Liquid supply equipment for semiconductor process

Abstract

The utility model discloses liquid supply equipment for a semiconductor process. The liquid supply equipment comprises a box body and a bushing, the lining comprises a first partition plate and a second partition plate. The first partition plate is arranged in the box body in the horizontal direction, and the second partition plate is arranged in the box body in the vertical direction. A liquid medicine conveying device and a medicine cylinder are arranged in each lower cavity, each liquid medicine conveying device extends into the corresponding medicine cylinder, and the bottom of each liquid medicine conveying device is immersed into the liquid medicine; a pump body is arranged in each upper cavity; the first partition plate is provided with connectors with the same number as the liquid medicine conveying devices, the tops and the bottoms of the connectors extend into the upper cavity and the corresponding lower cavity respectively, and the connectors are connected with the corresponding liquid medicine conveying devices and the pump body through the connectors respectively. The inside of the box body is divided into a plurality of cavities through the linings, the connector, the liquid medicine conveying device and the pump body are all installed in the corresponding cavities, and the connector, the liquid medicine conveying device and the pump body are prevented from being exposed out, so that the aging or deformation speed of parts such as the connector, the connecting pipe and the pump body is reduced, and the service life of key parts in the liquid supply equipment is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor liquid supply equipment, in particular to a kind of liquid supply equipment for semiconductor technology. BACKGROUND

[0002] The semiconductor liquid injection machine is a kind of equipment applied to the field of semiconductor manufacturing, for injecting specific liquid accurately into semiconductor devices or related products. The semiconductor liquid injection machine usually adopts precise metering and control technology to inject a certain amount of liquid (such as electrolyte, cleaning liquid, photoresist, etc.) into semiconductor chips, wafers, semiconductor packaging structures or other semiconductor related components. Common injection methods include pressure injection, vacuum injection, etc. For example, in the vacuum injection mode, the injection environment is first pumped to a vacuum state, and then the internal and external pressure difference is used to make the liquid more smoothly injected into the semiconductor device, which can ensure that the liquid is fully filled and avoid the generation of air bubbles, improving the quality and consistency of injection.

[0003] The liquid injection machine usually includes various connecting pipes, joints and pump bodies, and the connecting pipes and pump bodies are connected through joints. However, the connecting pipes, joints and pump bodies of the current liquid injection machine are usually arranged in the external environment, and the sealing rings and other components at the connecting pipe connection, the connecting pipe and joint connection, and the joint and pump body connection are prone to aging or deformation, which may cause liquid leakage during transportation, affecting the normal operation of the liquid injection machine. SUMMARY

[0004] The purpose of the utility model is to provide a liquid supply equipment for semiconductor technology, which can slow down the aging or deformation rate of joints, connecting pipes, pump bodies and other components, and prolong the service life of key components (joints, liquid delivery devices and pump bodies) in the liquid supply equipment.

[0005] The embodiment of the utility model is implemented as follows:

[0006] The liquid supply equipment for semiconductor technology of the embodiment of the application comprises a box body and a bushing. The bushing comprises a first partition plate and a second partition plate arranged in a cross shape. The first partition plate is arranged in the interior of the box body in a horizontal direction to divide the interior of the box body into upper and lower spaces. The second partition plate is arranged in the interior of the box body in a vertical direction to divide the upper and lower spaces into a plurality of groups of upper cavities and lower cavities. Each lower cavity is internally provided with a liquid delivery device and a cartridge. The bottom of the liquid delivery device extends into the interior of the corresponding cartridge and is immersed in the liquid in the cartridge. Each upper cavity is internally provided with a pump body. The first partition plate is provided with a number of joints equal to the number of liquid delivery devices. The top and bottom of each joint extend into the upper cavity and the corresponding lower cavity, respectively, and are connected to the corresponding liquid delivery device and pump body through the joint.

[0007] In a possible implementation, the front side of the box is provided with a door body, one side of the door body is connected with the box through a hinge; the two ends of the first partition plate are respectively slidably connected with the two side walls inside the box, and the two ends of the second partition plate are respectively slidably connected with the top and the bottom inside the box.

