Vertical filter

Abstract

The utility model relates to the technical field of dust filtration, and discloses a vertical filter which comprises a filter cartridge, a first connecting port and a discharge port are respectively mounted on the filter cartridge, an ultrasonic filter screen frame is mounted in the filter cartridge and located between the first connecting port and the discharge port, and the first connecting port is connected with the discharge port. The ultrasonic filter screen frame is further provided with a screen used for filtering gas, the ultrasonic filter screen frame is further provided with a pipeline extending out of the filter cartridge, and the outer end of the pipeline is provided with an ultrasonic transducer used for vibrating the ultrasonic filter screen frame. According to the utility model, the ultrasonic transducer is arranged on the ultrasonic filter screen frame, and the ultrasonic filter screen frame can be driven to vibrate through the ultrasonic transducer, so that the ultrasonic filter screen frame can drive the filter screen to vibrate at low frequency, a large amount of dust can fall off under the condition that the filter screen is vibrated, and the phenomenon that the filter screen is blocked is reduced; therefore, the stability of the filter is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to dust filtering technical field, concretely is a vertical filter. BACKGROUND

[0002] Single crystal furnace is a kind of resistance heating type semiconductor material smelting furnace, is under inert gas protection, using graphite resistance heating method, melt multiple silicon, and the special equipment of directly grown dislocation-free single crystal silicon with soft shaft. In recent years, with the rapid development of photovoltaic solar industry, the demand for improving the benefit of single crystal furnace pulling is increasing, especially in the domestic market with broad. In the process of pulling crystal, the gas in the furnace is always extracted by the gas extraction system, and the gas pressure in the furnace is kept stable. However, the oxide dust impurities in the gas will have a great influence on the use of vacuum pump in the gas extraction system, and timely and effective removal of oxide dust and other impurities in the gas can improve the benefit of single crystal furnace pulling.

[0003] The existing filter device is usually provided with a filter screen inside, which can filter dust in the gas. With the long-term use of the filter device, a large amount of dust is usually adhered to the filter screen, causing the filter screen to be blocked, affecting the gas pressure in the furnace. In addition, the filtered dust is usually directly discharged to the outside of the filter, causing pollution to the environment of the workshop, and not having the function of collecting the filtered dust.

[0004] Therefore, we propose a vertical filter to solve the problems mentioned above. INVENTION CONTENTS

[0005] The utility model is aimed at solving the above-mentioned problems.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vertical filter, comprising a filter cartridge, the filter cartridge is respectively provided with a first connecting port and a discharge port, the inside of the filter cartridge is provided with an ultrasonic filter screen frame, and the ultrasonic filter screen frame is located between the first connecting port and the discharge port, the ultrasonic filter screen frame is also provided with a screen for filtering gas, the ultrasonic filter screen frame is also provided with a pipeline extending to the outside of the filter cartridge, and the end of the pipeline is provided with an ultrasonic transducer for vibrating the ultrasonic filter screen frame.

[0007] Further, the filter cartridge comprises an upper filter cartridge and a lower filter cartridge, the bottom of the upper filter cartridge and the top of the lower filter cartridge are both provided with a first flange plate, and the ultrasonic filter screen frame is installed between the two first flange plates, and the two first flange plates are connected by a plurality of fixing bolts.

[0008] Further, the lower filter cartridge is detachably connected with a material cylinder, and the material cylinder is detachably connected with a material bag for collecting dust.

[0009] Further, the material cylinder is connected with a material pipeline, the inner end of the material pipeline is connected with the material bag, the outer end of the material pipeline is connected with a second flange, and the second flange is connected with a hand valve.

[0010] Further, the lower filter cartridge is detachably connected with a material cylinder, and the material cylinder is detachably connected with a material bag for collecting dust.

[0011] Further, the outer surface of the material cylinder is connected with a plurality of rotating frames, each rotating frame is connected with a rotating shaft, the rotating shaft is connected with a locking rod, and the locking rod is connected with a butterfly nut.

[0012] Further, the top of the filter cartridge is connected with a viewing lens.

[0013] Further, the outer surface of the filter cartridge is connected with a vacuum pressure gauge.

