Photoresist dispensing and homogenizing device
By designing a photoresist dispensing and homogenizing device, uniform coating of photoresist thickness was achieved during the microfluidic chip manufacturing process, solving the problem of poor photoresist thickness uniformity in the existing technology and improving chip performance and yield.
Patent Information
- Application Number
- CN202422579686.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-24
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-10-24
AI Technical Summary
In the prior art, the photoresist thickness is not uniform in the microfluidic chip manufacturing process, which leads to the technical problem that chip performance and yield are affected by the poor uniformity of photoresist thickness in the prior art.
Design a photoresist dispensing and homogenizing device, including a homogenizer, a glass substrate, a dispensing alignment component, and a dispensing machine. By driving the dispensing tube to swing in the horizontal plane, the device achieves precise alignment between the dispensing nozzle and the geometric center of the glass substrate. Combined with a transparent dispensing tube and scale lines, it ensures uniform application of photoresist.
Uniform photoresist coating was achieved, solving the problem of thickness inhomogeneity and improving chip performance and yield.
Smart Images
Figure CN223717532U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the micro -fluidic chip manufacturing technical field, concretely relates to a photoresist dispensing and uniform gluing device. BACKGROUND
[0002] In the micro -fluidic master manufacturing process, photoetching is the most complex, most expensive and key process. The present photoetching cost accounts for one third of the total chip manufacturing cost, and the time consumed accounts for 40%-60% of the whole chip production time. For the photoetching process, the thickness and uniformity of photoresist are very critical quality parameters, which directly affect the quality of subsequent photoetching process, thereby affecting the performance, yield and reliability of micro -fluidic chip etc. Generally speaking, the thickness of photoresist is from several hundred nanometers to several tens of microns, and its uniformity must be very good. The coating of micron-level, uniform photoresist puts very high requirements on the uniform gluing process. At present, the uniform gluing process of most photoresist generally adopts the rotary uniform gluing method, that is, the glue throwing method. In recent years, with the development of micro -electromechanical system and optoelectromechanical system technologies, the glue throwing process encounters more and more challenges, and the utility model is proposed to at least partially solve the problems of non-uniformity of glue thickness, ridge generation of photoresist caused by slow spin coating and poor thickness consistency between glues. SUMMARY
[0003] Therefore, the technical problem to be solved by the utility model is to provide a photoresist dispensing and uniform gluing device, which can meet the thickness uniformity requirement of the glue after uniform gluing.
[0004] In order to solve the above problems, the utility model provides a photoresist dispensing and uniform gluing device, which comprises a uniform gluing machine, a glass substrate, a dispensing centering component and a dispensing machine. The uniform gluing machine can drive the glass substrate to rotate. The dispensing centering component comprises a dispensing tube that can be driven to swing a preset angle in a horizontal plane. The dispensing tube has a glue injection port and a glue outlet port. The air outlet port of the dispensing machine is communicated with the glue injection port through an air pipe. When the glue outlet port is adjusted to be aligned with the geometric center of the glass substrate, the pressure gas output by the dispensing machine can flow out the photoresist in the dispensing tube to the geometric center through the glue outlet port.
[0005] In some embodiments, the dispensing centering component further comprises a support fixed on a rotating shaft, the bottom end of the rotating shaft is fixedly connected with the output shaft of a motor through a shaft coupling, and the dispensing tube is fixed on the support. The motor is fixed on a base.
[0006] In some embodiments, the rotating center axis of the rotating shaft is vertically arranged, and the support is connected with the rotating shaft along the radial direction of the rotating shaft.
[0007] In some embodiments, a cover is arranged at the glue injection port, a rubber plug is arranged in the glue dispensing tube, in use, the photoresist is between the rubber plug and the glue outlet, a through hole is formed on the cover, and the output end of the air pipe is inserted into the through hole.
[0008] In some embodiments, the cover is detachably connected to the glue injection port.
[0009] In some embodiments, the end face of the side of the cover facing the glue outlet is provided with a sealing ring, and when the cover is assembled on the glue injection port, the sealing ring is embedded in the glue injection port.
[0010] In some embodiments, the material of the glue dispensing tube is transparent, and the tube wall of the glue dispensing tube is provided with a scale line arranged along the height direction thereof.
