Brazing device for target material assembly

Abstract

The utility model provides a brazing device of a target material assembly. The brazing device comprises a back plate and a clamp which are movably arranged. The back plate comprises a welding end face with a plane structure, and the welding end face is circular; the clamp comprises a first clamping arm and a second clamping arm which are detachably connected, the cross section of the first clamping arm and the cross section of the second clamping arm are both semicircular, the first clamping arm and the second clamping arm form a clamping ring after being connected and are arranged on the back plate in a surrounding mode, and the clamping ring and the welding end face form a welding flux groove. The device is convenient to disassemble, does not damage the target material, and can be repeatedly used.

Description

TECHNICAL FIELD

[0001] The utility model belongs to target material brazing technical field relates to a kind of brazing device of target material assembly. BACKGROUND

[0002] Hard and brittle target material represented by chromium-silicon, tungsten-silicon and ceramic is a new type of sputtering target material, mainly used in semiconductor or functional thin film. Hard and brittle target material is generally welded by brazing process, and the positioning accuracy of target material on the back plate is usually more than 0.5mm. The target product usually has high requirements on size accuracy, and needs to use a semi-finished target material slightly larger than the finished product diameter for welding. After welding, the excess target material is ground off using a grinding head to achieve high-precision positioning and meet the required size requirements. The traditional brazing process needs to use appropriate methods to make grooves that can store liquid solder for welding.

[0003] When such hard and brittle target material is in Endura configuration, the back plate is required to be a bowl-shaped structure with reverse clamping, increasing the difficulty of making grooves and making brazing more difficult. Currently, the welding of hard and brittle target material in Endura configuration usually uses the following three methods:

[0004] (1) Process a solder groove on the semi-finished back plate, clamp the semi-finished target material on the semi-finished back plate for welding, and then turn the back plate to the finished product size after welding. However, when turning the back plate to the finished product size, the target material is easily turned when the cutter turns the back plate to the vicinity of the solder ring surface due to the low welding positioning accuracy of the target material on the back plate, causing the hard and brittle target material to crack.

[0005] (2) Increase the diameter of the semi-finished target material, use high-temperature adhesive tape to make a solder groove on the target material, clamp the finished product size back plate on the target material for welding, and then process the target material to the finished product size using a grinding head after welding. However, the increase in the diameter of the semi-finished target material increases the processing allowance, which requires long-time processing using a grinding head to achieve the finished product size, resulting in high cost and long processing time, and the grinding head is severely worn. If the grinding head cannot be replaced in time, it will also cause the target material to crack and become scrap.

[0006] (3) Use a welding fixture to assist welding, assemble the fixture with the finished product size back plate to form a solder groove structure, and remove the welding fixture after welding. This method not only effectively reduces processing time, but also avoids processing scrap, and has strong applicability. However, due to the problem of solder adhesion between the welding fixture and the product, the fixture is difficult to remove. Violent removal of the fixture will damage the product, and the one-time fixture removed by turning also has the risk of turning the product, which may increase the cost.

[0007] Therefore, how to remove the welding fixture is a problem to be solved. UTILITY MODEL CONTENT

[0008] In view of the deficiencies of the prior art, the utility model discloses a brazing device of target material assembly, convenient to disassemble, does not damage target material, can repeatedly use multiple times, and has better economy.

[0009] To achieve this purpose, the utility model adopts the following technical scheme:

[0010] The utility model provides a brazing device of target material assembly, brazing device includes the backplate and clamp of movable setting, the backplate includes the welding end face with plane structure, the welding end face is round, the clamp includes the first clamping arm and second clamping arm of detachable connection, the cross section of first clamping arm and second clamping arm is half ring, and the first clamping arm and second clamping arm form the clamping ring after being connected, and the clamping ring is surrounded on the backplate, and the clamping ring forms the solder groove with the welding end face.

[0011] The first clamping arm and the second clamping arm of the utility model form the clamping ring, cooperate with the backplate of the target material assembly to form the solder groove structure, then the target blank to be welded is placed in the solder groove to fill the solder and realize brazing, and after the brazing is finished, the clamp is removed, the product damage or cracking is avoided, the concentricity of the target material and the backplate is ensured, the rejection rate of target material processing can be reduced, the processing time is saved, the clamp is convenient to disassemble, can be repeatedly used in the brazing process of multiple target material assemblies, and the overall economy is improved.

