Extreme ultraviolet light generating cabin

Abstract

The utility model discloses an extreme ultraviolet light generating cabin, which comprises a cabin shell, a vacuum chamber arranged in the cabin shell, a fixed seat arranged in the vacuum chamber, a threaded sleeve mounted on the side wall of the fixed seat, an ionization table arranged on the fixed seat, and a displacement regulator connected with the cabin shell, the displacement regulator comprises a threaded rod, and the threaded rod is sleeved with the threaded sleeve. A plurality of springs are arranged between the side wall of the ionization table and the side wall of the fixing base, and the springs are used for applying traction force to the ionization table. According to the utility model, when the position of the ionization table is adjusted, the threaded rod rotates and is matched with the threaded sleeve, so that the ball at the end part of the threaded rod pushes the ionization table and the ionization table displaces, the spring has a traction effect on the ionization table all the time during the displacement of the ionization table, and the threaded fit between the threaded rod and the threaded sleeve is tighter under the traction effect; relative shaking generated between the threaded rod and the threaded sleeve in the adjusting process is avoided, and the adjusting precision of the ionization table is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of extreme ultraviolet light generator, concretely relates to an extreme ultraviolet light generating cabin. BACKGROUND

[0002] Extreme ultraviolet light, also known as extreme ultraviolet radiation, refers to electromagnetic radiation in the electromagnetic spectrum with a wavelength from 121 nanometers to 10 nanometers. An extreme ultraviolet light generator is a device for generating extreme ultraviolet light. In the extreme ultraviolet light generator, extreme ultraviolet light is generated by ionizing a red laser beam and an inert gas in a vacuum cavity in the extreme ultraviolet light generating cabin.

[0003] The ionization process occurs on an ionization table in the vacuum cavity. In order to accurately shoot the red laser beam into the optical fiber on the ionization table, the position of the ionization table needs to be adjusted to ensure that the optical fiber is coaxial with the red laser beam. The adjustment is generally made by adjusting the position of the ionization table through a threaded rod. Since there will be a machining precision problem during the manufacture of the workpiece, there will be a fitting gap between the threaded rod and the threaded sleeve, which will cause a certain degree of shaking during the adjustment process, affecting the adjustment accuracy. SUMMARY

[0004] The purpose of the utility model is to solve the problems in the background art and provide an extreme ultraviolet light generating cabin.

[0005] The purpose of the utility model can be achieved by the following technical solutions:

[0006] An extreme ultraviolet light generating cabin is arranged in an extreme ultraviolet light generator and comprises a cabin shell, a vacuum cavity arranged in the cabin shell, a fixing seat arranged in the vacuum cavity, a threaded sleeve mounted on the side wall of the fixing seat, an ionization table arranged on the fixing seat, a cabin shell connected to a displacement adjuster, the displacement adjuster comprising a threaded rod, the threaded rod being sleeved with the threaded sleeve, and the end of the threaded rod being in abutment with the ionization table, a plurality of springs arranged between the side wall of the ionization table and the side wall of the fixing seat, and the springs being used to apply a pulling force to the ionization table.

[0007] As a further solution of the utility model, the spring comprises a tension spring, and the two ends of the tension spring are provided with snap rings.

[0008] As a further solution of the utility model, the snap ring is provided with a clamping column.

[0009] As a further solution of the utility model, a plurality of first clamping holes are formed in the side wall of the fixing seat.

[0010] As a further solution of the utility model, a plurality of second clamping holes are formed in the side wall of the ionization table.

[0011] As a further scheme of the utility model: the first clamping hole is composed of two circular holes with different diameters and is in a stepped shape.

[0012] As a further scheme of the utility model: the second clamping hole is composed of two circular holes with different diameters and is in a stepped shape.

[0013] As a further scheme of the utility model: the clamping column arranged at one end of the spring is arranged in the first clamping hole.

[0014] As a further scheme of the utility model: the clamping column arranged at the other end of the spring is arranged in the second clamping hole.

[0015] As a further scheme of the utility model: the fixed seat is slidably connected with the ionization platform.

[0016] The utility model has the advantages of:

[0017] In the utility model, when the position of the ionization platform is adjusted, the threaded rod is rotated, and then the threaded sleeve is matched, so that the ball at the end of the threaded rod pushes the ionization platform, the ionization platform is displaced, and the spring always has a pulling effect on the ionization platform during the displacement of the ionization platform. Under the pulling effect, the threaded cooperation between the threaded rod and the threaded sleeve is more compact, the cooperation gap between the threads no longer affects the movement of the threaded rod, the relative shaking between the threaded rod and the threaded sleeve during the adjustment process is solved, the threaded surface on the outer surface of the threaded rod is more suitable for the threaded surface on the inner surface of the threaded sleeve, and therefore the adjustment accuracy of the ionization platform is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model will be further described below with reference to the drawings.

