Mechanical device for adjusting polarization state of laser beam

Abstract

The utility model provides a mechanical device for adjusting the polarization state of a laser beam, and the device comprises an action execution mechanism which comprises a first action execution mechanism and a second action execution mechanism. A transmission mechanism; the polaroid mechanical assembly is used for installing a polaroid; the mechanical bearing is used for realizing rotation of the polaroid mechanical assembly; a bearing spacer; a spring collar for a shaft; the switching swing rod is used for switching the third polarization state of the polaroid; the stop lever is used for limiting the rotation angle of the polaroid; and a modular housing mount; the first action executing mechanism drives the polaroid mechanical assembly to rotate through the transmission mechanism. And the second action executing mechanism drives the switching swing rod to rotate. According to the mechanical device for adjusting the polarization state of the laser beam provided by the utility model, the rotation angle of the polaroid is positioned by using the mechanical gear lever, the angle positioning precision is high, and the polarization state can be accurately and efficiently adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to laser technology field especially relates to a kind of mechanical device for laser beam polarization state adjustment. BACKGROUND

[0002] Light Amplification by Stimulated Emission of Radiation (LASER) is stimulated emission of light amplification, and is used in optical fiber communication, laser radar, laser weapon, medical treatment, ranging and other fields. The polarization state of laser refers to the vibration direction of electric field in the space propagation of laser. Laser has linear polarization, circular polarization and elliptical polarization, and the polarization state of output beam needs to be different when doing laser experiment or optical design according to different requirements, so polaroid is needed to adjust the polarization state of light beam. For example, in the wafer defect detection field in semiconductor front-end process technology, by making laser beam with linear polarization characteristics vertically incident and passing through a specific type of polaroid, the polarization state is changed by rotating the polaroid to make the polarization transmission axis of the polaroid and the vibration direction of incident linearly polarized light form a certain angle.

[0003] At present, the polaroid with adjusted polarization state is often put into the optical path, and then the outgoing light emits fixed polarization state. However, if the polarization of light beam needs to be adjusted in real time to test the polarization state of light beam in optical experiment, or the polarization state of outgoing light needs to be changed, the laser must be turned off to take out the polaroid for adjustment. As a result, the experimental efficiency is reduced, and if the polaroid is taken out and put back into the optical path, the optical path may be deviated, which may affect the final result of optical experiment or optical design.

[0004] Therefore, it is urgent to design a device capable of directly adjusting the polarization state of polaroid installed in the optical path in real time. UTILITY MODEL CONTENT

[0005] In view of part or all of the problems in the prior art, the utility model provides a kind of mechanical device for laser beam polarization state adjustment, comprising:

[0006] action execution mechanism, which includes first action execution mechanism and second action execution mechanism;

[0007] Transmission mechanism;

[0008] Polaroid mechanical assembly for installing polaroid;

[0009] Mechanical bearing for realizing rotation of polaroid mechanical assembly;

[0010] bearing spacer ring;

[0011] spring retainer for shaft;

[0012] switching swing lever for switching the third polarization state of the polarizer;

[0013] stop lever for limiting the rotation angle of the polarizer; and

[0014] modular housing mounting seat;

[0015] the first action execution mechanism drives the polarizer mechanical assembly to rotate through the transmission mechanism;

[0016] the second action execution mechanism drives the switching swing lever to rotate.

[0017] Further, the first action execution mechanism is a motor or a reduction gear integrated structure, or a rotating air cylinder or a pneumatic driving component; and / or

[0018] the second action execution mechanism is a motor or a reduction gear integrated mechanism, or a rotating air cylinder or a pneumatic driving component.

[0019] Further, the transmission mechanism is a synchronous belt transmission mechanism, or a gear transmission mechanism, or a chain wheel transmission mechanism, or a connecting rod transmission mechanism.

[0020] Further, the polarizer mechanical assembly includes a polarizer mounting seat, a polarizer pressing plate, and an O-ring.