[0014] Further, the material cylinder is connected with a connecting pipe, the connecting pipe is connected with an expansion tank, the expansion tank is connected with an electromagnetic valve and a ball valve, and the electromagnetic valve is located between the expansion tank and the ball valve.

[0015] The utility model discloses a filter device has following beneficial effects:

[0016] The utility model discloses an ultrasonic filter device, which comprises a filter frame, an ultrasonic transducer and a filter screen.

[0017] The utility model discloses an ultrasonic filter device, which comprises a filter frame, an ultrasonic transducer and a filter screen. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the three -dimensional structure schematic diagram of the utility model discloses a filter device;

[0019] Figure 2 It is the side view schematic diagram of the utility model discloses a filter device;

[0020] Figure 3 is the front view schematic diagram of the utility model

[0021] Figure 4 is the cross section structure schematic diagram of the utility model

[0022] Figure 5 is the A place local amplification structure schematic diagram in the utility model.

[0023] Corresponding name of each mark in the drawing:

[0024] 1, filter cartridge;101, upper filter cartridge;102, lower filter cartridge;103, first flange plate;2, first connecting port;3, discharge port;4, ultrasonic filter net rack;5, screen;6, pipeline;7, material cylinder;8, material bag;9, material cylinder live cover;10, discharging pipeline;11, second flange plate;121, rotating frame;122, rotating shaft;123, locking rod;124, butterfly nut;13, hand valve;14, peep lens;15, vacuum pressure gauge;16, connecting pipe;17, expansion tank;18, electromagnetic valve;19, ball valve;20, second connecting port. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art belong to the scope of protection of the utility model.

[0026] Embodiments of the utility model:

[0027] A filter, comprising a filter cartridge 1 for filtering inert gas (argon), and the lower part of the filter cartridge 1 is detachably installed with a material cylinder 7, through the setting of the material cylinder 7, the filtered dust can be collected.

[0028] Specifically: the filter cartridge 1 comprises an upper filter cartridge 101 and a lower filter cartridge 102, the bottom end of the upper filter cartridge 101 and the top end of the lower filter cartridge 102 are both fixed with a first flange plate 103, through the setting of the two first flange plates 103, the upper filter cartridge 101 and the lower filter cartridge 102 are fixed, the two first flange plates 103 are connected through a plurality of bolts, it should be noted that the outer surface of the lower filter cartridge 102 is installed with a first connecting port 2, it should be noted that the first connecting port 2 can be used as a feeding port, also can be used as a dust collecting port, the outer surface of the upper filter cartridge 101 is installed with a discharge port 3, through the setting of the discharge port 3, the filtered gas can be discharged.

[0029] The ultrasonic filter screen frame 4 is arranged between the two first flanges 103, and the connection position of the ultrasonic filter screen frame 4 and the first flange 103 is provided with an annular sealing ring. The annular sealing ring can seal and reduce the air leakage. The filter screen 5 is arranged on the ultrasonic filter screen frame 4, and the pore size of the filter screen 5 is about 630 meshes. The filter screen 5 can filter the inert gas (argon). Because the dust after filtration is usually sticky, the dust can be adhered to the filter screen 5. The pipeline 6 is arranged on the ultrasonic filter screen frame 4, and the end of the pipeline 6 extends to the outside of the filter cartridge 1 and is provided with an ultrasonic transducer (not shown in the figure). The ultrasonic transducer and the pipeline 6 can drive the ultrasonic filter screen frame 4 to vibrate, so that the dust adhered to the filter screen 5 can fall off.

[0030] The material cylinder 7 is provided with the feeding pipeline 10, the top end of the feeding pipeline 10 extends to the outside of the material cylinder 7 and is fixedly provided with the second flange 11. The second flange 11 can be arranged on the feeding pipeline 10, and the bottom end of the feeding pipeline 10 extends to the inside of the material cylinder 7 and is sealingly arranged with the material bag 8. The material bag 8 is arranged in the material cylinder 7. The material bag 8 can directly discharge the dust into the inside of the material bag 8, so that the dust is not discharged into the workshop to cause pollution.

[0031] The bottom end of the lower filter cartridge 102 is provided with the second connecting port 20, and the pore size of the first connecting port 2, the feeding pipeline 10 and the second connecting port 20 is the same. The second connecting port 20 can be used as a feeding port or a dust collecting port. The first connecting port 2 and the second connecting port 20 are provided with the third flange 21 which is matched with the second flange 11.

