Boron-doped diamond powder deposition device

Abstract

The utility model discloses a boron-doped diamond powder deposition device which comprises a base, a vibration container and a vibrator, the vibration container is installed on the base, and the vibrator is installed at the bottom of the vibration container. A vibrator is installed at the bottom of a vibration container, in the preparation process, a diamond powder substrate in the vibration container can continuously vibrate, the diamond powder substrate is in a continuous vibration suspension state, in the whole deposition preparation process, the diamond powder substrate is evenly wrapped with boron atoms, and therefore boron-doped diamond powder is formed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material preparation technology, and in particular to a boron-doped diamond powder deposition apparatus. Background Technology

[0002] Traditional boron-doped diamond electrodes are typically grown and deposited on planar substrates such as silicon, niobium, and titanium, resulting in relatively fixed shapes, generally sheet-like. Therefore, they are difficult to meet the shape requirements of boron-doped diamond electrodes under complex conditions. To obtain boron-doped diamond electrodes with complex shapes and even three-dimensional structures, our company plans to use boron-doped diamond powder to fabricate the electrodes. To solve the problem of boron-doped diamond powder preparation, our technical staff has proposed a boron-doped diamond powder deposition device. Utility Model Content

[0003] The purpose of this invention is to provide a boron-doped diamond powder deposition device. By installing a vibrator at the bottom of a vibrating container, the diamond powder substrate inside the vibrating container will continuously vibrate during the preparation process. The diamond powder substrate is in a continuous vibrating suspension state. During the entire deposition preparation process, boron atoms are uniformly wrapped on the diamond powder substrate, thereby forming boron-doped diamond powder.

[0004] To achieve the above objectives, this utility model provides a boron-doped diamond powder deposition device, including a base, a vibrating container, and a vibrator. The vibrating container is mounted on the base, and the vibrator is mounted on the bottom of the vibrating container.

[0005] The vibrating container includes an oscillating ring and a vibrating base plate. The vibrating base plate is fixed to the lower end of the oscillating ring and forms the bottom of the vibrating container. The upper end of the oscillating ring is installed and connected to the base. The vibrator is installed at the bottom of the vibrating base plate.

[0006] The vibration base plate is made of molybdenum alloy.

[0007] The upper end of the base is provided with a support platform, and the upper end of the vibrating container is provided with an outwardly extending flange. The support platform and the flange are connected by an elastic element.

[0008] The vibrator is a vibrating motor.

[0009] The vibrator is an ultrasonic transducer.

[0010] The oscillating ring has a corrugated tubular structure.

[0011] Compared with the prior art, this utility model has the following technical effects:

[0012] 1. This utility model installs a vibrator at the bottom of a vibrating container. During the preparation process, the diamond powder substrate inside the vibrating container will vibrate continuously, and the diamond powder substrate will be in a continuous vibrating suspension state. During the entire deposition preparation process, boron atoms are uniformly wrapped on the diamond powder substrate, thereby forming boron-doped diamond powder. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0014] Figure 1 This is a three-dimensional structural diagram of the first embodiment of the present utility model.

[0015] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of AA.

[0016] Figure label:

[0017] Base 10, support platform 11, elastic element 12, oscillating ring 20, flange 21, vibrating container 30, vibrating base plate 40, screw 41, recessed platform 42, vibrator 50, ultrasonic source 60. Detailed Implementation

[0018] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0019] Example 1:

[0020] Please see Figure 1 , 2 A boron-doped diamond powder deposition apparatus includes a base 10, a vibrating container 30, and a vibrator 50. The vibrating container 30 is mounted on the base 10, and the vibrator 50 is mounted on the bottom of the vibrating container 30.

[0021] In practice, the vibrating container 30 can be made of molybdenum alloy, or the bottom of the vibrating container 30 can be made of molybdenum alloy.

[0022] The base 10 is used to fix and support the vibration container 30, and the vibrator 50 is used to vibrate the vibration container 30 so that the diamond powder substrate inside the vibration container 30 can vibrate continuously. Throughout the deposition process, boron atoms are uniformly coated on the diamond powder substrate to form boron-doped diamond powder.

