Auxiliary mechanical arm device for replacing target material of sputtering machine

Abstract

The utility model discloses an auxiliary mechanical arm device for replacing a target material of a sputtering machine, which comprises a base unit, a mechanical arm unit and a control unit, the lifting unit comprises a lifting bottom plate, and the lifting unit is arranged on the mounting bottom plate in an up-down reciprocating motion mode through the lifting bottom plate; and one end of the mechanical arm is rotationally connected with the lifting bottom plate, and the other end of the mechanical arm can clamp the target material and drive the target material to move freely in the horizontal direction. According to the auxiliary mechanical arm device for replacing the target material of the sputtering machine, the movement of the target material in the vertical direction is realized through the lifting unit, and the target material can be placed and fixed at any position in the horizontal direction while the target material is lifted through the mechanical arm; and under the cooperative use of operators, the problems that the target material is difficult to dismount and mount and industrial accidents are easy to occur due to the fact that the internal shape of the equipment is irregular and the gravity center is difficult to balance when the operators are in the equipment are solved.

Description

Technical Field

[0001] This utility model belongs to the field of composite current collector tooling technology, specifically relating to an auxiliary robotic arm device for changing sputtering machine targets. Background Technology

[0002] Currently, when changing sputtering targets, the disassembly and installation of the targets are all done by operators working together to lift them. Since each target weighs approximately 50 kg, 3-4 people are needed to lift it to the target position for stability before another 2 people secure it in place. During replacement, operators need to lean forward and lift the target. Furthermore, due to the irregular shape of the equipment's interior, it is difficult for operators to maintain their balance. During installation and positioning, the target may wobble slightly due to the force applied, making it difficult for operators to stabilize the target in the target position.

[0003] This method of operation is time-consuming, requires a large number of personnel, and, due to the complexity of the work environment, easily leads to workplace accidents. Therefore, an auxiliary robotic arm device for sputtering machine target replacement was designed to solve the above problems.

[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this utility model. Utility Model Content

[0005] To overcome the shortcomings of the prior art, the purpose of this utility model is to provide an auxiliary robotic arm device for changing sputtering targets.

[0006] To achieve the above and other related objectives, the technical solution provided by this utility model is: a sputtering machine target replacement auxiliary robotic arm device, comprising: a base unit, the base unit including a vertically arranged mounting base plate; a lifting unit, the lifting unit including a lifting base plate, the lifting unit being mounted on the mounting base plate through the reciprocating motion of the lifting base plate; and a robotic arm, one end of the robotic arm being rotatably connected to the lifting base plate, and the other end of the robotic arm being capable of clamping the target material and moving the target material arbitrarily in the horizontal direction. In this solution, the vertical movement of the target material is achieved through the lifting unit, and the target material can be lifted and fixed at any position in the horizontal direction through the robotic arm.

[0007] Furthermore, the base unit also includes a vertically arranged lead screw, which is mounted on the center of the mounting base plate via a mounting base and is connected to a drive device. The lifting unit also includes a nut corresponding to the lead screw. The front of the lifting base plate is the side away from the base unit, and the back of the lifting base plate is the side facing the base unit. The nut is located on the back of the lifting base plate, and the lifting base plate is connected to the lead screw via the nut. In this design, the drive device drives the lead screw to rotate, and the rotation of the lead screw causes the nut to move back and forth along its axial direction. The nut then drives the lifting base plate to reciprocate along the axial direction of the lead screw, thus realizing the lifting movement of the lifting base plate.

[0008] Furthermore, the driving device is a servo motor, and the lead screw is connected to the servo motor via a coupling; two nuts are provided along the axial direction of the lead screw. In this design, using a servo motor to control the rotation of the lead screw can improve the accuracy of the movement, and providing two nuts can improve the stability of the structure.

[0009] Furthermore, the base unit also includes a vertically arranged guide rail, which is parallel to the lead screw; the lifting unit also includes a slide corresponding to the guide rail, which is disposed on the back of the lifting base. In this design, the slide and the guide rail are configured to cooperate, and the lifting base plate moves along the guide rail on the mounting base plate via the slide. The arrangement of the guide rail and the slide ensures the linearity of the movement of the lifting base plate on the lifting base plate.

[0010] Furthermore, the slide block contains steel balls that roll in cooperation with the guide rail. In this design, the cooperation between the slide block and the guide rail provides guidance and stability during the vertical translation of the entire lifting unit. Installing steel balls within the slide block reduces friction between the two, minimizing wear and extending service life.

