Molecular pump detacher

Abstract

The utility model discloses a molecular pump detacher. The molecular pump detacher comprises a circular ring frame and a plurality of jacking components. The circular ring frame comprises a first arc-shaped frame and a second arc-shaped frame which can be spliced with each other and jointly wrap a base and a pump shell of the molecular pump, and the first arc-shaped frame and the second arc-shaped frame are fixed to the base of the molecular pump when spliced with each other. The multiple jacking components are arranged on the first arc-shaped frame and the second arc-shaped frame in a scattered mode and are evenly spaced in the circumferential direction of the pump shell body of the pump shell. The multiple jacking components abut against the bottom face of the flange structure of the pump shell and can be operated to move relative to the circular ring frame so as to jointly push the pump shell to be separated from the base. According to the molecular pump detacher, the stability of the base and the pump shell of the molecular pump in the detaching process can be improved, so that the possibility that the base and the pump shell of the molecular pump are detached at a time is improved, and then the detaching efficiency of the molecular pump is improved.

Description

TECHNICAL FIELD

[0001] The embodiment of the utility model relates to the technical field of molecular pump disassembling device, more particularly, the utility model relates to a molecular pump disassembling device. BACKGROUND

[0002] As the core equipment in the high vacuum technical field, the molecular pump is widely used in semiconductor manufacturing, optical instruments, material science and aerospace and other high-tech fields. Since the molecular pump works under high speed and high load for a long time, the internal parts of the molecular pump are prone to wear and pollution, so the base and the pump shell of the molecular pump need to be disassembled regularly for cleaning and maintenance.

[0003] The base and the pump shell of the molecular pump are usually configured as interference fit to ensure good sealing between them. At present, the molecular pump mainly relies on the molecular pump disassembling device to disassemble the base and the pump shell of the molecular pump. However, the molecular pump disassembling device generally cannot guarantee stable disassembly effect when disassembling the base and the pump shell of the molecular pump. Specifically, when the jacking component of the molecular pump disassembling device jacks the flange structure of the pump shell of the molecular pump (i.e. the key step of disassembling the pump shell and the base), the molecular pump disassembling device will shake and other unstable phenomena will occur, which causes the jacking assembly to not always stably abut against the flange structure of the pump shell, and the jacking component needs to be adjusted multiple times during the disassembly process, which seriously affects the disassembly efficiency of the molecular pump. SUMMARY

[0004] In order to solve one or more technical problems mentioned above, the utility model provides a molecular pump disassembling device which can improve the stability of the base and the pump shell of the molecular pump during disassembly, so as to improve the possibility of the base and the pump shell of the molecular pump being disassembled at one time, and further improve the disassembly efficiency of the molecular pump.

[0005] The utility model embodiment provides a molecular pump disassembling device, comprising: a circular ring frame including a first arc-shaped frame and a second arc-shaped frame capable of being spliced with each other and collectively wrapping the base and the pump shell of the molecular pump, wherein the first arc-shaped frame and the second arc-shaped frame are fixed on the base of the molecular pump when being spliced with each other; a plurality of jacking components dispersedly arranged on the first arc-shaped frame and the second arc-shaped frame and uniformly spaced along the circumferential direction of the pump shell body of the pump shell; wherein the plurality of jacking components all abut against the bottom surface of the flange structure of the pump shell and can be operated to move relative to the circular ring frame to jointly push the pump shell to separate from the base.

[0006] Further, the base comprises a base body buckled on the pump shell, a support connected to an end of the base body away from the pump shell, and an annular gap formed between the base body and the support, the first and second arc-shaped frames are configured to be inserted into the annular gap when being folded together.

[0007] Further, the first arc-shaped frame comprises a first circular-arc bottom plate inserted into the annular gap, a first circular-arc top plate partially wrapped outside the pump shell, and a first connecting component connecting the first circular-arc bottom plate and the first circular-arc top plate, the second arc-shaped frame comprises a second circular-arc bottom plate inserted into the annular gap, a second circular-arc top plate partially wrapped outside the pump shell, and a second connecting component connecting the second circular-arc bottom plate and the second circular-arc top plate, wherein one side of the first circular-arc bottom plate and one side of the first circular-arc top plate are hingedly connected to one side of the second circular-arc bottom plate and one side of the second circular-arc top plate in sequence, and the other side of the first circular-arc bottom plate and the other side of the first circular-arc top plate are locked to the other side of the second circular-arc bottom plate and the other side of the second circular-arc top plate in sequence.

