Chip test fixture adaptive to ATE equipment

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By designing a chip test fixture adapted to ATE equipment, and adopting synchronous control and rotation mechanism to simplify carrier board replacement, the problem of low carrier board replacement efficiency in the existing technology is solved, achieving faster test preparation and higher test efficiency, while improving the heat dissipation effect of the chip.

CN223727955UActive Publication Date: 2025-12-26KUNSHAN PHOEBE ELECTRONIC TECHNOLOGY CO LTD

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Patent Information

Application Number: CN202520491454.7
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2025-03-20
Publication Date: 2025-12-26
Estimated Expiration: 2035-03-20

AI Technical Summary

Technical Problem

Existing chip test fixtures require tightening multiple bolts one by one when changing the carrier board, which increases test preparation time, reduces efficiency, and is prone to errors.

Method used

A chip testing fixture adapted to ATE equipment was designed. It adopts a base, clamping and pressing assembly and pressure plate structure, combined with a synchronous control mechanism and a synchronous rotation mechanism to achieve synchronous fixation of the four corners of the carrier board and simple operation. The carrier board replacement process is simplified by the cooperation of threaded rod and guide bar.

Benefits of technology

The carrier board replacement process is more convenient, significantly reducing test preparation time and improving overall test efficiency. Furthermore, the heat dissipation effect of the chip is improved through the heat-conducting plate and heat sink, ensuring the accuracy of test results.

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Abstract

A chip test fixture adapted to ATE equipment relates to the technical field of semiconductor test, a carrier plate is arranged in a placement groove on a base in an abutting manner, four corners in the placement groove are fixedly provided with limiting rods, the limiting rods are movably arranged on the carrier plate in a penetrating manner, a pressing block is movably sleeved on the limiting rods, and the pressing block is fixed on the base. An inserting groove is formed in the position, below the pressing block, of the upper portion of the base, a threaded rod is rotationally inserted into the inserting groove through a bearing, the threaded rod is rotationally sleeved with an internal threaded cylinder through threads, a synchronous rotating mechanism connected with the pressing block is arranged on the internal threaded cylinder, and vertical guide strips are fixedly arranged on the front side and the rear side of the outer ring wall of the internal threaded cylinder correspondingly; the front side and the rear side of the inner ring wall of the insertion groove are each provided with the guide vertical groove, the guide vertical strips are movably arranged in the guide vertical grooves, replacement of the carrier plate can be achieved without screwing a plurality of bolts one by one, the replacement process of the carrier plate is more convenient, the test preparation time is remarkably shortened, and the overall test efficiency is improved.

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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor test, specifically relates to a chip test fixture suitable for ATE equipment. BACKGROUND

[0002] In the semiconductor manufacturing process, chip testing is a key link to ensure product quality, ATE equipment is widely used in chip function test, performance test and reliability test, the existing chip form is various, and the pin number is much and the arrangement is complex, which puts forward higher requirements to the universality, precision and efficiency of the test fixture, the traditional chip test fixture usually replaces the carrier plate to adapt to the chip of different packaging forms and pin arrangement, however, the existing one is usually connected with the fixture body through a plurality of fixing bolts, and the bolts need to be screwed down one by one when replacing, which not only increases the test preparation time and reduces the overall test efficiency, but also is prone to error, therefore, a chip test fixture suitable for ATE equipment is urgently needed. SUMMARY

[0003] The utility model discloses a chip test fixture suitable for ATE equipment, which is designed rationally to solve the above problems.

[0004] To achieve the above object, the utility model adopts the following technical scheme: it contains base, clamping and pressing assembly and pressing plate, the base upper portion is equipped with clamping and pressing assembly, and the clamping and pressing assembly is equipped with pressing plate;

[0005] It also contains:

[0006] The carrier plate is arranged in the placing groove on the base, four limit rods are fixedly arranged in the four corners inside the placing groove, and the limit rods are movably arranged on the carrier plate.

[0007] The pressing block is movably arranged on the limit rod, and the base is provided with a synchronous control mechanism connected with the threaded rod.

[0008] The inner threaded cylinder is movably arranged on the threaded rod, the inner threaded cylinder is provided with a synchronous rotating mechanism connected with the pressing block, and the front and rear sides of the outer ring wall of the inner threaded cylinder are fixedly provided with guide vertical strips.

[0009] Further, the synchronous control mechanism contains:

[0010] The first synchronous rod is two, which are rotatably arranged on the left and right sides of the base through bearings, and the two ends of the first synchronous rod are respectively connected with the front and rear threaded rods through the bevel gear pairs;

[0011] The second synchronous rod is rotatably arranged in the base through a bearing, and the two ends of the second synchronous rod are respectively connected with the first synchronous rods on the two sides through bevel gear pairs.