[0008] In a possible implementation, a plurality of air dispersing holes are arranged on the side walls of the two sides of the box and the side walls relative to the door body, and the plurality of air dispersing holes are respectively in communication with the corresponding lower cavities.

[0009] In a possible implementation, the top of the box is further provided with a signal processing device and an alarm device, the liquid medicine delivery device comprises a liquid medicine sensor, the liquid medicine sensor is immersed in the liquid medicine of the corresponding medicine cartridge to collect the ph of the liquid medicine, the liquid medicine sensor is electrically connected with the signal processing device, the alarm device and the pump body respectively, when the ph of the liquid medicine exceeds a set range, the signal processing device is used to control the alarm device to alarm and control the pump body to stop working.

[0010] In a possible implementation, the connector comprises a first interface, a second interface and a third interface; the connector is connected with the liquid medicine delivery device through the first interface, and the cable of the liquid medicine sensor is connected with the signal processing device in sequence through the first interface and the third interface; the connector is connected with the first connecting pipe of the pump body through the second interface.

[0011] In a possible implementation, the inside of each lower cavity is provided with a connecting pipe installer, each connecting pipe installer is arranged on the side wall below the corresponding second partition plate of the lower cavity; each liquid medicine delivery device is arranged on the corresponding installer.

[0012] In a possible implementation, each installer comprises an installation plate, one side of each installation plate is connected with the corresponding side wall at the bottom of the second partition plate; the other side of each installation plate is provided with a clamping groove, so as to clamp the corresponding liquid medicine delivery device through the clamping groove.

[0013] In a possible implementation, each liquid medicine delivery device is arranged obliquely in the corresponding lower cavity; the top of each liquid medicine delivery device is connected with the first interface through a second connecting pipe, and the bottom of each liquid medicine delivery device obliquely extends into the inside of the corresponding medicine cartridge.

[0014] In a possible implementation, the liquid medicine delivery device comprises an inner cylinder and an outer cylinder, the outer cylinder is sleeved on the inner cylinder and a flow gap is formed between the inner cylinder and the outer cylinder, the bottom of the inner cylinder and the bottom of the outer cylinder both extend into the medicine cartridge; the connector is connected to the top of the inner cylinder and the top of the outer cylinder respectively; the liquid medicine sensor is arranged in the inner cylinder, and the probe of the liquid medicine sensor is located at the bottom of the inner cylinder; when the pump body is started, the liquid medicine flows along the flow gap, the connector and the pump body respectively.

[0015] The beneficial effects of the embodiment of the utility model are that: the box body is divided into multiple cavities by the bushing, the connector, the liquid medicine delivery device and the pump body are all installed in the corresponding cavities, the connector, the liquid medicine delivery device and the pump body are avoided from being exposed, thereby the aging or deformation speed of the connector, the connecting pipe and the pump body is slowed down, and the service life of the key components (the connector, the liquid medicine delivery device and the pump body) in the liquid supply equipment is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment, and it should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as a limitation to the scope, and for the ordinary skilled in the art, other related drawings can also be obtained according to these drawings without creative labor.

[0017] Figure 1 It is a structure diagram of the first perspective view of the liquid supply equipment for semiconductor process of the embodiment of the utility model after removing the door body.

[0018] Figure 2 It is a structure diagram of the liquid supply equipment for semiconductor process of the embodiment of the utility model.

[0019] Figure 3 It is a structure diagram of the second perspective view of the liquid supply equipment for semiconductor process of the embodiment of the utility model after removing the door body.

[0020] Figure 4 It is a structure diagram of the third perspective view of the liquid supply equipment for semiconductor process of the embodiment of the utility model after removing the door body.

[0021] Figure 5 It is a connection relationship diagram of the liquid medicine delivery device, the connector box and the pump body of the liquid supply equipment for semiconductor process of the embodiment of the utility model.

