Rotating cathode in coating equipment

Abstract

The utility model discloses a rotating cathode in coating equipment. The rotating cathode comprises a magnetic bar assembly, a driving end assembly and a driven end assembly, the magnetic bar assembly is coaxially installed between the driving end assembly and the driven end assembly. The driving end assembly is provided with a power motor, and the magnetic bar assembly is driven to rotate through the power motor. The magnetic bar assembly is further provided with a cooling assembly, and cooling water is circularly guided in through the cooling assembly to cool the magnetic bar assembly. A magnetic bar assembly in the rotating cathode is in floating connection with a driving end through a floating spring, so that the axial position of the magnetic bar assembly is adjusted; and the magnetic rod assembly is rotationally connected with the driven end through the ball head and the ball head seat so as to adjust the angular position of the magnetic rod assembly. Therefore, the coaxiality of the magnetic bar assembly can be quickly adjusted during installation or maintenance.

Description

TECHNICAL FIELD

[0001] The utility model relates to a rotating cathode structure technical field, especially in a kind of rotating cathode in coating equipment. BACKGROUND

[0002] Vacuum magnetron sputtering coating is the best coating quality in today's large area thin film deposition field, the most widely used coating deposition process, in magnetron sputtering coating process, the quality requirement of magnetron sputtering coating equipment is high, in magnetron sputtering coating equipment, magnetron sputtering cathode is particularly important.

[0003] The main structure of rotating cathode includes magnetic rod assembly and driving end and driven end for installing magnetic rod assembly, and magnetic rod assembly needs to be coaxially installed between driving end and driven end, but the existing rotating cathode connection end is rigid connection, which leads to that magnetic rod assembly is difficult to operate when coaxially installed. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of rotating cathode in coating equipment to solve the defects in prior art.

[0005] To solve the above technical problems, the utility model provides a kind of rotating cathode in coating equipment, including magnetic rod assembly, driving end assembly and driven end assembly;The magnetic rod assembly is coaxially installed between the driving end assembly and the driven end assembly;

[0006] The driving end assembly is provided with power motor, and the magnetic rod assembly is rotated by the power motor;

[0007] The magnetic rod assembly is also provided with cooling assembly, and the magnetic rod assembly is cooled by the cooling assembly circulating imported cooling water.

[0008] Preferably, the magnetic rod assembly, the driving end assembly, the driven end assembly, the power motor and the cooling assembly are provided with two groups, and are installed in parallel on the same substrate to form double rotating cathode device.

[0009] Preferably, the driving end assembly includes driving positioning shaft, and the end of the magnetic rod assembly is inserted and installed through the driving positioning shaft;

[0010] Floating spring is arranged on the driving positioning shaft, and the end of the floating spring abuts against the end of the magnetic rod assembly, so that the magnetic rod assembly is floatingly connected along the axis with the driving positioning shaft.

[0011] Preferably, pulley is arranged in the driving end assembly, and the output shaft of the power motor is connected through belt, so that the power motor can drive the driving end assembly and the magnetic rod assembly connected therewith to rotate.

[0012] Preferably, the driven end assembly comprises a driven positioning shaft, a ball head seat and a ball head, the ball head seat is installed on the driven positioning shaft, the ball head is connected with the end of the magnetic rod assembly, and the ball head can rotate in the ball head seat, so that the magnetic rod assembly can adjust coaxiality in the driven end assembly.

[0013] Preferably, the magnetic rod assembly comprises a magnetic rod and a target material, the magnetic rod is sleeved and installed in the target material, the cooling water pipe of the cooling assembly extends to the inside of the target material through the driving end assembly, and cooling water is circulated and introduced into the target material, so that the magnetic rod assembly is cooled.

[0014] Preferably, the target material of the magnetic rod assembly is sealed and connected with the driving end assembly and the driven end assembly through a clamp hoop at both ends respectively.

[0015] Preferably, the clamp hoop is a split clamp hoop comprising an upper hoop body and a lower hoop body, and the upper hoop body and the lower hoop body are locked and fixed through bolts after being spliced with each other.

