Lissajous optical fiber scanner with supporting plate

Abstract

The application discloses a Lissajous optical fiber scanner with a support plate, comprising a cylindrical body, a support plate fixedly connected with the cylindrical body and an optical fiber, at least one of the left and right sides of the cylindrical body is provided with a first piezoelectric plate, and at least one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric plate. The rear end of the supporting plate is fixedly connected with the barrel-shaped body, the supporting plate and the barrel-shaped body are provided with an overlapping part in the front-back direction, and the supporting plate and the overlapping part enable the inherent frequency of a combination part formed by the barrel-shaped body, the first piezoelectric plate, the second piezoelectric plate, the supporting plate and the optical fiber to be larger than the same-order inherent frequency of the combination part in the vertical direction. According to the invention, the piezoelectric actuating part of the Lissajous scanner does not need to have a specific difference in inherent frequencies in two driving directions, can also avoid coupling caused by vibration in the two driving directions, and reduces the processing difficulty and processing precision requirements.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical fiber scanner structure, and particularly relates to a Lissajous optical fiber scanner with a support plate. BACKGROUND

[0002] The optical fiber scanner is a display technology using a scanning driver to control the swing of an optical fiber while the light emitted by the optical fiber, which is mainly used in the technical fields of optical fiber scanning display technology, optical fiber scanning endoscope technology, optical fiber scanning radar and the like. When the optical fiber scanner is applied to image display, the color of the pattern irradiated by the technology is sharp and saturated, the contrast is high, the brightness is high, and the structure volume is very small.

[0003] The optical fiber scanner uses the mechanical resonance principle to make the cantilevered optical fiber achieve a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of Lissajous scanning generally has two driving parts in two directions, which drives the scanning device to vibrate in two directions at the same time. The closer the driving frequencies in the two directions in Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and theoretically the closer the driving frequencies in the two directions are, the better. However, the closer the inherent frequencies used in the two directions of the scanner are, the more obvious the vibration coupling effect will be, which will worsen the scanning trajectory, cause uncontrollable components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner should have a precise difference range, neither too small to cause coupling effect nor too large to cause non-uniformity.

[0004] However, the Lissajous scanner with inherent frequencies in two directions having a precise difference requires extremely high processing precision, and both the cost of processing equipment and the yield cannot be guaranteed. CONTENT OF THE INVENTION

[0005] The present application provides a Lissajous optical fiber scanner with a support plate to reduce the processing difficulty and improve the processing yield.

[0006] In order to achieve the above-mentioned application purposes, the present application provides a Lissajous optical fiber scanner with a support plate, which comprises a cylindrical body, a support plate fixedly connected with the cylindrical body, and an optical fiber fixedly arranged on the support plate in a cantilevered support manner,

[0007] The extension direction of the axis of the cylindrical body is the front-rear direction, the rear end of the cylindrical body is fixedly connected with the base to be supported by the base, at least one side of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet,

[0008] At least one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate in the vertical direction by the expansion and contraction of the second piezoelectric sheet.

[0009] The support plate is arranged in parallel to the horizontal direction, is located at the front side of the cylindrical body, and is fixedly connected to the rear end of the cylindrical body. The support plate and the cylindrical body have an overlapping portion in the front-rear direction. The support plate and the overlapping portion make the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate, and the optical fiber have a natural frequency in the horizontal direction that is greater than the same-order natural frequency of the combination in the vertical direction, and make the combination have a difference between a certain-order natural frequency in the vertical direction that is closest to the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, V being an integer greater than or equal to 1.

[0010] The difference satisfies that, when the piezoelectric actuating portion performs Lissajous scanning under the driving of the driving signal, the vibration of the combination in the horizontal direction and the vibration of the combination in the vertical direction do not couple.

[0011] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value of the difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating portion performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not couple. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.

[0012] Preferably, the natural frequency of the cylindrical body in the horizontal direction and the same-order natural frequency of the cylindrical body in the vertical direction are the same or similar, and the cylindrical body satisfying such a requirement is of a regular shape and a rotationally symmetric structure, so that the cylindrical body has low processing difficulty, the processing error is easy to control, and the yield is high, such as a cylindrical body or a square cylindrical body.

[0013] Optionally, any one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet. The number of the first piezoelectric sheets can be one, two, or more. When the number of the first piezoelectric sheets is two or more, each first piezoelectric sheet synchronously and equally expands and contracts.

[0014] Alternatively, the left and right sides of the cylindrical body are both provided with first piezoelectric sheets, the first piezoelectric sheet located on the left side synchronously and reversely expands and contracts with the first piezoelectric sheet located on the right side, and the front end of the cylindrical body is driven to vibrate left and right in the horizontal direction. The number of the first piezoelectric sheets located on the same side can be one, two, or more. When the number of the first piezoelectric sheets located on the same side is two or more, the first piezoelectric sheets located on the same side synchronously and equally expand and contract.

[0015] Optionally, any one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate up and down in the vertical direction by the expansion and contraction of the second piezoelectric sheet. The number of second piezoelectric sheets can be one, two or more. When the number of second piezoelectric sheets is two or more, the second piezoelectric sheets are synchronously and equally long in expansion and contraction.

