Vacuum degree control valve

Abstract

The utility model discloses a vacuum degree control valve which comprises a driver provided with a first connecting part; the valve main body is provided with a second connecting part; a cushion block is adapted; the positioning mechanism comprises a pin hole formed in the adaptive cushion block, a first positioning groove formed in the first connecting part, a second positioning groove formed in the second connecting part, and a positioning pin which is arranged in the first positioning groove, the second positioning groove and the pin hole at the same time; and the connecting mechanism comprises a threaded hole formed in the second connecting part, a first through hole formed in the first connecting part, a second through hole formed in the adaptive cushion block, and a fastening bolt which penetrates through the first through hole and the second through hole and is screwed into the threaded hole. According to the vacuum degree control valve, the relative position between the driver and the valve body of the assembled vacuum degree control valve can better fit the design target.

Description

TECHNICAL FIELD

[0001] The embodiment of the utility model relates to the field of vacuum equipment, and more particularly, the utility model relates to a vacuum degree control valve. BACKGROUND

[0002] The vacuum degree plays a vital role in various fields, whether in the semiconductor industry, aerospace, medical field, or specific vacuum coating process and static nitrogen adsorption instrument, the requirement of the vacuum degree is the key factor to ensure the process quality and effect. Therefore, understanding and controlling the vacuum degree is crucial for the technical personnel of the related industry.

[0003] The existing vacuum degree control valve includes a driver with a first connecting part, a valve body with a second connecting part, and an adapter pad provided between the driver and the valve body. When assembling the vacuum degree control valve, the driver is first connected with the adapter pad, and then the adapter pad is connected with the valve body, thereby completing the assembly of the vacuum degree control valve.

[0004] The applicant found that there is an error between the connection of the driver and the adapter pad, and there is also an error between the connection of the valve body and the adapter pad. The cumulative error between the two causes the relative position between the driver and the valve body to deviate seriously from the design target, resulting in a decrease in the control precision of the driver on the valve body. UTILITY MODEL CONTENTS

[0005] In order to solve one or more technical problems mentioned above, the utility model provides a kind of vacuum degree control valve, can be positioned to driver, adapter pad and valve body in the assembly process of vacuum degree control valve, to make the relative position between the driver and valve body of vacuum degree control valve after assembly more close to design target.

[0006] The vacuum degree control valve described above includes a driver with a first connecting part, a valve body with a second connecting part, an adapter pad provided between the first connecting part and the second connecting part, a positioning mechanism including a pin hole provided in the adapter pad, a first positioning slot provided in the first connecting part, a second positioning slot provided in the second connecting part, and a positioning pin fitted into the first positioning slot, the second positioning slot and the pin hole, and a connecting mechanism including a threaded hole provided on the second connecting part, a first through hole provided on the first connecting part, a second through hole provided on the adapter pad, and a fastening bolt passing through the first through hole and the second through hole and screwed into the threaded hole, wherein the cooperation between the first through hole and the fastening bolt and the cooperation between the second through hole and the fastening bolt are both clearance fit.

[0007] Optionally, the number of positioning mechanisms is two or three, and the number of connecting mechanisms is two, three or four.

[0008] Optionally, the fit between the first positioning slot and the positioning pin is a transition fit, the fit between the second positioning slot and the positioning pin is a transition fit, and the fit between the pin hole and the positioning pin is a transition fit.

[0009] Optionally, the cross sections of the pin hole, the first positioning slot, the second positioning slot and the pin hole are circular or regular polygonal.

[0010] Optionally, the driver comprises a motor module, a transmission module connected to the motor module and the adapter block and having the first connecting part, and the motor module drives the valve body to be open or cut off through the transmission module.

[0011] Optionally, the valve body comprises a valve body having a passage and a valve core rotatably arranged in the valve body, wherein the valve core is connected to the transmission module through transmission, so that the valve core can be driven and rotated in the valve body to select to block or open the passage of the valve body.

[0012] Optionally, the transmission module comprises a first housing having the first connecting part and allowing the core shaft of the valve core to pass through, and at least two gears arranged in the first housing and sequentially engaged along a predetermined transmission path, wherein the rotation shaft of the gear at the most upstream of the transmission path is connected to the output shaft of the motor module, and the gear at the most downstream of the transmission path is fixedly sleeved on the core shaft of the valve core and used to drive the valve core to rotate in the valve body.