[0012] Further, the handle is rotatably provided with a threaded resisting rod through a thread, and the rear end of the threaded resisting rod is arranged in abutment with the front side wall of the base.

[0013] Further, the synchronous rotating mechanism comprises:

[0014] The connecting rod is fixedly arranged on the upper portion of the inner threaded cylinder, the connecting cylinder is rotatably arranged on the connecting rod through a bearing, and the connecting cylinder is fixedly arranged on the bottom of the pressing block.

[0015] The guide block is two, which are respectively fixedly arranged on the left and right sides of the outer ring wall of the connecting cylinder, and the inner ring wall of the slot is provided with two rotating guide grooves, and the guide block is movably arranged in the rotating guide groove.

[0016] Further, the bottom of the pressing block is fixedly provided with a flexible pad, and the flexible pad is arranged in abutment on the upper portion of the carrier plate.

[0017] Further, the through hole provided on the pressing plate is fixedly provided with a heat-conducting plate, and the upper portion of the heat-conducting plate is fixedly provided with a plurality of cooling fins.

[0018] Compared with the prior art, the chip test fixture suitable for ATE equipment has the advantages that the carrier plate can be replaced without rotating a plurality of bolts one by one, the replacement process of the carrier plate is more convenient, the test preparation time is significantly reduced, and the overall test efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structural schematic view of the utility model.

[0020] Figure 2 It is a connection schematic view of the threaded rod and the synchronous control mechanism in the utility model.

[0021] Figure 3 It is a sectional view of the base in the utility model.

[0022] Figure 4 It is Figure 3 The enlarged view of A in The enlarged view of A in

[0023] Figure 5 It is the part explosion drawing of the pressing block, threaded rod, internal thread cylinder, synchronous rotating mechanism, guiding vertical bar and flexible pad in the utility model.

[0024] Mark explanation:

[0025] The base 1, the clamping down pressure assembly 2, the pressing plate 3, the carrier plate 4, the limiting rod 5, the pressing block 6, the slot 7, the threaded rod 8, the synchronous control mechanism 9, the synchronous rod 9-1, the bevel gear pair 9-2, the second synchronous rod 9-3, the adjusting rod 9-4, the handle 9-5, the internal thread cylinder 10, the synchronous rotating mechanism 11, the connecting rod 11-1, the connecting cylinder 11-2, the guiding block 11-3, the rotating guiding groove 11-4, the guiding vertical bar 12, the guiding vertical groove 13, the threaded resistance rod 14, the flexible pad 15, the heat conduction plate 16, the cooling fin 17. Specific implementation

[0026] The technical scheme in the utility model will be described clearly and completely in conjunction with the drawings, and the preferred embodiment in the description is only as an example, and all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model. Embodiment

[0027] As shown in Figures 1-5 The embodiment includes the base 1, the clamping down pressure assembly 2 and the pressing plate 3, the upper portion of the base 1 is equipped with the clamping down pressure assembly 2, the clamping down pressure assembly 2 is equipped with the pressing plate 3, the through opening opened in the pressing plate 3 is fixedly provided with the heat conduction plate 16, and the upper portion of the heat conduction plate 16 is fixedly provided with a plurality of cooling fins 17, when the pressing plate 3 is pressed on the chip, the heat generated in the chip testing process can be conducted to the plurality of cooling fins 17 on the heat conduction plate 16 for heat dissipation, and the heat dissipation effect on the chip is effectively improved;

[0028] It also includes:

[0029] The carrier plate 4 is abuttingly arranged in the placing groove on the base 1, the limiting rods 5 are fixedly arranged in the four corners inside the placing groove, and the limiting rods 5 are movably arranged on the carrier plate 4.

[0030] The pressing block 6 is four, and is abuttingly arranged on the four corners of the upper portion of the carrier plate 4, and the pressing block 6 is movably sleeved on the limiting rod 5, the slot 7 is opened at the position below the pressing block 6 on the upper portion of the base 1, the threaded rod 8 is rotatably inserted in the slot 7 through the bearing, and the synchronous control mechanism 9 connected with the threaded rod 8 is arranged on the base 1.

