Ceramic plate taking and placing manipulator

Abstract

The utility model discloses a ceramic plate pick-and-place manipulator which comprises a base mechanism, a lifting mechanism, a rotating mechanism and a discharging mechanism, the lifting mechanism is connected to the base mechanism, the base mechanism is used for driving the lifting mechanism to linearly move in the transverse direction, the rotating mechanism is installed on the lifting mechanism, and the lifting mechanism is used for driving the rotating mechanism to move in the vertical direction. The discharging mechanism is connected to the rotating mechanism, the rotating mechanism is used for driving the discharging mechanism to rotate, the discharging mechanism is provided with a sucker hand moving along a straight line, and the sucker hand is used for moving ceramic plates. Empty ceramic plates are adsorbed and lifted from the ceramic plate placing frame through the suction cup hand, the ceramic plates are rotated to the corresponding stations through the rotating mechanism, and after wafers coated with wax layers are placed in the ceramic plates, the ceramic plates are placed back into the placing frame through the suction cup hand, so that the ceramic plate taking and placing function is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer waxing technical field, especially relate to a ceramic disc taking and placing manipulator. BACKGROUND

[0002] In the processing flow of wafer, it contains cleaning, waxing, patching, spade piece, storage and other key procedures, each procedure has the vital influence to the quality of final chip. Among them, waxing procedure refers to wax is coated on wafer surface to form adhesive layer, then through patching procedure, wafer is turned over to make the side with glue accurately and correctly adhere to ceramic disc. The above procedure involves the transfer demand of empty ceramic disc and full ceramic disc, and it is necessary to design a ceramic disc moving device for the demand. SUMMARY

[0003] The ceramic disc taking and placing manipulator is provided, and the function of ceramic disc movement is realized.

[0004] The ceramic disc taking and placing manipulator is provided, and the function of ceramic disc movement is realized.

[0005] Base mechanism;

[0006] Lifting mechanism is connected to the base mechanism, and the base mechanism is used to drive the lifting mechanism to move along the transverse straight line;

[0007] Rotary mechanism is installed to the lifting mechanism, and the lifting mechanism is used to drive the rotary mechanism to move along the vertical direction;

[0008] Discharge mechanism is connected to the rotary mechanism, the rotary mechanism is used to drive the discharge mechanism to rotate, and the discharge mechanism has suction hand moving along the straight line, and the suction hand is used to move ceramic disc.

[0009] The beneficial effects of the above embodiment are that the empty ceramic disc is adsorbed and lifted from the ceramic disc placing rack by the suction hand, the ceramic disc is rotated to the corresponding station by the rotary mechanism, the ceramic disc is placed back in the placing rack by the suction hand after the wafer coated with wax layer is placed in the ceramic disc, so that the taking and placing function of ceramic disc is realized.

[0010] On the basis of the above embodiment, the application embodiment can also be improved as follows:

[0011] In one of the embodiments of the present application, the base mechanism comprises a base, a first driving device and a first guiding device, the first driving device and the first guiding device are arranged between the base and the lifting mechanism, and the first driving device and the first guiding device are used to drive the lifting mechanism to move linearly in the horizontal direction. The beneficial effect of this step is that the first driving device and the first guiding device are used to realize the linear movement of the lifting mechanism in the horizontal direction.

[0012] In one of the embodiments of the present application, the lifting mechanism comprises a bottom plate, a second driving device and a second guiding device, the bottom plate is connected with the base mechanism, the second driving device and the second guiding device are arranged between the bottom plate and the rotating mechanism, and the second driving device and the second guiding device are used to drive the rotating mechanism to move vertically. The beneficial effect of this step is that the second driving device and the second guiding device are used to realize the vertical movement of the lifting assembly.

[0013] In one of the embodiments of the present application, the rotating mechanism comprises a lifting table and a hollow rotating platform, the lifting table is connected with the lifting mechanism, the hollow rotating platform is installed on the lifting table, and the discharging mechanism is installed on the hollow rotating platform. The beneficial effect of this step is that the hollow rotating platform drives the suction hand to drive the ceramic disc to rotate.