[0013] Optionally, the transmission module comprises a first housing having the first connecting part and allowing the core shaft of the valve core to pass through, a gear arranged in the first housing and fixedly sleeved on the core shaft of the valve core, a rack slidably arranged in the first housing and engaged with the gear, and a cam mechanism or a crank slider mechanism arranged in the first housing and connecting the rack and the motor module, when the motor module drives the rack to reciprocate in the first housing through the cam mechanism or the crank slider mechanism, the rack drives the gear to rotate to drive the valve core to rotate in the valve body.

[0014] Optionally, the cam of the cam mechanism or the crank of the crank slider mechanism is sleeved on the output shaft of the motor module and locked on the output shaft through a screw arranged in itself, and the fit between the cam or the crank and the output shaft is a clearance fit.

[0015] Optionally, the motor module comprises a second housing connected with the transmission module, a motor arranged in the second housing, and a motor controller connected with the motor, wherein a rotating shaft of the motor serves as an output shaft of the motor module and is used to drive the transmission module.

[0016] From the above technical solution, the improvement of the vacuum control valve provided by the utility model covers the ingenious addition of a positioning mechanism between the adapter pad, the first connecting part of the driver and the second connecting part of the valve body. This innovative design accurately defines the relative positions among the three, so that the matching precision is significantly improved and is easy to control. Before the connection mechanism tightly links the three, the positioning mechanism ensures the accurate pre-positioning of their respective positions, thereby laying a solid foundation for the smooth assembly of the connection mechanism. This improvement not only ensures the effective connection of the connection mechanism, but also makes the relative positions of the driver and the valve body closer to the design expectation, thereby greatly improving the control precision of the vacuum control valve.

[0017] In addition, the utility model also adopts the gap cooperation design between the first through hole, the second through hole and the fastening bolt. This design makes the fastening bolt easily and accurately cooperate with the threaded hole, realizing more stable connection. More importantly, the adapter pad, the driver and the valve body can be fastened at the same time by a single fastening bolt, which significantly reduces the cumulative deviation compared with the traditional method of fixing the adapter pad and the driver respectively, thereby effectively improving the yield of the product and reducing the production cost. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and other objects, features and advantages of the exemplary embodiments of the present application will be more apparent from the following detailed description read in conjunction with the accompanying drawings, in which several embodiments of the present application are shown by way of example, and wherein the same reference numerals refer to the same or similar components throughout the several views. In the drawings:

[0019] Figure 1 A structural schematic view of the vacuum control valve of the embodiment of the present application is shown;

[0020] Figure 2 A sectional view of the positioning mechanism and the connection mechanism of the vacuum control valve as shown in Figure 1 ;

[0021] Figure 3 A perspective view of the positioning mechanism as shown in Figure 2 ;

[0022] Figure 4 A structural schematic view of the transmission module as shown in Figure 1 ;

[0023] Reference signs:

[0024] 1, driver; 11, first connecting part; 12, first positioning groove; 13, motor module; 131, second housing; 132, motor; 14, transmission module; 141, first housing; 142, gear; 143, rack;

[0025] 2, valve body; 21, second connecting part; 22, second positioning groove; 23, valve; 24, valve core;

[0026] 3, adapter pad;

[0027] 4, positioning mechanism; 41, pin hole; 42, positioning pin;

[0028] 5, connecting mechanism; 51, threaded hole; 52, first through hole; 53, second through hole; 54, fastening bolt. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present disclosure.

[0030] Embodiment one

[0031] The present application embodiment one discloses a kind of vacuum degree control valve, as shown in Figure 1 , Figure 1 The structure schematic diagram of the vacuum degree control valve of the present application embodiment is shown. A kind of vacuum degree control valve includes the driver 1 with first connecting part 11, the valve body 2 with second connecting part 21 and the adapter pad 3 being arranged between first connecting part 11 and second connecting part 21. Vacuum degree control valve further includes positioning mechanism 4 for realizing the accurate positioning between driver 1, adapter pad 3 and valve body 2, and connecting mechanism 5 for connecting driver 1, adapter pad 3 and valve body 2 together. Among them, to improve the positioning accuracy and connection strength of driver 1, adapter pad 3 and valve body 2 three, positioning mechanism 4 and connecting mechanism 5 are all set multiple. While considering the economic factor and the structural strength factor of the connection of driver 1, adapter pad 3 and valve body 2, the number of positioning mechanism 4 can be two or three, and the number of connecting mechanism 5 can be two, three or four.