[0008] Further, the first connecting component comprises a plurality of first connecting rods connecting the first circular-arc bottom plate and the first circular-arc top plate and uniformly arranged along the circumference of the base, and the second connecting component comprises a plurality of second connecting rods connecting the second circular-arc bottom plate and the second circular-arc top plate and uniformly arranged along the circumference of the base.

[0009] Further, an avoiding gap is provided at the inner side edge of the first circular-arc bottom plate and / or the second circular-arc bottom plate.

[0010] Further, the jacking component comprises a bolt penetrating through the first circular-arc top plate or the second circular-arc top plate and threadedly connected thereto.

[0011] Further, the number of the jacking component is two, three or four.

[0012] Further, the jacking component further comprises a top block rotatably arranged on the screw rod of the bolt and used for abutting against the flange structure of the pump shell.

[0013] Further, the whole or the part of the top block used for contacting the flange structure of the pump shell is made of nylon material or tetrafluoroethylene material.

[0014] Further, the circular-arc frame and the bolt are made of metal material.

[0015] The molecular pump disassembler provided by the above embodiment can push the pump shell to separate from the base by operating the plurality of jacking components to generate movement relative to the circular frame and abut against the bottom surface of the flange structure of the pump shell, so as to realize disassembly of the pump shell and the base of the molecular pump. The problem that the edges of the pump shell and the base are scratched or recessed due to the need for an operator to insert a screwdriver or other tool between the pump shell and the base to pry the two, thereby affecting the structural integrity of the molecular pump, is solved. In addition, while ensuring the structural integrity of the molecular pump, the first arc-shaped frame and the second arc-shaped frame that wrap the pump shell and the base of the molecular pump after splicing enable the circular frame to be stably fixed on the base, so as to avoid the problem of poor stability, such as left-right shaking, of the jacking components when being operated to generate movement relative to the circular frame, thereby improving the possibility that the pump shell and the base can be disassembled by one operation, and further improving the disassembly efficiency of the molecular pump. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the exemplary embodiments of the present application will be more apparent from the following detailed description read in conjunction with the accompanying drawings, in which:

[0017] Figure 1 A structure diagram of a molecular pump is shown;

[0018] Figure 2 A structure diagram of a molecular pump disassembler provided by an embodiment of the present application is shown when disassembling the molecular pump;

[0019] Figure 3 A structure diagram of a molecular pump disassembler provided by an embodiment of the present application is shown.

[0020] 1, circular frame; 11, first arc-shaped frame; 111, first circular arc bottom plate; 1111, avoiding notch; 112, first circular arc top plate; 113, first connecting component; 1131, first connecting rod; 12, second arc-shaped frame; 121, second arc-shaped bottom plate; 122, second arc-shaped top plate; 123, second connecting component; 1231, second connecting rod;

[0021] 2, jacking component; 21, bolt; 22, top block;

[0022] 100, base; 101, base body; 102, support; 103, annular gap; 200, pump shell; 201, pump shell body; 202, flange structure. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present disclosure will be clearly and completely described in combination with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0024] Figure 1 The structural schematic diagram of the molecular pump involved in the present embodiment is shown as Figure 1 In the process of disassembling the molecular pump, since the pump shell 200 and the base 100 of the molecular pump are configured as interference fit to ensure the sealing of the molecular pump, it is particularly difficult to disassemble the pump shell 200 and the base 100 of the molecular pump. At present, the molecular pump mainly relies on the molecular pump disassembler to disassemble the base 100 and the pump shell 200 of the molecular pump. When the jacking component 2 of the molecular pump disassembler jacks up the flange structure 202 of the pump shell 200 of the molecular pump, the molecular pump disassembler will shake and other unstable phenomena, so that the jacking assembly cannot always stably abut against the flange structure 202 of the pump shell 200, and it is necessary to adjust the jacking component 2 multiple times during the disassembly process, which seriously affects the disassembly efficiency of the molecular pump.