[0012] As a preferred technical scheme of the utility model, the axis through the center of the clamping ring is called the center axis.

[0013] Two first guide drill holes are formed in the two ends of the first clamping arm along the direction perpendicular to the center axis, two second guide drill holes are formed in the two ends of the second clamping arm along the direction perpendicular to the center axis, and the first guide drill hole and the second guide drill hole on the same side of the clamp are detachably connected through the fastening assembly.

[0014] In the utility model, the two ends of the first clamping arm or the second clamping arm refer to the two free ends of the half ring structure, and the first guide drill hole and the second guide drill hole are formed by punching from the corresponding free end to the inside. After the brazing of the target material is completed, the gap reserved at the connection of the first clamping arm and the second clamping arm can pry open the clamp, and the clamp can be easily removed.

[0015] As a preferred technical scheme of the utility model, the fastening assembly is a fastening bolt.

[0016] As an optimal technical scheme of the utility model, the back plate further comprises a side wall surface and a bottom wall surface, the side wall surface is arranged obliquely downward, the bottom wall surface is in annular structure, the inner diameter of the bottom wall surface is larger than the diameter of the welding end surface, and the side wall surface is used for connecting the welding end surface and the bottom wall surface.

[0017] The first clamping arm and the second clamping arm are independently provided with a solder ring surface, a first side surface, a bottom end surface, a second side surface and a top end surface connected in sequence; the solder ring surface is arranged in parallel to the central shaft, and the solder ring surface and the welding end surface form the solder groove; the first side surface is arranged obliquely downward, and is in close contact with the side wall surface; the bottom end surface and the top end surface are arranged in parallel, and the bottom end surface is in close contact with the bottom wall surface; and the second side surface is vertically arranged between the bottom end surface and the top end surface.

[0018] The brazing device is suitable for the Endura configuration target material assembly, the back plate of the Endura configuration target material assembly is in one-piece convex structure, the welding end surface at the top end is a plane, the welding end surface and the welding ring surface of the clamp jointly form a welding groove for welding the target material, and turning is not needed, so that the brazing qualification rate is improved; the first clamping arm and the second clamping arm are connected and matched with the structure of the back plate, the welding position of the back plate and the target material is limited, the concentricity of the target material assembly is improved, and the product quality is improved.

[0019] As an optimal technical scheme of the utility model, the depth of the solder groove is 1-40 mm, for example, can be 1 mm, 2 mm, 5 mm, 10 mm, 12 mm, 15 mm, 18 mm, 20 mm, 22 mm, 25 mm, 30 mm, 32 mm, 35 mm, 38 mm or 40 mm, but is not limited to the listed values, and other values not listed in the range are also applicable.

[0020] As an optimal technical scheme of the utility model, the solder ring surface is provided with an insulation layer.

[0021] The utility model discloses a brazing device for target material assembly, which comprises a back plate, a first clamping arm and a second clamping arm, wherein the back plate is provided with a welding end surface, the first clamping arm and the second clamping arm are connected to the welding end surface, and the first clamping arm and the second clamping arm are provided with a solder groove.

[0022] As an optimal technical scheme of the utility model, the first side surface and the bottom end surface are independently provided with a spacing layer.

[0023] The utility model discloses a brazing device for target material assembly, which comprises a back plate, a first clamping arm and a second clamping arm, wherein the back plate is provided with a welding end surface, the first clamping arm and the second clamping arm are connected to the welding end surface, and the first clamping arm and the second clamping arm are provided with a solder groove.

[0024] As an optimal technical scheme of the utility model, the outer periphery of the second side surface is covered with an anti-overflow layer, and the height of the anti-overflow layer along the central shaft direction is greater than the height of the second side surface along the central shaft direction.

[0025] As one preferred technical scheme of the present application, the anti-overflow layer is 10-20mm higher than the top end face, for example, it can be 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but it is not limited to the listed values, and other values not listed in the range are also applicable.