[0031] The inner threaded cylinder 10 is sleeved on the threaded rod 8 by thread rotation, the inner threaded cylinder 10 is provided with a synchronous rotation mechanism 11 connected with the pressing block 6, the front and rear sides of the outer ring wall of the inner threaded cylinder 10 are fixedly provided with guide vertical strips 12, the front and rear sides of the inner ring wall of the insertion slot 7 are provided with guide vertical grooves 13, and the guide vertical strips 12 are movably arranged in the guide vertical grooves 13;

[0032] The synchronous control mechanism 9 comprises:

[0033] The first synchronous rod 9-1 is movably arranged in the left and right sides of the base 1 through bearings, the two ends of the first synchronous rod 9-1 are connected with the front and rear threaded rods 8 through the bevel gear pair 9-2, and the front and rear threaded rods 8 are connected with the pressing block 6 through the bevel gear pair 9-2.

[0034] The second synchronous rod 9-3 is movably arranged in the base 1 through a bearing, the two ends of the second synchronous rod 9-3 are connected with the left and right first synchronous rods 9-1 through the bevel gear pair 9-2, the adjusting rod 9-4 is movably arranged on the front side wall of the base 1 through a bearing, the front end of the adjusting rod 9-4 is fixedly sleeved with the handle 9-5, the rear end of the adjusting rod 9-4 is fixedly connected with the left first synchronous rod 9-1, the synchronous control of the four threaded rods 8 can be realized through the cooperation of the first synchronous rod 9-1, the second synchronous rod 9-3 and the bevel gear pair 9-2, the synchronous fixing of the four corners of the carrier plate 4 can be realized, the fixing of the carrier plate 4 has simple operation steps, the threaded rod 14 is movably arranged on the handle 9-5 through threads, the rear end of the threaded rod 14 is in abutment with the front side wall of the base 1, the rotation of the handle 9-5 can be locked through the threaded rod 14, and the fixing of the carrier plate 4 is prevented from being affected by the arbitrary rotation of the handle 9-5.

[0035] The synchronous rotation mechanism 11 comprises:

[0036] The connecting rod 11-1 is fixedly arranged on the upper portion of the inner threaded cylinder 10, the connecting cylinder 11-2 is movably sleeved on the connecting rod 11-1 through a bearing, and the connecting cylinder 11-2 is fixedly arranged on the bottom of the pressing block 6.

[0037] The guide block 11-3 is movably arranged in the rotating guide groove 11-4, the rotation of the limiting rod 5 can be realized after the pressing block 6 is separated from the limiting rod 5, the limiting rod 5 is prevented from being blocked above the carrier plate 4 in the replacement process of the carrier plate 4, and the convenience of the replacement process of the carrier plate 4 is improved. Embodiment

[0038] As Figure 2 and Figure 3 Further improved on the basis of embodiment 1, the bottom of the pressing block 6 is fixedly provided with a flexible pad 15, and the flexible pad 15 is abutted on the upper portion of the carrier plate 4, and the flexible pad 15 is made of rubber material, which can not only enable the upper portion of the carrier plate 4 and the flexible pad 15 to have greater friction, improve the stability of the carrier plate 4, but also avoid the deformation of the carrier plate 4 caused by excessive clamping pressure.

[0039] When the utility model is used, the threaded abutting rod 14 is separated from the front side wall of the base 1 by rotating, then the handle 9-5 is rotated, the handle 9-5 drives the adjusting rod 9-4 to rotate, the adjusting rod 9-4 drives the left No. 1 synchronous rod 9-1 to rotate, and the synchronous rotation of the four threaded rods 8 is realized by the cooperation of the No. 2 synchronous rod 9-3 and the bevel gear pair 9-2, when the threaded rod 8 rotates, the threaded rod 8 is moved upwards by the movement guide provided by the guiding vertical strip 12 in the guiding vertical groove 13, so that the connecting rod 11-1, the connecting cylinder 11-2 and the pressing block 6 are all moved upwards, after the pressing block 6 is separated from the carrier plate 4 and the limiting rod 5, the guiding block 11-3 will be located at the junction of the arc-shaped section and the vertical section in the rotating guide groove 11-4, at this time, the handle 9-5 can be continuously rotated, so that the guiding block 11-3 moves in the arc-shaped section of the rotating guide groove 11-4, the connecting cylinder 11-2 is driven by the guiding block 11-3 to rotate the pressing block 6 to the position outside the carrier plate 4, and then the carrier plate 4 can be replaced.