[0025] Figure 2 The structural schematic diagram of the molecular pump disassembler provided in the present embodiment is shown as Figure 2 and in combination with Figure 1 The present embodiment provides a molecular pump disassembler, which comprises a circular ring frame 1 and a plurality of jacking components 2. The circular ring frame 1 comprises a first arc-shaped frame 11 and a second arc-shaped frame 12 capable of being spliced with each other and collectively wrapping the base 100 and the pump shell 200 of the molecular pump, wherein the first arc-shaped frame 11 and the second arc-shaped frame 12 are fixed on the base 100 of the molecular pump when being spliced with each other. The plurality of jacking components 2 are dispersedly arranged on the first arc-shaped frame 11 and the second arc-shaped frame 12 and are uniformly spaced along the circumference of the pump shell body 201 of the pump shell 200. Among them, the plurality of jacking components 2 all abut against the bottom surface of the flange structure 202 of the pump shell 200 and can be operated to move relative to the circular ring frame 1 to jointly push the pump shell 200 away from the base 100.

[0026] The molecular pump disassembler provided in the above embodiment can push the pump shell 200 away from the base 100 to realize the disassembly of the pump shell 200 and the base 100 of the molecular pump by operating the plurality of jacking components 2 to generate movement relative to the circular frame 1 and abut the bottom surface of the flange structure 202 of the pump shell 200. The problem that the edges of the pump shell 200 and the base 100 are scratched or recessed due to the interference fit and the need for an operator to insert a screwdriver or other tool between the pump shell 200 and the base 100 to pry them apart is solved, ensuring the structural integrity of the molecular pump. In addition, while ensuring the structural integrity of the molecular pump, the first arc-shaped frame 11 and the second arc-shaped frame 12 of the circular frame 1 that wrap around the pump shell 200 and the base 100 after being spliced together enable the circular frame 1 to be stably fixed on the base 100, avoiding the problem of poor stability such as left-right shaking of the jacking components 2 when they are operated to generate movement relative to the circular frame 1, thereby improving the possibility that the pump shell 200 and the base 100 can be disassembled with one operation, and further improving the disassembly efficiency of the molecular pump.

[0027] In the present embodiment, the base 100 includes a base body 101 clamped on the pump shell 200, a support 102 connected to the end of the base body 101 away from the pump shell 200, and an annular gap 103 formed between the base body 101 and the support 102, and the first arc-shaped frame 11 and the second arc-shaped frame 12 are configured to be inserted into the annular gap 103 when they are spliced together. In other embodiments, the first arc-shaped frame 11 and the second arc-shaped frame 12 can also be fixed by wrapping around the base 100 and the pump shell 200 of the molecular pump. In addition to the wrapping manner, the first arc-shaped frame 11 and the second arc-shaped frame 12 can also be inserted into the annular gap 103, and the support 102 can effectively and stably support the first arc-shaped frame 11 and the second arc-shaped frame 12. Compared with the wrapping manner of the first arc-shaped frame 11 and the second arc-shaped frame 12 around the base 100 and the pump shell 200 of the molecular pump, the combination of wrapping and inserting into the annular gap 103 can make the circular frame 1 more stable.

[0028] Figure 3 The structural diagram of the molecular pump provided in the present embodiment is shown. As shown in Figure 3 and in combination with Figures 1-2As shown, the first arc-shaped frame 11 comprises a first circular-arc bottom plate 111 inserted into the annular gap 103, a first circular-arc top plate 112 partially wrapped outside the pump shell 200, and a first connecting component 113 connecting the first circular-arc bottom plate 111 and the first circular-arc top plate 112, so as to realize the wrapping of the first arc-shaped frame 11 around the base 100 and the pump shell 200 of the molecular pump and the insertion of the first arc-shaped frame 11 into the annular gap 103. The second arc-shaped frame 12 comprises a second circular-arc bottom plate inserted into the annular gap 103, a second circular-arc top plate partially wrapped outside the pump shell 200, and a second connecting component 123 connecting the second circular-arc bottom plate and the second circular-arc top plate, so as to realize the wrapping of the second arc-shaped frame 12 around the base 100 and the pump shell 200 of the molecular pump and the insertion of the second arc-shaped frame 12 into the annular gap 103. One side of the first circular-arc bottom plate 111 and one side of the first circular-arc top plate 112 are hingedly connected to one side of the second circular-arc bottom plate and one side of the second circular-arc top plate in sequence, and the other side of the first circular-arc bottom plate 111 and the other side of the first circular-arc top plate 112 are locked to the other side of the second circular-arc bottom plate and the other side of the second circular-arc top plate in sequence, so that the first arc-shaped frame 11 and the second arc-shaped frame 12 can be spliced with each other. The hinged and locked manner can facilitate the operator to disassemble the molecular pump and take out the molecular pump disassembler, so as to improve the disassembly efficiency of the molecular pump.