[0016] Optionally, the upper and lower sides of the cylindrical body are both provided with second piezoelectric sheets, and the upper side second piezoelectric sheet and the lower side second piezoelectric sheet are synchronously and equally long in expansion and contraction in opposite directions, driving the front end of the cylindrical body to vibrate up and down in the vertical direction. The number of second piezoelectric sheets on the same side can be one, two or more. When the number of second piezoelectric sheets on the same side is two or more, the second piezoelectric sheets on the same side are synchronously and equally long in expansion and contraction.

[0017] Preferably, the surface of the first piezoelectric sheet or the second piezoelectric sheet provided on the cylindrical body is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the first piezoelectric sheet or the second piezoelectric sheet provided on the cylindrical body can be the inner surface of the cylindrical body, or the outer surface of the cylindrical body.

[0018] Further preferably, when the first piezoelectric sheets are arranged on both left and right sides of the cylindrical body, the first piezoelectric sheets on both left and right sides of the cylindrical body are symmetrically arranged, so as to drive the cylindrical body to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction; when the second piezoelectric sheets are arranged on both upper and lower sides of the cylindrical body, the second piezoelectric sheets on both upper and lower sides of the cylindrical body are symmetrically arranged, so as to drive the cylindrical body to accurately vibrate in the vertical direction without generating a displacement component in the horizontal direction.

[0019] One or more technical solutions in the present application have at least the following technical effects or advantages:

[0020] The present application allows the piezoelectric actuating part of the Lissajous scanner itself to not necessarily have a specific difference in the inherent frequency in the two driving directions, and also avoids the coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy; further preferably, the present application allows the inherent frequency of the cylindrical body in the two driving directions to be the same or close, and allows the cylindrical body itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the present application;

[0022] Figure 2 It is a structural schematic diagram of the overlapping part of the support plate and the cylindrical body in the front-rear direction;

[0023] Figure 3 Structure diagram of another embodiment of the utility model;

[0024] Figure 4 Structure diagram of third embodiment of the utility model;

[0025] Figure 5 Structure diagram of fourth embodiment of the utility model;

[0026] Figure 6 Structure diagram of fifth embodiment of the utility model;

[0027] Figure 7 Structure diagram of sixth embodiment of the utility model. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0029] Embodiment 1:

[0030] As shown in Figure 1 , Figure 2 , a Lissajous fiber scanner with a support plate comprises a cylindrical body 100, a support plate 103 fixedly connected with the cylindrical body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0031] The extending direction of the axis of the cylindrical body 100 is the front-back direction, the rear end of the cylindrical body 100 is fixedly connected with a base 200 to be supported by the base 200, at least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0032] At least one side of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0033] The support plate 103 is arranged in parallel to the horizontal direction, and is located at the front side of the cylindrical body 100, and the rear end is fixedly connected with the cylindrical body 100. The optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the cylindrical body 100 have a coincident part 105 in the front-rear direction. The support plate 103 and the coincident part 105 make the natural frequency of the combined part of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part in the vertical direction have a difference between a certain order natural frequency close to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.

[0034] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction. Among them, a certain order (for example, U order, U is an integer greater than or equal to 2) natural frequency is closest to the V order natural frequency in the horizontal direction (V is less than the U order natural frequency). The closer the driving frequencies in the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, and the more the number of points. In theory, the closer the driving frequencies in the two directions, the better. However, the closer the natural frequencies used by the combined part in the two directions, the more obvious the coupling effect. Therefore, the shape structure and / or size parameter of the support plate 103 and the coincident part 105 are adjusted so that the natural frequencies of the combined part used in the two directions are close enough to ensure good scanning effect and have uniform and dense scan grid, and at the same time have enough difference to prevent the vibration of the combined part in the two directions from being coupled.

[0035] The difference satisfies that when the piezoelectric actuator is driven to make Lissajous scan, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0036] Generally, the difference is in the range of 10Hz-12KHz. Further preferably, the difference is in the range of 1KHz-10KHz. The value of the V order natural frequency in the horizontal direction of the scanner cantilever is selected according to the selected scanner cantilever. As long as the difference satisfies that the scanner cantilever has enough amplitude when driven to make Lissajous scan, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0037] Preferably, the inherent frequency of the cylindrical body 100 in the horizontal direction and the same order inherent frequency in the vertical direction are the same or similar, the cylindrical body 100 meeting such requirements is of regular shape and rotationally symmetrical structure, so that the cylindrical body 100 has low processing difficulty, processing error is easy to control, and the yield is high, such as a cylindrical body or a square cylindrical body.

[0038] Optionally, any one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of first piezoelectric sheets 101 can be one, two or more. When the number of first piezoelectric sheets 101 is two or more, each first piezoelectric sheet 101 expands and contracts synchronously and equally.

[0039] Optionally, the left and right sides of the cylindrical body 100 are both provided with a first piezoelectric sheet 101, and the first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side expand and contract synchronously and equally in reverse, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 on the same side can be one, two or more. When the number of first piezoelectric sheets 101 on the same side is two or more, the first piezoelectric sheets 101 on the same side expand and contract synchronously and equally.