[0032] Figure 2 The sectional view of the positioning mechanism and connecting mechanism 5 of the vacuum degree control valve as shown in Figure 1 is shown,Figure 3 A perspective view of the positioning mechanism 4 is shown as Figure 2 Figure 2 Figure 3 Figure 1 Each positioning mechanism 4 includes a pin hole 41 provided on the adapter pad 3, a first positioning slot 12 provided on the first connecting part 11, a second positioning slot 22 provided on the second connecting part 21, and a positioning pin 42 fitted into the first positioning slot 12, the second positioning slot 22 and the pin hole 41 simultaneously. Each connecting mechanism 5 includes a threaded hole 51 provided on the second connecting part 21, a first through hole 52 provided on the first connecting part 11, a second through hole 53 provided on the adapter pad 3, and a fastening bolt 54 passing through the first through hole 52 and the second through hole 53 and screwed into the threaded hole 51, wherein the cooperation between the first through hole 52 and the fastening bolt 54 and the cooperation between the second through hole 53 and the fastening bolt 54 are both clearance fits.

[0033] The improvement of the vacuum control valve provided by the utility model covers the ingenious addition of the positioning mechanism 4 between the adapter pad 3, the first connecting part 11 of the driver 1 and the second connecting part 21 of the valve body 2. This innovative design accurately defines the relative positions among the three parts, significantly improves the fitting accuracy and is easy to control. Before the connecting mechanism 5 tightly connects the three parts, the positioning mechanism 4 ensures the accurate pre-positioning of the respective positions of the three parts, thereby laying a solid foundation for the smooth assembly of the connecting mechanism 5. This improvement not only ensures the effective connection of the connecting mechanism 5, but also makes the relative positions of the driver 1 and the valve body 2 closer to the design expectation, thereby significantly improving the control accuracy of the vacuum control valve.

[0034] In addition, the utility model also adopts the clearance fit design between the first through hole 52, the second through hole 53 and the fastening bolt 54. This design enables the fastening bolt 54 to easily and accurately cooperate with the threaded hole 51, achieving a more stable connection. More importantly, the adapter pad 3, the driver 1 and the valve body 2 can be fastened simultaneously by a single fastening bolt 54, which significantly reduces the cumulative deviation compared to the traditional method of fixing the adapter pad 3 and the driver 1 separately, thereby effectively improving the yield of the product and reducing the production cost.

[0035] ​​​The cooperation between the first positioning groove 12 and the positioning pin 42 is a transition fit, the cooperation between the second positioning groove 22 and the positioning pin 42 is a transition fit, and the cooperation between the pin hole 41 and the positioning pin 42 is a transition fit. By adopting the transition fit mode, the positioning pin 42 and the first positioning groove 12, the second positioning groove 22 and the pin hole 41 realize precise cooperation. This cooperation mode not only ensures that the positioning pin 42 can be combined with the first positioning groove 12, the second positioning groove 22 and the pin hole 41 smoothly, but also effectively improves the positioning accuracy between the positioning pin 42 and the first positioning groove 12, the second positioning groove 22 and the pin hole 41 by precisely controlling the cooperation gap, thereby enhancing the positioning accuracy of the entire positioning mechanism 4, which is conducive to improving the control accuracy of the driver 1 on the valve body 2.

[0036] In order to further improve the positioning accuracy of the positioning assembly, the cross sections of the pin hole 41, the first positioning groove 12, the second positioning groove 22 and the positioning pin 42 are all circular or regular polygonal. Since the circular and regular polygonal designs have the characteristics of standardization and universality, the pin hole 41, the first positioning groove 12, the second positioning groove 22 and the positioning pin 42 with circular or regular polygonal cross sections have good interchangeability, which not only facilitates maintenance and replacement, but also reduces the positioning error caused by mismatching of parts.

[0037] Preferably, as a power output device, the driver 1 at least comprises a motor 132 module 13, a transmission module 14 fixedly connected with the motor 132 module 13 and the adapter pad 3 and having the first connecting part 11, wherein the motor 132 module 13 drives the valve body 2 through the transmission module 14 to realize the conduction and interruption of the passage, thereby adjusting the vacuum degree. The motor 132 module 13 comprises a second housing 131 connected with the transmission module 14, a motor 132 arranged in the second housing 131 and a motor 132 controller connected with the motor 132, wherein the rotating shaft of the motor 132 serves as the output shaft of the motor 132 module 13 and is used to drive the transmission module 14. As an example, the valve body 2 comprises a valve body 23 having a passage and a valve core 24 rotatably arranged in the valve body 23, wherein the valve core 24 is connected with the transmission module 14 through a transmission mode, so that the valve core 24 can be driven and rotated in the valve body 23 to select to block or open the passage of the valve body 23.

