Piezoelectric micropump, heat dissipation circulation system and electronic equipment

Abstract

The utility model discloses a piezoelectric micropump, heat dissipation circulation system and electronic equipment, and relates to piezoelectric equipment technical field, the piezoelectric micropump comprises a pump body assembly and a driving assembly, the pump body assembly forms a plurality of one-way channels at intervals; the driving assembly comprises a first driving assembly and a second driving assembly, the first driving assembly and the second driving assembly are arranged on the two opposite sides of the pump body assembly correspondingly, and the first driving assembly and the second driving assembly define at least one first pump cavity and at least one second pump cavity correspondingly; the first pump cavity and the second pump cavity correspondingly communicate with two adjacent one-way channels and are arranged in series through the one-way channels to form a one-way flow channel, and a water inlet and a water outlet are formed in the two ends, corresponding to the one-way flow channel, of the first driving assembly and / or the second driving assembly; and under the driving of the driving assembly, the pressure intensity change in the first pump cavity is opposite to the pressure intensity change in the second pump cavity. The piezoelectric micropump provided by the utility model has the advantages of smaller volume and higher back pressure and flow.

Description

TECHNICAL FIELD

[0001] The utility model relates to piezoelectric equipment technical field, especially piezoelectric micro -pump, heat dissipation circulating system and electronic equipment. BACKGROUND

[0002] With the wide application of AI in intelligent terminal, the performance of chip is greatly improved, but also brings the severe heat dissipation problem. The temperature that is too high can reduce the operating efficiency of chip, shortens the terminal service life, and even can cause the failure. Among them, piezoelectric micro -pump as small volume, driving force, high efficiency, easy to control the heat dissipation scheme receives extensive attention.

[0003] Piezoelectric micro -pump is with piezoelectric vibrator as power source, through inverse piezoelectric effect, the mechanical energy of electric energy is converted piezoelectric vibrator, thereby realizes the transport of fluid to a kind of pump. Piezoelectric pump can be divided into valve piezoelectric pump and valveless piezoelectric pump according to whether there is valve, wherein, valve piezoelectric pump can effectively prevent fluid backflow due to having one-way working valve, and the output efficiency is relatively high.

[0004] With the further thinning of flow channel and the continuous improvement of chip power, the back pressure of existing piezoelectric micro -pump is relatively low, cannot fully meet the heat dissipation demand of high-power chip. UTILITY MODEL CONTENTS

[0005] The main purpose of the utility model is to propose a kind of piezoelectric micro -pump, heat dissipation circulating system and electronic equipment, to make piezoelectric micro -pump have smaller volume and higher back pressure.

[0006] To achieve the above object, the utility model provides a kind of piezoelectric micro -pump, the piezoelectric micro -pump includes:

[0007] Pump body assembly, the pump body assembly is formed with multiple spaced one-way channels;

[0008] Drive assembly, the drive assembly includes first drive assembly and second drive assembly, the first drive assembly and the second drive assembly are respectively arranged at the opposite sides of the pump body assembly, and at least one first pump cavity and at least one second pump cavity are formed with the pump body assembly;

[0009] The first pump cavity and the second pump cavity are both correspondingly connected with two adjacent one-way channels, the first pump cavity and the second pump cavity are arranged in series through the one-way channel, and form one-way flow channel, the first drive assembly and / or the second drive assembly form water inlet and water outlet corresponding to the two ends of the one-way flow channel;

[0010] Under the drive of the first drive assembly and the second drive assembly, the pressure variation in the first pump cavity is opposite to the pressure variation in the second pump cavity.

[0011] In one embodiment, the sum of the number of the first pump chamber and the second pump chamber is an odd number, and the inlet and the outlet are located on the same side.

[0012] In one embodiment, the unidirectional channel includes a first unidirectional channel, a second unidirectional channel, a third unidirectional channel, and a fourth unidirectional channel that are spaced apart.

[0013] The first pump chamber is configured as two, one of which is connected to the first one-way channel and the second one-way channel, and the other is connected to the third one-way channel and the fourth one-way channel;

[0014] The second pump chamber is configured as one, and the second pump chamber is connected to the second unidirectional channel and the third unidirectional channel;

[0015] The two first pump chambers, the second pump chamber, the first one-way channel, the second one-way channel, the third one-way channel, and the fourth one-way channel together form the one-way flow channel;

[0016] The inlet is connected to the first one-way channel, and the outlet is connected to the fourth one-way channel.

[0017] In one embodiment, the first drive assembly includes a first cavity plate, a first vibrating plate, and a first piezoelectric vibrator stacked sequentially on one side of the pump body assembly. The first cavity plate has two first through holes spaced apart. The first vibrating plate, the hole walls of the two first through holes, and the pump body assembly enclose two first pump chambers. Two first piezoelectric vibrators are provided, and the two first piezoelectric vibrators are provided corresponding to the two first pump chambers.

[0018] In one embodiment, the first piezoelectric vibrator includes a first piezoelectric ceramic and a first metal substrate connected together, and the first metal substrates of the two first piezoelectric vibrators are an integral structure.

[0019] In one embodiment, the first vibrating plate is made of metal, and the first vibrating plate and the first metal substrate are an integral structure.

[0020] In one embodiment, the second drive assembly includes a second cavity plate, a second vibrating plate, and a second piezoelectric vibrator, which are sequentially stacked on the other side of the pump body assembly. The second cavity plate has a second through hole, and the second vibrating plate, the hole wall of the second through hole, and the pump body assembly enclose to form the second pump cavity.