[0021] Further, one end of the polarizer mounting seat is arranged with a rotating shaft, the rotating shaft is a hollow structure, and the end of the rotating shaft is arranged with a groove for mounting a spring retainer for shaft;

[0022] The other end of the polarizer mounting seat is arranged with a groove for mounting a polarizer, the bottom of the groove is arranged with a groove for placing an O-ring, and the polarizer pressing plate is mounted on the end face of the polarizer mounting seat.

[0023] Further, one end of the switching swing lever is arranged with a fixed stop lever, when the stop lever on the polarizer mounting seat rotates to contact and stop the stop lever on the switching swing lever, the polarizer mounting seat is at a 22.5° position, and the state of the polarizer is the third polarization state of the polarizer.

[0024] Further, the modular housing mounting seat is arranged with a mounting hole of an action execution mechanism mounting seat, and the action execution mechanism mounting seat is used for mounting the action execution mechanism.

[0025] Further, the modular housing mounting seat is arranged with four stoppers, two of which are used to limit the angle range of the polarizer mounting seat rotation, and the other two are used to limit the angle range of the switching swing rod rotation.

[0026] Further, the polarizer mounting seat is arranged with a fixed stopper cooperating with two stoppers of the modular mounting seat to limit the rotation angle of the polarizer mounting seat.

[0027] Further, the angle range of the polarizer mounting seat rotation is 0°-45°;

[0028] When the angle of the polarizer mounting seat is 0°, it corresponds to the first polarization state of the polarizer;

[0029] When the angle of the polarizer mounting seat is 45°, it corresponds to the second polarization state of the polarizer;

[0030] When the angle of the polarizer mounting seat is 22.5°, it corresponds to the third polarization state of the polarizer.

[0031] The technical scheme provided by the utility model has the following advantages:

[0032] 1. The mechanical device for adjusting the polarization state of a laser beam provided by the utility model uses a mechanical stopper with precise positioning by machining to position the rotation angle of a polarizer, has high angle positioning precision, and the positioning precision is not affected by the motion control precision of a motion execution mechanism, has low control requirements for the motion execution mechanism, can accurately and efficiently adjust the polarization state and switch between three different states.

[0033] 2. The mechanical device for adjusting the polarization state of a laser beam provided by the utility model has compact structure design, integrates all components into one, forms a modular unit, has small overall external shape structure size, can greatly save the installation space inside the device, and is convenient to integrate as a general-purpose module into other optical instruments or devices with the same type of application.

[0034] 3. The mechanical device for adjusting the polarization state of a laser beam provided by the utility model uses common standard components such as synchronous pulleys, mechanical bearings, spring retainer rings for shafts, O-rings, and stoppers, can greatly reduce the comprehensive development cost of the device under the premise of meeting design requirements. BRIEF DESCRIPTION OF DRAWINGS

[0035] To further clarify the above and other advantages and features of the embodiments of the present utility model, a more particular description of embodiments of the present utility model will be rendered by reference to specific embodiments thereof which are illustrated in the drawings. It is appreciated that these drawings depict only typical embodiments of the present utility model and are therefore not to be considered limiting of its scope. The drawings comprise a plurality of figures identified in the following table, in which like reference numerals are employed to designate corresponding parts throughout the different views.

[0036] Figure 1 The appearance perspective view of the mechanical device for adjusting the polarization state of a laser beam of one embodiment of the present utility model is shown;

[0037] Figure 2 The cross-sectional view of the mechanical device for adjusting the polarization state of a laser beam of one embodiment of the present utility model is shown;

[0038] Figure 3 The appearance front view of the mechanical device for adjusting the polarization state of a laser beam of one embodiment of the present utility model corresponding to the third polarization state of a polarizer is shown;

[0039] Figure 4 The appearance front view of the mechanical device for adjusting the polarization state of a laser beam of one embodiment of the present utility model corresponding to the second polarization state of a polarizer is shown; and

[0040] Figure 5 The appearance front view of the mechanical device for adjusting the polarization state of a laser beam of one embodiment of the present utility model corresponding to the first polarization state of a polarizer is shown. DETAILED DESCRIPTION