[0040] Compared with the prior art, the utility model has the beneficial effects that:

[0041] By the cooperation of the pressing block 6, the threaded rod 8, the synchronous control mechanism 9, the inner threaded cylinder 10 and the guiding vertical strip 12, the synchronous fixing of the four corners of the carrier plate 4 can be realized by simple operation, so that the replacement of the carrier plate 4 has good replacement efficiency;

[0042] By the cooperation of the synchronous rotating mechanism 11, the rotation of the limiting rod 5 can be realized after the pressing block 6 is separated from the limiting rod 5, so that the pressing block 6 does not block the carrier plate 4 during the replacement of the carrier plate 4, and the convenience of the replacement of the carrier plate 4 is further improved;

[0043] By the cooperation of the heat-conducting plate 16 and the heat sink 17, the chip can be well cooled during the process that the pressing plate 3 presses on the chip and tests the chip, so that the accuracy of the test result of the chip is improved;

[0044] The handle 9-5 can be locked in rotation by the threaded abutting rod 14, so that the fixing of the carrier plate 4 is not affected by the arbitrary rotation of the handle 9-5.

[0045] For those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, and equivalent replacement of part of the technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A chip test fixture suitable for adapting ATE equipment, comprising a base (1), a clamping and pressing assembly (2) and a pressing plate (3), the clamping and pressing assembly (2) being arranged on the upper part of the base (1), and the pressing plate (3) being arranged on the clamping and pressing assembly (2); characterized in that It also comprises: a carrier plate (4) arranged in a placing groove on the base (1), four limit rods (5) being fixedly arranged at the four corners inside the placing groove, and the limit rods (5) being movably arranged on the carrier plate (4); four pressing blocks (6) movably arranged on the four corners of the upper part of the carrier plate (4), the pressing blocks (6) being movably arranged on the limit rods (5), a slot (7) being arranged on the base (1) below the pressing blocks (6), a threaded rod (8) being rotatably arranged in the slot (7) through a bearing, and a synchronous control mechanism (9) being arranged on the base (1) and connected with the threaded rod (8); an internally threaded cylinder (10) rotatably arranged on the threaded rod (8) through a thread, the internally threaded cylinder (10) being provided with a synchronous rotating mechanism (11) connected with the pressing blocks (6), guide vertical strips (12) being fixedly arranged on the front and back sides of the outer ring wall of the internally threaded cylinder (10), and guide vertical grooves (13) being arranged on the inner ring wall of the slot (7).

2. The chip test fixture for adapting an ATE device according to claim 1, wherein: The synchronous control mechanism (9) comprises: two No. 1 synchronous rods (9-1) rotatably arranged on the left and right sides of the base (1) through bearings, the two ends of the No. 1 synchronous rods (9-1) being drivingly connected with the threaded rods (8) on the front and back sides through bevel gear pairs (9-2); a No. 2 synchronous rod (9-3) rotatably arranged in the base (1) through a bearing, the two ends of the No. 2 synchronous rod (9-3) being drivingly connected with the No. 1 synchronous rods (9-1) on the left and right sides through bevel gear pairs (9-2), and an adjusting rod (9-4) being rotatably arranged on the front side wall of the base (1) through a bearing, the front end of the adjusting rod (9-4) being fixedly sleeved with a handle (9-5), and the rear end of the adjusting rod (9-4) being fixedly connected with the No. 1 synchronous rod (9-1) on the left side.

3. The chip test fixture for adapting an ATE device according to claim 2, wherein: A threaded abutting rod (14) is rotatably arranged on the handle (9-5) through a thread, and the rear end of the threaded abutting rod (14) is abuttingly arranged with the front side wall of the base (1).

4. The chip test fixture for adapting an ATE device according to claim 1, wherein: The synchronous rotating mechanism (11) comprises: a connecting rod (11-1) fixedly arranged on the upper part of the internally threaded cylinder (10), a connecting cylinder (11-2) rotatably sleeved with the connecting rod (11-1) through a bearing, and the connecting cylinder (11-2) being fixedly arranged on the bottom of the pressing block (6); two guide blocks (11-3) fixedly arranged on the left and right sides of the outer ring wall of the connecting cylinder (11-2), and two rotating guide grooves (11-4) being arranged on the inner ring wall of the slot (7), the guide blocks (11-3) being movably arranged in the rotating guide grooves (11-4).

5. The chip test fixture for adapting ATE equipment according to claim 1, wherein: The bottom of the briquet (6) is fixedly provided with a flexible pad (15), and the flexible pad (15) is abuttingly arranged on the upper portion of the carrier plate (4).

6. The chip test fixture for adapting an ATE device according to claim 1, wherein: A plurality of heat dissipation fins (17) are fixedly arranged on the upper portion of the heat conduction plate (16) arranged in the through hole of the pressing plate (3).