[0021] The second cavity plate is also provided with an inlet connection hole and an outlet connection hole. The inlet connection hole corresponds to and is connected to the first one-way channel, and the outlet connection hole corresponds to and is connected to the fourth one-way channel.

[0022] The second vibrating plate is provided with an inlet and an outlet spaced apart. The inlet corresponds to and is connected to the inlet connection hole, and the outlet corresponds to and is connected to the outlet connection hole.

[0023] In one embodiment, the second piezoelectric vibrator includes a second piezoelectric ceramic and a second metal substrate connected together; the second vibrating plate is made of metal, and the second vibrating plate and the second metal substrate are an integral structure.

[0024] In one embodiment, the pump body assembly includes a first pressure plate, a valve plate, and a second pressure plate stacked sequentially. The valve plate is provided with a plurality of deformable valve plates at intervals. The first pressure plate and the second pressure plate are respectively provided with large flow holes and small flow holes corresponding to the plurality of valve plates. The area of ​​the valve plate is larger than the area of ​​the small flow hole and smaller than the area of ​​the large flow hole. One small flow hole, together with the corresponding valve plate and the large flow hole, forms a unidirectional channel.

[0025] In one embodiment, the valve plate has a wheel-shaped structure, and the valve plate has multiple valve holes circumferentially formed around the valve plate; or, the valve plate has multiple connecting holes spaced apart, the valve plate has a cantilever structure, and one end is connected to the wall of the connecting hole.

[0026] This invention also proposes a heat dissipation circulation system, which includes the piezoelectric micropump described above.

[0027] This invention also proposes an electronic device, which includes the heat dissipation circulation system described above.

[0028] In the piezoelectric micropump provided by this utility model, a first driving component and a second driving component are respectively arranged on opposite sides of the pump body assembly. The two driving components, together with the pump body assembly, form at least one first pump chamber and at least one second pump chamber. The first pump body and the second pump chamber are connected in series through a unidirectional channel on the pump body assembly, forming a unidirectional flow channel. The first driving component and / or the second driving component form an inlet and an outlet at the two ends of the unidirectional flow channel. Thus, driven by the first driving component and the second driving component, by controlling the pressure changes in the first pump chamber and the second pump chamber to be opposite, the fluid can enter the unidirectional flow channel from the inlet and finally flow out from the outlet. Since the first pump chamber and the second pump chamber share the same pump body assembly and are connected in series, the pressure changes in the first pump chamber and the second pump chamber are opposite under the drive of the driving components. The directions of the pressures on both sides of the pump body assembly are also opposite. These two forces work together on the pump body assembly, more effectively driving the pump body assembly to quickly open and close the unidirectional flow channel, resulting in higher output efficiency and thus effectively improving the back pressure and flow rate of the piezoelectric micropump. Meanwhile, since the first and second pump chambers share the same pump body assembly, the overall thickness of the piezoelectric micropump can be effectively reduced. In other words, the piezoelectric micropump provided by this invention combines a small size with high back pressure and flow rate, meeting the heat dissipation requirements of high-power chips in electronic devices. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0030] Figure 1 An exploded structural diagram of an embodiment of the piezoelectric micropump provided by this utility model;

[0031] Figure 2 for Figure 1 A cross-sectional schematic diagram of the provided piezoelectric micropump;

[0032] Figure 3 for Figure 1 A structural schematic diagram of the middle valve plate from another perspective;

[0033] Figure 4 for Figure 1 A schematic diagram of the structure of the first piezoelectric vibrator from another perspective;

[0034] Figure 5 for Figure 1 A schematic diagram of the second cavity plate from another perspective.

[0035] Explanation of icon numbers:

[0036] 100. Piezoelectric micropump; 1. Pump body assembly; 11. Valve plate; 111. Valve disc; 112. Valve orifice; 12. First pressure plate; 121. Large flow orifice; 122. Small flow orifice; 13. Second pressure plate; 2. First drive assembly; 2a. First pump chamber; 21. First cavity plate; 211. First through hole; 22. First vibrating plate; 23. First piezoelectric vibrator; 231. First piezoelectric ceramic; 232. First metal substrate; 3. Second drive assembly; 3a. Second pump chamber; 31. Second cavity plate; 311. Second through hole; 312. Water inlet connection hole; 313. Water outlet connection hole; 32. Second vibrating plate; 321. Water inlet; 322. Water outlet; 33. Second piezoelectric vibrator; 331. Second piezoelectric ceramic; 332. Second metal substrate.

[0037] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0039] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0040] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0041] With the widespread application of AI in smart terminals, chip performance has been greatly improved, but this has also brought about serious heat dissipation problems. Excessive temperature can reduce chip operating efficiency, shorten the lifespan of the terminal, and may even cause malfunctions. Among these solutions, piezoelectric micropumps have attracted widespread attention as a heat dissipation solution that is small in size, has high driving force, high efficiency, and is easy to control.

[0042] A piezoelectric micropump uses a piezoelectric oscillator as its power source. Through the inverse piezoelectric effect, it converts electrical energy into the mechanical energy of the piezoelectric oscillator, thereby achieving the transportation of fluids. Piezoelectric pumps can be divided into valved piezoelectric pumps and valveless piezoelectric pumps based on whether they have a valve. Among them, valved piezoelectric pumps, due to their one-way valve, can effectively prevent fluid backflow and have relatively high output efficiency.

[0043] With the further thinning of the flow channel and the continuous increase in chip power, the back pressure of existing piezoelectric micropumps is relatively low, which cannot fully meet the heat dissipation requirements of high-power chips.