[0011] In some embodiments, the glass substrate is placed on the placing table of the glue homogenizer, the placing table is provided with a vacuum suction hole, and the vacuum suction hole can suck the glass substrate when the placing table is driven to rotate.
[0012] The photoresist glue dispensing and homogenizing device provided by the utility model can drive the swing angle of the glue dispensing tube in the horizontal plane through the glue dispensing centering component, and then realize the accurate alignment of the glue outlet of the glue dispensing tube in the glue dispensing centering component and the geometric center of the glass substrate, so that the problem of uneven glue thickness after the subsequent glue solution is spin-coated and homogenized on the glass substrate due to the misalignment between the position of the glue solution on the glass substrate and the geometric center of the glass substrate in the prior art can be eliminated. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 FIG. 1 is a structural schematic view of a photoresist glue dispensing and homogenizing device according to an embodiment of the utility model;
[0014] Figure 2 FIG. 2 is a schematic view of the glue dispensing tube in FIG. 1. Figure 1
[0015] The reference signs are as follows:
[0016] 1, glue homogenizer; 2, glass substrate; 3, glue dispensing tube; 4, support; 5, rotating shaft; 6, shaft coupling; 7, motor; 8, glue dispenser; 9, base body; 10, air pipe; 11, rubber plug; 12, cover. DETAILED DESCRIPTION
[0017] Referring to Figures 1 to 2 As shown, according to the embodiment of the utility model, provide a photoresist glue dispensing uniform glue device, the aforementioned photoresist for example SU8, the photoresist glue dispensing uniform glue device includes uniform glue machine 1, glass substrate 2, glue dispensing centering component (in the figure is not marked), glue dispenser 8, the uniform glue machine 1 can drive the glass substrate 2 rotation, the glue dispensing centering component includes the glue dispensing pipe 3 that can be driven to swing preset angle (specific angle is accurate with the center line of glue dispensing pipe 3 and the geometric center of glass substrate 2 in vertical direction coincides) in horizontal plane, the glue dispensing pipe 3 has glue injection port (in the figure is not marked, namely the glue injection port of the glue dispensing pipe 3 is in the vertical direction with the geometric center of glass substrate 2 coincides) and glue outlet (in the figure is not marked, namely the bottom end of the glue outlet is in the vertical direction with the geometric center of glass substrate 2 coincides), the air outlet of glue dispenser 8 is communicated with the glue injection port through air pipe 10, when the glue outlet is adjusted and the geometric center of glass substrate 2 is aligned (namely the center line of glue outlet and the geometric center is completely coincided in vertical direction), the pressure gas that the glue dispenser 8 outputs can make the photoresist in the glue dispensing pipe 3 content flow out to the geometric center via the glue outlet, the aforementioned uniform glue machine 1 and glue dispenser 8 can be realized with the mature equipment in prior art. Figure 1 As shown, the glue injection port of the glue dispensing pipe 3 is in the vertical direction with the geometric center of glass substrate 2 coincides) and glue outlet (in the figure is not marked, namely the bottom end of the glue outlet is in the vertical direction with the geometric center of glass substrate 2 coincides), the air outlet of glue dispenser 8 is communicated with the glue injection port through air pipe 10, when the glue outlet is adjusted and the geometric center of glass substrate 2 is aligned (namely the center line of glue outlet and the geometric center is completely coincided in vertical direction), the pressure gas that the glue dispenser 8 outputs can make the photoresist in the glue dispensing pipe 3 content flow out to the geometric center via the glue outlet, the aforementioned uniform glue machine 1 and glue dispenser 8 can be realized with the mature equipment in prior art. Figure 1 As shown, the glue injection port of the glue dispensing pipe 3 is in the vertical direction with the geometric center of glass substrate 2 coincides) and glue outlet (in the figure is not marked, namely the bottom end of the glue outlet is in the vertical direction with the geometric center of glass substrate 2 coincides), the air outlet of glue dispenser 8 is communicated with the glue injection port through air pipe 10, when the glue outlet is adjusted and the geometric center of glass substrate 2 is aligned (namely the center line of glue outlet and the geometric center is completely coincided in vertical direction), the pressure gas that the glue dispenser 8 outputs can make the photoresist in the glue dispensing pipe 3 content flow out to the geometric center via the glue outlet, the aforementioned uniform glue machine 1 and glue dispenser 8 can be realized with the mature equipment in prior art.