[0041] In the following description, the present utility model is described with reference to various embodiments thereof. However, a person skilled in the art will recognize that the various embodiments can be practiced without one or more of the specific details, or with other replacement and / or additional methods or components, and in some instances, well-known structures or operations are not shown or described in detail in order not to obscure the pertinent aspects of the utility model. Similarly, for purposes of explanation, specific numbers and configurations are set forth in order to provide a thorough understanding of the embodiments of the present utility model. However, the present utility model can be practiced without the specific details (e.g., an equivalent arrangement, structure and operation) and in other instances, well-known structures or operations are not shown or described in detail in order not to obscure the pertinent aspects of the utility model.

[0042] In the present utility model, unless specifically indicated, "arranged on" and "arranged above" do not exclude the presence of an intermediate object between them. In addition, "arranged on or above" only indicates the relative position relationship between the two components, and in certain cases, such as after reversing the product direction, it can also be converted to "arranged below or below", and vice versa.

[0043] In this specification, reference to "one embodiment" or "the embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.

[0044] It should be noted that it is also to be understood that the embodiments of the application, the word "comprise", "comprising", "have", "have", "contain" and / or "contain", when used in this specification, means the presence of the stated feature, element and / or component, but does not exclude the presence or addition of one or more other features, elements, components and / or combinations thereof.

[0045] In this specification, "first", "second", unless specifically indicated, are used only to distinguish description, not contain size difference, and cannot be understood as explicit or implicit relative importance.

[0046] In this specification, the quantifier "a plurality of", "many" refers to one or more elements.

[0047] The utility model provides a kind of mechanical device for laser beam polarization state adjustment, can quickly, accurately make the polarizer installed on it rotate to three different angles, to realize the adjustment for laser polarization state, and can quickly and efficiently realize the back and forth switching of polarization state in three different states.The mechanical structure of the mechanical device is compact, and each component is integrated into a whole, forming a modular unit, the overall appearance structure size is smaller, can greatly save the installation space inside equipment, also facilitate as a kind of general type module integrated into other optical instruments or equipment with the same type application.Meanwhile, the mechanical parts constituting the actuating mechanism are mostly using common standard parts, which can greatly reduce the comprehensive development cost of equipment under the premise of meeting design requirements.

[0048] The scheme of the utility model will be further described below in conjunction with the embodiment drawing.

[0049] Figure 1 The appearance three-dimensional schematic diagram of the mechanical device for laser beam polarization state adjustment of one embodiment of the utility model is shown. Figure 2A cross-sectional view schematic diagram of the mechanical device for adjusting the polarization state of laser beam is shown in an embodiment of the utility model. As shown in the figure, the mechanical device for adjusting the polarization state of laser beam comprises a modular housing mounting seat 1, a first action execution mechanism 2, a second action execution mechanism 3, a main transmission mechanism 4, a slave transmission mechanism 5, a synchronous belt 6, a polarizer mounting seat 7, a polarizer pressing plate 8, a switching swing lever 10, an O-ring 11, a mechanical bearing 12, a bearing spacer 13, a shaft spring retainer 14, an action execution mechanism mounting seat 15, a polarizer mounting seat upper stop lever 16, a switching swing lever upper stop lever 17, a polarizer mounting seat rotation limiting stop lever 18, a switching swing lever limiting stop lever 19. The polarizer 9 is arranged in the polarizer mounting seat 7.