[0044] To address the above-mentioned issues and problems, this invention proposes a piezoelectric micropump, which aims to combine a small size with a high back pressure to meet the heat dissipation requirements of high-power chips.

[0045] Please see Figure 1 and Figure 2 In one embodiment of this utility model, the piezoelectric micropump 100 includes a pump body assembly 1 and a drive assembly. The pump body assembly 1 forms a plurality of spaced unidirectional channels (not shown). The drive assembly includes a first drive assembly 2 and a second drive assembly 3. The first drive assembly 2 and the second drive assembly 3 are respectively disposed on opposite sides of the pump body assembly 1 and respectively enclose the pump body assembly 1 to form at least one first pump chamber 2a and at least one second pump chamber 3a. The first pump chamber 2a and the second pump chamber 3a are each connected to two adjacent unidirectional channels. The first pump chamber 2a and the second pump chamber 3a are connected in series through the unidirectional channels to form a unidirectional flow channel. The first drive assembly 2 and / or the second drive assembly 3 form an inlet 321 and an outlet 322 at the two ends of the unidirectional flow channel. Under the drive of the first drive assembly 2 and the second drive assembly 3, the pressure change in the first pump chamber 2a is opposite to the pressure change in the second pump chamber 3a.

[0046] Pump assembly 1 is generally a flat plate structure with opposing first and second sides. Pump assembly 1 has multiple spaced unidirectional channels penetrating both the first and second sides. These unidirectional channels include inlet valve structures and outlet valve structures. These valve structures can open and close under specific conditions (such as pressure), ensuring that fluid can only enter through the inlet valve structure and exit through the outlet valve structure, achieving unidirectional fluid flow. The valve structures here include, but are not limited to, wheel valve structures or cantilever beam valve structures, as long as they enable unidirectional fluid flow. Pump assembly 1 can be a single, integral structure with through holes forming the unidirectional channels. Alternatively, pump assembly 1 can be a multi-plate structure with stacked plates, forming unidirectional channels by creating through holes at corresponding positions on each of the multi-plate structures.

[0047] The first driving assembly 2 and the second driving assembly 3 are located on the first side and the second side, respectively. The first driving assembly 2 and the first side of the pump body assembly 1 enclose at least one first pump chamber 2a. The first pump chamber 2a connects to two adjacent unidirectional channels, one of which is the liquid inlet channel of the first pump chamber 2a, and the other is the liquid outlet channel of the first pump chamber 2a. The second driving assembly 3 and the second side of the pump body assembly 1 enclose at least one second pump chamber 3a. The second pump chamber 3a connects to two adjacent unidirectional channels, one of which is the liquid inlet channel of the second pump chamber 3a, and the other is the liquid outlet channel of the second pump chamber 3a. The liquid outlet channel of the first pump chamber 2a is the liquid inlet channel of the opposite second pump chamber 3a. That is, the opposite first pump chamber 2a and second pump chamber 3a are connected to the same unidirectional channel. Thus, the first pump chamber 2a and the second pump chamber 3a are connected in series through the unidirectional channel to form a unidirectional flow channel. Since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1, the overall thickness of the piezoelectric micropump 100 can be effectively reduced. The number of first pump chambers 2a and the number of second pump chambers 3a are not limited.

[0048] In one embodiment, if there is only one first pump chamber 2a and one second pump chamber 3a, then there are three unidirectional channels, namely, a first unidirectional channel, a second unidirectional channel and a third unidirectional channel arranged in sequence. The first pump chamber 2a is connected to the first unidirectional channel and the second unidirectional channel, and the second pump chamber 3a is connected to the second unidirectional channel and the third unidirectional channel. The first pump chamber 2a and the second pump chamber 3a are arranged in series through the three unidirectional channels to form a unidirectional flow channel.

[0049] In another embodiment, multiple first pump chambers 2a and multiple second pump chambers 3a are provided. These multiple first pump chambers 2a and multiple second pump chambers 3a are spaced apart along the connecting direction of multiple unidirectional channels. Each first pump chamber 2a is connected to two adjacent unidirectional channels, and each second pump chamber 3a is connected to two adjacent unidirectional channels. Simultaneously, the second pump chambers 3a are spaced apart from adjacent first pump chambers 2a, and the first pump chambers 2a and second pump chambers 3a are connected to the same unidirectional channel. This allows multiple first pump chambers 2a and multiple second pump chambers 3a to be connected in series through multiple unidirectional channels.

[0050] Of course, in some other embodiments, one of the first pump chamber 2a and the second pump chamber 3a is set to one, and the other is set to two, and the corresponding unidirectional channels are set to four. The first pump chamber 2a and the second pump chamber 3a can also be set in series through the four unidirectional channels to form a unidirectional flow channel.

[0051] In some embodiments, if the sum of the number of first pump chambers 2a and second pump chambers 3a is odd, then the inlet 321 and outlet 322 are located on the same side, that is, the first drive assembly 2 or the second drive assembly 3 has inlets 321 and outlets 322 at both ends of the unidirectional flow channel. Optionally, the inlet 321 and outlet 322 are located on the side of the pump chamber with a smaller number of first pump chambers 2a and second pump chambers 3a.

[0052] In some other embodiments, the sum of the number of the first pump chamber 2a and the second pump chamber 3a is an even number, and the inlet 321 and the outlet 322 are located on different sides, that is, the first drive assembly 2 and the second drive assembly 3 are respectively provided with inlet 321 and outlet 322 at both ends of the unidirectional flow channel.