[0018] In the technical scheme, the glue dispensing centering component can drive the swing angle of the glue dispensing pipe 3 in the horizontal plane, and then realize the accurate alignment of the glue outlet of the glue dispensing pipe 3 in the glue dispensing centering component and the geometric center of the glass substrate 2, so that the problem of uneven thickness of the glue after the subsequent glue is spin-coated and uniformly glued on the glass substrate 2 due to the misalignment of the position of the glue on the glass substrate 2 and the geometric center of the glass substrate 2 in the prior art can be eliminated.
[0019] In one specific embodiment, the glue dispensing centering component further includes a bracket 4, the bracket 4 is fixed on a rotating shaft 5, the bottom end of the rotating shaft 5 is fixedly connected with the output shaft of a motor 7 through a coupling 6, the glue dispensing pipe 3 is fixed on the bracket 4, and the motor 7 is fixed on a base body 9.
[0020] In the technical scheme, the base body 9 serves as the mounting carrier of the entire glue dispensing centering component, which is arranged adjacent to the uniform glue machine 1, and by fixing the motor 7 on the base body 9, the accurate control of the swing position of the glue dispensing pipe 3 can be realized, and then the accurate alignment of the glue dispensing position is ensured.
[0021] Specifically referring to Figure 1 As shown, the rotating center axis of the rotating shaft 5 is vertically arranged, the bracket 4 is connected with the rotating shaft 5 along the radial direction of the rotating shaft 5, that is, the bracket 4 is objectively a cantilever structure, which makes the glue dispensing pipe 3 vertically suspended above the upper region of the glass substrate 2, so that the structure of the device of the utility model is more compact.
[0022] Specifically referring toFigure 2 As shown, the glue injection opening is provided with a cover 12, the glue injection tube 3 is provided with a rubber plug 11, the rubber plug 11 is in sliding sealing connection with the inner wall of the glue injection tube 3, in the use state, the photoresist is between the rubber plug 11 and the glue outlet, the cover 12 is formed with a through hole (not marked in the figure), and the output end of the air pipe 10 is inserted into the through hole.
[0023] When it is needed to inject glue on the glass substrate 2, the glue dispenser 8 is controlled to operate, and a pressure gas with a certain pressure is output, the pressure gas enters the glue injection opening of the glue injection tube 3 along the air pipe 10, so as to drive the rubber plug 11 to move downward and squeeze the quantitative glue liquid in the glue injection tube 3 to the glass substrate 2. That is, the glue dispenser 8 adjusts the air pressure to realize the speed of glue injection of the glue injection tube 3, and the problem that the ridge is generated on the glass plate during the glue uniformizing due to slow manual glue coating and solvent volatilization can be solved.
[0024] As a preferred embodiment, the cover 12 is detachably connected to the glue injection opening, and the cover 12 can specifically have an elastic buckle (not marked in the figure), which is integrated with the outwardly turned flange of the glue injection opening by buckling, so that the cover 12 is detachably connected. When it is needed to inject glue into the glue injection tube 3, the cover 12 is opened, and after the injection is completed, the cover 12 is buckled and sealed, so as to ensure the sealing environment in the glue injection tube 3.
[0025] Further referring to Figure 2 As shown, the end face of the cover 12 on the side facing the glue outlet is provided with a sealing ring (not marked in the figure), when the cover 12 is assembled on the glue injection opening, the sealing ring is embedded in the glue injection opening, so as to improve the sealing effect of the cover 12 on the glue injection opening and prevent the leakage of the pressure gas. The cover 12 can be made of rubber.
[0026] In a preferred embodiment, the material of the glue injection tube 3 is transparent material (for example, transparent glass), and the glue injection tube 3 is provided with scale lines arranged along the height direction of the tube wall, so that the amount of glue injected into the glue injection tube 3 can be determined, and the problem that the thickness of each glue is inconsistent after the glue is uniformized due to large error of the amount of glue coated each time can be solved, so as to ensure the thickness consistency between glue batches.
[0027] In some embodiments, the glass substrate 2 is placed on a placement table (not shown and not marked in the figure) of the glue uniformizer 1, the placement table is provided with a vacuum adsorption hole (not shown and not marked in the figure), and the vacuum adsorption hole can adsorb the glass substrate 2 when the placement table is driven to rotate, so as to ensure that the position of the glass substrate 2 is reliable and stable during the spin coating process.