[0029] In the present embodiment, the first connecting component 113 comprises a plurality of first connecting rods 1131 connecting the first circular-arc bottom plate 111 and the first circular-arc top plate 112 and arranged uniformly along the circumference of the base 100, and the second connecting component 123 comprises a plurality of second connecting rods 1231 connecting the second circular-arc bottom plate and the second circular-arc top plate and arranged uniformly along the circumference of the base 100. In other embodiments, the first connecting component 113 and the second connecting component 123 can also be arc-shaped plates wrapping around the base 100 and the pump shell 200 of the molecular pump. Compared with the arc-shaped plates wrapping around the base 100 and the pump shell 200 of the molecular pump, the first connecting rods 1131 and the second connecting rods 1231 can reduce the manufacturing cost of the first arc-shaped frame 11 and the second arc-shaped frame 12 while ensuring the connecting and supporting effects, and can also reduce the overall weight of the first arc-shaped frame 11 and the second arc-shaped frame 12, so as to facilitate the operator to take.

[0030] Further, the inner side edge of the first circular-arc bottom plate 111 or the second circular-arc bottom plate is provided with a avoiding gap 1111 to avoid the protruding structure (such as the support column supporting the base body 101) in the annular gap 103, so that the first circular-arc bottom plate 111 or the second circular-arc bottom plate can be inserted deeper into the annular gap 103, so as to further improve the stability of the first arc-shaped frame and the second arc-shaped frame.

[0031] In the embodiment, the jacking component 2 comprises a bolt 21 penetrating through the first circular arc top plate 112 or the second circular arc top plate and being threadedly connected therewith. In other embodiments, the jacking component 2 can also be a jacking mechanism such as a linear cylinder or a linear motor. However, compared with the jacking mechanism such as the linear cylinder or the linear motor, the bolt 21 can not only effectively jack up the flange structure 202 of the pump shell 200, but also has a lower cost.

[0032] Preferably, the number of the jacking component 2 is two, three or four, so as to ensure that the jacking component 2 can effectively jack up the flange structure 202 of the pump shell 200, save the cost, and avoid redundancy of too many jacking components 2 and waste.

[0033] Further, the jacking component 2 further comprises a top block 22 rotatably arranged on a screw rod of the bolt 21 and used for abutting against the flange structure 202 of the pump shell 200, so as to avoid that the bolt 21 scratches or extrudes the surface of the flange structure 202 when jacking up the flange structure 202 of the pump shell 200, causes the flange structure 202 to be concave, and thus protects the structural integrity of the pump shell 200.

[0034] Preferably, the whole or the part of the top block 22 used for contacting the flange structure 202 of the pump shell 200 is made of nylon material or tetrafluoroethylene material, because the hardness of the nylon material or the tetrafluoroethylene material is lower than that of the metal material of the flange structure 202, so as to achieve the purpose of protecting the structural integrity of the pump shell 200.

[0035] Preferably, the circular ring frame 1 and the bolt 21 are made of metal material, which utilizes the characteristics of the metal material being solid and durable, and improves the service life of the molecular pump disassembling device.

[0036] In the above description of the present application, unless otherwise explicitly specified and limited, the terms “fixed”, “mounted”, “connected” or “linked” and the like should be understood in a broad sense. For example, as to the term “linked”, it can be fixedly connected, or detachably connected, or integrated; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise explicitly limited in the present application, the above terms can be understood in the specific meaning in the present application by those skilled in the art according to the specific circumstances.

