Nozzle positioning jig

Abstract

The utility model discloses a nozzle positioning jig which is used for positioning a nozzle of a nozzle mechanism and comprises a jig body, the jig body comprises a base plate, the bottom of the base plate is clamped on the peripheral side of a suction cup, a sliding groove is formed in the upper end of the base plate, a position block is arranged in the sliding groove in a sliding mode, and the nozzle is matched with the position block in an up-down sliding mode. A fixing block used for limiting the position of the position block is further connected into the sliding groove in a sliding mode, a plurality of scale marks distributed in parallel in the height direction are arranged on the lower portion of the position block, and a center hole concentric with the circle center of the suction cup is formed in the sliding groove. Thus, by means of the jig, the nozzle can be directly moved up and down to the target position, convenience and rapidness are achieved, errors are small, and the working efficiency is improved; and the nozzle cannot be polluted.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field especially relates to a nozzle positioning fixture. BACKGROUND

[0002] In the semiconductor equipment, there is a step of coating chemical substances on the wafer, and the coating needs to place the nozzle spraying chemical substances in the target position, and the target position is generally aligned with the center of the wafer. The existing step of placing the nozzle in the center of the wafer is: a transparent acrylic plate is arranged, which is the same size as the wafer, and a cross mark is arranged on the plate, the acrylic plate is placed on the suction disc, and the nozzle is manually measured to coincide with the cross mark, that is, the nozzle is determined to be in the center position. The existing step of placing the nozzle at a suitable height is: a specific height object is set, the nozzle is lowered, and the nozzle is stopped when it contacts the object, that is, the nozzle is determined to be at a suitable height.

[0003] Therefore, the current visual measurement method is completely based on the skill level of the workers, and when the skill level of the workers is low, there may be a large deviation between the actual determined position and the target position, which is not conducive to the consistency of the process and causes quality defects. In addition, the nozzle height is limited by the object, which inevitably causes the nozzle head to contact the object and contaminate the nozzle. Moreover, the existing technology uses two steps to determine the planar position and height position of the nozzle, which is complicated and low in work efficiency. UTILITY MODEL CONTENT

[0004] To solve the technical problems in the background art, the utility model provides a nozzle positioning fixture.

[0005] The utility model discloses a nozzle positioning fixture for positioning the nozzle of a nozzle mechanism, which comprises a fixture body, wherein the fixture body comprises a base plate, the bottom of the base plate is clamped on the outer circumferential side of a suction disc, and the upper end is provided with a sliding groove; a position block is slidably arranged in the sliding groove; the nozzle and the position block are in up-down sliding fit; a fixing block for limiting the position of the position block is also slidably connected in the sliding groove; the lower part of the position block is provided with a plurality of scale lines distributed in parallel along the height direction; and a center hole concentric with the center of the suction disc is formed in the sliding groove.

[0006] Preferably, the sliding groove is an L-shaped groove, which comprises a groove I and a groove II connected vertically; the position block is slidably arranged in the groove I; the center hole is located in the groove I; and the fixing block is slidably arranged in the groove II.

[0007] Preferably, the position block comprises a cuboid structure I sliding in the groove I and a semi-cylinder structure at the upper end of the cuboid structure I, a semicircular opening with a radius matching the nozzle is arranged at the center of the semi-cylinder structure, and the scale line is arranged at the lower side of the semicircular opening.

[0008] Preferably, the groove I is further provided with a circular hole at the two sides of the end away from the groove II, and the position block is provided with a circular protrusion at the two sides of the end, which matches the circular hole.

[0009] Preferably, the fixed block is a cuboid structure II.

[0010] Preferably, the center hole, the center of the suction disc and the center of the semicircular opening are on the same vertical line and have the same radius.

[0011] Preferably, the center hole, the center of the suction disc and the center of the semicircular opening are on the same vertical line, and the radius of the semicircular opening matches the nozzle and is different from the radius of the center hole.

[0012] Preferably, a groove III is arranged at the lower end of the base plate, and the groove III is clamped with the outer circumferential side of the suction disc.

[0013] Preferably, the scale line is provided with three lines.

[0014] Preferably, a middle hole is arranged at the middle of the upper end of the fixed block.