[0011] Furthermore, two guide rails are provided, one on each side of the lead screw; four slides are provided, with each pair of slides corresponding to one guide rail. In this design, two guide rails are provided, and two slides are provided on each guide rail, ensuring the stability of the running structure.

[0012] Furthermore, the lifting unit also includes two connecting bases arranged vertically. These connecting bases are located on the front of the lifting base plate. One end of the robotic arm is mounted on the connecting base via a first connecting shaft, and the robotic arm can rotate within 180° in the horizontal direction. In this design, the connecting bases are installed on the lifting unit, allowing one end of the robotic arm to rotate 180° horizontally, enabling the target material to move left and right, thereby achieving position adjustment.

[0013] Furthermore, a bearing is provided inside the connecting base. In this design, the bearing inside the connecting base allows for more flexible rotation.

[0014] Furthermore, the robotic arm includes a first arm shaft, a second arm shaft, and a third arm shaft. One end of the first arm shaft is connected to the lifting base plate. One end of the second arm shaft is located at the other end of the first arm shaft via a second connecting shaft and can achieve rotational movement within 180° in the horizontal direction. One end of the third arm shaft is located at the other end of the second arm shaft via a third connecting shaft and can also achieve rotational movement within 180° in the horizontal direction. In this solution, the first arm shaft is connected to the lifting unit via a connecting base and supports the second arm shaft; the second arm shaft relies on the support of the first arm shaft and is connected to the third arm shaft, while simultaneously enabling arbitrary position adjustment of the robotic arm in the horizontal direction via the connecting shaft; the third arm shaft relies on the support of the second arm shaft to lift the target material, and in cooperation with the first and second arm shafts, it can simultaneously lift the target material and place and fix the target material at any position in the horizontal direction.

[0015] Furthermore, the other end of the third arm shaft is provided with a clamping claw that can hold the target material. In this solution, the target material is moved and positioned by clamping it with the end clamping claw of the third arm shaft.

[0016] Due to the application of the above technical solution, the beneficial effects of this utility model compared with the prior art are as follows:

[0017] 1. This device achieves vertical movement of the target material through a lifting unit, and simultaneously holds and fixes the target material at any horizontal position through a robotic arm that lifts the target material.

[0018] 2. With the cooperation of operators, this device solves the problem that the irregular shape of the equipment makes it difficult for personnel to maintain their center of gravity, which leads to difficulties in disassembling and installing the target material and increases the risk of workplace accidents.

[0019] 3. This device is easy to assemble, installs on the existing equipment, and is easy to disassemble. It can be installed when needed and removed when not in use. It is simple and safe to operate, does not affect the normal operation of the equipment, and significantly improves the efficiency of equipment maintenance. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the auxiliary robotic arm device of this utility model;

[0021] Figure 2 This is a schematic diagram of the base unit structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the front structure of the lifting unit of this utility model;

[0023] Figure 4This is a schematic diagram of the rear structure of the lifting unit of this utility model;

[0024] Figure 5 This is a schematic diagram of the robotic arm structure of this utility model;

[0025] In the above attached figures, 1 is the base unit; 101 is the mounting plate; 102 is the lead screw; 103 is the drive device; 104 is the guide rail; 2 is the lifting unit; 201 is the lifting base plate; 202 is the nut; 203 is the slide; 204 is the connecting base; 3 is the robotic arm; 301 is the first arm shaft; 302 is the second arm shaft; 303 is the third arm shaft; 304 is the first connecting shaft; 305 is the second connecting shaft; 306 is the third connecting shaft; and 307 is the chuck. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0027] It should be noted that in the description of this utility model, the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. These terms are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance. The terms "horizontal," "vertical," and "suspended," etc., do not indicate that the component must be absolutely horizontal or suspended, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0030] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0031] Example:

[0032] See appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, this embodiment provides a sputtering machine target replacement auxiliary robotic arm 3 device, including: a base unit 1, the base unit 1 including a vertically arranged mounting base plate 101; a lifting unit 2, the lifting unit 2 including a lifting base plate 201, the lifting unit 2 being mounted on the mounting base plate 101 through the reciprocating motion of the lifting base plate 201, the lifting base plate 201 being made of ordinary steel plated with nickel, providing an installation and operation platform for the vertical linear movement of the entire device; and a robotic arm 3, one end of the robotic arm 3 being rotatably connected to the lifting base plate 201, the other end of the robotic arm 3 being able to clamp the target and move the target arbitrarily in the horizontal direction. The vertical movement of the target is achieved through the lifting unit 2, and the target can be placed and fixed at any position in the horizontal direction while being lifted by the robotic arm 3.

