Etching machine loading port with detection function
By introducing a detection function on the etching machine's loading port, using microswitches and photoelectric switches to detect the loading seat status, the problem of the loading port being unable to identify the wafer cassette was solved, thus improving the safety of the etching machine.
Patent Information
- Application Number
- CN202423212834.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-25
AI Technical Summary
The loading port of the existing etching machine lacks wafer cassette detection function, which makes it impossible for SMIF to confirm whether there is a wafer cassette on the loading port. This can easily cause wafer cassettes to collide during repeated operations, creating a safety hazard.
Design an etching machine loading port with detection function. Use first, second and third detection devices (microswitches and photoelectric switches) to detect the status of the loading seat, and ensure that loading is only performed when the loading seat is in a position where the wafer cassette can be placed, so as to avoid collision.
By designing the detection components, the problem of collisions caused by the inability to identify wafer boxes during loading is eliminated, thus improving the safety of wafer processing.
Smart Images
Figure CN223712715U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to etching machine technical field especially, it relates to a kind of etching machine loading port with detection function. BACKGROUND
[0002] In the manufacturing process of semiconductor devices, wafers are usually loaded in standard specification wafer cassettes for transfer between various process procedures, and each wafer cassette can load multiple wafers. For standard integrated circuit front-end process equipment, there is a standard mechanical interface (SMIF) to receive the wafer cassette. When the process starts, the wafer cassette is placed on the standard mechanical interface, and the wafer cassette is opened using an automatic device. A mechanical arm is used to take the wafer from the wafer cassette, and the mechanical arm transfers the wafer to the process cavity for further processing. After the process procedure is completed, the wafer is reloaded into the wafer cassette.
[0003] In the etching process, the wafer cassette needs to be loaded into the loading port. However, some etching machines on the market do not have a detection function for the wafer cassette, which can cause the SMIF to fail to confirm whether there is a wafer cassette on the loading port, and repeated states can easily cause the wafer cassette to collide, causing safety hazards. SUMMARY
[0004] The utility model aims at solving the problems of the existing technology, such as the lack of detection function for the wafer cassette in the loading port of some etching machines, and proposes an etching machine loading port with detection function.
[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:
[0006] A kind of etching machine loading port with detection function is designed, including the loading port installed on the side of machine body;
[0007] The loading port includes a drive module fixed to the side of the machine body and a loading seat driven to move by the drive module, and a clamping module is arranged above the loading seat;
[0008] The first detection member is installed on the loading seat, and the second detection member is arranged on the clamping module.
[0009] Further, the first detection member is a microswitch installed on the loading seat, and the actuating portion of the microswitch protrudes above the loading seat to contact the lower end of the wafer cassette.
[0010] Further, the clamping module includes a clamping piece rotatably connected to the loading seat, and a pusher is pinned to the side of the loading seat, and the telescopic end of the pusher is connected to the clamping piece.
[0011] Further, the second detection member is a micro switch installed at the bottom of the clamping member, and a touch part of the micro switch protrudes from the end surface of the clamping member and is used to contact the upper end of the wafer box.
[0012] Further, a third detection member is installed at the back end of the loading seat, and the end surface of the machine body is provided with a baffle matched with the third detection member.
[0013] Further, the third detection member is a photoelectric switch, and the photoelectric switch is coupled with the baffle at the original position of the loading seat.
[0014] The etching machine loading port with the detection function has the advantages that: in the utility model, the first detection member, the second detection member and the third detection member are used to detect whether the wafer box is loaded on the loading seat, whether the wafer box is clamped and whether the loading seat is at the original position, and after the output signal is connected with the SMIF, the SMIF is loaded only when the current loading seat can place the wafer box, otherwise, the wafer box can be unloaded only, so that the problem that the wafer box on the SMIF collides and breaks due to the failure to identify whether the wafer box is loaded on the loading port is solved, the structure is simple, and the safety of wafer processing is greatly improved. BRIEF DESCRIPTION OF DRAWINGS
[0015] Fig. 1 It is a structural schematic view of the utility model;
[0016] Fig. 2 It is a left view of the utility model;
[0017] Fig. 3 It is a micro switch circuit schematic view of the utility model.
[0018] In the drawing: 1, machine body; 11, baffle; 2, loading port; 21, driving module; 22, loading seat; 23, clamping module; 231, clamping member; 232, pushing member; 24, first detection member; 25, second detection member; 26, third detection member. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.
[0020] REFERENCE Figs. 1-3For an embodiment of the utility model, it discloses a kind of etching machine loading port with detection function, the port is interlocked with connection standard mechanical interface (SMIF), to when loading port 2 is in predetermined position, SMIF can load and unload wafer box, to avoid the problem of collision box, specifically the structure includes the loading port 2 of installing on the side of machine body 1;
[0021] The loading port 2 includes a drive module 21 fixed to the side of the machine body 1 and a loading seat 22 driven to move by the drive module 21. In this embodiment, the drive module 21 can be a screw rod module, which is driven by a motor to rotate the screw rod to control the linear movement of the loading seat 22. A clamping module 23 is provided above the loading seat 22.
[0022] The first detection member 24 is installed on the loading seat 22, and the second detection member 25 is provided on the clamping module 23.