[0040] Optionally, any one side of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate up and down in the vertical direction by the expansion and contraction of the second piezoelectric sheet 102. The number of second piezoelectric sheets 102 can be one, two or more. When the number of second piezoelectric sheets 102 is two or more, the second piezoelectric sheets 102 expand and contract synchronously and equally.

[0041] Optionally, the upper and lower sides of the cylindrical body 100 are both provided with a second piezoelectric sheet 102, and the second piezoelectric sheet 102 on the upper side and the second piezoelectric sheet 102 on the lower side expand and contract synchronously and equally in reverse, driving the front end of the cylindrical body 100 to vibrate up and down in the vertical direction. The number of second piezoelectric sheets 102 on the same side can be one, two or more. When the number of second piezoelectric sheets 102 on the same side is two or more, the second piezoelectric sheets 102 on the same side expand and contract synchronously and equally.

[0042] Preferably, the surface of the cylindrical body 100 provided with the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical body 100 provided with the first piezoelectric sheet 101 or the second piezoelectric sheet 102 can be the inner surface of the cylindrical body 100, or the outer surface of the cylindrical body 100.

[0043] Further preferably, when the first piezoelectric sheet 101 is arranged on both sides of the cylindrical body 100, the first piezoelectric sheet 101 on both sides of the cylindrical body 100 is arranged symmetrically to drive the cylindrical body 100 to vibrate accurately in the horizontal direction left and right without generating a displacement component in the vertical direction; when the second piezoelectric sheet 102 is arranged on both sides of the cylindrical body 100, the second piezoelectric sheet 102 on both sides of the cylindrical body 100 is arranged symmetrically to drive the cylindrical body 100 to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0044] The application makes the piezoelectric actuating part of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequency in the two driving directions, and also avoids the coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy; further preferably, the application allows the inherent frequency of the cylindrical body 100 in the two driving directions to be the same or close, and allows the cylindrical body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and yield.

[0045] Embodiment 2:

[0046] As shown in Figure 1 , Figure 2 A Lissajous optical fiber scanner with a support plate, comprising a cylindrical body 100, a support plate 103 fixedly connected with the cylindrical body 100, and an optical fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0047] The axis extension direction of the cylindrical body 100 is the front-back direction, the rear end of the cylindrical body 100 is fixedly connected with the base 200 to be supported by the base 200, at least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0048] At least one side of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate in the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0049] The support plate 103 is arranged in a direction parallel to the horizontal plane, and is located at the front side of the cylindrical body 100, and the rear end thereof is fixedly connected with the cylindrical body 100,

[0050] The left and right side walls of the cylindrical body 100 are each provided with a mounting groove 106 for connecting the support plate 103, and the rear end of the support plate 103 is inserted into the mounting groove 106 and fixedly connected with the cylindrical body 100,

[0051] The optical fiber 104 is fixed at the front end of the support plate 103 in a cantilever support manner, the support plate 103 has a coincident part 105 with the cylindrical body 100 in the front-rear direction, the support plate 103 and the coincident part 105 make the natural frequency of the combination part of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part in the vertical direction closest to a certain order natural frequency of the V order natural frequency in the horizontal direction, and the V order natural frequency in the horizontal direction has a difference value, V is an integer greater than or equal to 1.

[0052] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to 2) natural frequency closest to the V order natural frequency in the horizontal direction of the combination part (V is less than the U order natural frequency), the closer the driving frequencies of the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, the more the number of points, and theoretically the closer the driving frequencies of the two directions, but the closer the natural frequencies used by the combination part in the two directions, the more obvious the coupling effect. Therefore, the shape and / or size parameters of the support plate 103 and the coincident part 105 are adjusted to make the natural frequencies of the combination part used in the two directions close enough to ensure good scanning effect and have uniform and dense scan grid, and at the same time have enough difference to make the vibration of the combination part in the two directions not coupled.

[0053] The difference value satisfies that when the piezoelectric actuator part is driven by the driving signal to make Lissajous scan, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0054] Generally, the difference value is in the range of 10 Hz to 12 KHz. Further preferably, the difference value is in the range of 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference value satisfies that when the piezoelectric actuator part is driven to make Lissajous scan, the scanner cantilever has enough amplitude, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0055] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar, and the cylindrical body 100 satisfying such requirements is a regular shape and a rotationally symmetric structure, so that the cylindrical body 100 has low processing difficulty, the processing error is easy to control, and the yield is high, such as a cylindrical body or a square cylindrical body.

[0056] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, which is not limited.

[0057] Optionally, as shown in Figure 1 , the inherent frequency of the cylindrical body 100 in the horizontal direction is the same as the inherent frequency in the vertical direction, and the outer contour is square, and the inside is provided with a center hole with the same contour as the outer contour and the same center as the outer contour.

[0058] Optionally, as shown in Figure 3 , the inherent frequency of the cylindrical body 100 in the horizontal direction is the same as the inherent frequency in the vertical direction, and the outer contour is square, and the inside is provided with a center hole with the same contour as the outer contour and the same center as the outer contour.

[0059] In this embodiment, the piezoelectric sheet attached to the outer surface or inner surface of the cylindrical body 100 is a flat plate type piezoelectric sheet or an arc-shaped piezoelectric sheet that matches the shape of the outer surface or inner surface of the cylindrical body 100, which is adaptively selected according to specific working conditions. On this basis, the setting mode of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as that of embodiment 1.

