Lissajous optical fiber scanner with supporting plate
By introducing a support plate and overlapping part into the Lissajous scanner, the natural frequency difference was adjusted, the vibration coupling problem was solved, the scanning effect and processing efficiency were improved, and the yield was increased.
Patent Information
- Application Number
- CN202520864728.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-30
AI Technical Summary
When the natural frequencies used by a Lissajous scanner in two directions are close, vibration coupling effects are likely to occur, leading to distortion of the scanning trajectory and making it difficult to guarantee processing accuracy and yield.
Design a Lissajous fiber optic scanner with a support plate. By adjusting the shape and size parameters of the support plate and the overlapping part, the natural frequencies of the combined part in both directions are close yet have a sufficient difference, avoiding vibration coupling and allowing the piezoelectric cylindrical body to have the same or close natural frequencies in both directions, thus reducing the difficulty of processing.
It achieves excellent scanning results and a uniform and dense scanning grid, while reducing processing difficulty and improving yield.
Smart Images
Figure CN223742867U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application No. 2024232650214, filed on December 30, 2024, with the State Intellectual Property Office of China, and entitled "Lissajous Fiber Scanner with Support Plate", the whole content of which is incorporated herein by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a Lissajous fiber scanner with a support plate. BACKGROUND
[0003] The fiber scanner is a display technology that uses a scanning driver to control the swing of a fiber while the fiber emits light rays. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] The fiber scanner uses the principle of mechanical resonance to make the fiber cantilever achieve a larger scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of Lissajous scanning generally has two driving parts that vibrate in two directions simultaneously. The closer the driving frequencies of the two directions in Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions. In theory, the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect, which can worsen the scanning trajectory and cause uncontrolled components in the scanning image, resulting in distortion of the scanning image that is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner should have a precise difference range, neither too small to cause coupling effect nor too large to cause non-uniformity.
[0005] However, the Lissajous scanner that processes and manufactures inherent frequencies with a precise difference in the two directions requires extremely high processing precision, and both the cost of processing equipment and the yield cannot be guaranteed. Practical new type content
[0006] The present application provides a Lissajous fiber scanner with a support plate to reduce the processing difficulty and improve the processing yield.
[0007] In order to achieve the above-mentioned application purpose, the present application provides a Lissajous fiber scanner with a support plate, which comprises a piezoelectric material cylinder body, a support plate fixedly connected with the piezoelectric material cylinder body, and a fiber fixedly arranged on the support plate in a cantilever support manner,
[0008] The axis of the piezoelectric material cylinder body extends in the front-rear direction, the rear end of the piezoelectric material cylinder body is fixedly connected with the base to be supported by the base, the inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode which are correspondingly arranged, the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-rear direction by the first inner electrode and the corresponding first outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate left and right in the horizontal direction,
[0009] The inner surface and the outer surface of at least one side of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode which are correspondingly arranged, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract in the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate in the vertical direction;
[0010] The support plate is arranged in parallel to the horizontal direction, and is located at the front side of the piezoelectric material cylinder body, and a part of the rear end of the support plate is attached to the upper surface or the lower surface of the piezoelectric material cylinder body and is fixedly connected with the piezoelectric material cylinder body, the surface of the piezoelectric material cylinder body for attaching the support plate is a plane, the optical fiber is fixedly arranged at the front end of the support plate in a cantilever support manner, the part of the support plate attached to the piezoelectric material cylinder body and the part of the piezoelectric material cylinder body coinciding with the part of the support plate in the front-rear direction form a coinciding part, the support plate and the coinciding part make the natural frequency of the combination part composed of the piezoelectric material cylinder body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part have a difference value between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order, and the U order is the second order.
[0011] Of course, this is only the parameter selection of this embodiment, in other embodiments of similar structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.
[0012] Specifically, by adjusting the shape structure and / or size parameters of the support plate and the coinciding part, the natural frequencies of the combination part used in the two directions can be made to simultaneously meet both close enough to ensure good scanning effect and have a uniform and dense scanning grid, and also have a sufficient difference value to make the vibration of the combination part in the two directions not coupled.
[0013] Preferably, the piezoelectric material cylinder body has the same or similar natural frequency in the horizontal direction and the vertical direction. Optionally, the outer contour is square, and a center hole with a square or circular contour is coaxially arranged in the center of the outer contour. Of course, this is not limited, for example, the outer surface is a substantially cylindrical surface, and several planes are arranged in rotational symmetry, one of which is used to attach the support plate.
[0014] The difference satisfies that when the combination part performs Lissajous scanning under the driving of the driving signal, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction do not generate coupling. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value is selected according to the selected V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under the driving, and the scanner cantilever in the horizontal direction and the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0015] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0016] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the piezoelectric material on the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0017] Optionally, the inner surface and the outer surface of any one of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction. The number of the second inner electrode or the second outer electrode on the same side can be one, two or more.
[0018] Optionally, the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction. The number of the second inner electrode or the second outer electrode on the same side can be one, two or more.