[0019] Figure 1 Is the structure schematic view of the extreme ultraviolet generating cabin of the utility model;

[0020] Figure 2 Is Figure 1 The enlarged view of A in the figure;

[0021] Figure 3 Is the cooperation relationship schematic view of the ionization platform and the fixed seat during the adjustment of the position;

[0022] Figure 4 Is the cooperation relationship schematic view of the ionization platform and the fixed seat during the adjustment of the position;

[0023] Figure 5 Is Figure 4 The structure schematic view of the ionization platform;

[0024] Figure 6 Is Figure 4 The structure schematic view of the tension spring.

[0025] In the picture:

[0026] 1. Chamber shell; 11. Vacuum chamber; 2. Fixing base; 21. Threaded sleeve; 22. First locking hole; 3. Ionization stage; 31. Second locking hole; 4. Displacement adjuster; 41. Threaded rod; 5. Spring; 51. Tension spring; 52. Snap ring; 53. Snap pin. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] This utility model is an extreme ultraviolet light generating chamber, which is installed inside an extreme ultraviolet light generator.

[0029] Please see Figures 1-2 As shown, the extreme ultraviolet light generating chamber includes: a chamber shell 1, a vacuum chamber 11 disposed inside the chamber shell 1, a fixed base 2 disposed inside the vacuum chamber 11, and a threaded sleeve 21 installed on the side wall of the fixed base 2. An ionization stage 3 is disposed on the fixed base 2, and the fixed base 2 and the ionization stage 3 are slidably connected.

[0030] Please refer to Figures 2-4 As shown, the cabin shell 1 is also connected to a displacement adjuster 4, which includes an adjusting handle. The adjusting handle is fixed to the cabin shell 1 by a mounting sleeve and bolts. The adjusting handle is connected to a threaded rod 41 via a coupling. Rotating the adjusting handle can drive the threaded rod 41 to rotate. A threaded sleeve 21 is fitted over the threaded rod 41, and the ball bearings at the end of the threaded rod 41 abut against the ionization stage 3.

[0031] Please see Figures 4-6 As shown, several springs 5 ​​are provided between the side wall of the ionization stage 3 and the side wall of the fixed base 2. The springs 5 ​​are used to apply a pulling force to the ionization stage 3.

[0032] Specifically, the spring 5 includes a tension spring 51, with retaining rings 52 at both ends, and retaining posts 53 inside the retaining rings 52. Several first retaining holes 22 are formed on the side wall of the fixing base 2, and several second retaining holes 31 are formed on the side wall of the ionization stage 3. Both the first retaining holes 22 and the second retaining holes 31 consist of two circular holes of different diameters arranged in a stepped shape. The retaining post 53 at one end of the spring 5 is positioned within the first retaining hole 22, and the retaining post 53 at the other end is positioned within the second retaining hole 31. The stepped holes facilitate the installation and positioning of the retaining post 53, which helps to fix the position of the spring 5. The tension force is adjusted by the extension and retraction of the tension spring 51.

[0033] The inventor found that during the machining of the thread (the external thread of the threaded rod 41 and the internal thread of the threaded sleeve 21), the threaded rod 41 and the threaded sleeve 21 need to be manufactured according to certain tolerance and precision standards. The tolerance is the allowable size deviation range to ensure the normal cooperation between the components. The tolerance refers to the fact that during the manufacturing process, the sizes of the threaded rod 41 and the threaded sleeve 21 are not completely consistent, and there is usually a certain size deviation. In order to ensure that the assembly will not be stuck or cannot be screwed due to size difference, the manufacturer will leave a cooperation gap during the design. The cooperation gap is usually small, but can avoid interference during assembly. Moreover, the specifications and standards (such as ISO, ANSI) of the threaded rod 41 and the threaded sleeve 21 usually specify their cooperation relationship. Even if the threaded rod 41 and the threaded sleeve 21 are of the same specification, they will be different in actual processing and will have a cooperation gap.

[0034] Due to the existence of the cooperation gap, the threaded rod 41 and the threaded sleeve 21 will have different degrees of shaking when cooperating, which will affect the position adjustment accuracy of the ionizing table 3 when applied to the extreme ultraviolet light generator which requires high precision.