[0060] Embodiment 3:

[0061] As shown in Figure 1 , Figure 2 , a Lissajous fiber scanner with a support plate, comprising a cylindrical body 100, a support plate 103 fixedly connected with the cylindrical body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0062] The axis extension direction of the cylindrical body 100 is the front-back direction, the rear end of the cylindrical body 100 is fixedly connected with the base 200 to be supported by the base 200, at least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0063] At least one side of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate in the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0064] The inherent frequency of the cylindrical body 100 in the horizontal direction is the same as the inherent frequency in the vertical direction, and the outer contour is square, and the inside is provided with a center hole with the same contour as the outer contour and the same center as the outer contour.

[0065] The support plate 103 is arranged along a direction parallel to a horizontal plane, is located at a front side of the cylindrical body 100, and is fixedly connected to the cylindrical body 100 at a rear end. The support plate 103 and the cylindrical body 100 have a coinciding portion 105 in a front-rear direction. The left and right side walls of the cylindrical body 100 are each provided with a mounting groove 106 for connecting the support plate 103. A portion of the rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected to the cylindrical body 100. The optical fiber 104 is fixedly arranged at a front end of the support plate 103 in a cantilever support manner. The portion of the support plate 103 that is mounted in the mounting groove 106 and the portion of the cylindrical body 100 that coincides with the portion of the support plate 103 in the front-rear direction form the coinciding portion 105. The support plate 103 and the coinciding portion 105 are configured such that the natural frequency of the combined portion of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103, and the optical fiber 104 in a horizontal direction is greater than the same-order natural frequency of the combined portion in a vertical direction, and such that the combined portion has a difference between a U-order natural frequency closest to a V-order natural frequency in the horizontal direction in the vertical direction. In this embodiment, the V-order is the first order and the U-order is the second order. Of course, this is only a parameter selection in this embodiment, and in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0066] Specifically, the shape and / or size parameters of the support plate 103 and the coinciding portion 105 are adjusted such that the natural frequencies of the combined portion in the two directions simultaneously satisfy both being close enough to ensure good scanning effect and having a uniform and dense scanning grid, and simultaneously satisfying having a sufficient difference to prevent coupling of the vibrations of the combined portion in the two directions.

[0067] The difference satisfies that, when the piezoelectric actuating portion is driven by a driving signal to perform Lissajous scanning, the vibrations of the combined portion in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference is in a range of 10 Hz to 12 KHz. Further preferably, the difference is in a range of 1 KHz to 10 KHz. The value of the difference is selected according to the selected V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that, when the piezoelectric actuating portion is driven to perform Lissajous scanning, the scanner cantilever has a sufficient amplitude and the vibrations of the scanner cantilever in the horizontal direction and the vibrations in the vertical direction do not couple. For those skilled in the art, selecting the value according to the above description is a conventional technical means in the art.

[0068] Optionally, the mounting groove 106 can be located at a middle, upper, or lower portion of the left and right side walls of the cylindrical body 100 in the vertical direction, and no limitation is made in this regard.

[0069] The first piezoelectric sheet 101 and the second piezoelectric sheet 102 are arranged in the same manner as in Embodiment 1.

[0070] Embodiment 4:

[0071] As shown in Figure 3 , Figure 2 A Lissajous fiber scanner with a support plate comprises a cylindrical body 100, a support plate 103 fixedly connected with the cylindrical body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0072] The axis extension direction of the cylindrical body 100 is defined as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected with a base 200 to be supported by the base 200, at least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0073] At least one side of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0074] The natural frequency of the cylindrical body 100 in the horizontal direction and the natural frequency of the cylindrical body 100 in the vertical direction are the same, the outer contour of the cylindrical body 100 is circular, and the inner part of the cylindrical body 100 is provided with a central hole with a square or circular contour coaxial with the outer contour,

[0075] The support plate 103 is arranged along a direction parallel to a horizontal plane, is located at a front side of the cylindrical body 100, and is fixedly connected to the cylindrical body 100 at a rear end. The optical fiber 104 is fixedly arranged at a front end of the support plate 103 in a cantilever support manner. The support plate 103 and the cylindrical body 100 have a coinciding portion 105 in a front-rear direction. The left side wall and the right side wall of the cylindrical body 100 are each provided with a mounting groove 106 for connecting the support plate 103. A portion of the rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected to the cylindrical body 100. The portion of the support plate 103 inserted into the mounting groove 106 and the portion of the cylindrical body 100 coinciding with the portion of the support plate 103 in the front-rear direction constitute the coinciding portion 105. The support plate 103 and the coinciding portion 105 are configured such that a natural frequency of a combined portion of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103, and the optical fiber 104 in a horizontal direction is greater than a same-order natural frequency of the combined portion in a vertical direction, and such that the combined portion has a difference between a U-order natural frequency closest to a V-order natural frequency in the horizontal direction in the vertical direction. In this embodiment, the V-order is the first order and the U-order is the second order. Of course, this is only a parameter selection in this embodiment, and in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0076] Specifically, the shape and / or size parameters of the support plate 103 and the coinciding portion 105 are adjusted such that the natural frequencies of the combined portion in the two directions simultaneously satisfy both being close enough to ensure good scanning effect and having a uniform and dense scanning grid, and simultaneously satisfying having a sufficient difference to prevent coupling of vibrations of the combined portion in the two directions.