[0026] As one preferred technical scheme of the present application, the anti-overflow layer, the spacing layer and the insulation layer are all heat-resistant adhesive tapes.

[0027] The numerical range of the present application includes not only the above-mentioned point values, but also any point values between the above-mentioned numerical ranges that are not listed, and due to the limited space and for the sake of simplicity, the present application does not exhaustively list the specific point values included in the range.

[0028] Compared with the prior art, the present application has the following advantages:

[0029] The brazing device for target material assembly provided by the present application does not need to turn the product, avoids damaging the target material, improves the welding qualification rate of the target material and the back plate, is easy to disassemble, can be reused, and has good economic efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 The structure diagram of the brazing device for target material assembly provided by one specific embodiment of the present application.

[0031] Figure 2 The structure diagram of the clamp provided by one specific embodiment of the present application.

[0032] Figure 3 The structure diagram of the Endura configuration target material assembly product provided by one specific embodiment of the present application.

[0033] Figure 4 The side view of the clamping arm provided by one specific embodiment of the present application.

[0034] Wherein, 100-back plate; 200-clamp; 300-target blank; 400-solder layer; 1-first clamping arm; 2-second clamping arm; 3-first guide hole; 4-second guide hole; 5-fastening assembly; 6-welding end face; 7-solder groove; 8-side wall face; 9-bottom wall face; 201-solder ring face; 202-first side face; 203-bottom end face; 204-second side face; 205-top end face. DETAILED DESCRIPTION

[0035] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited by "first", "second" and the like can be explicitly or implicitly included one or more. In the description of the present application, "a plurality of" means two or more, unless otherwise specified.

[0036] It should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "provided", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0037] The technical solutions of the present application will be further illustrated below in conjunction with the drawings and through specific embodiments.

[0038] In one specific embodiment, the present application provides a brazing device for a target assembly, as shown in Figure 1 The back plate 100 includes a welding end surface 6 with a planar structure, and the welding end surface 6 is circular. As shown in Figure 2 The clamp 200 includes a first clamping arm 1 and a second clamping arm 2 connected detachably, and the cross sections of the first clamping arm 1 and the second clamping arm 2 are both semicircular. The first clamping arm 1 and the second clamping arm 2 form a clamping ring after being connected, and are arranged around the back plate 100. The clamping ring and the welding end surface 6 form a solder groove 7.

[0039] The Endura configuration target assembly in the present application refers to the sputtering target of the Endura series machine table well known in the art, such as Figure 3As shown, the target blank 300 and the back plate 100 are provided with a solder layer 400, wherein the target blank 300 has a circular or rectangular structure, and the back plate 100 has a reverse-buckled bowl structure. Since the welding end surface 6 of the back plate 100 of the Endura configuration target assembly is a plane, if the target blank 300 is directly welded, a turning operation needs to be performed after the welding is completed, which is easy to cause damage to the hard and brittle target blank 300. The utility model does not need to groove the back plate 100, and utilizes the combination of the clamp 200 and the back plate 100 to form a solder groove 7 containing solder to perform the welding of the target blank 300, thereby avoiding the problem of product damage caused by turning the target blank 300. The brazing device of the utility model is suitable for the welding of various types of target blank 300 and back plate 100, and is particularly suitable for the welding of hard and brittle target blank 300.

[0040] Meanwhile, the clamp 200 is arranged around the back plate 100 to limit the positions of the back plate 100 and the target blank 300, thereby ensuring the concentricity after the welding is completed and improving the product qualification rate. The inner diameter of the solder groove 7 is greater than the outer diameter of the target blank 300 to be welded, and the depth of the solder groove 7 is less than the height of the target blank 300 to be welded, thereby ensuring the welding strength of the target blank 300 and the back plate 100. Moreover, the clamp 200 is convenient to disassemble, and after the welding is completed, the clamp 200 can be removed and reused in the brazing process of multiple target assemblies, thereby improving the overall economy.

