High-tightness vacuum valve of vacuum coating equipment

Abstract

The utility model relates to the field of high-sealing-performance vacuum valves, in particular to a high-sealing-performance vacuum valve of vacuum coating equipment, which comprises a valve body, a first silica gel sealing gasket, a valve seat and a second silica gel sealing gasket, the rear end of the valve body is fixedly connected with a first pipeline, and the bottom of the valve body is fixedly connected with a second pipeline. A first silica gel sealing gasket is movably connected to the rear position in the valve body, a valve seat is fixedly connected to the front end of the first silica gel sealing gasket, a second silica gel sealing gasket is fixedly connected to the front end of the valve seat, and first fixing blocks are fixedly connected to the left side and the right side of the valve seat respectively. The sealing door is taken down from the valve body through the external bolt, then the first threaded rod is driven to rotate on the valve seat and the valve body through a hexagon wrench or directly rotating the rotating block to take down the valve seat, and then a new valve seat is installed, so that the problems that an existing vacuum valve rubber sealing ring is often installed at a hidden or difficult-to-touch position, and the sealing effect is poor are solved. And therefore, the problem that the replacement operation is very inconvenient is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of high sealing property vacuum valve, especially to high sealing property vacuum valve of vacuum coating equipment. BACKGROUND

[0002] The high sealing property vacuum valve is a key component designed specifically for maintaining and controlling the internal environment of a vacuum system. Its primary function is to allow the flow and cutoff of fluids or gases while maintaining extremely high vacuum levels within the system. This type of valve is manufactured with precision design and high-quality materials to ensure excellent sealing performance under extreme conditions, effectively preventing the infiltration of external air or impurities, thereby ensuring the stable operation of the vacuum system.

[0003] The existing vacuum valve, while providing excellent sealing performance, is designed with precision and requires high sealing properties. The rubber sealing ring is often installed in a relatively concealed or difficult-to-reach position, which makes it necessary to disassemble a large number of components during replacement operations. The process is complex and time-consuming, and improper installation can increase the risk of leakage, affecting the stability and efficiency of the vacuum system.

[0004] Therefore, in view of the above-mentioned problem that the existing vacuum valve, while providing excellent sealing performance, is designed with precision and requires high sealing properties, the rubber sealing ring is often installed in a relatively concealed or difficult-to-reach position, which makes it necessary to disassemble a large number of components during replacement operations, a high sealing property vacuum valve for vacuum coating equipment can be designed, which sets a sealing ring that is easy to disassemble. SUMMARY

[0005] In order to overcome the problem that the existing vacuum valve, while providing excellent sealing performance, is designed with precision and requires high sealing properties, the rubber sealing ring is often installed in a relatively concealed or difficult-to-reach position, which makes it necessary to disassemble a large number of components during replacement operations.

[0006] The technical solution of the utility model is: a high sealing property vacuum valve for vacuum coating equipment, comprising a valve body, a silica gel sealing gasket one, a valve seat, and a silica gel sealing gasket two, a pipe one fixedly connected to the rear end of the valve body, a pipe two fixedly connected to the bottom of the valve body, a silica gel sealing gasket one movably connected to the inside of the valve body at the rear position, a valve seat fixedly connected to the front end of the silica gel sealing gasket one, a silica gel sealing gasket two fixedly connected to the front end of the valve seat, a fixed block one fixedly connected to the left and right sides of the valve seat, a fixed block two fixedly connected to the rear end of the valve body corresponding to the position of the fixed block one, a threaded rod one screwedly connected to the inside of the fixed block one, the threaded rod one screwedly connected to the fixed block two through the valve body at the rear end, and a rotating block fixedly connected to the rear end of the threaded rod one.

[0007] Preferably, the valve seat is removed from the valve body by external bolts, and then the valve seat is removed by rotating the screw rod on the valve seat and valve body using a hex wrench or by directly rotating the screw rod. Then, a new valve seat is installed, and the screw rod and screw rod are rotated to fix the valve seat on the valve body. At the same time, the silicone sealing gasket on the valve seat keeps the valve seat and valve body sealed.

[0008] Preferably, a valve disc is provided inside the valve body, and a threaded rod is rotatably connected to the front end of the valve disc. A fixing block is fixedly connected to the front position inside the valve body, and the threaded rod is threadedly connected to the valve body.

[0009] Preferably, the threaded rod two is threadedly connected to the fixed block three, and a spring is fixedly connected to the rear end of the fixed block three, and the spring is fixedly connected to the valve disc.

[0010] Preferably, a sealing frame one is fixedly connected to the front end of the valve disc, and a sealing frame two is fixedly connected to the rear end of the valve body.

[0011] Preferably, sealing frame one and sealing frame two are slidably connected, and the front end of threaded rod two is fixedly connected with a handle.

[0012] Preferably, the rear end of pipe one has multiple mounting holes, and the bottom of pipe two has multiple identical mounting holes.

[0013] Preferably, a sealing door is movably connected to the top of the valve body, and a sealing plug is fixedly connected to the bottom of the sealing door.