[0053] Both the first drive assembly 2 and the second drive assembly 3 can be separate structures or integral structures. Their specific structures are not limited, as long as they can form at least one first pump chamber 2a and at least one second pump chamber 3a located on both sides of the pump body assembly 1.

[0054] Driven by the first drive assembly 2 and the second drive assembly 3, the pressure change in the first pump chamber 2a is opposite to the pressure change in the second pump chamber 3a. Therefore, the directions of the pressure on both sides of the pump body assembly 1 are also opposite. These two forces work together on the pump body assembly 1, which more effectively drives the pump body assembly 1 to move to quickly open and close the unidirectional flow channel, resulting in higher fluid output efficiency. This can effectively improve the back pressure and flow rate of the piezoelectric micropump 100.

[0055] It should be noted that back pressure refers to the reverse pressure on the fluid at the outlet 322 of the piezoelectric micropump 100. The resultant force formed by the pressure difference on both sides of the pump body assembly 1 can more forcefully push the fluid out, so that the fluid can overcome greater resistance during the discharge process, that is, increase the back pressure of the piezoelectric micropump 100.

[0056] Because the pump body assembly 1 can open and close the one-way channel relatively quickly, the fluid intake and discharge process is more efficient, and more intake and discharge cycles can be completed per unit time. At the same time, the more powerful driving force also increases the amount of fluid discharged in each cycle, thereby increasing the flow rate of the piezoelectric micropump 100.

[0057] The fluid can be cooling water. When the piezoelectric micropump 100 of this invention is used for chip heat dissipation, the heat dissipation effect is good and the cost is low.

[0058] In the piezoelectric micropump 100 provided by this utility model, a first driving component 2 and a second driving component 3 are respectively arranged on opposite sides of the pump body assembly 1. The two driving components are respectively enclosed with the pump body assembly 1 to form at least one first pump chamber 2a and at least one second pump chamber 3a. The first pump body and the second pump chamber 3a are arranged in series through a unidirectional channel on the pump body assembly 1 and form a unidirectional flow channel. The first driving component 2 and / or the second driving component 3 form an inlet 321 and an outlet 322 at the two ends of the unidirectional flow channel. Thus, under the drive of the driving components, by controlling the pressure changes in the first pump chamber 2a and the second pump chamber 3a to be opposite, the fluid can enter the unidirectional flow channel from the inlet 321 and finally flow out from the outlet 322. Since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1 and are arranged in series, the pressure change in the first pump chamber 2a is opposite to that in the second pump chamber 3a under the drive of the drive assembly. The directions of the pressure on both sides of the pump body assembly 1 are also opposite. These two forces work together on the pump body assembly 1, more effectively propelling it to quickly open and close the unidirectional flow channel, resulting in higher output efficiency and thus effectively improving the back pressure and flow rate of the piezoelectric micropump 100. Simultaneously, since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1, the overall thickness of the piezoelectric micropump 100 can be effectively reduced. In other words, the piezoelectric micropump 100 provided by this invention combines a small size with high back pressure and flow rate, meeting the heat dissipation requirements of high-power chips in electronic devices.

[0059] In an optional embodiment of this utility model, the sum of the number of the first pump chamber 2a and the second pump chamber 3a is an odd number, and the inlet 321 and the outlet 322 are located on the same side.

[0060] The piezoelectric micropump 100 provided in this embodiment of the utility model adopts an odd number of pump chambers connected in series. The first drive component 2 or the second drive component 3 respectively opens an inlet 321 and an outlet 322 at both ends of the unidirectional flow channel. The inlet 321 and the outlet 322 are located on the same side of the pump chamber with a smaller number of pump chambers in the first pump chamber 2a and the second pump chamber 3a. This facilitates the connection of ultra-thin planar flow channels, saves space, and makes the installation arrangement more flexible, reduces the space occupied by pipelines, and facilitates integrated design.

[0061] It should be noted that the number of the first pump chamber 2a and the specific number of the second pump chamber 3a are not limited, as long as the sum of the two is an odd number.

[0062] See again Figure 1 and Figure 2 In one embodiment of this utility model, the unidirectional channel includes a first unidirectional channel, a second unidirectional channel, a third unidirectional channel, and a fourth unidirectional channel arranged sequentially at intervals; two first pump chambers 2a are provided, one of which is connected to the first unidirectional channel and the second unidirectional channel, and the other is connected to the third unidirectional channel and the fourth unidirectional channel; one second pump chamber 3a is provided, which is connected to the second unidirectional channel and the third unidirectional channel; the two first pump chambers 2a, the second pump chamber 3a, the first unidirectional channel, the second unidirectional channel, the third unidirectional channel, and the fourth unidirectional channel together form a unidirectional flow channel; the inlet 321 is connected to the first unidirectional channel, and the outlet 322 is connected to the fourth unidirectional channel.