[0023] In some embodiments, the first detection member 24 in the utility model is a microswitch installed on the loading seat 22. The actuating part of the microswitch protrudes above the loading seat 22 and is used to contact the lower end of the wafer box.
[0024] Specifically, the first detection member 24 and the second detection member 25 in this embodiment are electrically connected to the control unit of the SMIF. Only when the first detection member 24 and the second detection member 25 output corresponding signals, the SMIF performs corresponding actions to realize the action interlocking between the loading port 2 and the SMIF, and avoid the collision of the wafer box.
[0025] As shown in Fig. 3 The connection circuit diagram of the microswitch in this embodiment is shown in the figure. Since the output end of the microswitch is normally closed and connected to 24V, the voltage feedback of 24V is high voltage frequency, which represents that the loading seat 22 has no wafer box, and the SMIF can load the wafer box. Conversely, 0V represents that there is a wafer box, which cannot load the wafer box at this time, and can only perform unloading action.
[0026] In some embodiments, the clamping module 23 in the utility model includes a clamping piece 231 rotatably connected to the loading seat 22. As a preferred embodiment, the clamping piece 231 in this embodiment is provided as a U-shaped piece, both ends of which are rotatably connected to the loading seat 22. A push piece 232 is pinned to the side of the loading seat 22. The telescopic end of the push piece 232 is connected to the clamping piece 231. The push piece 232 in this embodiment is preferably an electric push rod. The telescopic top end of the electric push rod is pinned to the middle part of the side of the clamping piece 231 to drive the clamping piece 231 to rotate and achieve clamping of the wafer box.
[0027] Further, the second detection member 25 in the embodiment is a micro switch installed at the bottom of the clamp 231, and the touch part of the micro switch protrudes from the end face of the clamp 231 and is used for contacting the upper end of the wafer box.
[0028] Similarly, as shown in the figure, since the output end of the micro switch is normally closed and connected with 24V, when the voltage feedback is 24V, it represents that the clamp 231 is lifted and does not contact the wafer box, at this time, the SMIF can load and unload the wafer box, on the contrary, when the output is 0V, it represents that the wafer box is placed on the loading seat 22 and the loading action cannot be performed. Fig. 3
[0029] On the basis of the above embodiment, in order to realize the detection of the original point of the loading seat 22, the utility model also includes a third detection member 26 installed at the back end of the loading seat 22, and the end face of the machine body 1 is provided with a baffle 11 matched with the third detection member 26.
[0030] Specifically, the third detection member 26 in the embodiment is a photoelectric switch, the photoelectric switch can be fixed on the loading seat 22 through a support, and the photoelectric switch is coupled with the baffle 11 at the original point position of the loading seat 22, wherein the photoelectric switch in the utility model is set as a PNP type photoelectric switch, when the third detection member 26 is opposite to the baffle 11, the output voltage feedback is 12-24V, which represents that the loading seat 22 is at the original point position, and the SMIF can load and unload the wafer box, on the contrary, when the output voltage is 0V, the SMIF cannot load and unload, and the photoelectric switch circuit structure is a conventional technical solution for those skilled in the art, which will not be described here.
[0031] In summary, in the utility model, the first detection member 24, the second detection member 25 and the third detection member 26 are used to detect whether the wafer box is placed on the loading seat 22, whether the wafer box is clamped and whether the loading seat 22 is at the original point position and the like, so that after the output signal is connected with the SMIF, it is ensured that the SMIF loads only when the current loading seat 22 can place the wafer box, otherwise, only the wafer box unloading action can be realized, so as to prevent the problem that the SMIF cannot identify whether the wafer box is placed on the loading port 2 and causes collision and causes fragments, the structure design is simple, and the safety of wafer processing is greatly improved.
[0032] The above is only a preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the technical field according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model can make equivalent replacement or change, which should be covered in the protection scope of the utility model.
Claims
1. An etching machine loading port with detection function, characterized in that, Includes a loading port (2) installed on the side of the body (1); The loading port (2) includes a drive module (21) fixed to the side of the body (1) and a loading seat (22) driven by the drive module (21). A clamping module (23) is provided above the loading seat (22). The loading seat (22) is equipped with a first detection element (24), and the clamping module (23) is equipped with a second detection element (25).
2. The etching machine loading port with detection function according to claim 1, characterized in that: The first detection element (24) is a micro switch installed on the loading seat (22). The actuating part of the micro switch protrudes above the loading seat (22) and is used to contact the lower end of the wafer cassette.
3. The etching machine loading port with detection function according to claim 1, characterized in that: The clamping module (23) includes a clamp (231) rotatably connected to the loading seat (22), and a pusher (232) is pinned to the side of the loading seat (22), with the telescopic end of the pusher (232) connected to the clamp (231).
4. The etching machine loading port with detection function according to claim 3, characterized in that: The second detection element (25) is a micro switch installed at the bottom of the clamp (231). The actuating part of the micro switch protrudes from the end face of the clamp (231) and is used to contact the upper end of the wafer cassette.
5. The etching machine loading port with detection function according to claim 1, characterized in that: It also includes a third detection element (26) installed on the back end of the loading seat (22), and the end face of the body (1) has a baffle (11) adapted to the third detection element (26).
6. The etching machine loading port with detection function according to claim 5, characterized in that: The third detection element (26) is a photoelectric switch, which is coupled to the baffle (11) at the origin position of the loading seat (22).