[0014] The beneficial effects of this utility model are:

[0015] By removing the sealing door from the valve body using external bolts, and then using a hex wrench or by directly rotating the rotating block to rotate the threaded rod on the valve seat and valve body to remove the valve seat, a new valve seat is installed. The rotating block and threaded rod are then rotated to fix the valve seat on the valve body. At the same time, the silicone sealing gasket on the valve seat keeps the valve seat and valve body sealed. This solves the problem that the rubber sealing rings of existing vacuum valves are often installed in relatively hidden or hard-to-reach locations, which makes replacement operations very inconvenient. Attached Figure Description

[0016] Figure 1 The diagram shown is a three-dimensional structural schematic of the high-sealing vacuum valve of the vacuum coating equipment of this utility model;

[0017] Figure 2 The diagram shown is a three-dimensional lower cross-sectional view of the high-sealing vacuum valve of the vacuum coating equipment of this utility model.

[0018] Figure 3 The diagram shown is a three-dimensional front and side cross-sectional view of the high-sealing vacuum valve of the vacuum coating equipment of this utility model.

[0019] Figure 4 The high-sealing vacuum valve of the vacuum coating equipment is shown in the three-dimensional structure schematic view.

[0020] The reference signs are explained as follows: 1, valve body; 2, pipeline one; 3, pipeline two; 4, silica gel sealing gasket one; 5, valve seat; 6, silica gel sealing gasket two; 7, fixed block one; 8, threaded rod one; 9, fixed block two; 10, rotating block; 11, valve flap; 12, sealing frame one; 13, sealing frame two; 14, fixed block three; 15, threaded rod two; 16, spring; 17, handle; 18, mounting hole; 19, sealing door; 20, sealing plug. DETAILED DESCRIPTION

[0021] The utility model is further explained in combination with the drawings and examples.

[0022] Please refer to Figures 1-4 The utility model provides a kind of embodiment: the high-sealing vacuum valve of vacuum coating equipment includes valve body 1, still include silica gel sealing gasket one 4, valve seat 5 and silica gel sealing gasket two 6, the rear end of valve body 1 is fixedly connected with pipeline one 2, the bottom of valve body 1 is fixedly connected with pipeline two 3, the inside of valve body 1 is movably connected with silica gel sealing gasket one 4 in rear position, the front end of silica gel sealing gasket one 4 is fixedly connected with valve seat 5, the front end of valve seat 5 is fixedly connected with silica gel sealing gasket two 6, the left and right sides of valve seat 5 are respectively fixedly connected with fixed block one 7, the rear end of valve body 1 is fixedly connected with fixed block two 9 in position corresponding fixed block one 7, the inside of fixed block one 7 is screw-connected with threaded rod one 8, the rear end of threaded rod one 8 is screw-connected with fixed block two 9 by passing through valve body 1, the rear end of threaded rod one 8 is fixedly connected with rotating block 10, by taking sealing door 19 from valve body 1 by external bolt, then by hexagonal spanner or directly rotating rotating block 10 drives threaded rod one 8 to rotate on valve seat 5 and valve body 1, valve seat 5 is taken down, then new valve seat 5 is installed, and rotating block 10 and threaded rod one 8 are rotated, and valve seat 5 is fixed on valve body 1, while silica gel sealing gasket one 4 on valve seat 5 keeps sealing state between valve seat 5 and valve body 1.

[0023] Please refer to Figures 1-4In the embodiment, the inside of the valve body 1 is provided with a valve disc 11, the front end of the valve disc 11 is rotationally connected with a threaded rod two 15, the inside of the valve body 1 is fixedly connected with a fixed block three 14 at the front position, the threaded rod two 15 is threadedly connected with the valve body 1, the threaded rod two 15 rotationally pushes the valve disc 11 to move backward, the threaded rod two 15 is threadedly connected with the fixed block three 14, the rear end of the fixed block three 14 is fixedly connected with a spring 16, the spring 16 is fixedly connected with the valve disc 11, the valve disc 11 moves backward to pull the spring 16, the front end of the valve disc 11 is fixedly connected with a sealing frame one 12, the rear end of the valve body 1 is fixedly connected with a sealing frame two 13, the sealing frame one 12 and the sealing frame two 13 tightly slide to improve the sealing performance, and meanwhile the sealing frame one 12 and the sealing frame two 13 protect the threaded rod one 8 and the spring 16.

[0024] Please refer to Figures 2-4 In the embodiment, the sealing frame one 12 and the sealing frame two 13 are slidingly connected, the front end of the threaded rod two 15 is fixedly connected with a handle 17, the handle 17 is rotated to drive the threaded rod two 15 to rotate on the valve body 1 and the fixed block three 14, a plurality of mounting holes 18 are formed in the rear end of the pipeline one 2, a plurality of same mounting holes 18 are formed in the bottom of the pipeline two 3, the pipeline one 2 and the pipeline two 3 are fixedly connected with other pipelines through the mounting holes 18, the top of the valve body 1 is movably connected with a sealing door 19, the bottom of the sealing door 19 is fixedly connected with a sealing plug 20, the sealing door 19 is fixed on the valve body 1 through external bolts, and meanwhile the sealing plug 20 improves the sealing performance.