[0032] The material cylinder 7 is provided with the material cylinder cover 9 which is detachably arranged at the opening of the material cylinder 7. When the material cylinder cover 9 is taken out from the opening of the material cylinder 7, the material bag 8 can be directly taken out from the inside of the material cylinder 7.

[0033] The outer surfaces of the material cylinder 7 and the material cylinder cover 9 are provided with annular protrusions, and the outer surfaces of the two annular protrusions are equidistantly provided with a plurality of locking grooves in the circumferential direction. The outer surface of the material cylinder 7 is provided with the rotating frame 121 which is arranged near the locking groove. The rotating shaft 122 is fixedly arranged on the rotating frame 121, and the locking rod 123 is rotatably arranged on the rotating shaft 122. The butterfly nut 124 is threadedly arranged on the locking rod 123. When the locking rod 123 is rotated into the two locking grooves, the butterfly nut 124 can lock the material cylinder 7 and the material cylinder cover 9.

[0034] The connecting pipe 16 is installed on the material cylinder 7, and one end of the connecting pipe 16 is provided with an expansion tank 17. It should be noted that the expansion tank 17 is respectively provided with an electromagnetic valve 18 and a ball valve 19, and the electromagnetic valve 18 is located between the ball valve 19 and the expansion tank 17. Through the setting of the electromagnetic valve 18, the vacuum gas in the material cylinder 7 can be slowly released. Through the setting of the ball valve 19, the function of backup is realized. If the electromagnetic valve 18 fails or is damaged, the ball valve 19 can be used to avoid the situation that the electromagnetic valve 18 cannot be used due to failure.

[0035] The top of the filter cartridge 1 is provided with a viewing lens 14, and the bottom end of the viewing lens 14 is in communication with the inside of the filter cartridge 1. Through the setting of the viewing lens 14, the inside of the filter cartridge 1 can be observed.

[0036] The outer surface of the filter cartridge 1 is provided with a vacuum pressure gauge 15. Through the setting of the vacuum pressure gauge 15, the pressure in the filter cartridge 1 can be detected.

[0037] The filter has two installation methods, vertical installation and horizontal installation, so that the installation space can be adjusted according to the needs;

[0038] Vertical installation: first, adjust the filter cartridge 1 to the "vertical" state, connect the first connecting port 2 (which is the inlet port at this time) on the outer surface of the lower filter cartridge 102 with the single crystal furnace, then align the second connecting port 20 (which is the dust collecting port at this time) at the bottom of the lower filter cartridge 102 with the top of the lower pipe 10, and then use the bolt to pass through the second flange plate 11 and the third flange plate 21 at one end of the second connecting port 20 to connect, which plays a role in fastening the filter cartridge 1 and the material cylinder 7, so as to complete the work of vertical installation (as shown in FIG. Figure 1 、 2 or 3),

[0039] When the vertical filter is used: first, connect one end of the vacuum pump with the discharge port 3. When the vacuum pump 3 extracts the inside of the filter cartridge 1, the inside of the vacuum pump 3 forms negative pressure, the first connecting port 2 can extract inert gas (argon) into the inside of the filter cartridge 1, the inert gas can flow upwards and pass through the filter screen 5, the filter screen 5 can filter the dust in the inert gas, and the filtered gas can be discharged from the inside of the discharge port 3 into the inside of the single crystal furnace for recycling.

[0040] Horizontal installation: first adjust the filter cartridge 1 to the "horizontal" state; the second connecting port 20 (at this time the second connecting port 20 is the inlet) of the lower filter cartridge 102 is connected with the single crystal furnace, then the first connecting port 2 (at this time the first connecting port 2 is the dust outlet) of the outer surface of the lower filter cartridge 102 is aligned with the top of the lower pipe 10, the bolt is used again to connect the second flange plate 11 with the third flange plate 21 at one end of the first connecting port 2, which plays a role in fastening the filter cartridge 1 and the cylinder 7, thereby completing the horizontal installation (as shown in Figure 4 the working state).