[0035] In this embodiment, when the position of the ionizing table 3 is adjusted, the adjustment handle of the displacement adjuster 4 is rotated to drive the threaded rod 41 to rotate, and then the threaded sleeve 21 is cooperated. The ball at the end of the threaded rod 41 pushes the ionizing table 3 to make the ionizing table 3 displace. During the displacement of the ionizing table 3, the spring 5 always has a pulling effect on the ionizing table 3. Under the pulling effect, the cooperation between the threaded rod 41 and the threaded sleeve 21 is more closely, and the cooperation gap between the threads no longer affects the movement of the threaded rod 41, thereby solving the relative shaking between the threaded rod 41 and the threaded sleeve 21 during the adjustment process. The threaded rod 41 has a higher cooperation degree with the threads on the outer surface of the threaded sleeve 21, and the adjustment accuracy of the ionizing table 3 is improved.

[0036] In addition, in the extreme ultraviolet light generator, the necessary condition for generating extreme ultraviolet light is a vacuum environment. If there is no pulling effect of the spring 5 on the ionizing table 3, the reset and recall operation of the ionizing table 3 needs to break the vacuum of the vacuum chamber 11 in advance, and the multiple breaking of the vacuum will affect the service life of other components in the vacuum chamber 11. In this embodiment, when the ionizing table 3 needs to be reset or recalled, the adjustment handle of the displacement adjuster 4 is reversely rotated to make the threaded rod 41 recall. Due to the pulling effect of the spring 5, the spring 5 will always move together with the ball at the end of the threaded rod 41, so that the reset or recall of the ionizing table 3 can be realized without breaking the vacuum environment.

[0037] The utility model discloses a working principle: when the position adjustment of ionization platform 3, threaded rod 41 rotates, and then cooperate with threaded sleeve 21, make the ball of threaded rod 41 end portion push ionization platform 3, and ionization platform 3 occurs displacement, during the displacement of ionization platform 3, spring 5 has the pulling effect to ionization platform 3 all the time, and the screw thread cooperation between threaded rod 41 and threaded sleeve 21 is more closely under the pulling effect, and the cooperation gap between screw threads no longer affects the movement of threaded rod 41, thereby solve the shaking produced in the adjustment process.

[0038] The above has carried out the detailed explanation to one embodiment of the utility model, but the content described is only the preferred embodiment of the utility model, can not be considered for limiting the implementation scope of the utility model. All equivalent changes and improvements etc. made in the application scope of the utility model should still belong to the claim coverage scope of the utility model.

Claims

1. An extreme ultraviolet light generating chamber provided in an extreme ultraviolet light generator, characterized by comprising: Include: The cabin shell (1) is provided with a vacuum chamber (11) inside, a fixed seat (2) is arranged in the vacuum chamber (11), a threaded sleeve (21) is arranged on the side wall of the fixed seat (2), and an ionization platform (3) is arranged on the fixed seat (2); The cabin shell (1) is connected with a displacement regulator (4), the displacement regulator (4) comprises a threaded rod (41), the threaded sleeve (21) is arranged on the threaded rod (41), and the end of the threaded rod (41) is in abutment with the ionization platform (3); A plurality of springs (5) are arranged between the side wall of the ionization platform (3) and the side wall of the fixed seat (2), and the springs (5) are used for applying pulling force to the ionization platform (3).

2. The extreme ultraviolet light generating chamber of claim 1, wherein, The spring (5) comprises a tension spring (51), and the two ends of the tension spring (51) are provided with snap rings (52).

3. The extreme ultraviolet light generating chamber of claim 2, wherein, The snap ring (52) is provided with a clamping column (53) inside.

4. The extreme ultraviolet light generating chamber of claim 3, wherein, The side wall of the fixed seat (2) is provided with a plurality of first clamping holes (22).

5. The extreme ultraviolet light generating chamber of claim 4, wherein, The side wall of the ionization platform (3) is provided with a plurality of second clamping holes (31).

6. The extreme ultraviolet light generating chamber of claim 4, wherein, The first clamping hole (22) is composed of two circular holes with different diameters and is in a stepped shape.

7. The extreme ultraviolet light generating chamber of claim 5, wherein, The second clamping hole (31) is composed of two circular holes with different diameters and is in a stepped shape.

8. The extreme ultraviolet light generating chamber of claim 5, wherein, The clamping column (53) arranged at one end of the spring (5) is arranged in the first clamping hole (22).

9. The extreme ultraviolet light generating chamber of claim 8, wherein, The clamping column (53) arranged at the other end of the spring (5) is arranged in the second clamping hole (31).

10. The extreme ultraviolet light generating chamber of claim 1, wherein, The fixed seat (2) and the ionization platform (3) are in sliding connection.

Images