction of the glue spraying pipe 10. For example, the multiple groups of the circulation pipes 20 are arranged on the second pipe section 12 of the glue spraying pipe 10. Figure 5 In the embodiment, the at least three circulation pipes 20 are arranged on the second pipe section 12 along the circumferential direction of the glue spraying pipe 10. Figure 6 In the embodiment, the at least two circulation pipes 20 are arranged in sequence along the circumferential direction of the glue spraying pipe 10, and the two ends of the circulation pipes 20 are in communication with the first pipe section 11 and the second pipe section 12, respectively. For the multiple circulation pipes 20 arranged, part of the circulation pipes 20 can be used for the photoresist to flow in the forward direction in the direction from the glue inlet end to the glue spraying end, thereby flowing into the glue spraying pipe 10. For example, Figure 4 the circulation pipes 20 close to the glue inlet end (for example, the upper two rows of the circulation pipes 20 in Figure 4 ); and another part of the circulation pipes 20 can be used for the photoresist to flow in the reverse direction in the direction from the glue spraying end to the glue inlet end (for example, Figure 4The two lower rows of the circulation pipeline 20) in the glue spraying pipeline 10) can make the overflowed photoresist at the glue spraying end flow back to the glue spraying pipeline 10 through the part of the circulation pipeline 20, so as to avoid waste of the photoresist.

[0038] The utility model discloses an embodiment further provides a photoresist conveying system, it includes glue feeding pipeline 40, pump body and above-mentioned glue coating unit, glue feeding pipeline 40 communicates with the glue inlet end of glue spraying pipeline 10, and pump body sets up on glue feeding pipeline 40.

[0039] It should be noted that those skilled in the art can learn the working principle and other structural components of the photoresist conveying system according to the prior art, which will not be described here. For example, the photoresist conveying system also includes a back suction valve, a buffer container and a filter.

[0040] Although the utility model discloses as above with preferable embodiment, however the above embodiment is not used to limit the utility model. For any skilled person in the art, without departing from the range of the utility model technical scheme, can utilize the technical content disclosed above to make many possible changes and modifications to the utility model technical scheme, or modify as equivalent variation equivalent embodiment. Therefore, any simple modification, equivalent variation and modification made to the above embodiment according to the technical essence of the utility model, all still belong to the protection range of the utility model technical scheme.

Claims

1. A gluing unit, characterized in that, The application relates to a photoresist conveying system. The photoresist conveying system comprises a photoresist conveying pipeline, a pump body and a photoresist coating unit. The photoresist conveying pipeline has an inlet end and a photoresist outlet end. The photoresist coating unit is arranged at the photoresist outlet end.

2. The gluing unit according to claim 1, characterized in that The photoresist coating unit comprises an opening and closing blade and an elastic member. The elastic member is arranged at the photoresist outlet end.

3. The gluing unit according to claim 2, characterized in that, The elastic member is arranged at the photoresist outlet end.

4. The gluing unit according to claim 3, characterized in that, The elastic member is arranged at the photoresist outlet end.

5. The gluing unit according to claim 1, characterized in that, The elastic member is arranged at the photoresist outlet end.

6. The gluing unit according to claim 1, characterized in that, The elastic member is arranged at the photoresist outlet end.

7. The gluing unit according to claim 1, characterized in that, The elastic member is arranged at the photoresist outlet end.

8. The gluing unit according to claim 7, characterized in that, The photoresist conveying pipeline comprises a first pipeline section and a second pipeline section.

9. A photoresist delivery system characterized by, The first pipeline section has an inlet end and a second end.

10. The photoresist delivery system of claim 9, wherein, The second end of the first pipeline section is connected with one end of the second pipeline section. The other end of the second pipeline section is a photoresist outlet end. The photoresist conveying pipeline comprises a first pipeline section and a second pipeline section. The first pipeline section has an inlet end and a second end. The second end of the first pipeline section is connected with one end of the second pipeline section. The other end of the second pipeline section is a photoresist outlet end. The photoresist conveying system further comprises a temperature control sleeve. The temperature control sleeve is arranged on the photoresist conveying pipeline.

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