[0022] Icon: 1, box body; 11, door body; 12, mounting hinge; 13, air dispersion hole; 14, upper cavity; 15, lower cavity; 2, liquid delivery device; 3, pump body; 4, joint; 5, signal processing device; 6, cavity; 61, sub-cavity; 7, bushing; 71, first partition; 72, second partition; 81, first connecting pipe; 82, second connecting pipe. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0025] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0026] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, the terms "horizontal", "vertical", etc. do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0028] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term "arrangement", "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication.For ordinary skilled in the art, the above-mentioned terms can be understood in the utility model according to the specific meaning of the specific circumstances.

[0029] As Figure 1 Value Figure 5 As shown in the application embodiment for the liquid supply equipment of semiconductor process, including box 1 and bushing 7;Bushing 7 includes the first baffle 71 and the second baffle 72 arranged in cross;The first baffle 71 is arranged in the interior of box 1 along the horizontal direction, to separate the interior of box 1 into upper and lower space;The second baffle 72 is arranged in the interior of box 7 along the vertical direction, to separate the upper and lower space into a plurality of upper cavities 14 and lower cavities 15;Each lower cavity 15 interior is provided with reagent delivery device 2 and medicine cartridge, the bottom of reagent delivery device 2 is immersed into the reagent of the interior of corresponding medicine cartridge and the bottom;Each upper cavity 14 interior is provided with pump body 3;The first baffle 71 is provided with the same number of joints 4 as reagent delivery device 2, the top and bottom end of joint 4 are respectively inserted into upper cavity 14 and corresponding lower cavity 15, and are connected with corresponding reagent delivery device 2 and pump body 3 respectively through joint 4.

[0030] In combination with the above embodiment, the interior of box 1 is divided into a plurality of cavities (upper cavities 14 and lower cavities 15) by bushing 7, for placing and installing medicine cartridge, reagent delivery device 2, joint 4 and pump body 3, avoiding reagent delivery device 2, joint 4 and pump body 3 exposed, thereby slowing down the aging of reagent delivery device 2, joint 4 and pump body 3, prolonging the service life.In addition, the number of second baffles 72 is not limited and can be set to one or more.As Figure 1 As shown, one second baffle 72 and first baffle 71 divide the interior of box 1 into four cavities, and two groups of reagent delivery device 2, joint 4 and pump body 3 can be arranged in the interior of box 1.Multiple second baffles 72 and a first baffle 71 can divide more cavities, so as to arrange more reagent delivery device 2, joint 4 and pump body 3.In fact, considering the size requirement of box 1, avoiding box 1 occupying a larger space, one second baffle 72 can meet the use.

[0031] The liquid supply device for semiconductor process of the embodiment of the present application, the front side of the box 1 is provided with a door body 11, one side of the door body 11 is connected with the box 1 through a hinge 12; the two ends of the first partition plate 71 are respectively slidably connected with the two side walls inside the box 1, and the two ends of the second partition plate 72 are respectively slidably connected with the top and bottom inside the box 1. The door body 11 is installed on the front side of the box 1 through the hinge 12, the two ends of the first partition plate 71 abut against the two sides inside the box 1, the two ends of the second partition plate 72 abut against the top and bottom inside the box 1, and the bushing 7 is slidably installed into the inside of the box 1, and the bushing 7 can be quickly installed by rotating to open the door body 11.

[0032] The liquid supply device for semiconductor process of the embodiment of the present application, the side walls on the two sides of the box 1 and the side walls relative to the door body 11 are all provided with a plurality of air dispersing holes 13, and the plurality of air dispersing holes 13 are respectively communicated with corresponding lower cavities 15. Since the semiconductor liquid medicine is mostly strong acid or strong alkali liquid medicine and has strong volatility, by layering the medicine cartridge and the pump body 3, that is, the medicine cartridge is arranged in the lower area 15 and the pump body 3 is arranged in the corresponding upper area 14, the corrosion of the pump body 3 by the liquid medicine volatilization is reduced, and the service life of the pump body 3 is prolonged. At the same time, the air dispersing holes 13 on the side walls of the box 1 are beneficial to the outflow of the liquid medicine from the inside of the box 13, so that the volatilized liquid medicine is avoided from accumulating in the box 13, the corrosion of the parts (such as the bushing 7, the joint 4 and the bolt, etc.) inside the box 13 by the liquid medicine volatilization is reduced, and the service life of the parts inside the box 1 is prolonged.