[0063] In this embodiment of the invention, the piezoelectric micropump 100 employs three pump chambers arranged in series: two first pump chambers 2a and one second pump chamber 3a. The two first pump chambers 2a are located on the first side of the pump body assembly 1, and the second pump chamber 3a is located on the second side of the pump body assembly 1, with the second pump chamber 3a spaced apart from the two first pump chambers 2a. Correspondingly, the pump body assembly 1 forms four unidirectional channels. Specifically, the first unidirectional channel, the second unidirectional channel, the third unidirectional channel, and the fourth unidirectional channel are sequentially spaced apart along the direction from one of the first pump chambers 2a to the other. The fluid flow direction of the first and third unidirectional channels is the same, forming an inlet valve structure. The fluid flow direction of the second and fourth unidirectional channels is the same, forming an outlet valve structure. That is, the inlet valve structure and the outlet valve structure are alternately spaced apart. One of the first pump chambers 2a is connected to the first and second unidirectional channels, and the other first pump chamber 2a is connected to the third and fourth unidirectional channels. The second pump chamber 3a is connected to the second and third unidirectional channels. The two first pump chambers 2a and the one second pump chamber 3a are connected in series through the four unidirectional channels, forming a unidirectional flow channel. That is, in the flow direction of the unidirectional flow channel, one first pump chamber 2a, the second pump chamber 3a, and the other first pump chamber 2a are arranged sequentially and connected in series. The inlet 321 and the outlet 322 are both opened in the second drive assembly 3 and are located on both sides of the second pump chamber 3a, respectively. The inlet 321 corresponds to and connects to the first unidirectional channel, and the outlet 322 corresponds to and connects to the fourth channel.

[0064] Driven by the first driving component 2 and the second driving component 3, when the pressure in the first pump chamber 2a decreases and the pressure in the second pump chamber 3a increases, since the external pressure remains constant, fluid enters the first pump chamber 2a from the inlet 321 through the first one-way channel, and fluid in the second pump chamber 3a enters the first pump chamber 2a through the third one-way channel. When the pressure in the first pump chamber 2a increases and the pressure in the second pump chamber 3a decreases, since the external pressure remains constant, fluid in one of the first pump chambers 2a enters the second pump chamber 3a through the second one-way channel, and fluid in the other first pump chamber 2a enters the outlet 322 through the fourth one-way channel. This allows for unidirectional flow of fluid within the one-way channels.

[0065] The above-mentioned structural design allows the piezoelectric micropump 100 to have both a small size and higher back pressure and flow rate, which can meet the heat dissipation requirements of high-power chips in electronic devices.

[0066] Refer again Figure 1 and Figure 2In one embodiment of the present invention, the first driving component 2 includes a first cavity plate 21, a first vibrating plate 22 and a first piezoelectric vibrator 23 stacked sequentially on one side of the pump body component 1. The first cavity plate 21 has two first through holes 211 spaced apart. The first vibrating plate 22, the hole walls of the two first through holes 211 and the pump body component 1 enclose two first pump chambers 2a. Two first piezoelectric vibrators 23 are provided, and the two first piezoelectric vibrators 23 are provided corresponding to the two first pump chambers 2a.

[0067] In this embodiment, the first cavity plate 21 is disposed on the first side of the pump body assembly 1. The first cavity plate 21 has two through holes 211 spaced apart. The first through holes 211 can be elliptical, circular, square, or other reasonable shapes, and are not limited here. After the first drive assembly 2 is assembled, the first vibrating plate 22, the hole walls of the two first through holes 211, and the first side of the pump body assembly 1 enclose two first pump chambers 2a. The materials of the first cavity plate 21 and the first vibrating plate 22 can be metal or plastic, etc. The shapes of the first cavity plate 21, the first vibrating plate 22, and the pump body assembly 1 are compatible, and their sizes are also compatible, thereby forming a first pump chamber 2a with a larger area, which can simultaneously correspond to and connect two adjacent unidirectional channels.

[0068] This embodiment of the utility model, by setting a first cavity plate 21 to form a first pump cavity 2a, can increase the size of the first pump cavity 2a in the stacking direction, increase the volume of the first pump cavity 2a, enhance the driving force of the pumped fluid, and further increase the pumping volume.

[0069] Of course, in some other embodiments, the first vibrating plate 22 can also be directly connected to the pump body assembly 1. Specifically, the peripheral wall of the first vibrating plate 22 is connected to the periphery of the pump body assembly 1, and the middle part of the first vibrating plate 22 is bent away from the pump body assembly 1, thereby forming a larger first pump chamber 2a.

[0070] Two first piezoelectric vibrators 23 are set corresponding to two first pump chambers 2a. Since the two first pump chambers 2a are located on the same side, the two first piezoelectric vibrators 23 carry the first vibrating plate 22 to vibrate in the same direction, so that the pressure in the two first pump chambers 2a increases or decreases at the same time.

[0071] In this embodiment of the invention, two first piezoelectric vibrators 23 are used. Compared with a single piezoelectric vibrator, the displacement of the vibration is relatively large, and the pressure change in the first pump chamber 2a is greater. This results in a greater pushing pressure on the pump body assembly 1, which is beneficial for further improving the back pressure and flow rate of the piezoelectric micropump 100. At the same time, the manufacturing cost is relatively low.

[0072] Furthermore, in this embodiment of the present invention, both the first vibration plate 22 and the first cavity plate 21 adopt an integral structure. Compared with the split structure, the integral structure can ensure the consistency of its vibration, and has higher structural stability and reliability, while also being convenient for installation and manufacturing.

[0073] Please refer to Figure 1 , Figure 2 and Figure 4 In some embodiments of this utility model, the first piezoelectric vibrator 23 includes a first piezoelectric ceramic 231 and a first metal substrate 232 connected to each other, and the first metal substrates 232 of the two first piezoelectric vibrators 23 are an integral structure.