[0041] In some embodiments, an axis passing through the center of the clamping ring is referred to as a central axis; as Figure 2 As shown, two first guide drill holes 3 are respectively arranged at the two ends of the first clamping arm 1 in a direction perpendicular to the central axis, and two second guide drill holes 4 are respectively arranged at the two ends of the second clamping arm 2 in a direction perpendicular to the central axis, and the first guide drill hole 3 and the second guide drill hole 4 on the same side of the clamp 200 are detachably connected through a fastening assembly 5. In the utility model, the first guide drill hole 3 or the second guide drill hole 4 is formed by punching the two end faces of the first clamping wall or the second clamping arm 2 towards the inside, and then the fastening assembly 5 is used for detachable connection, and a gap is reserved at the connection of the two ends of the first clamping wall and the second clamping arm 2, so that the clamp 200 can be removed after the brazing of the target blank 300 is completed, and at the same time, the solder loss caused by the overflow of the solder from the gap should also be avoided. Specifically, the fastening assembly 5 is a fastening bolt. In the application process, two fastening bolts are sequentially inserted into the corresponding first guide drill hole 3 and second guide drill hole 4, the connection of the first clamping wall and the second clamping arm 2 is realized, the clamp 200 is then positioned on the back plate 100, and then the fastening bolts at the two ends are tightened for fixation; after the welding is completed, the fastening bolts are loosened, and the clamp 200 is pried open along the gap reserved at the connection of the two half rings, so that the clamp 200 can be easily removed.

[0042] This utility model does not specifically limit the materials of the back plate 100 and the clamp 200. Those skilled in the art can make adjustments according to their needs. For example, the material of the back plate 100 can be copper or copper alloy, or aluminum or aluminum alloy; the material of the clamp 200 can be aluminum or aluminum alloy, or stainless steel.

[0043] In some embodiments, the backplate 100 further includes a sidewall surface 8 and a bottom wall surface 9. The sidewall surface 8 is inclined downwards, and the bottom wall surface 9 has an annular structure. The inner diameter of the bottom wall surface 9 is larger than the diameter of the welding end face 6. The sidewall surface 8 is used to connect the welding end face 6 and the bottom wall surface 9. In the Endura configuration target assembly, the welding end face 6 of the backplate 100 is a plane, the sidewall surface 8 is a truncated cone-shaped inclined surface connecting the outer edge of the welding end face 6 and the inner ring of the bottom sidewall, and the bottom wall surface 9 is preferably an annular plane. The welding end face 6, the sidewall surface 8, and the bottom wall surface 9 together form an integrally formed convex structure. Figure 4 As shown, the first clamping arm 1 and the second clamping arm 2 each independently have a solder annular surface 201, a first side surface 202, a bottom end surface 203, a second side surface 204, and a top end surface 205 connected end to end. The solder annular surface 201 is arranged parallel to the central axis, and the outer edge of the solder annular surface 201 is flush with the welding end surface 6, and they are tightly joined to form the solder groove 7. The first side surface 202 is an inclined surface arranged downwards and is in contact with the side wall surface 8. The bottom end surface 203 is arranged parallel to the top end surface 205, and the bottom end surface 203 is in contact with the bottom wall surface 9. The second side surface 204 is vertically arranged between the bottom end surface 203 and the top end surface 205. Further, the second side surface 204 is flush with the outer edge of the bottom wall surface 9 of the back plate 100. Specifically, the depth of the solder groove 7 is 1-40 mm. Those skilled in the art can adjust the depth of the solder groove 7 according to the actual target blank 300 size, material, and welding strength requirements.

[0044] In some embodiments, an insulating layer is provided on the solder annular surface 201 to isolate the solder and prevent the target blank 300 from sticking to the fixture 200. Specifically, the insulating layer can be heat-resistant tape.

[0045] In some embodiments, spacer layers are independently provided on the first side surface 202 and the bottom end surface 203 to facilitate the removal of solder after welding. Specifically, the spacer layer may be heat-resistant tape.

[0046] In some embodiments, the outer periphery of the second side surface 204 is covered with an anti-overflow layer, the height of the anti-overflow layer along the central axis is greater than the height of the second side surface 204 along the central axis, preventing the liquid solder from leaking out. Preferably, the anti-overflow layer is 10-20mm higher than the top end surface 205. Specifically, the anti-overflow layer is a heat-resistant adhesive tape.