[0023] In this embodiment, see Figure 2The vibrating container 30 includes an oscillating ring 20 and a vibrating base plate 40. The vibrating base plate 40 is fixed to the lower end of the oscillating ring 20 and forms the bottom of the vibrating container 30. The upper end of the oscillating ring 20 is installed and connected to the base 10. The vibrator 50 is installed at the bottom of the vibrating base plate 40. The vibrating base plate 40 is made of molybdenum alloy.

[0024] In this embodiment, the oscillation ring 20 is a corrugated tubular structure. The oscillation ring 20 can not only serve as the sidewall of the container, but also allow the oscillation ring 20 to elastically extend and retract axially, thereby facilitating the up-and-down vibration of the vibration base plate 40.

[0025] In one of the designs, the vibrator 50 is a vibrating motor.

[0026] In another embodiment, the vibrator 50 is an ultrasonic transducer. See also Figure 2 During installation, the ultrasonic transducer is fixed to the underside of the vibration base plate 40 with screws 41. The ultrasonic transducer is screwed to the screws 41 and also bonded to the vibration base plate 40. In use, the ultrasonic transducer is electrically connected to the ultrasonic source 60 via a wire.

[0027] The wire can be passed through the opening at the bottom of the base 10 and sealed with sealant.

[0028] When in use, the diamond powder substrate is placed onto the vibrating base plate 40.

[0029] Example 2:

[0030] Based on Example 1, see Figure 2 The base 10 has a support platform 11 at its upper end, and the oscillating ring 20 has an outwardly extending flange 21 at its upper end. The support platform 11 and the flange 21 are connected by an elastic element 12. The elastic element 12 is used to dampen the vibration of the oscillating ring 20, so that the vibration of the oscillating ring 20 is not transmitted to the base 10.

[0031] In this embodiment, the elastic element 12 can be a rubber ring or multiple rubber pads. The elastic element 12 can be bonded between the support platform 11 and the flange 21.

[0032] The working principle or operation process of this utility model is as follows:

[0033] During production, a suitable amount of cleaned diamond powder substrate is taken and laid flat on the vibrating base plate 40 or inside the movable cup 70. The vibrator 50 is powered on, and the diamond powder substrate inside the vibrating container vibrates continuously. The diamond powder substrate is in a continuous vibrating suspension state, so that boron atoms are uniformly wrapped on the diamond powder substrate, thereby forming boron-doped diamond powder.

Claims

1. A boron-doped diamond powder deposition apparatus, characterized by: The vibration container (30) comprises a vibrating ring (20) and a vibrating bottom plate (40), the vibrating bottom plate (40) is fixedly connected to the lower end of the vibrating ring (20), the vibrating bottom plate (40) forms the bottom of the vibration container (30), the upper end of the vibrating ring (20) is connected to the base (10), and the vibrator (50) is arranged at the bottom of the vibrating bottom plate (40).

2. A boron-doped diamond powder deposition apparatus as claimed in claim 1, wherein: The vibrating bottom plate (40) is made of molybdenum alloy.

3. A boron-doped diamond powder deposition apparatus as claimed in claim 2, wherein: The upper end of the base (10) is provided with a supporting table (11), the upper end of the vibration container (30) is provided with an outwardly extending flange (21), and the supporting table (11) and the flange (21) are connected through an elastic element (12).

4. A boron-doped diamond powder deposition apparatus as claimed in claim 1 or 2, wherein: The vibrator (50) is a vibration motor.

5. A boron-doped diamond powder deposition apparatus as claimed in claim 1 or 2, wherein: The vibrator (50) is an ultrasonic vibrator.

6. A boron-doped diamond powder deposition apparatus as claimed in claim 1 or 2, wherein: The vibrating ring (20) is in a bellows-shaped structure.

7. A boron-doped diamond powder deposition apparatus as claimed in claim 2, wherein: The vibrator (50) is an ultrasonic vibrator. The vibrating ring (20) is in a bellows-shaped structure.

Images