Semi-conductor type single-walled carbon nano tube and preparation method thereof
A single-wall carbon nanotube and semiconductor technology, which is applied in the field of carbon nanotubes to achieve the effects of simple equipment, strong repeatability and easy operation
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Embodiment 1
[0035] Embodiment 1: Bulk phase growth of semiconducting single-walled carbon nanotubes of the present invention
[0036] The present embodiment method comprises the following steps:
[0037] 1. Preparation of catalyst
[0038] with FeCl 3 / EtOH solution acts as a catalyst precursor with a concentration of 1mmol / L. The selected carrier includes silica microspheres (about 400nm in particle size) and porous magnesia. Soak 0.05g of carrier powder in 20ml of the above-mentioned FeCl 3 / EtOH solution for 30 minutes, centrifuge to discard the liquid part, and dry the solid powder at 70°C;
[0039] The reaction chamber is sealed, and argon gas is introduced to exhaust the air;
[0040] The temperature was raised to 900°C, and 100 sccm of hydrogen gas was used to reduce the catalyst particles for 20 minutes;
[0041] 2. Chemical vapor deposition
[0042] Keep the temperature constant, turn off the hydrogen used for reduction, and change it to 800-1000 sccm argon to act as a dilue...
Embodiment 2
[0046] Embodiment 2: Surface Random film growth of semiconducting single-walled carbon nanotubes of the present invention
[0047] This embodiment adopts the same device and steps as in Example 1, the difference is that the substrate is replaced with a silicon wafer with a 400nm thick oxide layer, and the catalyst precursor solution is dropped on the substrate and dried quickly so that it is evenly covered on the silicon wafer. A thin film of catalyst particles was formed on the surface of the sheet.
[0048] The scanning electron micrograph of the semiconductor-type single-walled carbon nanotube obtained in the present embodiment is as attached Figure 4 As shown, the XPS spectrum is as Image 6 As shown, the Raman spectrum is shown as Figure 7 As shown, its RBM is located at 157.3cm -1 , is a single-walled carbon nanotube with a diameter of about 1.6nm. The height of the D Band peak is not high, which shows that a good quality single-walled carbon nanotube film can be o...
Embodiment 3
[0049] Example 3: Surface Oriented Array Growth of Semiconducting Single-walled Carbon Nanotubes of the Present Invention
[0050] 1. Preparation of catalyst
[0051] Catalyst is prepared according to the same method as in Example 1, the difference is that the catalyst precursor solution is applied to the front end of the silicon chip;
[0052] 2. Chemical vapor deposition
[0053] Then keep the temperature constant, turn off the hydrogen used for reduction, and change it into 800-1000 sccm argon to serve as a diluent gas;
[0054] Pull the reaction area out of the constant temperature area for 5 minutes, so that the temperature of the reaction area is about 300°C different from the constant temperature area in the furnace; introduce the pyridine vapor generated by bubbling 10.0 sccm of hydrogen into the reaction system, and pull the reaction area back to the constant temperature in the furnace Zone, 900°C constant temperature for 15 minutes; during the reaction process, pla...
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Abstract
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