[0033] The liquid supply device for semiconductor process of the embodiment of the present application, the top of the box 1 is further provided with a signal processing device 5 and an alarm device, the liquid medicine conveying device 2 comprises a liquid medicine sensor, the liquid medicine sensor is immersed in the liquid medicine of the corresponding medicine cartridge to collect the ph of the liquid medicine; the liquid medicine sensor is electrically connected with the signal processing device 5, the alarm device and the pump body 3 respectively, when the ph of the liquid medicine exceeds the set range, the signal processing device 5 is used for controlling the alarm device to alarm and controlling the pump body 3 to stop working. Since the semiconductor device has high precision requirement on the ph value of the liquid medicine, when the liquid medicine in the medicine cartridge is placed for a long time, the ph value will change greatly, the liquid supply device can realize the detection of the ph of the liquid medicine while the liquid medicine is pumped out, the liquid medicine sensor can acquire the ph value of the liquid medicine in real time, when the ph value of the liquid medicine changes beyond the set range, the alarm device alarms and prompts the operator to replace the new liquid medicine in time.

[0034] The liquid supply equipment for semiconductor process of the embodiment of the application, the connector 4 comprises a first interface, a second interface and a third interface; the connector 4 is connected with the liquid medicine conveying device 2 through the first interface, and the cable of the liquid medicine sensor is connected with the signal processing device 5 through the first interface and the third interface in sequence; the connector 4 is connected with the first connecting pipe 8 of the pump body 3 through the second interface. The liquid medicine conveying device 2, the pump body 3 and the cable of the liquid medicine sensor are realized through the three-way connector 4 respectively, and the liquid medicine conveying device 2 is arranged in the lower cavity 15 in an inclined manner, so that the upper cavity 14 and the lower cavity 15 are fully utilized, and the volume of the box body 1 is reduced.

[0035] The liquid supply equipment for semiconductor process of the embodiment of the application, the inside of each lower cavity 15 is provided with a connecting pipe installer, and each connecting pipe installer is arranged on the side wall below the corresponding second partition plate; each liquid medicine conveying device 2 is arranged on the corresponding installer. Each installer comprises an installation plate, one side of each installation plate is connected with the corresponding side wall of the bottom of the second partition plate; the other side of each installation plate is provided with a clamping groove, so as to be clamped with the corresponding liquid medicine conveying device through the clamping groove, thereby realizing the quick installation of the liquid medicine conveying device 2.

[0036] The liquid supply equipment for semiconductor process of the embodiment of the application, each liquid medicine conveying device 2 is arranged in the corresponding lower cavity 15 in an inclined manner; the top of each liquid medicine conveying device 2 is connected with the first interface through the second connecting pipe 82, and the bottom of each liquid medicine conveying device 2 is arranged in the corresponding liquid cylinder in an inclined manner.

[0037] The liquid supply equipment for semiconductor process of the embodiment of the application, the liquid medicine conveying device 2 comprises an inner cylinder and an outer cylinder, the outer cylinder is sleeved on the inner cylinder and has a flow gap between the inner cylinder and the outer cylinder, the bottom of the inner cylinder and the bottom of the outer cylinder are arranged in the liquid cylinder; the connector 4 is connected with the top of the inner cylinder and the top of the outer cylinder respectively; the liquid medicine sensor is arranged in the inner cylinder, and the probe of the liquid medicine sensor is arranged at the bottom of the inner cylinder; when the pump body 3 is started, the liquid medicine flows along the flow gap, the connector and the pump body.