[0038] The driver 1 forms a high-efficiency and precise control system through the integrated motor 132 module 13, the transmission module 14, and the finely designed valve body 2. The valve body 23 in the valve body 2 is designed with a passage, and the valve core 24 is rotatably arranged in the valve body 23 and connected with the transmission module 14 through a specific transmission mode. This design enables the valve core 24 to be accurately driven by the transmission module 14 to rotate in the valve body 23, thereby selectively blocking or opening the passage of the valve body 23. This design not only improves the response speed and stability of the system, but also makes the adjustment of the internal conduction and cutoff of the passage more accurate and reliable. Through the cooperation of the motor 132 module 13 and the transmission module 14, accurate control of the rotation of the valve core 24 can be achieved, thereby ensuring that the valve body 2 can accurately reach the required open or closed state. This precise control capability is particularly important for application scenarios that require precise regulation of vacuum, and can greatly improve the performance and reliability of the system.

[0039] Figure 4 As shown in FIG. 1, the valve body 2 is connected with the transmission module 14 through the first connecting part 11, and the valve core 24 is rotatably arranged in the valve body 23. Figure 1 As shown in FIG. 2, the structure of the transmission module 14 is shown as an example, which is combined with Figure 1 Figure 2 and Figure 3 The transmission module 14 includes a first housing 141 having the first connecting part 11 and permitting the core shaft of the valve core 24 to pass through, and at least two gears 142 arranged in the first housing 141 and sequentially engaged along a predetermined transmission path, wherein the rotating shaft of the gear 142 at the most upstream of the transmission path is connected with the output shaft of the motor 132 module 13, and the gear 142 at the most downstream of the transmission path is fixedly sleeved on the core shaft and used to drive the valve core 24 to rotate in the valve body 23.

[0040] Through the at least two gears 142 (hereinafter referred to as gear set) sequentially engaged along the predetermined transmission path, efficient power transmission from the motor 132 output shaft to the core shaft of the valve core 24 is achieved, which not only helps to reduce the space occupied by the transmission module 14, but also improves the stability and reliability of the system. At the same time, by controlling the engagement accuracy between the gear set, the accuracy of the rotation angle of the valve core 24 can also be ensured, meeting the demand for precise regulation of the valve opening. In addition, by using the gear set for transmission, it is also beneficial to the maintenance and repair of the gear 142 set in the later stage.

[0041] Embodiment Two

[0042] The difference between the embodiment two in the present application and the embodiment one is that the embodiment two provides another implementation form of the transmission module 14.

[0043] In the second embodiment, the transmission module 14 comprises a first housing 141 having the first connecting part 11 and permitting the stem of the valve core 24 to pass in, a gear 142 arranged in the first housing 141 and fixedly sleeved on the stem of the valve core 24, a rack 143 slidably arranged in the first housing 141 and engaged with the gear 142, and a cam mechanism or a crank slider mechanism arranged in the first housing 141 and connecting the rack 143 and the motor 132 module 13, when the motor 132 module 13 drives the rack 143 to reciprocally slide in the first housing 141 through the cam mechanism or the crank slider mechanism, the rack 143 drives the gear 142 to rotate to drive the valve core 24 to rotate in the valve body 23.

[0044] The combination of the cam mechanism or the crank slider mechanism and the gear 142-rack 143 transmission structure provides a highly flexible and adaptable transmission solution for the driver 1. The cam mechanism or the crank slider mechanism enables the transmission module 14 to adapt to the control requirements of more types of valves, and at the same time, this design also facilitates the implementation of complex control logic and motion rules, providing higher flexibility and controllability for the valve system.

[0045] The cam of the cam mechanism or the crank of the crank slider mechanism is sleeved on the output shaft of the motor 132 module 13 and is locked on the output shaft through a screw arranged in itself, and the cooperation between the cam or the crank and the output shaft is gap cooperation. The design that the cam or the crank is sleeved on the output shaft of the motor 132 module 13 and is locked through a screw greatly simplifies the assembly process. The gap cooperation mode provides a certain fault tolerance in the assembly process. Even if there is a slight size deviation between the output shaft and the cam or the crank in the machining and manufacturing process, the assembly can be successfully completed, avoiding the problems of assembly difficulty or even damage to the parts caused by interference fit, further ensuring the success rate of assembly and the stability of product quality.