[0016] Preferably, a ring groove is arranged on the inner wall of the upper hoop body and the lower hoop body, and is used for placing a metal sealing ring, and the metal sealing ring is pressed and fixed in a sealing groove on the outer wall of the target material along with the clamping of the upper hoop body and the lower hoop body.

[0017] Preferably, a ring-shaped movable ring is further arranged in the ring groove, and the ring-shaped movable ring is in contact with the slope of the ring groove and is movable, so as to push the metal sealing ring to slide into the sealing groove on the outer wall of the target material.

[0018] Compared with the prior art, the utility model has the beneficial effects that:

[0019] 1. The connection between the magnetic rod assembly and the driving end in the rotary cathode is a floating connection of a floating spring, so as to adjust the axial position of the magnetic rod assembly; and the connection between the magnetic rod assembly and the driven end is a rotary connection of a ball head and a ball head seat, so as to adjust the angle position of the magnetic rod assembly. The magnetic rod assembly can be quickly adjusted in coaxiality during installation or maintenance.

[0020] 2. In the rotary cathode, the split clamp hoop is used to seal and connect the target material of the magnetic rod assembly with the driving end assembly and the driven end assembly at both ends respectively, and during actual installation and use, only the metal sealing ring needs to be placed near the sealing groove on the outer wall of the target material, and along with the clamping of the upper hoop body and the lower hoop body, the ring-shaped movable ring slides along the slope of the ring groove, so as to push the metal sealing ring into the sealing groove on the outer wall of the target material, and the alignment difficulty of the metal sealing ring is greatly reduced, and the sealing performance of the rotary cathode is improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1It is the structure schematic view of the rotating negative pole in the coating equipment provided by the utility model;

[0022] Figure 2 It is the front view of the rotating negative pole in the coating equipment provided by the utility model;

[0023] Figure 3 It is the sectional view of the rotating negative pole in the coating equipment provided by the utility model;

[0024] Figure 4 It is the structure schematic view of the driving end assembly provided by the utility model;

[0025] Figure 5 It is the structure schematic view of the driven end assembly provided by the utility model;

[0026] Figure 6 It is the structure schematic view of the hoop first perspective provided by the utility model;

[0027] Figure 7 It is the structure schematic view of the hoop second perspective provided by the utility model;

[0028] Figure 8 It is the sectional view of the hoop provided by the utility model.

[0029] In the drawing: 1, magnetic bar assembly; 101, magnetic bar; 102, target material; 2, driving end assembly; 201, driving positioning shaft; 202, floating spring; 203, belt pulley; 3, driven end assembly; 301, driven positioning shaft; 302, ball head seat; 303, ball head; 4, power motor; 5, cooling assembly; 6, base plate; 7, hoop; 71, upper hoop body; 72, lower hoop body; 73, ring groove; 74, metal sealing ring; 75, annular movable ring. DETAILED DESCRIPTION

[0030] The utility model will be made further detailed description in combination with the drawings and specific embodiments. According to the following description and claims, the advantages and features of the utility model will be more clear. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clear and assist the purpose of describing the embodiment of the utility model.

[0031] In the description of the utility model, it needs to be understood that the orientation or position relationship indicated by the terms 'center', 'longitudinal', 'lateral', 'upper', 'lower', 'front','rear', 'left', 'right','vertical', 'horizontal', 'top', 'bottom', 'inner', 'outer' and the like is the orientation or position relationship based on the orientation or position relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as the limitation of the utility model.