[0077] The difference satisfies that, when the piezoelectric actuating portion is driven to perform Lissajous scanning, the vibrations of the combined portion in the horizontal direction and in the vertical direction do not couple. Generally, the difference is in a range of 10 Hz to 12 KHz. Further preferably, the difference is in a range of 1 KHz to 10 KHz. The value of the difference is selected according to the selected V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that, when the piezoelectric actuating portion is driven to perform Lissajous scanning, the scanner cantilever has a sufficient amplitude and the vibrations of the scanner cantilever in the horizontal direction and in the vertical direction do not couple. For those skilled in the art, selecting the value according to the above description is a routine technical means in the art.

[0078] Optionally, the mounting groove 106 can be located at a middle portion, an upper portion, or a lower portion of the left side wall and the right side wall of the cylindrical body 100 in the vertical direction, and is not limited in this regard.

[0079] In this embodiment, the piezoelectric sheet attached to the outer surface or inner surface of the cylindrical body 100 is a flat plate type piezoelectric sheet or an arc-shaped piezoelectric sheet that matches the shape of the outer surface or inner surface of the cylindrical body 100, and is adaptively selected according to the specific working conditions. On this basis, the setting mode of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as that in Embodiment 1.

[0080] Embodiment 5:

[0081] As shown in Figure 4 , Figure 2 , a Lissajous fiber scanner with a support plate includes a cylindrical body 100, a support plate 103 fixedly connected with the cylindrical body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0082] The axis extension direction of the cylindrical body 100 is the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected with the base 200 to be supported by the base 200, and at least one side of the left and right sides of the cylindrical body 100 is provided with the first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0083] At least one side of the upper and lower sides of the cylindrical body 100 is provided with the second piezoelectric sheet 102, and the front end of the cylindrical body 100 is driven to vibrate along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102;

[0084] The support plate 103 is arranged along the direction parallel to the horizontal plane, and is located at the front side of the cylindrical body 100, and a part of the rear end thereof is attached to the upper surface or lower surface of the cylindrical body 100 and is fixedly connected with the cylindrical body 100, the surface of the cylindrical body 100 for attaching the support plate is a plane, the fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner, the part of the support plate 103 attached to the cylindrical body 100 and the part of the cylindrical body 100 coinciding with the part of the support plate 103 in the front-rear direction constitute a coinciding part 105, the support plate 103 and the coinciding part 105 make the inherent frequency of the combination part of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the fiber 104 in the horizontal direction greater than the same frequency inherent frequency of the combination part in the vertical direction, and make the combination part in the vertical direction closest to the U-order inherent frequency between the V-order inherent frequency in the horizontal direction and the U-order inherent frequency closest to the V-order inherent frequency in the horizontal direction. In this embodiment, the V-order is the first order, and the U-order is the second order.

[0085] Of course, this is only the parameter selection of this embodiment, in other embodiments of similar structure type to this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0086] Specifically, the shape structure and / or size parameter of the support plate 103 and the coincident part 105 are adjusted so that the combined part in two directions satisfies the inherent frequency which is close enough to ensure good scanning effect and has uniform and dense scanning grid, and has enough difference to make the vibration of the combined part in two directions not coupled.

[0087] Preferably, the inherent frequency of the cylindrical body 100 in the horizontal direction and the same order inherent frequency in the vertical direction are the same. Optionally, the outer contour is square, and the inner part is provided with a center hole with square or circular contour coaxial with the outer contour. Of course, this is not limited, for example, the outer surface is a generally cylindrical surface, and several planes are arranged rotationally symmetrically, one of which is used for attaching the support plate.

[0088] The difference satisfies the Lissajous scanning of the piezoelectric actuator under the driving of the driving signal, so that the vibration of the combined part in the horizontal direction and the vibration in the vertical direction are not coupled. Generally, the difference range is 10Hz-12KHz. Further preferably, the difference range is 1KHz-10KHz. The value is selected according to the selected V-order inherent frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies the scanner cantilever having sufficient amplitude when the piezoelectric actuator is driven to make Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction is not coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0089] In this embodiment, the piezoelectric sheet attached to the outer surface or inner surface of the cylindrical body 100 is a flat plate type piezoelectric sheet or an arc-shaped piezoelectric sheet which cooperates with the outer surface or inner surface of the cylindrical body 100, and is adaptively selected according to specific working conditions. On this basis, the setting mode of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as that in embodiment 1.

[0090] Embodiment 6:

[0091] In combination Figure 5 , Figure 2 As shown in FIGS. 1-3, a Lissajous optical fiber scanner with a support plate includes a piezoelectric material cylindrical body 100, a support plate 103 fixedly connected with the piezoelectric material cylindrical body 100, and an optical fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0092] The axis extension direction of the piezoelectric material cylindrical body 100 is the front-back direction, and the rear end of the piezoelectric material cylindrical body 100 is fixedly connected with the base 200 to be supported by the base 200,

[0093] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction.

[0094] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 arranged correspondingly, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction.