[0015] In summary, the utility model has the following beneficial effects: the jig body is clamped on the suction disc, the height line is arranged on the position block, the nozzle is moved up and down to the scale line at the target position height, the height of the nozzle is adjusted, then the wafer placed between the suction disc and the jig body is sprayed through the nozzle (after the jig body and the suction disc are clamped, there is a height gap, and the wafer is placed in the height gap at the center position of the suction disc), which is convenient, fast, small in error and improves the work efficiency, and the nozzle is not polluted.

[0016] Additional aspects and advantages of the utility model will be partially given in the following description, partially will become obvious from the following description, or will be understood through the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a perspective view of the nozzle positioning jig of the utility model embodiment Figure 1 ;

[0018] Figure 2 It is a perspective view of the nozzle positioning jig of the utility model embodiment Figure 2 .

[0019] In the drawings:

[0020] 1 - base plate; 2 - suction cup; 3 - position block; 4 - nozzle; 5 - fixing block; 6 - groove I; 7 - groove II; 8 - semicircular opening; 9 - center hole; 10 - scale line. DETAILED DESCRIPTION

[0021] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar symbols represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0022] As Figures 1-2 shown, the nozzle positioning jig proposed in the embodiment is used for positioning the nozzle 4 of the nozzle mechanism, and comprises a jig body, the jig body comprises a base plate 1, the bottom of the base plate 1 is clamped on the outer circumferential side of a suction cup 2, the upper end is provided with a sliding groove, a position block 3 is slidably arranged in the sliding groove, the nozzle 4 is slidably connected with the position block 3, a fixing block 5 for limiting the position of the position block is also slidably connected in the sliding groove, and the lower part of the position block 3 is provided with a plurality of scale lines 10 distributed in parallel along the height direction, and a center hole 9 corresponding to the center position of the suction cup 2 is formed on the sliding groove.

[0023] When the position block 3 is slid and the nozzle 4 is aligned with the center hole 9, then the position of the position block 3 is fixed by moving the fixing block 5, the nozzle 4 is moved up and down, and when the bottom of the nozzle 4 is tangent to the scale line 10, the height position of the nozzle 4 is confirmed.

[0024] Specifically, a groove III is formed at the lower end of the base plate 1, and the groove III is clamped with the outer circumferential side of the suction cup 2. It is convenient to disassemble and assemble, and it saves time and effort.

[0025] In one of the embodiments, the scale line 10 can be provided with three scale lines, and of course, other numbers can also be provided in other embodiments, which is determined according to the actual situation.

[0026] It should be noted that in order to facilitate the movement of the fixing block 5, a center hole is formed in the upper middle part of the fixing block 5.

[0027] In this way, the jig body is clamped on the suction cup 2, the height line is set on the position block, and then the nozzle 4 is moved up and down to the scale line at the target position height, after the height of the nozzle 4 is adjusted, the wafer placed between the suction cup 2 and the jig body is sprayed through the nozzle 4 (there is a height gap between the jig body and the suction cup after clamping, and the wafer is placed in the height gap at the center position of the suction cup 2), which is convenient, fast, small error and improves the work efficiency; and the nozzle 4 will not be contaminated.

[0028] Further, the sliding groove is provided as an L-shaped groove, the L-shaped groove comprising a groove I 6 and a groove II 7 which are vertically communicated, the position block 3 slides in the groove I 6, the center hole 9 is located in the groove I 6, and the fixed block 5 slides in the groove II 7. The groove I 6 and the groove II 7 share a part of the area groove, when the position block 3 slides to be close to the center hole 9, the fixed block 5 slides to the shared area, so as to limit the position of the position block 3.

[0029] Further, the position block 3 comprises a cuboid structure I and a semi-cylindrical structure, the cuboid structure I slides in the groove I 6, the semi-cylindrical structure is located at the upper end of the cuboid structure I, a semicircular opening 8 is provided at the center of the semi-cylindrical structure, the radius of the semicircular opening 8 matches the nozzle 4, and the scale line 10 is located at the lower part of the side of the semicircular opening 8.

