Corrosion-resistant semiconductor equipment rubber sealing element

Abstract

The utility model relates to a rubber sealing element for semiconductor equipment, belongs to the technical field of rubber sealing elements, and particularly relates to a corrosion-resistant rubber sealing element for semiconductor equipment, which comprises a sealing assembly, and the sealing assembly comprises a connecting column and a sealing disc. A cleaning assembly is arranged outside the connecting column and comprises a mounting groove, a pressing plate and a discharging ring. According to the sealing piece, the pressing plate is extruded, the pressure between the sealing disc and the side wall of equipment is improved through the pressing plate, the discharging ring is extruded on the sealing disc, meanwhile, the discharging ring expands outwards, impurities on the surface of the equipment are pushed out, the sealing disc can be tightly attached to the side wall of the equipment, and therefore the sealing effect of the sealing piece is improved; impurities on the surface of equipment are prevented from corroding the side wall of the sealing disc, so that the service life of the sealing piece is prolonged; the problem that an existing sealing piece is directly in contact with impurities, and consequently the sealing piece is corroded more easily is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to rubber sealing element technical field, especially a kind of corrosion-resistant semiconductor equipment rubber sealing element. BACKGROUND

[0002] Sealing element is the material or part of the part that prevents fluid or solid particles from leaking between adjacent joints and prevents foreign matter such as dust and moisture from entering the internal machine equipment.

[0003] According to the search, the patent with the publication number CN216382539U discloses a kind of corrosion-resistant rubber sealing element, including sealing element body, the top of the sealing element body is equipped with the first annular groove, the inner wall of the first annular groove is equipped with the second annular groove, third annular groove;The inside of the second annular groove is provided with a first reinforcing body;The inside of the third annular groove is provided with a second reinforcing body;The sealing element body includes base material, wear-resistant layer, adhesive layer, corrosion-resistant layer, the inside of the first annular groove is provided with the first annular seal body, second annular seal body, the first annular seal body is fixedly installed on the inner wall of second annular groove, and the second annular seal body is fixedly installed on the inner wall of third annular groove.The corrosion-resistant rubber sealing element, the first reinforcing body and the second reinforcing body can effectively strengthen the supporting effect when the sealing element body is extruded, and the sealing element body is prevented from being damaged.

[0004] In the above prior art, the first reinforcing body and the second reinforcing body can effectively strengthen the supporting effect when the sealing element body is extruded, and the sealing element body is prevented from being damaged, but in actual use, when the sealing element is replaced, the old sealing element is usually taken out, and then the new sealing element is put in, and the surface of the sealed equipment may leave some impurities, so that the sealing element directly contacts the impurities, the impurities directly contact the surface of the sealing element, and the sealing element is easily corroded by the impurities, thereby reducing the service life of the sealing element. UTILITY MODEL CONTENTS

[0005] To solve the above technical problems, the utility model provides a kind of corrosion-resistant semiconductor equipment rubber sealing element, by extruding pressing plate, material discharge ring is extruded to sealing disc at the same time and expands outward, and the impurities on the surface of the equipment are pushed outwards, so that the sealing disc can be tightly combined with the sidewall of the equipment, thereby improving the sealing effect of the sealing element, and preventing the impurities on the surface of the equipment from corroding the sidewall of the sealing disc, thereby prolonging the service life of the sealing element.

[0006] The technical solution for achieving the purpose of the utility model is as follows: a kind of corrosion-resistant semiconductor equipment rubber sealing element, including sealing assembly, the sealing assembly includes;

[0007] The connecting column is in a hollow cylindrical shape, and the two sealing discs are fixedly installed on the upper and lower ends of the outer sidewall of the connecting column, and are both made of rubber material;

[0008] The outer part of the connecting column is provided with a cleaning assembly, and the cleaning assembly comprises;

[0009] The installation groove is arranged on the sidewall surface close to the two sealing discs, and the pressing plate is fixedly installed on the inner sidewall of the installation groove;

[0010] The two discharge rings are fixedly installed on the sidewall surfaces away from the two sealing discs.

[0011] In some embodiments, the sealing assembly further comprises;

[0012] The reinforcing rods are circumferentially and equidistantly distributed in the interior of the connecting column, and the reinforcing rods are in an arc shape.

[0013] In some embodiments, the sidewall of the discharge ring is in an inclined shape.

[0014] In some embodiments, the outer part of the connecting column is provided with a pressing assembly, and the pressing assembly comprises;

[0015] The two sealing rings are fixedly installed on the sidewall surfaces away from the two sealing discs, and the sidewall surfaces away from the two sealing rings are both provided with expansion grooves.

[0016] In some embodiments, the pressing assembly further comprises;

[0017] The plurality of extrusion rings are circumferentially and equidistantly slid through the sidewalls of the two sealing discs, and the two pressing rods are arranged on the sidewall surfaces away from the two sealing discs and are in contact with the sidewalls of the sealing rings.