[0014] In one of the embodiments of the present application, the discharging mechanism further comprises a first platform, a third driving device, a third guiding device, a second platform, a fourth driving device and a fourth guiding device, the first platform is connected with the rotating mechanism, the third driving device and the third guiding device are arranged between the second platform and the first platform, the third driving device and the third guiding device are used to drive the second platform to move linearly in the horizontal direction, the fourth driving device and the fourth guiding device are arranged between the suction hand and the second platform, and the fourth driving device and the fourth guiding device are used to drive the suction hand to move linearly in the horizontal direction. The beneficial effect of this step is that the discharging mechanism is used to realize the feeding and discharging actions of the suction hand. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or prior art description will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0016] Figure 1 Structure schematic view of the ceramic disc taking and placing mechanical hand

[0017] Figure 2 Part structure diagram of the rotating mechanism;

[0018] Figure 3 Part structure diagram of the discharging mechanism;

[0019] Figure 4 Part structure diagram of the discharging mechanism.

[0020] Wherein, 1 base mechanism, 101 base, 102 first driving device, 103 first guide device;

[0021] 2 lifting mechanism, 201 bottom plate, 202 second driving device, 203 second guide device, 204 top plate;

[0022] 3 rotating mechanism, 301 lifting platform, 302 hollow rotating platform;

[0023] 4 discharging mechanism, 401 suction cup hand, 402 first platform, 403 third driving device, 404 third guide device, 405 second platform, 406 fourth driving device, 407 fourth guide device. DETAILED DESCRIPTION

[0024] In the present application, unless otherwise explicitly specified and limited, the terms in the present application should be understood in a broad sense, for example, the connection can be fixed connection, or detachable connection or integral, can be directly connected, or indirectly connected through intermediate medium. If it involves power, electronic equipment, it can also be electrically connected or communication signal connection, etc. For ordinary skilled in the art, different terms in the present application can be understood according to the specific circumstances, and the specific meaning of the range should be limited to the function of the present application.

[0025] In the description of the present application, it should be understood that the orientation terms or position relationship description is based on the orientation or position relationship shown in the drawings, or based on the orientation or position relationship in actual use, only for the convenience of describing the content of the present application and simplifying the description, and not indicating or implying that the device or element indicated must have a specific orientation, structure and operation, therefore, it cannot be understood as a limitation of the present application.

[0026] As shown in Figures 1-4 A ceramic plate taking and placing manipulator, comprising: a base mechanism 1, a lifting mechanism 2, a rotating mechanism 3, and a discharging mechanism 4, the lifting mechanism 2 is connected to the base mechanism 1, the base mechanism 1 is used for driving the lifting mechanism 2 to move along the horizontal direction, the rotating mechanism 3 is installed on the lifting mechanism 2, the lifting mechanism 2 is used for driving the rotating mechanism 3 to move along the vertical direction, the discharging mechanism 4 is connected to the rotating mechanism 3, the rotating mechanism 3 is used for driving the discharging mechanism 4 to rotate, the discharging mechanism 4 has a suction cup hand 401 moving along the straight line, and the suction cup hand 401 is used for moving the ceramic plate.

[0027] Specifically, as shown in Figure 1 , the base mechanism 1 comprises a base 101, a first driving device 102 and a first guide device 103, the first driving device 102 and the first guide device 103 are arranged between the base 101 and the lifting mechanism 2, the first driving device 102 and the first guide device 103 are used to drive the lifting mechanism 2 to move linearly in the horizontal direction. Through the cooperation of the first driving device 102 and the first guide device 103, the function of the lifting mechanism 2 moving linearly in the horizontal direction is realized.

[0028] Specifically, as shown in Figure 1 , the first driving device 102 comprises a first motor, a first lead screw and a first nut, the first motor is installed on the base 101, the first lead screw is rotatably arranged on the base 101 and connected with the output shaft of the first motor, the first nut is threadedly connected with the first lead screw, and the first nut is further connected with the lifting mechanism 2; the first guide device 103 comprises a first guide rail and a first sliding block, the first guide rail is connected with the base 101, and the first sliding block is connected with the lifting mechanism 2 and slidably arranged on the first guide rail.