[0033] See appendix Figure 2 As shown, the base unit 1 also includes a vertically arranged lead screw 102, which is mounted in the middle of the mounting base 101 via a mounting base. The lead screw 102 is connected to a driving device 103; see attached figure. Figure 4As shown, the lifting unit 2 also includes a nut 202 corresponding to the lead screw 102. The nut 202 is located on the back of the lifting base plate 201, and the lifting base plate 201 is connected to the lead screw 102 via the nut 202. The mounting base contains a bearing that mates with the lead screw 102. The nut 202 is the lead screw nut 202. The drive device 103 drives the lead screw 102 to rotate, and the rotation of the lead screw 102 causes the nut 202 to move back and forth along its axial direction. The nut 202 then drives the lifting base plate 201 to reciprocate along the axial direction of the lead screw 102, thus achieving the lifting motion of the lifting base plate 201. The rotational motion of the lead screw 102 is converted into the reciprocating motion of the executed component (lifting unit 2). Each rotation of the lead screw 102 raises the lifting unit 2 by one pitch. The nut 202 is fixed to the lifting unit 2, and the lead screw 102 is fixed to the base unit 1. The combination of these two components allows the lifting unit 2 to rise or fall smoothly and precisely.

[0034] See appendix Figure 2 As shown, the drive unit 103 is a servo motor, which works with a gearbox to achieve speed reduction. Its power is approximately 200W, and its speed is 0-36 rpm. The lead screw 102 is connected to the servo motor via a coupling, which transmits the motor torque to the lead screw 102, which then transmits the motor's power to the lifting unit 2 for reciprocating motion. (See attached diagram) Figure 4 As shown, two nuts 202 are provided along the axial direction of the lead screw 102. Using a servo motor to control the rotation of the lead screw 102 can improve the accuracy of the movement, and providing two nuts 202 can improve the stability of the structure.

[0035] See appendix Figure 2 As shown, the base unit 1 also includes a vertically arranged guide rail 104, which is parallel to the lead screw 102; see attached diagram. Figure 3As shown, the lifting unit 2 also includes a slide 203 corresponding to the guide rail 104. The front of the lifting base plate 201 is the side of the lifting base plate 201 away from the base unit 1, and the back of the lifting base plate 201 is the side of the lifting base plate 201 facing the base unit 1. The slide 203 is located on the back of the lifting base plate 201. The slide 203 is configured to cooperate with the guide rail 104, and the lifting base plate 201 moves along the guide rail 104 on the mounting base plate 101 via the slide 203. The configuration of the guide rail 104 and the slide 203 ensures the linearity of the movement of the lifting base plate 201 on the mounting base plate 101. Steel balls are provided on the inner side of the slide 203. The cooperation between the slide 203 and the guide rail 104 realizes the guiding and stabilizing function during the vertical translation process of the entire lifting unit 2. The steel balls inside the slide 203 that roll with the guide rail 104 can reduce the friction between the two, reduce the degree of wear in the later stage, and extend the service life. Two guide rails 104 are provided, one on each side of the lead screw 102; four slide blocks 203 are provided, with each pair of slide blocks 203 corresponding to one guide rail 104. The provision of two guide rails 104 and two slide blocks 203 on each guide rail 104 ensures the stability of the running structure.

[0036] See appendix Figure 1 Appendix Figure 3 and attached Figure 5 As shown, the lifting unit 2 also includes two vertically arranged connecting bases 204. The connecting bases 204 are located on the front of the lifting base plate 201. One end of the robotic arm 3 is mounted on the connecting base 204 via a first connecting shaft 304, and the robotic arm 3 can rotate within 180° in the horizontal direction. Installing the connecting bases 204 on the lifting unit 2 allows one end of the robotic arm 3 to rotate 180° horizontally, enabling the target material to move left and right, thereby achieving position adjustment. Bearings are installed inside the connecting bases 204. The bearings inside the connecting bases 204 allow for more flexible rotation. (See attached diagram) Figure 5As shown, the robotic arm 3 includes a first arm shaft 301, a second arm shaft 302, and a third arm shaft 303. One end of the first arm shaft 301 is connected to the lifting base plate 201. One end of the second arm shaft 302 is connected to the other end of the first arm shaft 301 via a second connecting shaft 305 and can rotate within 180° in the horizontal direction. One end of the third arm shaft 303 is connected to the other end of the second arm shaft 302 via a third connecting shaft 306 and can rotate within 180° in the horizontal direction. The first arm shaft 301 is connected to the lifting unit 2 via a connecting base 204 and supports the second arm shaft 302. The second arm shaft 302 relies on the support of the first arm shaft 301 and is connected to the third arm shaft 303. At the same time, the connecting shaft enables the robotic arm 3 to be adjusted to any position in the horizontal direction. The third arm shaft 303 relies on the support of the second arm shaft 302 to lift the target material. In cooperation with the first arm shaft 301 and the second arm shaft 302, the target material can be placed and fixed at any position in the horizontal direction while being lifted. The other end of the third arm shaft 303 is provided with a chuck 307 that can clamp the target material. The target material is clamped by the chuck 307 at the end of the third arm shaft 303, thus realizing the displacement and placement of the target material.