[0095] The support plate 103 is arranged along the horizontal direction, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end of the support plate 103 is fixedly connected with the piezoelectric material cylinder body 100, the optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner, the support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, and the support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and make the combination have a difference between the certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.

[0096] The combination part has a first-order natural frequency, a second-order natural frequency, a third-order natural frequency, and an N-order natural frequency in the vertical direction, wherein the natural frequency of a certain order (for example, U order, U is an integer greater than or equal to two) is closest to the V-order natural frequency of the combination part in the horizontal direction (V is less than the first-order natural frequency of U), the closer the driving frequencies of the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, the more the number of points, and theoretically the closer the driving frequencies of the two directions, the better, but the closer the natural frequencies of the combination part used in the two directions, the more obvious the coupling effect, so the application adjusts the shape and / or size parameters of the support plate 103 and the overlapping part 105, so that the natural frequencies of the combination part used in the two directions are close enough to ensure good scanning effect and have uniform and dense scanning grid; at the same time, there is a sufficient difference, so that the vibration of the combination part in the two directions will not be coupled.

[0097] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0098] Generally, the difference is in the range of 10Hz-12KHz. Further preferably, the difference is in the range of 1KHz-10KHz. The value is selected according to the selected V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0099] Preferably, the natural frequency of the piezoelectric material cylinder body 100 in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar, and the piezoelectric material cylinder body 100 satisfying such requirements is of regular shape and rotational symmetry structure, so that the piezoelectric material cylinder body 100 has low processing difficulty, easy to control processing error, and high yield, such as a cylindrical body or a square cylindrical body.

[0100] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0101] Optionally, the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with corresponding first inner electrodes 1011 and first outer electrodes 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrodes 1011 and the corresponding first outer electrodes 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrodes 1011 and the corresponding first outer electrodes 1012 is driven to stretch and contract in the front-back direction by the first inner electrodes 1011 and the corresponding first outer electrodes 1012. The piezoelectric material on the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right along the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0102] Optionally, the inner surface and the outer surface of any one of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with corresponding second inner electrodes 1021 and second outer electrodes 1022, the part of the piezoelectric material cylinder body 100 between the second inner electrodes 1021 and the second outer electrodes 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to stretch and contract in the front-back direction by the second inner electrodes 1021 and the second outer electrodes 1022. The front end of the piezoelectric material cylinder body 100 is driven to vibrate along the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 on the same side can be one, two or more.

[0103] Optionally, the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with corresponding second inner electrodes 1021 and second outer electrodes 1022, the part of the piezoelectric material cylinder body 100 between the second inner electrodes 1021 and the second outer electrodes 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to stretch and contract in the front-back direction by the second inner electrodes 1021 and the second outer electrodes 1022. The piezoelectric material on the upper and lower sides synchronously and reversely stretches and contracts by the same length, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate along the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 on the same side can be one, two or more.

[0104] Further preferably, when the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the corresponding first outer electrode 1012, the first inner electrode 1011 of the left and right sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction; when the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with the second inner electrode 1021 and the corresponding second outer electrode 1022, the second inner electrode 1021 of the upper and lower sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate in the vertical direction without generating a displacement component in the horizontal direction.

[0105] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision; further preferably, the present application allows the natural frequency of the piezoelectric material cylinder body 100 in the two driving directions to be the same or close, and allows the piezoelectric material cylinder body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, and significantly improves the processing efficiency and the yield.

[0106] Embodiment 7:

[0107] In combination with FIGS. 1-6, Figure 5 , Figure 2 As shown in FIG. 7, a Lissajous fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0108] The axis extension direction of the piezoelectric material cylinder body 100 is the front-rear direction, and the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200 to be supported by the base 200,

[0109] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the corresponding first inner electrode 1011 and the first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the corresponding first inner electrode 1011 and the first outer electrode 1012 is polarized in the thickness direction, so that the piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right in the horizontal direction,

[0110] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction,

[0111] The support plate 103 is arranged along the direction parallel to the horizontal plane, is located at the front side of the piezoelectric material cylinder body 100, and the rear end thereof is fixedly connected with the piezoelectric material cylinder body 100. The left side wall and the right side wall of the piezoelectric material cylinder body 100 are respectively provided with a mounting groove 106 for connecting the support plate 103. The part of the rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected with the piezoelectric material cylinder body 100. The optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction. The part of the support plate 103 which is inserted into the mounting groove 106 and the part of the piezoelectric material cylinder body 100 which coincides with the part of the support plate 103 in the front-back direction constitute the coincident part 105. The support plate 103 and the coincident part 105 make the natural frequency of the combined part of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference value between the U order natural frequency which is closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In the embodiment, the V order is the first order and the U order is the second order.

[0112] Of course, this is only the parameter selection of the embodiment. In other embodiments of the same structure type as the embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0113] Specifically, the shape and / or size parameters of the support plate 103 and the coincident part 105 are adjusted so that the natural frequencies of the combined part in the two directions simultaneously meet the requirements that they are close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have sufficient difference to prevent the vibration of the combined part in the two directions from being coupled.

[0114] The difference value meets the requirement that the vibration of the combined part in the horizontal direction and the vibration of the combined part in the vertical direction are not coupled when the combined part is driven to perform Lissajous scanning by a driving signal.