[0025] In the working process, the handle 17 is rotated to drive the threaded rod two 15 to rotate on the valve body 1 and the fixed block three 14, the threaded rod two 15 is rotated to push the valve disc 11 to move backward, the valve disc 11 moves backward to pull the spring 16, so that the valve disc 11 tightly abuts against the silica gel sealing gasket two 6, the spring 16 protects the silica gel sealing gasket two 6, prevents the silica gel sealing gasket one 4 and the silica gel sealing gasket two 6 from receiving excessive force, the sealing frame one 12 and the sealing frame two 13 tightly slide to improve the sealing performance, and meanwhile the sealing frame one 12 and the sealing frame two 13 protect the threaded rod one 8 and the spring 16, the pipeline one 2 and the pipeline two 3 are fixedly connected with other pipelines through the mounting holes 18, when the silica gel sealing gasket one 4 and the silica gel sealing gasket two 6 need to be replaced, the sealing door 19 is removed from the valve body 1 through external bolts, then a hexagonal wrench or the rotating block 10 is directly rotated to drive the threaded rod one 8 to rotate on the valve seat 5 and the valve body 1, so that the valve seat 5 is removed, then a new valve seat 5 is installed, and the rotating block 10 and the threaded rod one 8 are rotated to fix the valve seat 5 on the valve body 1, and meanwhile the silica gel sealing gasket one 4 on the valve seat 5 keeps the valve seat 5 and the valve body 1 in a sealed state.

[0026] Through the above steps, when the silica gel sealing gasket 4 and the silica gel sealing gasket 6 need to be replaced, the sealing door 19 is taken off from the valve body 1 through external bolts, then the valve seat 5 is taken off by rotating the rotating block 10 or directly rotating the rotating block 10 to drive the threaded rod 8 to rotate on the valve seat 5 and the valve body 1, the new valve seat 5 is installed, and the valve seat 5 is fixed on the valve body 1 by rotating the rotating block 10 and the threaded rod 8, and the silica gel sealing gasket 4 on the valve seat 5 keeps the valve seat 5 and the valve body 1 in a sealed state, so as to solve the problem that the existing vacuum valve has excellent sealing performance, but due to the design precision and high sealing requirement, the rubber sealing ring is often installed in a relatively hidden or difficult-to-reach position, which makes the replacement operation very inconvenient.

Claims

1. A high-tightness vacuum valve for vacuum coating apparatus, comprising a valve body (1); characterized in that: It also includes silica gel gasket one (4), valve seat (5) and silica gel gasket two (6), the rear end of valve body (1) is fixedly connected with pipeline one (2), the bottom of valve body (1) is fixedly connected with pipeline two (3), the inside of valve body (1) is movably connected with silica gel gasket one (4) at the rear position, the front end of silica gel gasket one (4) is fixedly connected with valve seat (5), the front end of valve seat (5) is fixedly connected with silica gel gasket two (6), the left and right sides of valve seat (5) are fixedly connected with fixed block one (7) respectively, the rear end of valve body (1) is fixedly connected with fixed block two (9) corresponding fixed block one (7) position, the inside of fixed block one (7) is screw connected with threaded rod one (8), the rear end of threaded rod one (8) is screw connected with fixed block two (9) through valve body (1), the rear end of threaded rod one (8) is fixedly connected with rotating block (10).

2. The high-tightness vacuum valve of a vacuum coating equipment according to claim 1, characterized in that: The inside of valve body (1) is provided with valve clapper (11), the front end of valve clapper (11) is rotatably connected with threaded rod two (15), the inside of valve body (1) is fixedly connected with fixed block three (14) at the front position, threaded rod two (15) is screw connected with valve body (1).

3. The high-tightness vacuum valve of the vacuum coating equipment according to claim 2, characterized in that: Threaded rod two (15) is screw connected with fixed block three (14), the rear end of fixed block three (14) is fixedly connected with spring (16), spring (16) is fixedly connected with valve clapper (11).

4. The high-tightness vacuum valve of the vacuum coating equipment according to claim 3, characterized in that: The front end of valve clapper (11) is fixedly connected with sealing frame one (12), the rear end of valve body (1) is fixedly connected with sealing frame two (13).

5. The high-tightness vacuum valve of the vacuum coating equipment according to claim 4, characterized in that: Sealing frame one (12) and sealing frame two (13) are slidingly connected, the front end of threaded rod two (15) is fixedly connected with handle (17).

6. The high-tightness vacuum valve of a vacuum coating equipment according to claim 1, characterized in that: The rear end of pipeline one (2) is provided with a plurality of mounting holes (18), the bottom of pipeline two (3) is provided with a plurality of same mounting holes (18).

7. The high-tightness vacuum valve of a vacuum coating equipment according to claim 1, characterized in that: The top of valve body (1) is movably connected with sealing door (19), the bottom of sealing door (19) is fixedly connected with sealing plug (20).

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