[0074] In this embodiment of the invention, the two first piezoelectric vibrators 23 adopt an integral first metal substrate 232, and the two first piezoelectric vibrators 23 are in phase. This ensures the consistency of the vibration of the two first piezoelectric vibrators 23. Increased vibration more powerfully drives the fluid flow in the piezoelectric micropump 100, improving the flow rate, back pressure, and output capacity of the piezoelectric micropump 100. At the same time, it ensures high overall structural strength and stability.

[0075] In some embodiments, the first vibrating plate 22 is made of metal, and the first vibrating plate 22 and the first metal substrate 232 are integrally formed. This can further reduce the overall thickness of the piezoelectric micropump 100, making the piezoelectric micropump 100 have a smaller volume.

[0076] Refer again Figure 1 , Figure 2 and Figure 5 In one embodiment of this utility model, the second driving component 3 includes a second cavity plate 31, a second vibrating plate 32, and a second piezoelectric vibrator 33, which are sequentially stacked on the other side of the pump body component 1. The second cavity plate 31 has a second through hole 311. The second vibrating plate 32, the hole wall of the second through hole 311, and the pump body component 1 enclose to form a second pump cavity 3a. The second cavity plate 31 also has a water inlet connection hole 312 and a water outlet connection hole 313. The water inlet connection hole 312 corresponds to and is connected to a first one-way channel, and the water outlet connection hole 313 corresponds to and is connected to a fourth one-way channel. The second vibrating plate 32 has a water inlet 321 and a water outlet 322 spaced apart. The water inlet 321 corresponds to and is connected to the water inlet connection hole 312, and the water outlet 322 corresponds to and is connected to the water outlet connection hole 313.

[0077] In this embodiment, the second cavity plate 31 is disposed on the second side of the pump body assembly 1. The second cavity plate 31 is provided with a second through hole 311, a water inlet connection hole 312, and a water outlet connection hole 313 spaced apart. The water inlet connection hole 312 and the water outlet connection hole 313 are located on both sides of the second through hole 311, and the size of the water inlet connection hole 312 and the water outlet connection hole 313 is smaller than the size of the second through hole 311. Optionally, the size and shape of the second through hole 311 are the same as the size and shape of the first through hole 211. The second cavity plate 31 and the second vibrating plate 32 can both be made of metal or plastic, etc. The shapes of the second cavity plate 31, the second vibrating plate 32, and the pump body assembly 1 are compatible, and their sizes are also compatible, thereby forming a second pump cavity 3a with a larger area, which can simultaneously correspond to and connect two adjacent unidirectional channels. The second vibrating plate 32 is also provided with an inlet 321 and an outlet 322. The inlet 321 corresponds to and is connected to the inlet connection hole 312, and the outlet 322 corresponds to and is connected to the outlet connection hole 313. Optionally, the inlet 321 and the inlet connection hole 312 are identical in shape and size, and the outlet 322 and the outlet connection hole 313 are identical in shape and size.

[0078] This embodiment of the utility model, by setting a second cavity plate 31 to form a second pump cavity 3a, can increase the size of the second pump cavity 3a in the stacking direction, increase the volume of the second pump cavity 3a, enhance the driving force of the pumped fluid, and further increase the pumping volume.

[0079] Of course, in some other embodiments, the second vibrating plate 32 can also be directly connected to the pump body assembly 1. Specifically, the peripheral wall of the second vibrating plate 32 is connected to the periphery of the pump body assembly 1, and the middle part of the second vibrating plate 32 is bent away from the pump body assembly 1, thereby forming a larger second pump chamber 3a.

[0080] In one embodiment of this utility model, the second piezoelectric vibrator 33 includes a second piezoelectric ceramic 331 and a second metal substrate 332 connected together. Optionally, the second piezoelectric ceramic 331 and the first piezoelectric ceramic 231 have the same shape and size; the second metal substrate 332 and the first metal substrate 232 have the same size and shape.

[0081] In some embodiments of this invention, the second vibrating plate 32 is made of metal, and the second vibrating plate 32 and the second metal substrate 332 are integrally formed. This further reduces the overall thickness of the piezoelectric micropump 100, resulting in a smaller volume.

[0082] Refer again Figure 1 and Figure 2In one embodiment of the present invention, the pump body assembly 1 includes a first pressure plate 12, a valve plate 11, and a second pressure plate 13 stacked sequentially. The valve plate 11 is provided with a plurality of deformable valve plates 111 at intervals. The first pressure plate 12 and the second pressure plate 13 are respectively provided with a large flow hole 121 and a small flow hole 122 corresponding to the plurality of valve plates 111. The area of ​​the valve plate 111 is larger than the area of ​​the small flow hole 122 and smaller than the area of ​​the large flow hole 121. A small flow hole 122 forms a unidirectional channel with the corresponding valve plate 111 and the large flow hole 121.

[0083] In this embodiment of the invention, the pump body assembly 1 is a split structure consisting of multiple stacked plates. The first pressure plate 12, valve plate 11, and second pressure plate 13 together form the aforementioned multiple spaced unidirectional channels. The valve plate 11 has multiple deformable valve plates 111 spaced apart, with each valve plate 111 having approximately the same planar area. Both the first pressure plate 12 and the second pressure plate 13 have through-holes 122 and 121. Their specific arrangement is not limited, as long as the large flow hole 121 and the small flow hole 122 are located on opposite sides of the same valve plate 111. Furthermore, the planar area of ​​the valve plate 111 is larger than the opening area of ​​the small flow hole 122 but smaller than the opening area of ​​the large flow hole 121, thus allowing the valve plate 111 to deform only towards the side with the large flow hole 121, enabling fluid pumping. The corresponding small flow passage 122, valve plate 111, and large flow passage 121 together form the aforementioned one-way channel. When the pressure on the side of the large flow passage 121 is less than the pressure on the side of the small flow passage 122, under the action of the pressure difference between the two sides, the valve plate 111 deforms toward the side of the large flow passage 121, and the one-way channel opens. When the pressure on the side of the large flow passage 121 is greater than the pressure on the side of the small flow passage 122, under the action of the pressure difference between the two sides, the valve plate 111 adheres to and covers the small flow passage 122, and the one-way channel closes.