[0028] Based on the foregoing technical solutions, in actual application: the point glue machine 8 is connected with the air source through the air pipe 10 at one end and is connected with the point glue pipe 3 through the air pipe at one end, the point glue machine 8 can adjust the pressure to control the output pressure, first, the glue distributing machine 1, the point glue centering part and the switch of the point glue machine 8 are turned on, the glue is injected into the point glue pipe 3 to reach a certain scale line (determined according to the actual demand) of the point glue pipe 3, the point glue pipe 3 is sealed by using the rubber plug 11 and the cover 12, the point glue pipe 3 is installed on the support 4 in interference fit, the glass substrate 2 is aligned and placed in the center of the glue distributing machine 1, the vacuum of the glue distributing machine 1 is turned on to suck the glass substrate 2, the air pressure of the point glue machine 8 is set, the button of the point glue centering part is pressed, the motor 7 drives the coupling 6 and the rotating shaft 5 to rotate to align the point glue pipe 3 with the center, the air pressure of the point glue machine 8 is turned on, the air pressure gives the rubber plug 11 pressure through the air pipe 10, the rubber plug 11 is quickly extruded to the bottom of the point glue pipe 3, the glue in the point glue pipe 3 is evenly and quantitatively coated on the center of the glass substrate 2, the glue distributing machine 1 is set to a certain speed, and the glass substrate 2 is rotated at a constant speed for a certain time, and then the photoresist is formed.
[0029] Those skilled in the art can easily understand that the above-mentioned advantageous modes can be freely combined and superimposed without conflict.
[0030] The above is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application. The above is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A photoresist dispensing and leveling device, characterized by, The device comprises a glue spreading machine (1), a glass substrate (2), a glue spreading centering component, and a glue spreading machine (8). The glue spreading machine (1) can drive the glass substrate (2) to rotate. The glue spreading centering component comprises a glue spreading pipe (3) that can be driven to swing a preset angle in a horizontal plane. The glue spreading pipe (3) has a glue injection port and a glue outlet port. The outlet port of the glue spreading machine (8) is communicated with the glue injection port through an air pipe (10). When the glue outlet port is adjusted to be aligned with the geometric center of the glass substrate (2), the pressure gas output by the glue spreading machine (8) can make the photoresist in the glue spreading pipe (3) flow out to the geometric center through the glue outlet port.
2. The photoresist dispensing and uniformizing device according to claim 1, wherein The glue spreading centering component further comprises a support (4) fixed on a rotating shaft (5). The bottom end of the rotating shaft (5) is fixedly connected with the output shaft of a motor (7) through a coupling (6). The glue spreading pipe (3) is fixed on the support (4). The motor (7) is fixed on a base (9).
3. The photoresist dispensing and uniformizing device according to claim 2, wherein The center axis of the rotating shaft (5) is vertically arranged. The support (4) is connected with the rotating shaft (5) along the radial direction of the rotating shaft (5).
4. The photoresist dispensing and leveling device of claim 1, wherein, A cover (12) is arranged at the glue injection port. A rubber plug (11) is arranged in the glue spreading pipe (3). In the use state, the photoresist is between the rubber plug (11) and the glue outlet port. The cover (12) has a through hole. The output end of the air pipe (10) is inserted into the through hole.
5. The photoresist dispensing and uniformizing device according to claim 4, wherein The cover (12) is detachably connected with the glue injection port.
6. The photoresist dispensing and uniformizing device according to claim 5, wherein The cover (12) has a sealing ring on the end face of the side facing the glue outlet port. When the cover (12) is assembled on the glue injection port, the sealing ring is embedded in the glue injection port.
7. The photoresist dispensing and leveling device of claim 1, wherein, The material of the glue spreading pipe (3) is transparent. The glue spreading pipe (3) has a scale line arranged along the height direction of the pipe wall.
8. The photoresist dispensing and leveling device of claim 1, wherein, The glass substrate (2) is placed on a placing table of the glue spreading machine (1). The placing table has a vacuum adsorption hole. The vacuum adsorption hole can adsorb the glass substrate (2) when the placing table is driven to rotate.