[0037] According to the above description of the present application, those skilled in the art can also understand that the terms used, such as "upper", "lower", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "center", "longitudinal", "transverse", "clockwise" or "counterclockwise", and the like indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings of the present application, and are only for the purpose of facilitating the description of the scheme of the present application and simplifying the description, and are not explicitly or implicitly indicating that the devices or elements involved must have the specific orientation, be constructed and operated in a specific orientation, therefore the above orientation or positional relationship terms cannot be understood or interpreted as a limitation on the scheme of the present application.

[0038] In addition, the terms "first" or "second" and the like used in the present application are terms used to refer to numbers or ordinal numbers only for the purpose of description, and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" or "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three or more, etc., unless otherwise specifically limited.

[0039] Although the embodiments of the present application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided only in an exemplary manner. Those skilled in the art can think of many changes, modifications and alternatives without departing from the idea and spirit of the present application. It should be understood that various alternatives to the embodiments of the present application described herein can be employed in practicing the present application. The appended claims are intended to define the scope of protection of the present application, and therefore cover the equivalents or alternatives within the scope of the claims.

Claims

1. A molecular pump disassembler, characterized by, The application relates to a molecular pump, comprising: a circular frame comprising a first arc-shaped frame and a second arc-shaped frame capable of being combined with each other and jointly wrapping a base and a pump shell of the molecular pump, wherein the first arc-shaped frame and the second arc-shaped frame are fixed on the base of the molecular pump when combined with each other; a plurality of jacking components which are dispersedly arranged on the first arc-shaped frame and the second arc-shaped frame and are uniformly spaced along the circumference of a pump shell body of the pump shell; wherein the plurality of jacking components are in abutment with the bottom surface of a flange structure of the pump shell and can be operated to move relative to the circular frame to jointly push the pump shell away from the base.

2. The molecular pump dismounting device according to claim 1, characterized in that, The base comprises a base body buckled on the pump shell, a support connected to the end of the base body away from the pump shell, and an annular gap formed between the base body and the support, and the first arc-shaped frame and the second arc-shaped frame are configured to be inserted into the annular gap when combined with each other.

3. The molecular pump dismounting device according to claim 2, characterized in that, The first arc-shaped frame comprises a first circular-arc bottom plate inserted into the annular gap, a first circular-arc top plate partially wrapped outside the pump shell, and a first connecting component connecting the first circular-arc bottom plate and the first circular-arc top plate, and the second arc-shaped frame comprises a second circular-arc bottom plate inserted into the annular gap, a second circular-arc top plate partially wrapped outside the pump shell, and a second connecting component connecting the second circular-arc bottom plate and the second circular-arc top plate, wherein one side of the first circular-arc bottom plate and one side of the first circular-arc top plate are hingedly connected with one side of the second circular-arc bottom plate and one side of the second circular-arc top plate in sequence, and the other side of the first circular-arc bottom plate and the other side of the first circular-arc top plate are locked with the other side of the second circular-arc bottom plate and the other side of the second circular-arc top plate in sequence.

4. The molecular pump dismounting device according to claim 3, characterized in that The first connecting component comprises a plurality of first connecting rods connecting the first circular-arc bottom plate and the first circular-arc top plate and uniformly arranged along the circumference of the base, and the second connecting component comprises a plurality of second connecting rods connecting the second circular-arc bottom plate and the second circular-arc top plate and uniformly arranged along the circumference of the base.

5. The molecular pump dismounting device according to claim 4, characterized in that, An avoiding gap is arranged at the inner side edge of the first circular-arc bottom plate and / or the second circular-arc bottom plate.

6. The molecular pump dismounting device according to claim 3, characterized in that, The jacking component comprises a bolt penetrating through the first circular-arc top plate or the second circular-arc top plate and being threadedly connected therewith.

7. The molecular pump dismounting device according to claim 6, characterized in that The number of the jacking components is two, three or four.

8. The molecular pump dismounting device according to claim 6, characterized in that The jacking component further comprises a top block rotatably arranged on the screw rod of the bolt and used for abutting against the flange structure of the pump shell.

9. The molecular pump dismounting device according to claim 8, characterized in that, The whole or the part of the top block used for contacting the flange structure of the pump shell is made of nylon material or polytetrafluoroethylene material.

10. The molecular pump disassembler of claim 6, wherein, The circular frame and the bolt are made of metal material.

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