[0018] In some embodiments, the sidewall of the sealing ring is in an inclined shape.

[0019] Compared with the prior art, the utility model has the advantages of:

[0020] One: the utility model discloses, when the side wall surface of two sealing discs near one side is attached to the inner and outer two side wall surfaces of equipment, the side wall of equipment will extrude pressing plate, and the pressure of sealing disc and equipment side wall is improved through pressing plate, and the extrusion of discharge ring in sealing disc is expanded outward simultaneously, and the impurities on the surface of equipment are pushed outward, so that the sealing disc can be closely attached to the side wall of equipment, thereby improving the sealing effect of the sealing element, and at the same time, preventing the impurities on the surface of equipment from corroding the side wall of sealing disc, thereby prolonging the service life of the sealing element, the sealing element directly contacts the impurities, and the problem that the sealing element is more easily corroded is solved.

[0021] Second: the utility model discloses, when pressing plate is extruded, pressing plate will extrude extrusion ring, and extrusion ring pushes pressing rod and sealing ring and the side wall of equipment, and since the side wall of sealing ring is inclined, so when sealing ring is extruded, part of the impurities on the side wall of equipment is pushed outward, and the impurities on the surface of equipment are in the gap between sealing disc and equipment side wall, and the corrosion resistance of the sealing element is further improved. DRAWINGS

[0022] The utility model will be explained further in combination with the drawings and examples:

[0023] Fig. 1 It is the whole structure stereogram of the utility model, and

[0024] Fig. 2 It is the inside structure diagram of connecting column of the utility model, and

[0025] Fig. 3 It is the inside structure diagram of installation groove of the utility model.

[0026] Mark explanation:

[0027] 11, connecting column, 12, sealing disc, 13, reinforcing rod, 21, installation groove, 22, pressing plate, 23, discharge ring, 31, sealing ring, 32, expansion groove, 33, extrusion ring, 34, pressing rod. Specific implementation

[0028] The utility model will be explained further in combination with the drawings and examples:

[0029] The utility model discloses a kind of corrosion-resistant semiconductor equipment rubber sealing elements by improvement, and the technical scheme of the utility model is:

[0030] As Figs. 1-3 Corrosion-resistant semiconductor device rubber seal, comprising a sealing assembly, the sealing assembly comprises a connecting column 11, a sealing disc 12 and a reinforcing rod 13, the connecting column 11 is hollow cylindrical, the sealing disc 12 has two, two sealing discs 12 are respectively fixedly installed on the upper and lower ends of the outer side wall of the connecting column 11, the connecting column 11 and the sealing disc 12 are both composed of rubber material; there is a gap between the two sealing discs 12 through the connecting column 11, the side wall surface of the two sealing discs 12 close to each other is attached to the inner and outer side wall surfaces of the external device, the connecting piece penetrates the inside of the connecting column 11, and the side wall surface of the two sealing discs 12 away from each other is extruded, the sealing disc 12 is attached to the side wall of the device, and the connecting part on the device is sealed; the reinforcing rod 13 has a plurality of reinforcing rods 13, the reinforcing rod 13 is circumferentially equidistantly distributed in the inside of the connecting column 11, and the reinforcing rod 13 is in arc shape; the inside of the connecting column 11 is reinforced by the reinforcing rod 13, the strength of the reinforcing rod 13 is improved, when the two ends of the connecting column 11 are extruded, the connecting column 11 will deform along with the shape of the reinforcing rod 13, so that the inner side wall of the connecting column 11 is tightly attached to the side wall of the connecting piece, and the sealing effect of the seal is further improved; the outside of the connecting column 11 is provided with a cleaning assembly, the cleaning assembly comprises a mounting groove 21, a pressing plate 22 and a discharge ring 23, the mounting groove 21 is opened in the side wall surface close to the two sealing discs 12, the pressing plate 22 is fixedly installed on the inner side wall of the mounting groove 21, the discharge ring 23 has two, the two discharge rings 23 are respectively fixedly installed on the side wall surface away from each other of the two sealing discs 12, and the side wall of the discharge ring 23 is in inclined shape; when the side wall surface close to the two sealing discs 12 is attached to the inner and outer side wall surfaces of the device, the side wall of the device will extrude the pressing plate 22, the pressure between the sealing disc 12 and the side wall of the device is increased through the pressing plate 22, the discharge ring 23 is extruded by the sealing disc 12 and expands outward at the same time, the impurities on the surface of the device are pushed outwards, so that the sealing disc 12 can be tightly attached to the side wall of the device, thereby improving the sealing effect of the seal, and preventing the impurities on the surface of the device from corroding the side wall of the sealing disc 12, thereby prolonging the service life of the seal.