[0032] In the description of the utility model, it is to explain, unless otherwise definite and limited, the term '' install '' '' link '' '' connect '' should be broad sense understanding, for example, can be fixed connection, can be detachable connection, or integrally connected, can be mechanical connection, can be electrical connection, can be directly connected, can be indirectly connected through intermediate medium, can be the intercommunication of two elements. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood by specific circumstances. Embodiment

[0033] The utility model provides a kind of rotary cathode in coating equipment, please refer to Figures 1-3 Including magnetic rod assembly 1, driving end component 2 and driven end component 3;The magnetic rod assembly 1 is coaxially installed between the driving end component 2 and the driven end component 3;The driving end component 2 is configured with power motor 4, the magnetic rod assembly 1 is rotated by the power motor 4;The magnetic rod assembly 1 is also configured with cooling assembly 5, and the magnetic rod assembly 1 is cooled by the cooling assembly 5 circulatingly imported cooling water.

[0034] In the embodiment, the magnetic rod assembly 1, the driving end component 2, the driven end component 3, the power motor 4 and the cooling assembly 5 are all provided with two groups, and are installed in parallel on the same substrate 6, to form double rotary cathode device.

[0035] Specifically, as Figure 4 Shown, the driving end component 2 includes driving positioning shaft 201, and the end of the magnetic rod assembly 1 is inserted and installed by the driving positioning shaft 201;Floating spring 202 is provided on the driving positioning shaft 201, and the end of the floating spring 202 abuts against the end of the magnetic rod assembly 1, so that the magnetic rod assembly 1 is floatingly connected along the axis with the driving positioning shaft 201.

[0036] Further, the driving end component 2 is provided with pulley 203, which is connected to the output shaft of the power motor 4 by a belt, so that the power motor 4 can drive the driving end component 2 and the magnetic rod assembly 1 connected thereto to rotate.

[0037] Specifically, as Figure 5 Shown, the driven end component 3 includes driven positioning shaft 301, ball head seat 302 and ball head 303, the ball head seat 302 is installed on the driven positioning shaft 301, and the ball head 303 is connected with the end of the magnetic rod assembly 1, and the ball head 303 can rotate in the ball head seat 302, so that the magnetic rod assembly 1 can adjust coaxiality in the driven end component 3.

[0038] The magnetic rod assembly 1 in the rotary cathode is connected with the driving end in a floating spring floating connection to adjust the axial position of the magnetic rod assembly 1, and is connected with the driven end in a ball head ball head seat rotary connection to adjust the angular position of the magnetic rod assembly 1, so that the magnetic rod assembly 1 can be quickly adjusted in coaxiality during installation or maintenance.

[0039] Further, the magnetic rod assembly 1 comprises a magnetic rod 101 and a target material 102, the magnetic rod 101 is sleeved and installed in the target material 102, the cooling water pipe of the cooling assembly 5 extends to the inside of the target material 102 through the driving end assembly 2, and the cooling water is circulated and introduced into the target material 102, so that the magnetic rod assembly 1 is cooled.

[0040] The target material 102 of the magnetic rod assembly 1 is sealingly connected with the driving end assembly 2 and the driven end assembly 3 through the clamps 7 at both ends. Figures 6-8 The clamp 7 is a clamping clamp, comprising an upper clamp body 71 and a lower clamp body 72, and the upper clamp body 71 and the lower clamp body 72 are spliced and locked and fixed by bolts.

[0041] Further, the inner walls of the upper clamp body 71 and the lower clamp body 72 are provided with ring grooves 73 for placing metal sealing rings 74, and the metal sealing rings 74 are pressed and fixed in the sealing grooves on the outer wall of the target material 102 by the clamping of the upper clamp body 71 and the lower clamp body 72.

[0042] Further, the ring groove 73 is also provided with a ring-shaped movable ring 75, and the ring-shaped movable ring 75 is in contact with the slope of the ring groove 73, so as to push the metal sealing ring 74 into the sealing groove on the outer wall of the target material 102.

[0043] In the rotary cathode, the target material 102 of the magnetic rod assembly 1 is sealingly connected with the driving end assembly 2 and the driven end assembly 3 through the clamping clamp, and during actual installation and use, the metal sealing ring 74 is only placed near the sealing groove on the outer wall of the target material 102, and the ring-shaped movable ring 75 slides along the slope of the ring groove by the clamping of the upper clamp body 71 and the lower clamp body 72, so as to push the metal sealing ring 74 into the sealing groove on the outer wall of the target material 102, which greatly reduces the alignment difficulty of the metal sealing ring 74, thereby improving the sealing performance of the rotary cathode.