[0050] The action execution mechanism comprises the first action execution mechanism 2 and the second action execution mechanism 3. The transmission mechanism comprises the main transmission mechanism 4, the slave transmission mechanism 5 and the synchronous belt 6. Figure 1 And Figure 2 The transmission mechanism in the above is a synchronous belt transmission mechanism. In an embodiment of the utility model, the transmission mechanism can also be a gear transmission mechanism or a chain wheel transmission mechanism or a connecting rod transmission mechanism. The main transmission mechanism 4 drives the slave transmission mechanism 5 to rotate through the synchronous belt 6. The polarizer mechanical assembly is used for installing the polarizer, and the polarizer mechanical assembly polarizer mounting seat 7, polarizer pressing plate 8 and O-ring 11. The mechanical bearing 12 is used to realize the rotation of the polarizer mechanical assembly. The switching swing lever 10 is used to realize the switching of the third polarization state of the polarizer. The stop lever is used for the limiting of the rotation angle of the polarizer, and the stop lever comprises the polarizer mounting seat upper stop lever 16, the switching swing lever upper stop lever 17, the polarizer mounting seat rotation limiting stop lever 18 and the switching swing lever limiting stop lever 19. The modular housing mounting seat 1 is used for installing and fixing the above-mentioned components.

[0051] The first action execution mechanism 2 drives the polarizer mechanical assembly to rotate through the transmission mechanism, and the second action execution mechanism 3 drives the switching swing lever to rotate. In an embodiment of the utility model, the first action execution mechanism 2 can be a motor or a speed reducer integrated structure or a rotary air cylinder or a pneumatic driving part; the second action execution mechanism 3 can be a motor or a speed reducer integrated mechanism or a rotary air cylinder or a pneumatic driving part.

[0052] One end of the polarizer mounting seat 7 is arranged with a rotating shaft, and the rotating shaft is a hollow structure, and the hollow structure is used for passing through the laser beam. The outer diameter of the rotating shaft is matched with the inner hole of the mechanical bearing 12 to realize the rotation of the whole polarizer mechanical assembly; the end of the rotating shaft is arranged with a groove for installing the shaft spring retainer 14; the rotating shaft is arranged with a step with increased outer diameter at a certain position away from the groove, for positioning the bearing inner ring in the axial direction of the rotating shaft.

[0053] The middle part of the polarizer mounting seat 7 is arranged with a shaft shoulder matched with the inner hole of the transmission mechanism 5. A jam screw is arranged on the transmission mechanism 5. After the shaft shoulder on the polarizer mounting seat 7 is jammed by the jam screw, the polarizer mounting seat 7 can be driven to rotate with the transmission mechanism 5. After the transmission mechanism 5 is mounted on the polarizer mounting seat 7 and fastened, a mechanical bearing 12, a bearing spacer 13 and another mechanical bearing 12 are sequentially mounted on the rotating shaft from the end side of the rotating shaft. After the assembly is completed, the elastic retaining ring 14 for the shaft is mounted in the clamping groove at the end of the rotating shaft. The two bearings can be positioned and mounted in the axial direction of the rotating shaft. The assembled components can be mounted in the modular housing mounting seat 1. After being mounted in the corresponding position, the two bearing outer rings can be fixed relative to the modular housing mounting seat by tightening the jam screw at the bottom of the modular housing mounting seat.

[0054] The other end of the polarizer mounting seat 7 is arranged with a groove for mounting a polarizer. A groove for placing an O-ring is arranged at the bottom of the groove. After the O-ring is placed in the groove, the polarizer is placed in the groove. Finally, the polarizer pressing plate is mounted on the end face of the polarizer mounting seat. After being locked by the corresponding mounting screw, the polarizer can be pressed tightly by the polarizer pressing plate, so that the polarizer can rotate with the polarizer mounting seat. On the other hand, when the mounting screw is loosened, the polarizer is not pressed tightly by the pressing plate. The polarizer can be manually rotated by the part of the polarizer exposed outside the groove. Before the polarizer is pressed tightly, the initial installation angle of the polarizer relative to the polarizer mounting seat is adjusted.