[0029] Specifically, as shown in Figure 1 , the lifting mechanism 2 comprises a bottom plate 201, a second driving device 202 and a second guide device 203, the bottom plate 201 is connected with the base mechanism 1, the second driving device 202 and the second guide device 203 are arranged between the bottom plate 201 and the rotating mechanism 3, and the second driving device 202 and the second guide device 203 are used to drive the rotating mechanism 3 to move vertically. Through the cooperation of the second driving device 202 and the second guide device 203, the function of the rotating mechanism 3 moving in the height direction is realized.

[0030] Specifically, as shown in Figure 1 , the bottom plate 201 is connected with the first sliding block and the first nut, and the lifting mechanism 2 further comprises a top plate 204, the second guide device 203 comprises a guide rod and a guide sleeve, the lower end of the guide rod is connected with the bottom plate 201, the upper end of the guide rod is connected with the top plate 204, the guide sleeve is connected with the rotating mechanism 3 and slidably sleeved on the guide column, and the guide sleeve adopts a linear bearing; the second driving device 202 comprises a second motor, a second synchronous pulley, a second synchronous belt, a second lead screw and a second nut, the second motor is connected with the bottom plate 201, the lower end of the second lead screw is connected with the bottom plate 201, the upper end of the second lead screw is connected with the top plate 204, the output shaft of the second motor is provided with the second synchronous pulley, the second synchronous belt is wound on the second synchronous pulley, and the second nut is connected with the rotating mechanism 3 and threadedly connected with the second lead screw.

[0031] Specifically, as shown in Figure 1 , 2As shown, the rotating mechanism 3 comprises: a lifting platform 301, a hollow rotating platform 302, the lifting platform 301 is connected with the lifting mechanism 2, the guide sleeve and the second nut are both installed on the lifting platform 301, the hollow rotating platform 302 is installed on the lifting platform 301, the discharging mechanism 4 is installed on the hollow rotating platform 302, and the suction cup hand 401 drives the ceramic disc to rotate by the hollow rotating platform 302.

[0032] Specifically, as shown in Figure 3 , 4 As shown, the discharging mechanism 4 further comprises: a first platform 402, a third driving device 403, a third guide device 404, a second platform 405, a fourth driving device 406, and a fourth guide device 407. The first platform 402 is connected to the rotating mechanism 3. The third driving device 403 and the third guide device 404 are arranged between the second platform 405 and the first platform 402. The third driving device 403 and the third guide device 404 are used to drive the second platform 405 to move linearly in the horizontal direction. The fourth driving device 406 and the fourth guide device 407 are arranged between the suction cup hand 401 and the second platform 405. The fourth driving device 406 and the fourth guide device 407 are used to drive the suction cup hand 401 to move linearly in the horizontal direction. The suction cup hand 401 realizes the action of feeding and discharging through the discharging mechanism 4.

[0033] Specifically, as shown in Figure 3 The third driving device 403 comprises: a third motor, a third synchronous pulley, a third synchronous belt, and a third moving block. The third motor is installed on the first platform 402. The output shaft of the third motor is installed with the third synchronous pulley on the first platform 402. The third synchronous belt is wound around the third synchronous pulley. The third moving block comprises an upper block body and a lower block body. The upper block body and the lower block body are located on the upper and lower sides of the third synchronous belt respectively and are connected by bolts, so that the third synchronous belt is clamped in the third moving block. The third moving block is connected with the second platform 405. The third guide device 404 comprises: a third guide rail and a third sliding block. The third guide rail is connected to the first platform 402. The third sliding block is connected to the second platform 405. The third sliding block is slidingly arranged on the third guide rail.

[0034] Specifically, as shown in Figure 4 The fourth driving device 406 comprises: a linkage block, a fourth synchronous pulley, a fourth synchronous belt, and a fourth moving block. There are two fourth synchronous pulleys which are rotatably installed on the side surface of the second platform 405. The fourth synchronous belt is wound around the fourth synchronous pulley. The linkage block is fixedly connected with the first platform 402 on the lower side of the fourth synchronous belt. The fourth moving block is fixedly connected with the second platform 405 on the upper side of the fourth synchronous belt. The fourth guide device 407 comprises: a fourth guide rail and a fourth sliding block. The fourth guide rail is connected to the suction cup hand 401. The fourth sliding block is connected to the second platform 405. The fourth sliding block is slidingly arranged on the fourth guide rail.