[0044] The above description is only a description of the preferred embodiment of the utility model, and does not limit the scope of the utility model, and any change or modification made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A rotating cathode in a coating apparatus, characterized by, It comprises a magnetic rod assembly (1), a driving end assembly (2) and a driven end assembly (3); the magnetic rod assembly (1) is coaxially installed between the driving end assembly (2) and the driven end assembly (3); The driving end assembly (2) is provided with a power motor (4) to drive the magnetic rod assembly (1) to rotate; The magnetic rod assembly (1) is further provided with a cooling assembly (5) to circulate cooling water to cool the magnetic rod assembly (1).

2. A rotating cathode in a coating apparatus as defined in claim 1, characterized in that The magnetic rod assembly (1), the driving end assembly (2), the driven end assembly (3), the power motor (4) and the cooling assembly (5) are all provided with two groups and are installed in parallel on the same base plate (6) to form a double-rotating cathode device.

3. A rotating cathode in a coating apparatus as defined in claim 1, characterized in that The driving end assembly (2) comprises a driving positioning shaft (201) to insert and install the end of the magnetic rod assembly (1); A floating spring (202) is arranged on the driving positioning shaft (201) and the end of the floating spring (202) abuts against the end of the magnetic rod assembly (1) to make the magnetic rod assembly (1) float along the axis and connect with the driving positioning shaft (201).

4. A rotating cathode in a coating apparatus as defined in claim 3, characterized in that A belt pulley (203) is arranged in the driving end assembly (2) and is connected with the output shaft of the power motor (4) by a belt to make the power motor (4) drive the driving end assembly (2) and the magnetic rod assembly (1) connected therewith to rotate.

5. A rotating cathode in a coating apparatus as defined in claim 1, characterized in that The driven end assembly (3) comprises a driven positioning shaft (301), a ball head seat (302) and a ball head (303); the ball head seat (302) is installed on the driven positioning shaft (301) and the ball head (303) is connected with the end of the magnetic rod assembly (1) and can rotate in the ball head seat (302) to make the magnetic rod assembly (1) adjust the coaxiality in the driven end assembly (3).

6. A rotating cathode in a coating apparatus as defined in claim 1, characterized in that The magnetic rod assembly (1) comprises a magnetic rod (101) and a target material (102); the magnetic rod (101) is sleeved and installed in the target material (102); the cooling water pipe of the cooling assembly (5) extends to the inside of the target material (102) through the driving end assembly (2) and circulates cooling water into the target material (102) to cool the magnetic rod assembly (1).

7. A rotating cathode in a coating apparatus as defined in claim 6, characterized in that The ends of the target material (102) of the magnetic rod assembly (1) are respectively sealed and connected with the driving end assembly (2) and the driven end assembly (3) by a clamp hoop (7).

8. A rotating cathode in a coating apparatus as defined in claim 7, characterized in that The clamp hoop (7) is a clamping hoop comprising an upper hoop body (71) and a lower hoop body (72); the upper hoop body (71) and the lower hoop body (72) are spliced and locked and fixed by bolts.

9. A rotating cathode in a coating apparatus as defined in claim 8, characterized in that The inner walls of the upper hoop body (71) and the lower hoop body (72) are provided with ring grooves (73) to place metal sealing rings (74); the metal sealing rings (74) are pressed and fixed in the sealing grooves on the outer wall of the target material (102) by the clamping of the upper hoop body (71) and the lower hoop body (72).

10. A rotating cathode in a coating apparatus as defined in claim 9, characterized in that An annular movable ring (75) is further arranged in the annular groove (73), and the annular movable ring (75) is in contact with the slope of the annular groove (73) and pushes the metal sealing ring (74) to slide into the sealing groove of the outer wall of the target material (102).

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