[0030] In the embodiment one, when viewed from above, the center hole 9, the center of the suction cup 2 and the center of the semicircular opening 8 are located at the same horizontal position and have the same radius. In the embodiment two, when viewed from above, the center hole 9, the center of the suction cup 2 and the center of the semicircular opening 8 are located at the same horizontal position, the radius of the semicircular opening 8 matches the nozzle 4 and is different from the radius of the center hole 9.

[0031] The fixed block 5 is provided as a cuboid structure II.

[0032] The two sides of the end of the groove I 6 away from the groove II 7 are further provided with circular holes, and the end of the position block is provided with a circular protrusion which cooperates with the circular hole.

[0033] In summary, the fixed block 5 is first slid into the groove II 7 away from the movable area of the position block, then the position block 3 is slid into the groove I 6 to the fixed area close to the center hole 9, the position block is reciprocally slid along the groove I 6 to move the nozzle 4 to above the center hole 9 on the substrate 1, the nozzle 4 is aligned with the center hole 9 on the substrate 1 by visual observation, the position of the nozzle is fine-tuned while the position block is slid, until the circular protrusion of the position block 3 is attached to the circular hole of the substrate 1, at this time, the center position of the nozzle 4 is confirmed; the nozzle 4 is moved up and down, so that the bottom of the nozzle 4 is tangent to the height scale line 10, at this time, the height position of the nozzle 4 is confirmed.

[0034] It should be noted that the cuboid structure described herein can be a cuboid structure or a square structure, or in other embodiments, the cross-sectional area of the bottom of the position block and the fixed block is rectangular, so that it can be smoothly slid in the sliding groove.

[0035] It needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0036] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected or in communication with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0037] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can understand the specific meaning of the above terms in the present application according to the technical range disclosed in the present application and the technical concept of the present application, and make equivalent replacement or change, which should be covered within the protection scope of the present application.

Claims

1. A nozzle positioning jig for positioning a nozzle of a nozzle mechanism, comprising a jig body, characterized by, The jig body comprises a base plate, the bottom of the base plate is clamped on the outer circumferential side of a suction disc, the upper end of the base plate is provided with a sliding slot, a position block is slidably arranged in the sliding slot, a nozzle is slidably arranged on the position block, a fixing block is slidably arranged in the sliding slot and used for limiting the position of the position block, the lower part of the position block is provided with a plurality of scale lines which are distributed in parallel along the height direction, and a center hole which is concentric with the center of the suction disc is formed in the sliding slot.

2. The nozzle positioning fixture of claim 1, wherein, The sliding slot is an L-shaped groove, the L-shaped groove comprises a groove I and a groove II which are vertically communicated, the position block is slidably arranged in the groove I, the center hole is located in the groove I, and the fixing block is slidably arranged in the groove II.

3. The nozzle positioning fixture of claim 2, wherein, The position block comprises a cuboid structure I and a semi-cylindrical structure, the cuboid structure I is slidably arranged in the groove I, the semi-cylindrical structure is located at the upper end edge of the cuboid structure I, a semicircular opening is arranged at the center of the semi-cylindrical structure, the radius of the semicircular opening matches the nozzle, and the scale lines are located at the lower part of the side edge of the semicircular opening.

4. The nozzle positioning fixture of claim 2, wherein, Round holes are further arranged at both sides of the end of the groove I which is away from the groove II, and round protrusions are arranged at both sides of the end of the position block, the round protrusions are matched with the round holes.

5. The nozzle positioning fixture of claim 3, wherein, The fixing block is a cuboid structure II.

6. The nozzle positioning fixture of claim 3, wherein, The center of the center hole, the center of the suction disc and the center of the semicircular opening are located on the same vertical line and have the same radius.

7. The nozzle positioning fixture of claim 3, wherein, The center of the center hole, the center of the suction disc and the center of the semicircular opening are located on the same vertical line, the radius of the semicircular opening matches the nozzle and is different from the radius of the center hole.

8. The nozzle positioning fixture of claim 1, wherein, A groove III is formed in the lower end of the base plate, and the groove III is clamped with the outer circumferential side of the suction disc.

9. The nozzle positioning fixture of claim 1, wherein, The scale lines are provided with three scale lines.

10. The nozzle positioning fixture of claim 1, wherein, A middle hole is formed in the middle of the upper end of the fixing block.

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