[0035] Specifically, asFigure 4 As shown, the suction cup hand 401 comprises a plate body, suction cups, fourth guide rails installed on both sides of the plate body, fourth sliders connected with the second platform 405, fourth guide rails slidingly inserted into the fourth sliders, four suction cups connected to the surface of the plate body, and negative pressure pipelines connected with the suction cups. When the suction cups are attached to the bottom surface of the ceramic disc, the negative pressure pipelines generate negative pressure to suck away the gas in the suction cups, thereby stably positioning the ceramic disc on the suction cup hand 401.

[0036] When the ceramic disc taking and placing manipulator works, the height position of the suction cup hand 401 is controlled by the lifting mechanism 2, the suction cup hand 401 moves into the placing rack for placing empty ceramic discs by the discharging mechanism 4, the empty ceramic discs are adsorbed by the suction cups, the suction cup hand 401 lifts the empty discs and retracts to the top of the hollow rotating platform 302, the hollow rotating platform 302 drives the empty discs to rotate, the base mechanism 1 drives the empty discs to displace, the suction cup hand 401 is controlled to rotate and align with the work station of the next process by the rotating mechanism 3, and the suction cup hand 401 moves to the work station by the feeding mechanism, so that the empty discs are received by the equipment of the next process; when the ceramic disc is full of waxes-coated wafer pieces, the ceramic disc is in a full disc state, the full disc is lifted by the suction cup hand 401 for recycling and sent into the placing rack, so as to complete the taking and placing of the ceramic disc.

[0037] The above is only an embodiment of the present application, and the specific structure and characteristics of the scheme known in the art are not described in detail, the ordinary technical personnel in the art know all the ordinary technical knowledge in the technical field of the present application before the application date or the priority date, can know all the prior art in the field, and has the ability to apply the conventional experimental means before the date, the ordinary technical personnel in the art can improve and implement the scheme under the inspiration of the present application, some typical known structures or known methods should not be an obstacle for the ordinary technical personnel to implement the present application. It should be pointed out that for those skilled in the art, without departing from the structure of the present application, a number of modifications and improvements can be made, which should also be considered as the protection scope of the present application, which will not affect the effect and practicality of the present application.

Claims

1. A ceramic disc pick-and-place robot, characterized by, The utility model relates to a ceramic plate production line, which comprises a base mechanism, a lifting mechanism connected to the base mechanism, the base mechanism being used to drive the lifting mechanism to move linearly in the transverse direction, a rotating mechanism installed on the lifting mechanism, the lifting mechanism being used to drive the rotating mechanism to move vertically, and a discharging mechanism connected to the rotating mechanism, the rotating mechanism being used to drive the discharging mechanism to rotate, the discharging mechanism having a suction hand moving linearly, which is used to move a ceramic plate. The base mechanism comprises a base, a first driving device and a first guide device, the first driving device and the first guide device being arranged between the base and the lifting mechanism, the first driving device and the first guide device being used to drive the lifting mechanism to move linearly in the horizontal direction. The lifting mechanism comprises a bottom plate, a second driving device and a second guide device, the bottom plate being connected to the base mechanism, the second driving device and the second guide device being arranged between the bottom plate and the rotating mechanism, the second driving device and the second guide device being used to drive the rotating mechanism to move vertically. The rotating mechanism comprises a lifting platform and a hollow rotating platform, the lifting platform being connected to the lifting mechanism, the hollow rotating platform being installed on the lifting platform, and the discharging mechanism being installed on the hollow rotating platform. The discharging mechanism further comprises a first platform, a third driving device, a third guide device, a second platform, a fourth driving device and a fourth guide device, the first platform being connected to the rotating mechanism, the third driving device and the third guide device being arranged between the second platform and the first platform, the third driving device and the third guide device being used to drive the second platform to move linearly in the horizontal direction, and the fourth driving device and the fourth guide device being arranged between the suction hand and the second platform, the fourth driving device and the fourth guide device being used to drive the suction hand to move linearly in the horizontal direction. ​ ​ ​ ​

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