[0115] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The difference is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating part is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not couple. For those skilled in the art, selecting the value according to the above description is a routine technical means in the art.

[0116] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.

[0117] Optionally, as shown in Figure 5 , the piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and in the vertical direction, and its outer contour is square, and a center hole with a square or circular contour is coaxially arranged in the center of the outer contour.

[0118] Optionally, as shown in Figure 6 , the piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and in the vertical direction, and its outer contour is circular, and a center hole with a circular or square contour is coaxially arranged in the center of the outer contour.

[0119] The first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode 1021 and the second outer electrode 1022 in this embodiment are arranged in the same way as in Embodiment 6, and the polarization mode, driving mode and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 6.

[0120] Embodiment 8:

[0121] As shown in Figure 5 , Figure 2 , a Lissajous optical fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and an optical fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0122] The axis extension direction of the piezoelectric material cylinder body 100 is the front-rear direction, and the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200 to be supported by the base 200,

[0123] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction,

[0124] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 arranged correspondingly, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction,

[0125] The piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and the same order natural frequency in the vertical direction, and has a square outer contour and a square or circular center hole coaxial with the outer contour in the interior;

[0126] The support plate 103 is arranged along the horizontal direction, is located at the front side of the piezoelectric material cylinder body 100, and is fixedly connected to the piezoelectric material cylinder body 100 at the rear end thereof, the optical fiber 104 is fixedly arranged in a cantilevered support manner at the front end of the support plate 103, the support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, the left side wall and the right side wall of the piezoelectric material cylinder body 100 are each provided with a mounting groove 106 for connecting the support plate 103, a part of the rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected to the piezoelectric material cylinder body 100, the part of the support plate 103 inserted into the mounting groove 106 and the part of the piezoelectric material cylinder body 100 coincident with the part of the support plate 103 in the front-back direction constitute the coincident part 105, and the support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency in the vertical direction, and make the combination have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order and the U order is the second order.

[0127] Of course, this is only the parameter selection of this embodiment, and in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0128] Specifically, the shape structure and / or the size parameter of the support plate 103 and the coincident part 105 are adjusted so that the natural frequency of the combined part in two directions meets the requirements of being close enough to ensure good scanning effect and having uniform and dense scanning grid, and also meets the requirement of having enough difference to prevent the vibration of the combined part in two directions from being coupled.

[0129] The difference meets the requirement of preventing the vibration of the combined part in the horizontal direction and the vibration in the vertical direction from being coupled when the combined part performs Lissajous scanning under the driving of the driving signal.

[0130] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has enough amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction are not coupled. For those skilled in the art, the numerical selection according to the above description is a conventional technical means in the art.

[0131] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.

[0132] In this embodiment, the first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode 1021 and the second outer electrode 1022 are arranged in the same way as in Embodiment 6, and the polarization mode, driving mode and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 6.

[0133] Embodiment 9:

[0134] In combination with FIGS. 1-8, Figure 6 、 Figure 2 A Lissajous optical fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and an optical fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0135] The axis extension direction of the piezoelectric material cylinder body 100 is the front-rear direction, the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200, and the piezoelectric material cylinder body 100 is supported by the base 200,

[0136] At least one of the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012, respectively, and the piezoelectric material between the first inner electrode 1011 and the first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the first outer electrode 1012, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right along the horizontal direction,

[0137] At least one of the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022, respectively, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate along the vertical direction,

[0138] The piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and the vertical direction, and the outer contour is circular, and the inside is provided with a central hole coaxial with the outer contour, and the contour is circular or square;

[0139] The support plate 103 is arranged along the horizontal direction, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end is fixedly connected with the piezoelectric material cylinder body 100, and the optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner, and the support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, and the left and right side walls of the piezoelectric material cylinder body 100 are provided with mounting grooves 106 for connecting the support plate 103, and the rear end of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected with the piezoelectric material cylinder body 100, and the part of the support plate 103 inserted into the mounting grooves 106 and the part of the piezoelectric material cylinder body 100 coincident with the part of the support plate 103 in the front-back direction constitute the coincident part 105, and the support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency in the vertical direction, and make the combination have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order, and the U order is the second order.

[0140] Of course, this is only the parameter selection of this embodiment, and in other embodiments of similar structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0141] Specifically, the shape structure of the support plate 103 and the coincidence part 105 and / or the adjustment of the size parameters are used to make the combined part inherent frequency in two directions meet the requirements of being close enough to ensure good scanning effect and having uniform and dense scanning grid, and at the same time, the difference is enough to make the vibration of the combined part in two directions not coupled.

[0142] The difference meets the requirements that the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled when the combined part makes Lissajous scanning under the driving of the driving signal. Generally, the difference range is 10 Hz to 12 KHz. Further preferably, the difference range is 1 KHz to 10 KHz. The value is selected according to the V-order inherent frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has enough amplitude when the piezoelectric actuator makes Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0143] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.

[0144] The setting mode of the first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode 1021 and the second outer electrode 1022 in the embodiment is the same as that of embodiment 6, and the polarization mode, driving mode and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as those of embodiment 6.