[0046] In the above description of the present application, unless otherwise explicitly specified and limited, the terms "fixed", "mounted", "connected" or "linked" and the like should be understood in a broad sense. For example, as to the term "connected", it can be fixed connection, can be detachable connection, or can be integrated; can be mechanical connection, can be electrical connection; can be directly connected, can be indirectly connected through an intermediate medium, or can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise explicitly specified in the present application, those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0047] According to the above description of the present application, those skilled in the art can also understand that the terms used such as "upper", "lower", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "center", "longitudinal", "transverse", "clockwise" or "counterclockwise" and other terms indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings of the present application, which are only for the purpose of facilitating the description of the scheme of the present application and simplifying the description, and are not explicitly or implicitly indicating that the devices or elements involved must have the specific orientation, be constructed and operated in a specific orientation, therefore the above orientation or positional relationship terms cannot be understood or interpreted as a limitation on the scheme of the present application.

[0048] In addition, the terms "first" or "second" and the like used in the present application are terms used to refer to numbers or ordinal numbers only for the purpose of description, and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" or "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise specifically limited.

[0049] Although the embodiments of the present application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided only in an exemplary manner. Those skilled in the art can think of many changes, modifications and alternatives without departing from the idea and spirit of the present application. It should be understood that various alternatives to the embodiments of the present application described herein can be employed in practicing the present application. The appended claims are intended to define the scope of protection of the present application and therefore cover equivalent or alternative solutions within the scope of these claims.

Claims

1. A vacuum control valve, characterized by, The utility model relates to a valve drive mechanism, comprising: a driver having a first connecting part; a valve body having a second connecting part; an adapter pad provided between the first connecting part and the second connecting part; a positioning mechanism comprising a pin hole provided in the adapter pad, a first positioning slot provided in the first connecting part, a second positioning slot provided in the second connecting part, and a positioning pin simultaneously fitted into the first positioning slot, the second positioning slot and the pin hole; and a connecting mechanism comprising a threaded hole provided on the second connecting part, a first through hole provided on the first connecting part, a second through hole provided on the adapter pad, and a fastening bolt passing through the first through hole and the second through hole and screwed into the threaded hole, wherein the fit between the first through hole and the fastening bolt and the fit between the second through hole and the fastening bolt are both clearance fits.

2. The vacuum control valve according to claim 1, characterized in that The number of the positioning mechanisms is two or three, and the number of the connecting mechanisms is two, three or four.

3. The vacuum control valve according to claim 1, wherein The fit between the first positioning slot and the positioning pin is a transition fit, the fit between the second positioning slot and the positioning pin is a transition fit, and the fit between the pin hole and the positioning pin is a transition fit.

4. The vacuum control valve according to claim 1, wherein The cross sections of the pin hole, the first positioning slot, the second positioning slot and the pin hole are circular or regular polygonal.

5. The vacuum control valve according to claim 4, characterized in that The driver comprises a motor module, a transmission module connected with the motor module and the adapter pad and having the first connecting part, and the motor module drives the valve body to achieve conduction and interruption through the transmission module.

6. The vacuum control valve according to claim 4, wherein The valve body comprises a valve body having a passage and a valve core rotatably provided in the valve body, wherein the valve core is connected with the transmission module through transmission, so that the valve core can be driven and rotated in the valve body to select to block or open the passage of the valve body.

7. The vacuum control valve according to claim 1, wherein The transmission module comprises a first housing having the first connecting part and permitting the core shaft of the valve core to pass in, and at least two gears sequentially engaged along a predetermined transmission path in the first housing, wherein the rotation shaft of the gear at the most upstream of the transmission path is connected with the output shaft of the motor module, and the gear at the most downstream of the transmission path is fixedly sleeved on the core shaft of the valve core and used to drive the valve core to rotate in the valve body.

8. The vacuum control valve according to claim 7, characterized in that The transmission module comprises a first housing having the first connecting part and permitting the core shaft of the valve core to pass in, a gear provided in the first housing and fixedly sleeved on the core shaft of the valve core, a rack slidably provided in the first housing and engaged with the gear, and a cam mechanism or a slider-crank mechanism provided in the first housing and connecting the rack and the motor module, when the motor module drives the rack to reciprocally slide in the first housing through the cam mechanism or the slider-crank mechanism, the rack drives the gear to rotate to drive the valve core to rotate in the valve body.

9. The vacuum control valve according to claim 4, wherein The cam of the cam mechanism or the crank of the slider-crank mechanism is sleeved on the output shaft of the motor module and locked on the output shaft through a screw provided in itself, and the fit between the cam or the crank and the output shaft is a clearance fit.

10. The vacuum control valve according to claim 1, wherein The motor module comprises a second housing connected with the transmission module, a motor arranged in the second housing, and a motor controller connected with the motor, wherein a rotating shaft of the motor serves as an output shaft of the motor module and is used for driving the transmission module.

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