[0041] Horizontal filter use: first connect one end of the vacuum pump with the discharge port 3, the vacuum pump 3 extracts the inside of the filter cartridge 1, the inside of the vacuum pump 3 forms a negative pressure, the second connecting port 20 can extract inert gas (argon) into the inside of the filter cartridge 1, the inert gas can flow to one side and pass through the filter screen 5, the filter screen 5 can filter the dust in the inert gas, and the filtered gas 3 can enter the inside of the single crystal furnace for recycling.

[0042] With the long-term use of the filter, a large amount of dust will stick to the filter screen 5, the ultrasonic transducer can be opened, the generated ultrasonic waves can make the ultrasonic filter screen frame 4 vibrate, the ultrasonic filter screen frame 4 can drive the filter screen 5 to vibrate, so that the dust on the filter screen 5 can shake off and fall into the inside of the bag 8 for collection.

[0043] With the long-term use of the bag 8, if the inside of the bag 8 is full and needs to be replaced, the manual valve 13 needs to be adjusted so that the manual valve 13 is in a closed state, then the electromagnetic valve 18 is intermittently opened, the pressure inside the cylinder 7 gradually increases until it is consistent with the outside air pressure; then open the cylinder cover 9, replace the bag 8, prevent the dust from falling into the inside of the cylinder 7 during the replacement process.

Claims

1. A vertical filter comprising a filter cartridge (1) on which a first connecting port (2) and a discharge port (3) are respectively mounted, characterized in that: The inside of the filter cartridge (1) is provided with an ultrasonic filter net rack (4), and the ultrasonic filter net rack (4) is located between the first connecting port (2) and the discharge port (3), the ultrasonic filter net rack (4) is further provided with a screen (5) for filtering gas, and the ultrasonic filter net rack (4) is further provided with a pipeline (6) extending to the outside of the filter cartridge (1), and the end of the pipeline (6) is provided with an ultrasonic transducer for vibrating the ultrasonic filter net rack (4).

2. A vertical filter according to claim 1, characterized in that: The filter cartridge (1) comprises an upper filter cartridge (101) and a lower filter cartridge (102), the bottom of the upper filter cartridge (101) and the top of the lower filter cartridge (102) are provided with a first flange plate (103), and the ultrasonic filter net rack (4) is installed between the two first flange plates (103), and the two first flange plates (103) are connected by a plurality of fixing bolts.

3. A vertical filter according to claim 2, characterized in that: The lower filter cartridge (102) is detachably provided with a material cylinder (7), the inside of the material cylinder (7) is detachably provided with a material bag (8) for collecting dust, and the opening of the material cylinder (7) is detachably provided with a material cylinder cover (9).

4. A vertical filter according to claim 3, characterized in that: The material cylinder (7) is provided with a downpipe (10), the inner end of the downpipe (10) extends to the inside of the material cylinder (7) and is sealingly connected with the opening of the material bag (8), the outer end of the downpipe (10) extends to the outside of the material cylinder (7) and is provided with a second flange plate (11), and the second flange plate (11) is provided with a hand valve (13).

5. A vertical filter according to claim 3, wherein: The bottom end of the lower filter cartridge (102) is provided with a second connecting port (20), and the aperture of the second connecting port (20) is the same as the aperture of the first connecting port (2) and the aperture of the downpipe (10).

6. A vertical filter according to claim 3, characterized in that: The outer surface of the material cylinder (7) is provided with a plurality of rotating frames (121) equidistantly in the circumferential direction, and each rotating frame (121) is fixedly provided with a rotating shaft (122), the rotating shaft (122) is rotatably provided with a locking rod (123), and one end of the locking rod (123) is threadedly provided with a butterfly nut (124).

7. A vertical filter according to claim 1, characterized in that: The top of the filter cartridge (1) is provided with a peep lens (14), and the bottom end of the peep lens (14) is in communication with the inside of the filter cartridge (1).

8. A vertical filter according to claim 1, characterized in that: The outer surface of the filter cartridge (1) is provided with a vacuum pressure gauge (15).

9. A vertical filter according to claim 3, characterized in that: The material cylinder (7) is provided with a connecting pipe (16), and one end of the connecting pipe (16) is provided with an expansion tank (17), the expansion tank (17) is provided with an electromagnetic valve (18) and a ball valve (19), and the electromagnetic valve (18) is located between the expansion tank (17) and the ball valve (19).

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