[0145] Embodiment 10:

[0146] Combined Figure 7 , Figure 2 As shown in FIG. 10, a Lissajous optical fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and an optical fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,

[0147] The axis extension direction of the piezoelectric material cylinder body 100 is the front-rear direction, the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200 to be supported by the base 200, the inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right along the horizontal direction,

[0148] The inner surface and the outer surface of at least one side of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with the second inner electrode 1021 and the second outer electrode 1022 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-rear direction by the second inner electrode 1021 and the second outer electrode 1022, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate along the vertical direction;

[0149] The support plate 103 is arranged along the horizontal direction parallel to the horizontal plane, and is located at the front side of the piezoelectric material cylinder body 100, and the part of the rear end of the support plate 103 is attached to the upper surface or the lower surface of the piezoelectric material cylinder body 100 and is fixedly connected with the piezoelectric material cylinder body 100, the surface of the piezoelectric material cylinder body 100 for attaching the support plate is a plane, the optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner, the part of the support plate 103 attached to the piezoelectric material cylinder body 100 and the part of the piezoelectric material cylinder body 100 coinciding with the part of the support plate 103 in the front-rear direction constitute a coinciding part 105, the support plate 103 and the coinciding part 105 make the combination part composed of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order and the U order is the second order.

[0150] Of course, this is only the parameter selection of this embodiment, in other embodiments of similar structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0151] Specifically, the shape structure and / or the size parameter of the support plate 103 and the overlapping part 105 are adjusted so that the natural frequency of the combined part in two directions is close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time has enough difference so that the vibration of the combined part in two directions will not be coupled.

[0152] Preferably, the piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and in the vertical direction. Optionally, the outer contour is square, and a center hole with square or circular contour is arranged coaxially with the outer contour. Of course, this is not limited, for example, the outer surface is a substantially cylindrical surface, and several planes are arranged rotationally symmetrically, one of which is used for attaching the support plate.

[0153] The difference satisfies that when the combined part is driven by the driving signal to perform Lissajous scanning, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled. Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0154] In this embodiment, the first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode 1021 and the second outer electrode 1022 are arranged in the same way as in Embodiment 6, and the polarization mode, driving mode and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 6.

[0155] It should be noted that the above embodiments illustrate the application rather than limit the application, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs located between parentheses shall not be construed as limiting the claims. The word "comprise" or "include" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the word "about" accompanying the use of a quantity is intended to add tolerance to the quantity value provided it does not significantly affect the end result. The use of the word "first", "second" and "third" etc. does not indicate any order but these words can be interpreted as names.

[0156] All features disclosed in this specification, except for mutually exclusive features, can be combined in any way.

[0157] Any feature in the foregoing specification that can be added to the application, unless explicitly described as an application, can be replaced by alternatives having similar effect. That is, each feature is one of a number of alternatives that can be substituted for that feature in the application.

[0158] This application is not limited to the specific embodiments previously described. This application extends to any novel one, or any novel combination, of the features disclosed in this specification, and to any novel method or process disclosed or suggested in this specification, or any novel combination of steps of any novel method or process.

Claims

1. A Lissajous fiber scanner with a support plate, characterized in that, The optical fiber is fixedly arranged on the support plate in a cantilever support mode, The first piezoelectric sheet is arranged on at least one side of the left and right sides of the cylinder body, and the front end of the cylinder body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet, The second piezoelectric sheet is arranged on at least one side of the upper and lower sides of the cylinder body, and the front end of the cylinder body is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet, The support plate is arranged along the direction parallel to the horizontal plane, and is located at the front side of the cylinder body and has a rear end fixedly connected with the cylinder body. The support plate and the cylinder body have a coincident part in the front-rear direction. The support plate and the coincident part make the inherent frequency of the combination of the cylinder body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the same order inherent frequency of the combination in the vertical direction, and make the combination have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the vertical direction, and V is an integer greater than or equal to 1.

2. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, The difference satisfies that when the piezoelectric actuating part is driven to make Lissajous scanning under the driving of the driving signal, the vibration of the combination in the horizontal direction and the vibration in the vertical direction will not be coupled.

3. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The difference ranges from 10 Hz to 12 KHz.

4. A Lissajous fiber scanner with a support plate as claimed in claim 3, characterized in that, The difference ranges from 1 KHz to 10 KHz.

5. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The inherent frequency of the cylinder body in the horizontal direction and the same order inherent frequency in the vertical direction are the same or close.

6. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The first piezoelectric sheet is arranged on any one side of the left and right sides of the cylinder body, and the front end of the cylinder body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet.

7. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The first piezoelectric sheet is arranged on any one side of the left and right sides of the cylinder body, and the front end of the cylinder body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet.

8. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The second piezoelectric sheet is arranged on any one side of the upper and lower sides of the cylinder body, and the front end of the cylinder body is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet.

9. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The second piezoelectric sheet is arranged on any one side of the upper and lower sides of the cylinder body, and the front end of the cylinder body is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet.

10. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, When the first piezoelectric sheet is arranged on the left and right sides of the cylinder body, the first piezoelectric sheets on the left and right sides of the cylinder body are symmetrically arranged. When the second piezoelectric sheet is arranged on the upper and lower sides of the cylinder body, the second piezoelectric sheets on the upper and lower sides of the cylinder body are symmetrically arranged.

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