[0037] The sputtering machine target replacement auxiliary robotic arm 3 designed in this utility model realizes the vertical movement of the target through the lifting unit 2, and the robotic arm 3 can lift the target and place and fix the target at any position in the horizontal direction. With the cooperation of the operator, it solves the problem that the irregular shape of the equipment makes it difficult for the operator to maintain balance, which leads to difficulties in target disassembly and installation and easy to cause work-related accidents.

[0038] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A sputtering machine target replacement auxiliary robotic arm device, characterized in that, The utility model relates to a kind of auxiliary mechanical arm device for target material replacement of sputtering machine, including: Base unit (1), the base unit (1) includes vertically arranged installation base plate (101); Lifting unit (2), the lifting unit (2) includes lifting base plate (201), the lifting unit (2) is reciprocatingly arranged on the installation base plate (101) by the lifting base plate (201); Mechanical arm (3), one end of the mechanical arm (3) is rotatably connected with the lifting base plate (201), and the other end of the mechanical arm (3) can clamp the target material and move along the horizontal direction with the target material.

2. The auxiliary mechanical arm device for target material replacement of sputtering machine according to claim 1, wherein: The base unit (1) further includes a vertically arranged lead screw (102), which is arranged in the middle of the installation base plate (101) through a mounting base, and the lead screw (102) is connected with a driving device (103); The lifting unit (2) further includes a nut (202) corresponding to the lead screw (102), the front side of the lifting base plate (201) is the side of the lifting base plate (201) away from the base unit (1), the back side of the lifting base plate (201) is the side of the lifting base plate (201) facing the base unit (1), the nut (202) is arranged on the back side of the lifting base plate (201), and the lifting base plate (201) is drivingly connected with the lead screw (102) through the nut (202).

3. The sputtering machine target replacement auxiliary mechanical arm device according to claim 2, characterized in that: The driving device (103) is a servo motor, the lead screw (102) is connected with the servo motor through a shaft coupling, and the nut (202) is arranged in the axial direction of the lead screw (102).

4. The sputtering machine target replacement auxiliary mechanical arm device according to claim 2, wherein: The base unit (1) further includes a vertically arranged guide rail (104), which is arranged parallel to the lead screw (102); the lifting unit (2) further includes a sliding seat (203) corresponding to the guide rail (104), which is arranged on the back side of the lifting base plate (201).

5. The sputtering machine target replacement auxiliary mechanical arm device according to claim 4, characterized in that: Steel balls are arranged in the sliding seat (203) to roll with the guide rail (104).

6. The sputtering machine target replacement auxiliary mechanical arm device according to claim 4, wherein: The guide rail (104) is arranged in two and arranged on both sides of the lead screw (102); the sliding seat (203) is arranged in four, and each two sliding seats (203) correspond to one guide rail (104).

7. The sputtering machine target replacement auxiliary mechanical arm device according to claim 2, wherein: The lifting unit (2) further includes two connection bases (204) arranged above and below, which are arranged on the front side of the lifting base plate (201), one end of the mechanical arm (3) is arranged on the connection base (204) through a first connecting shaft (304), and the mechanical arm (3) can realize rotational movement within 180° in the horizontal direction.

8. The sputtering machine target replacement auxiliary mechanical arm device according to claim 7, characterized in that: A bearing is arranged in the connection base (204).

9. The sputtering machine target replacement auxiliary mechanical arm device of claim 1, wherein: The mechanical arm (3) comprises a first arm shaft (301), a second arm shaft (302) and a third arm shaft (303), one end of the first arm shaft (301) is connected with the lifting bottom plate (201), one end of the second arm shaft (302) is arranged at the other end of the first arm shaft (301) through a second connecting shaft (305) and can realize rotary motion within 180° in the horizontal direction, one end of the third arm shaft (303) is arranged at the other end of the second arm shaft (302) through a third connecting shaft (306) and can realize rotary motion within 180° in the horizontal direction.

10. The sputtering machine target replacement auxiliary mechanical arm device according to claim 9, characterized in that: The other end of the third arm shaft (303) is provided with a clamping jaw (307) capable of clamping the target material.

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