[0055] The modular housing mounting seat 1 is reserved with mounting holes of the action execution mechanism mounting seat 15. The first action execution mechanism 2 is pre-installed on the action execution mechanism mounting seat 15. Then, the main transmission mechanism 4 is installed on the output shaft of the first action execution mechanism 2 through the jam screw arranged thereon. Then, the first action execution mechanism 2 and the main transmission mechanism 4 are installed on the modular housing mounting seat 1 through the action execution mechanism mounting seat 15. Before being installed in place, the synchronous belt can be sleeved on the corresponding synchronous belt matching positions of the main transmission mechanism 4 and the transmission mechanism 5. Then, the action execution mechanism mounting seat 15 is installed and fastened. The synchronous belt is engaged with the matched main transmission mechanism 4 and transmission mechanism 5 at the same time of fastening. Thus, the installation of the transmission mechanism is completed. When the first action execution mechanism 2 drives the main transmission mechanism 4 to rotate, the polarizer mounted on the polarizer mounting seat 7 will also rotate with the transmission mechanism 5 under the action of the transmission mechanism.

[0056] Another action executing mechanism mounting seat is arranged on the modular shell mounting seat 1, and the second action executing mechanism 3 can be mounted to the corresponding position and fixed. After the second action executing mechanism 3 is fixed, the switching swing rod 10 can be fixed on the output shaft of the second action executing mechanism 3 through the locking screw arranged thereon, so that the second action executing mechanism 3 can drive the switching swing rod to rotate.

[0057] Four stoppers, namely two polaroid mounting seat rotation limiting stoppers 18 and two switching swing rod limiting stoppers 19, are arranged on the modular shell mounting seat 1, and each stopper has a specific position. The ends of the two polaroid mounting seat rotation limiting stoppers 18 are more protruding, and are used for limiting the angle range of the rotation of the polaroid mounting seat. The other two switching swing rod limiting stoppers 19 are used for limiting the angle range of the rotation of the switching swing rod.

[0058] One fixed stopper, namely a polaroid mounting seat upper stopper 16, is arranged on one side of the groove of the polaroid mounting seat 7, and cooperates with the more protruding two polaroid mounting seat rotation limiting stoppers 18 on the above-mentioned modular mounting seat, so that the rotation angle of the polaroid mounting seat is limited to a certain range. In the embodiment, the angle range of the rotation of the polaroid mounting seat is 0°-45°.

[0059] One fixed stopper, namely a switching swing rod upper stopper 17, is arranged on one end of the switching swing rod 10. When the switching swing rod 10 rotates to the stopper close to the polaroid mounting seat 7 and stops, the rotation angle range of the polaroid mounting seat is further compressed. When the stopper on the polaroid mounting seat 7 rotates to the stopper on the switching swing rod 10 and stops, the rotation angle position of the polaroid is determined as the angle designed in advance. At this time, the polaroid mounting seat is at a position of 22.5°, and the state of the polaroid is a third polaroid state, as shown in FIG. 6. Figure 3 When the angle of the polaroid mounting seat is 45°, the second polaroid state of the polaroid is corresponded, as shown in FIG. 5. Figure 4 When the angle of the polaroid mounting seat is 0°, the first polaroid state of the polaroid is corresponded, as shown in FIG. 4. Figure 5 In one embodiment of the utility model, the first polaroid state, the second polaroid state and the third polaroid state of the polaroid correspond to one of a polaroid P polarization state, a polaroid S polarization state and a polaroid Q polarization state.

[0060] The mechanical device for adjusting polarization state of laser beam provided by the utility model, through the interaction of the stop lever arranged on the polaroid mounting seat and the corresponding stop lever on the modularized shell mounting seat, the polaroid can be kept unmoved at two rotary angle positions, so that the adjustment of the two polarization states of the laser beam by the polaroid is realized; through the interaction of the stop lever on the polaroid mounting seat and the stop lever on the switching swing lever, the polaroid can be kept unmoved at a third angle position between the above two rotary angles, so that the adjustment of the third polarization state of the laser beam by the polaroid is realized; through the movement of the two action executing mechanisms according to the specific order process, the back and forth switching of the polarization state of the laser beam in three different states can be realized quickly and efficiently.

