The invention discloses a
solar cell boron emitter and a preparation method and application thereof, and belongs to the field of solar cells, after a
monocrystalline silicon wafer is selected, cleaned and textured, a first BSG layer, a
silicon oxide mask layer and a second BSG layer are sequentially deposited on the front surface of the
silicon wafer, and then annealing treatment is carried out; wherein the
boron atom concentration of the first BSG layer is lower than that of the second BSG layer, and the
oxygen atom concentration of the first BSG layer is higher than that of the second BSG layer. The BSG layer with low-concentration
boron atoms and high-concentration
oxygen atoms, the
silicon oxide mask layer and the BSG layer with high-concentration boron atoms and low-concentration
oxygen atoms are sequentially deposited on the silicon
wafer, and after annealing treatment, the surface of the formed boron emitter has high
boron doping concentration and can be in better contact with a
metal electrode; and meanwhile, the
junction depth of the boron emitter is relatively shallow, defects caused by internal
boron doping can be repaired due to existence of high-concentration oxygen atoms, and compounding of a silicon substrate is reduced.