[0038] The above only describes the preferred embodiments of the application and is not used to limit the application, and for those skilled in the art, the application can be variously changed and modified. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A liquid supply device for semiconductor processes, characterized in that, The application relates to a medicine box, which comprises a box body and a liner; the liner comprises a first partition plate and a second partition plate arranged in a cross shape; the first partition plate is arranged in the horizontal direction inside the box body to divide the inside of the box body into upper and lower spaces; the second partition plate is arranged in the vertical direction inside the box body to divide the upper and lower spaces into a plurality of groups of upper cavities and lower cavities; a medicine liquid conveying device and a medicine cartridge are arranged inside each lower cavity; the bottom of the medicine liquid conveying device extends into the inside of the corresponding medicine cartridge and is immersed in the medicine liquid in the medicine cartridge; a pump body is arranged inside each upper cavity; the first partition plate is provided with the same number of joints as the medicine liquid conveying devices; the top and bottom of the joint extend into the upper cavity and the corresponding lower cavity respectively, and the joint is connected with the corresponding medicine liquid conveying device and pump body respectively.

2. The liquid supply apparatus for a semiconductor process according to Claim 1, wherein The front side of the box body is provided with a door body, one side of the door body is connected with the box body through a hinge; the two ends of the first partition plate are slidably connected with the two side walls inside the box body respectively, and the two ends of the second partition plate are slidably connected with the top and bottom of the box body inside respectively.

3. The liquid supply apparatus for a semiconductor process according to Claim 2, wherein A plurality of air dispersing holes are arranged on the side walls of the two sides of the box body and the side walls opposite to the door body, and the plurality of air dispersing holes are communicated with the corresponding lower cavities respectively.

4. The liquid supply apparatus for a semiconductor process according to Claim 1, wherein The top of the box body is further provided with a signal processing device and an alarm device; the medicine liquid conveying device comprises a medicine liquid sensor which is immersed in the medicine liquid of the corresponding medicine cartridge to collect the ph of the medicine liquid; the medicine liquid sensor is electrically connected with the signal processing device, the alarm device and the pump body respectively; when the ph of the medicine liquid exceeds the set range, the signal processing device is used for controlling the alarm device to alarm and controlling the pump body to stop working.

5. The liquid supply apparatus for a semiconductor process according to Claim 4, wherein The joint comprises a first interface, a second interface and a third interface; the joint is connected with the medicine liquid conveying device through the first interface, and the cable of the medicine liquid sensor is connected with the signal processing device through the first interface and the third interface in sequence; the joint is connected with the first connecting pipe of the pump body through the second interface.

6. The liquid supply apparatus for a semiconductor process according to claim 1, wherein A connecting pipe installer is arranged inside each lower cavity, and each connecting pipe installer is arranged on the side wall below the corresponding second partition plate of the lower cavity; each medicine liquid conveying device is arranged on the corresponding installer.

7. The liquid supply apparatus for a semiconductor process according to Claim 6, wherein Each installer comprises an installation plate, one side of each installation plate is connected with the corresponding side wall at the bottom of the second partition plate; the other side of each installation plate is provided with a clamping groove to clamp the corresponding medicine liquid conveying device through the clamping groove.

8. The liquid supply apparatus for a semiconductor process according to claim 5, wherein Each medicine liquid conveying device is arranged in the corresponding lower cavity in an inclined mode; the top of each medicine liquid conveying device is connected with the first interface through a second connecting pipe, and the bottom of each medicine liquid conveying device extends into the inside of the corresponding medicine cartridge in an inclined mode.

9. The liquid supply apparatus for a semiconductor process according to claim 5, wherein The medicine liquid delivery device comprises an inner cylinder and an outer cylinder, the outer cylinder is sleeved on the inner cylinder and has a flow gap between the two, the bottom of the inner cylinder and the bottom of the outer cylinder both extend into the medicine cartridge; the connector is connected with the top of the inner cylinder and the top of the outer cylinder respectively; the medicine liquid sensor is arranged in the inner cylinder, and the probe of the medicine liquid sensor is located at the bottom of the inner cylinder; when the pump body is started, the medicine liquid flows along the flow gap, the connector and the pump body respectively.

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