[0061] The mechanical device for adjusting polarization state of laser beam provided by the utility model uses the mechanical stop lever of machining precision positioning to position the rotary angle of the polaroid, the angle positioning precision is high, and the positioning precision is not affected by the motion control precision of the action executing mechanism, the control requirement of the action executing mechanism is low, the adjustment of the polarization state and the back and forth switching in three different states can be realized accurately and efficiently; the mechanical device is compact in structure design, the components are integrated into an entity, form a modularized unit, the overall appearance structure size is small, the installation space inside the equipment can be greatly saved, and it is also convenient to integrate as a general type of module into other optical instruments or equipment with the same type of application; the mechanical components used by the mechanical device are all common standard parts, such as synchronous pulley, mechanical bearing, spring retainer for shaft, O-ring, stop lever, etc., which can greatly reduce the comprehensive development cost of the equipment under the premise of meeting the design requirements.

[0062] Although the embodiments of the utility model are described above, it should be understood that they are only presented as examples, not as limitations. It is obvious for those skilled in the related art that various combinations, modifications and changes can be made without departing from the spirit and scope of the utility model. Therefore, the width and scope of the utility model disclosed herein should not be limited by the above disclosed exemplary embodiments, but should be defined only according to the technical scheme and its equivalent replacement.

Claims

1. A mechanical device for laser beam polarization state adjustment, characterized in that, Comprise: action execution mechanism, comprising a first action execution mechanism and a second action execution mechanism; transmission mechanism; polarizer mechanical assembly for installing polarizer; mechanical bearing for realizing rotation of polarizer mechanical assembly; bearing spacer; spring retainer for shaft; switching swing lever for realizing switching of third polarization state of polarizer; stop lever for limiting rotation angle of polarizer; and modular shell mounting seat; The first action execution mechanism drives the polarizer mechanical assembly to rotate through the transmission mechanism; The second action execution mechanism drives the switching swing lever to rotate.

2. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: The first action execution mechanism is motor or integrated structure of speed reducer, or rotary cylinder or pneumatic drive component; and / or The second action execution mechanism is motor or integrated structure of speed reducer, or rotary cylinder or pneumatic drive component.

3. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: The transmission mechanism is synchronous belt transmission mechanism or gear transmission mechanism or chain wheel transmission mechanism or connecting rod transmission mechanism.

4. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: The polarizer mechanical assembly comprises polarizer mounting seat, polarizer pressing plate and O-ring.

5. The mechanical device for adjusting polarization state of laser beam according to claim 4, wherein: One end of the polarizer mounting seat is arranged with rotating shaft, the rotating shaft is hollow structure, and the end of the rotating shaft is arranged with groove for installing spring retainer for shaft; The other end of the polarizer mounting seat is arranged with groove for installing polarizer, the bottom of the groove is arranged with groove for placing O-ring, and the polarizer pressing plate is installed on the end face of the polarizer mounting seat.

6. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: One end of the switching swing lever is arranged with fixed stop lever, when the stop lever on the polarizer mounting seat rotates to contact with the stop lever on the switching swing lever and stops, the polarizer mounting seat is at 22.5° position, and the state of the polarizer is third polarization state of polarizer.

7. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: The modular shell mounting seat is arranged with mounting hole of action execution mechanism mounting seat for installing the action execution mechanism.

8. The mechanical device for adjusting polarization state of laser beam according to claim 1, wherein: The modular shell mounting seat is arranged with four stop levers, two of which are used to limit the angle range of rotation of the polarizer mounting seat, and the other two are used to limit the angle range of rotation of the switching swing lever.

9. The mechanical device for adjusting polarization state of laser beam according to claim 4, wherein: The polarizer mounting seat is arranged with fixed stop lever, which cooperates with two stop levers of the modular mounting seat, for limiting the rotation angle of the polarizer mounting seat.

10. The mechanical device for laser beam polarization state adjustment according to claim 9, wherein, the angle range of the rotation of the polarizer mount is 0°-45°; the angle of the polarizer mount is 0°, corresponding to the first polarization state of the polarizer; the angle of the polarizer mount is 45°, corresponding to the second polarization state of the polarizer; the angle of the polarizer mount is 22.5°, corresponding to the third polarization state of the polarizer.

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