[0031] As Figs. 1-3As shown, in an embodiment, in order to further improve the sealing effect of the sealing piece, the outside of the connecting column 11 is provided with a pressing assembly, the pressing assembly comprises two sealing rings 31, a plurality of extrusion rings 33 and two pressing rods 34, the two sealing rings 31 are fixedly installed on the side wall surfaces of the two sealing discs 12 away from each other, the side wall surfaces of the two sealing rings 31 away from each other are provided with expansion grooves 32, the side wall of the sealing ring 31 is inclined, the plurality of extrusion rings 33 are circularly equidistantly slid through the side walls of the two sealing discs 12, and the two pressing rods 34 are arranged on the side wall surfaces of the two sealing discs 12 away from each other and are attached to the side wall of the sealing ring 31; when the pressing plate 22 is extruded, the pressing plate 22 extrudes the extrusion ring 33, so that the extrusion ring 33 pushes the pressing rod 34 and the sealing ring 31 to be attached to the side wall of the equipment, and since the side wall of the sealing ring 31 is inclined, when the sealing ring 31 is extruded, part of the impurities on the side wall of the equipment is pushed outward, so that the impurities on the surface of the side wall of the equipment are arranged in the gap between the sealing disc 12 and the side wall of the equipment, and the corrosion resistance of the sealing piece is improved.

[0032] The specific working method is: the two sealing discs 12 are connected by the connecting column 11, the side wall surfaces close to each other of the two sealing discs 12 are attached to the inner and outer side wall surfaces of the external equipment, the inside of the connecting column 11 is penetrated by the connecting piece, and the side wall surfaces away from each other of the two sealing discs 12 are extruded, so that the sealing disc 12 is attached to the side wall of the equipment and the connecting part on the equipment is sealed; when the side wall surfaces close to each other of the two sealing discs 12 are attached to the inner and outer side wall surfaces of the equipment, the side wall of the equipment extrudes the pressing plate 22, the pressing plate 22 improves the pressure of the sealing disc 12 and the side wall of the equipment, the discharge ring 23 is extruded and expanded outwardly under the extrusion of the sealing disc 12, the impurities on the surface of the equipment are pushed outward, the sealing disc 12 can be tightly attached to the side wall of the equipment, and the sealing effect of the sealing piece is improved; when the pressing plate 22 is extruded, the pressing plate 22 extrudes the extrusion ring 33, so that the extrusion ring 33 pushes the pressing rod 34 and the sealing ring 31 to be attached to the side wall of the equipment, and since the side wall of the sealing ring 31 is inclined, when the sealing ring 31 is extruded, part of the impurities on the side wall of the equipment is pushed outward, so that the impurities on the surface of the side wall of the equipment are arranged in the gap between the sealing disc 12 and the side wall of the equipment, and the corrosion resistance of the sealing piece is improved.

[0033] The technical means disclosed in the technical scheme of the utility model is not limited to the technical means disclosed in the above technical means, and also includes the technical scheme composed by the equivalent replacement of the above technical features. The unfinished matters of the utility model belong to the common knowledge of the person skilled in the art.

Claims

1. A corrosion-resistant rubber seal for semiconductor devices, comprising a sealing assembly, characterized in that: The sealing assembly includes; The connecting column (11) and the sealing plate (12) are hollow cylindrical. There are two sealing plates (12). The two sealing plates (12) are fixedly installed at the upper and lower ends of the outer side wall of the connecting column (11). Both the connecting column (11) and the sealing plate (12) are made of rubber. A cleaning component is provided on the outside of the connecting post (11), the cleaning component including; The mounting groove (21) and the pressing plate (22) are provided. The mounting groove (21) is opened on one side wall of the two sealing discs (12) that are close to each other. The pressing plate (22) is fixedly installed on the inner side wall of the mounting groove (21). There are two discharge rings (23), and the two discharge rings (23) are fixedly installed on the side wall of the two sealing discs (12) that are far apart.

2. The corrosion-resistant rubber seal for semiconductor equipment according to claim 1, characterized in that: The sealing assembly also includes; There are multiple reinforcing rods (13), which are circumferentially distributed inside the connecting column (11) and are arc-shaped.

3. The corrosion-resistant rubber seal for semiconductor equipment according to claim 1, characterized in that: The sidewalls of the discharge ring (23) are inclined.

4. The corrosion-resistant rubber seal for semiconductor equipment according to claim 1, characterized in that: A clamping assembly is provided on the outside of the connecting column (11), the clamping assembly including; There are two sealing rings (31). The two sealing rings (31) are fixedly installed on the side wall of the two sealing discs (12) that are far apart. The side wall of the two sealing rings (31) that are far apart is provided with an expansion groove (32).

5. The corrosion-resistant rubber seal for semiconductor equipment according to claim 4, characterized in that: The clamping assembly also includes; The compression ring (33) and the pressing rod (34) are provided. There are multiple compression rings (33), which slide equidistantly through the side walls of the two sealing discs (12). There are two pressing rods (34), which are located on the side walls of the two sealing discs (12) that are far apart, and are in contact with the side walls of the sealing ring (31).

6. The corrosion-resistant rubber seal for semiconductor equipment according to claim 4, characterized in that: The sidewall of the sealing ring (31) is inclined.

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