[0047] To help the skilled in the art better understand the overall technical scheme and working process of the present application, the present application exemplarily provides the following specific method for brazing the hard and brittle target blank 300 and the back plate 100 by using the brazing device with the target material assembly:

[0048] (1) Insert the two fastening bolts into the corresponding first guide drill hole 3 and second guide drill hole 4 in sequence, realize the connection of the first clamping wall and the second clamping arm 2, and then position the clamp 200 on the back plate 100, so that the welding ring surface of the clamp 200 is butted against the welding end surface 6 of the back plate 100, the first side surface 202 is attached to the side wall surface 8, and the bottom end surface 203 is attached to the bottom wall surface 9;

[0049] (2) Then tighten the fastening bolts at both ends to fix, so that the welding ring surface of the clamp 200 and the welding end surface 6 of the back plate 100 form the solder groove 7;

[0050] (3) Fill the indium solder into the solder groove 7 and spread it evenly and quickly throughout the solder groove 7, and then place the hard and brittle target blank 300 in the solder groove 7 for welding, so as to form a solder layer 400 between the back plate 100 and the target blank 300;

[0051] (4) After the welding is completed, cool the solder to below 120℃, loosen the fastening bolts, pry open the clamp 200 along the joint between the two half rings, remove the clamp 200, and obtain the product of the hard and brittle target blank 300 and the back plate 100 welded as shown in Figure 4 .

[0052] The applicant declares that the above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. It should be understood by those skilled in the art that any changes or replacements within the technical scope disclosed by the present application can be easily thought of by any person skilled in the art, and all such changes or replacements fall within the protection scope and disclosure scope of the present application.

Claims

1. A brazed apparatus for a target assembly, characterized by, The brazing device comprises a back plate and a clamp; The back plate comprises a welding end face with a planar structure, and the welding end face is circular; The clamp comprises a first clamping arm and a second clamping arm which are detachably connected, the cross sections of the first clamping arm and the second clamping arm are both semicircular, the first clamping arm and the second clamping arm form a clamping ring after being connected, and the clamping ring is arranged around the back plate, and the clamping ring and the welding end face form a solder groove.

2. The brazed apparatus of the target assembly of claim 1, wherein, An axis passing through the center of the clamping ring is referred to as a central axis; Two first guide holes are respectively arranged at the two ends of the first clamping arm in a direction perpendicular to the central axis, two second guide holes are respectively arranged at the two ends of the second clamping arm in a direction perpendicular to the central axis, and the first guide hole and the second guide hole on the same side of the clamp are detachably connected through a fastening assembly.

3. The brazed apparatus of claim 2, wherein, The fastening assembly is a fastening bolt.

4. The brazed apparatus of claim 2, wherein, The back plate further comprises a side wall face and a bottom wall face, the side wall face is arranged obliquely downward, the bottom wall face is annular, the inner diameter of the bottom wall face is greater than the diameter of the welding end face, and the side wall face is used for connecting the welding end face and the bottom wall face; The first clamping arm and the second clamping arm each independently have a solder ring face, a first side face, a bottom end face, a second side face and a top end face which are connected in sequence; The solder ring face is arranged parallel to the central axis, and the solder ring face and the welding end face form the solder groove; The first side face is an inclined surface arranged obliquely downward, and is in close contact with the side wall face; The bottom end face and the top end face are arranged parallel to each other, and the bottom end face is in close contact with the bottom wall face; The second side face is arranged vertically between the bottom end face and the top end face.

5. The brazed apparatus of claim 4, wherein, The depth of the solder groove is 1-40 mm.

6. The brazed apparatus of claim 4, wherein, An insulation layer is arranged on the solder ring face.

7. The brazed apparatus of claim 6, wherein, A spacing layer is independently arranged on the first side face and the bottom end face.

8. The brazed apparatus of claim 7, wherein, The outer periphery of the second side face is covered with an anti-overflow layer, and the height of the anti-overflow layer in the direction of the central axis is greater than the height of the second side face in the direction of the central axis.

9. The brazed apparatus of claim 8, wherein, The anti-overflow layer is 10-20 mm higher than the top end face.

10. The brazed apparatus of claim 8, wherein, The anti-overflow layer, the spacing layer and the insulation layer are all heat-resistant adhesive tapes.

Images