[0084] It should be noted that the shapes of the large flow passage 121 and the small flow passage 122 can be the same or different. The size of the large flow passage 121 on the first pressure plate 12 and the size of the large flow passage 121 on the second pressure plate 13 can be the same or different. The size of the small flow passage 122 on the first pressure plate 12 and the size of the small flow passage 122 on the second pressure plate 13 can be the same or different. There are no restrictions here, as long as they can cooperate with the valve plate 111 to form a one-way channel.

[0085] Combination Figure 1 and Figure 2 In a specific embodiment of this utility model, four valves are provided. The first pressure plate 12 and the second pressure plate 13 are each provided with two small flow holes 122 and two large flow holes 121. On the same pressure plate, the small flow holes 122 and the large flow holes 121 are alternately distributed, thereby forming four unidirectional channels.

[0086] Please refer to Figure 1 and Figure 3 In one embodiment of the present invention, the valve plate 111 has a wheel-shaped structure, and the valve plate 11 has multiple valve holes 112 circumferentially opened around the valve plate 111.

[0087] In this embodiment of the present invention, three valve holes 112 may be provided, and they are arranged in an arc-shaped hole structure. Thus, the valve plate 111 can deform toward the side of the large flow hole 121 under the action of pressure difference. The structure is relatively simple, and the valve plate 111 itself has good elastic deformation, which can improve the efficiency of pumping fluid.

[0088] In other embodiments, the valve plate 11 is provided with a plurality of connection holes spaced apart, the valve piece 111 is a cantilever structure, and one end is connected to the wall of the connection hole.

[0089] This embodiment of the invention uses a cantilever valve plate 111. One end of the valve plate 111 is connected to the wall of the connecting hole, while the other end is suspended. Thus, under the drive of fluid, the other end deforms relative to the valve plate 11. This cantilever structure can have good elastic deformation, thereby improving the efficiency of pumping fluid. The shape of the connecting hole can be circular, square, or other suitable polygons.

[0090] In some other embodiments, the plurality of valve plates 111 may include both wheel-type valve plates 111 and cantilever-type valves, and the specific number is not limited.

[0091] Please combine Figure 2 , Figure 2The dashed arrows indicate the fluid flow direction. The multiple valve plates 111 are sequentially designated as the first valve plate 111, the second valve plate 111, the third valve plate 111, and the fourth valve plate 111. The working principle of the piezoelectric micropump 100 provided by this utility model is as follows: the two first piezoelectric ceramics 231 are in phase and are 180° out of phase with the second piezoelectric ceramic 331, thereby ensuring that the pressure changes in the first pump chamber 2a and the second pump chamber 3a located on both sides of the pump body assembly 1 are opposite. Specifically, when the two first piezoelectric ceramics 231 drive the first vibrating plate 22 to vibrate upward, the volume in the first pump chamber 2a increases and the pressure decreases. At the same time, the second piezoelectric ceramic 331 drives the second vibrating plate 32 to vibrate upward, the volume in the second pump chamber 3a decreases and the pressure increases. Since the external pressure remains constant, the fluid causes the first valve plate 111 and the third valve plate 111 to deform upward under the action of the pressure difference. At this time, the first one-way channel and the third one-way channel open. At the same time, the second valve plate 111 and the fourth valve plate 111 are tightly attached to and cover the small flow hole 122, and the second one-way channel and the fourth one-way channel close. The fluid enters the first pump chamber 2a from the inlet 321 through the first one-way channel, and the fluid in the second pump chamber 3a enters the first pump chamber 2a through the third one-way channel.

[0092] When the two first piezoelectric ceramics 231 drive the first vibrating plate 22 to vibrate downwards, the volume in the first pump chamber 2a decreases and the pressure increases. At the same time, the second piezoelectric ceramic 331 drives the second vibrating plate 32 to vibrate downwards, and the volume in the second pump chamber 3a increases and the pressure decreases. Since the external pressure remains constant, the fluid causes the second valve plate 111 and the fourth valve plate 111 to deform upwards under the action of the pressure difference. At this time, the second one-way channel and the fourth one-way channel open. At the same time, the first valve plate 111 and the third valve plate 111 are tightly attached to and cover the small flow hole 122, and the first one-way channel and the third one-way channel close. The fluid in the left first pump chamber 2a enters the second pump chamber 3a through the second one-way channel, and the fluid in the right first pump chamber 2a enters the outlet 322 through the fourth one-way channel.

[0093] The fluid flowing out of outlet 322 flows into inlet 321 through an external circulating water path, and so on in a continuous cycle.

[0094] This utility model also proposes a heat dissipation circulation system, which includes a piezoelectric micropump 100. The specific structure of the piezoelectric micropump 100 is as described in the above embodiments. Since this heat dissipation circulation system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0095] The heat dissipation circulation system is the chip's operating system, which uses a piezoelectric micropump 100 to dissipate the heat generated during chip operation.

[0096] In addition, the heat dissipation circulation system may also include a piping structure that is connected to the inlet 321 and outlet 322 of the piezoelectric micropump 100.

[0097] Because the piezoelectric micropump 100 provided by this utility model has both a small size and high back pressure and flow rate, it can meet the heat dissipation requirements of high-power chips.

[0098] This utility model also proposes an electronic device, which includes a heat dissipation circulation system. The specific structure of the heat dissipation circulation system is as described in the above embodiments. Since this heat dissipation circulation system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0099] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A piezoelectric micropump, characterized by, The piezoelectric micropump comprises: a pump body assembly formed with a plurality of spaced one-way channels; a driving assembly comprising a first driving assembly and a second driving assembly, the first driving assembly and the second driving assembly being respectively arranged on opposite sides of the pump body assembly and respectively enclosing the pump body assembly to form at least one first pump cavity and at least one second pump cavity; the first pump cavity and the second pump cavity are both correspondingly connected to two adjacent one-way channels, the first pump cavity and the second pump cavity are arranged in series through the one-way channels, and a one-way flow channel is formed, and the first driving assembly and / or the second driving assembly form a water inlet and a water outlet corresponding to two ends of the one-way flow channel; under the driving of the first driving assembly and the second driving assembly, the pressure change in the first pump cavity is opposite to the pressure change in the second pump cavity.

2. The piezoelectric micropump of claim 1, wherein The sum of the number of the first pump cavity and the second pump cavity is odd, and the water inlet and the water outlet are located on the same side.

3. The piezoelectric micropump of claim 2, wherein, The one-way channel comprises a first one-way channel, a second one-way channel, a third one-way channel and a fourth one-way channel arranged at intervals; the first pump cavity is provided as two, one of the first pump cavities is connected to the first one-way channel and the second one-way channel, and the other first pump cavity is connected to the third one-way channel and the fourth one-way channel; the second pump cavity is provided as one, and the second pump cavity is connected to the second one-way channel and the third one-way channel; two first pump cavities, the second pump cavity, the first one-way channel, the second one-way channel, the third one-way channel and the fourth one-way channel jointly form the one-way flow channel; the water inlet is connected to the first one-way channel, and the water outlet is connected to the fourth one-way channel.

4. The piezoelectric micropump of claim 3, wherein the piezoelectric element is a piezoelectric bimorph. The first driving assembly comprises a first cavity plate, a first vibration plate and a first piezoelectric vibrator arranged in sequence on one side of the pump body assembly, the first cavity plate is spaced apart to provide two first through holes, the first vibration plate, the hole wall of the two first through holes and the pump body assembly enclose to form two first pump cavities, and the first piezoelectric vibrator is provided as two, and two first piezoelectric vibrators are arranged corresponding to two first pump cavities.

5. The piezoelectric micropump of claim 4, wherein the piezoelectric actuator is a piezoelectric bimorph. The first piezoelectric vibrator comprises a first piezoelectric ceramic and a first metal substrate connected to each other, and the first metal substrates of the two first piezoelectric vibrators are an integral structure.

6. The piezoelectric micropump of claim 5, wherein the piezoelectric actuator is a piezoelectric bimorph. The first vibration plate is made of metal material, and the first vibration plate and the first metal substrate are an integral structure.

7. The piezoelectric micropump of claim 3, wherein the piezoelectric actuator is a piezoelectric bimorph. The second driving assembly comprises a second cavity plate, a second vibration plate and a second piezoelectric vibrator arranged in sequence on the other side of the pump body assembly, the second cavity plate is provided with a second through hole, the second vibration plate, the hole wall of the second through hole and the pump body assembly enclose to form the second pump cavity; the second cavity plate is also provided with a water inlet connecting hole and a water outlet connecting hole, the water inlet connecting hole corresponds to and is connected to the first one-way channel, and the water outlet connecting hole corresponds to and is connected to the fourth one-way channel; The second vibrating plate is spaced apart to have a water inlet and a water outlet, the water inlet corresponds to and communicates with the water inlet connecting hole, and the water outlet corresponds to and communicates with the water outlet connecting hole.

8. The piezoelectric micropump of claim 7, wherein the piezoelectric actuator is a piezoelectric bimorph. The second piezoelectric vibrator comprises a second piezoelectric ceramic and a second metal substrate connected with each other. The second vibrating plate is made of metal material, and the second vibrating plate and the second metal substrate are in an integrated structure.

9. The piezoelectric micropump according to any one of claims 1 to 8, characterized in that The pump body assembly comprises a first pressing plate, a valve plate and a second pressing plate which are sequentially stacked, the valve plate is spaced apart to have a plurality of deformable valve pieces, the first pressing plate and the second pressing plate are respectively provided with large flow holes and small flow holes corresponding to the plurality of valve pieces, the area of the valve piece is larger than the area of the small flow hole and smaller than the area of the large flow hole, and one small flow hole, the corresponding valve piece and the large flow hole form one one-way channel.

10. The piezoelectric micropump of claim 9, wherein the piezoelectric actuator is a piezoelectric bimorph. The valve plate is provided with a plurality of valve holes in the periphery of the valve piece in the circumferential direction; or The valve plate is spaced apart to have a plurality of connecting holes, the valve piece is in a cantilever structure, and one end of the valve piece is connected to the hole wall of the connecting hole.

11. A heat dissipation circulation system, characterized in that, The heat dissipation circulation system comprises the piezoelectric micropump according to any one of claims 1 to 10.

12. An electronic device, comprising: The electronic device comprises the heat dissipation circulation system according to claim 11.

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