[0019] Further preferably, when the inner surface and the outer surface of the left side and the right side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode corresponding thereto, the first inner electrodes on the left side and the right side of the piezoelectric material cylinder body are symmetrically arranged to drive the piezoelectric material cylinder body to vibrate accurately along the horizontal direction left and right, without generating a displacement component in the vertical direction; when the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode corresponding thereto, the second inner electrodes on the upper side and the lower side of the piezoelectric material cylinder body are symmetrically arranged to drive the piezoelectric material cylinder body to vibrate accurately along the vertical direction, without generating a displacement component in the horizontal direction.
[0020] One or more technical solutions in the present application have at least the following technical effects or advantages:
[0021] In the present application, the shape structure and / or the size parameter of the supporting plate and the coincidence part are adjusted, so that the natural frequencies of the combined part in two directions are close enough to ensure good scanning effect and have uniform and dense scanning grid, and the difference is large enough to prevent the vibration of the combined part in two directions from being coupled.
[0022] The piezoelectric actuating part of the Lissajous scanner does not necessarily have a specific difference in the natural frequency in two driving directions, and the coupling of vibration in the two driving directions can be avoided, and the processing difficulty and the requirement of processing precision are reduced; further preferably, the natural frequency of the barrel-shaped body in the two driving directions is the same or close, and the barrel-shaped body can be a rotationally symmetrical structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0024] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the application.
[0025] Embodiment 1:
[0026] In combination with Figure 1 As shown in the figure, a Lissajous fiber scanner with a support plate comprises a piezoelectric material barrel-shaped body 100, a support plate 103 fixedly connected with the piezoelectric material barrel-shaped body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,
[0027] The extending direction of the axis of the piezoelectric material barrel-shaped body 100 is the front-back direction, the rear end of the piezoelectric material barrel-shaped body 100 is fixedly connected with the base 200 to be supported by the base 200, the inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material barrel-shaped body 100 are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 arranged in corresponding matching manner, the part of the piezoelectric material barrel-shaped body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the piezoelectric material barrel-shaped body 100 is driven to vibrate left and right along the horizontal direction,
[0028] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction;
[0029] The support plate 103 is arranged along the direction parallel to the horizontal plane, is located at the front side of the piezoelectric material cylinder body 100, and a part of the rear end thereof is attached to the upper surface or the lower surface of the piezoelectric material cylinder body 100 and is fixedly connected with the piezoelectric material cylinder body 100, the surface of the piezoelectric material cylinder body 100 for attaching the support plate is a plane, the optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner, and the part of the support plate 103 attached to the piezoelectric material cylinder body 100 and the part of the piezoelectric material cylinder body 100 coinciding with the part of the support plate 103 in the front-back direction constitute a coinciding part 105, the support plate 103 and the coinciding part 105 make the inherent frequency of the combination part composed of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the same-order inherent frequency of the combination part in the vertical direction, and make the combination part have a difference value between the U-order inherent frequency closest to the V-order inherent frequency in the horizontal direction and the V-order inherent frequency in the vertical direction. In the embodiment, the V-order is the first order, and the U-order is the second order.
[0030] Of course, this is only the parameter selection of the embodiment, and in other embodiments of the similar structure type of the embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.
[0031] Specifically, the shape and / or size parameters of the support plate 103 and the coinciding part 105 are adjusted, so that the inherent frequencies of the combination part used in the two directions simultaneously meet the requirements that they are close enough to ensure good scanning effect and have uniform and dense scanning grids, and at the same time have sufficient difference values to prevent the vibration of the combination part in the two directions from being coupled.
[0032] Preferably, the inherent frequency of the piezoelectric material cylinder body 100 in the horizontal direction is the same as or close to the inherent frequency in the vertical direction. Optionally, the outer contour is a square, and a center hole with a square or circular contour coaxial with the outer contour is arranged in the center. Of course, this is not limited, for example, the outer surface is a substantially cylindrical surface, and several planes are arranged in a rotational symmetry, one of which is used to attach the support plate.
[0033] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0034] Optionally, the inner surface and the outer surface of any one of the left side and the right side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0035] Optionally, the inner surface and the outer surface of any one of the left side and the right side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the piezoelectric material on the left side and the right side synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0036] Optionally, the inner surface and the outer surface of any one of the left side and the right side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the piezoelectric material on the left side and the right side synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0037] Optionally, the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding second inner electrode 1021 and a second outer electrode 1022, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract in the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, the piezoelectric material on the upper and lower sides synchronously and reversely stretches and contracts with the same length, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate in the vertical direction. The number of the second inner electrode 1021 or the second outer electrode 1022 on the same side can be one, two or more.
[0038] Further preferably, when the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the corresponding first outer electrode 1012, the first inner electrode 1011 on the left and right sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction; when the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with the second inner electrode 1021 and the corresponding second outer electrode 1022, the second inner electrode 1021 on the upper and lower sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate in the vertical direction without generating a displacement component in the horizontal direction.
[0039] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids the coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy; further preferably, the present application allows the piezoelectric material cylinder body 100 to have the same or close natural frequency in the two driving directions, and allows the piezoelectric material cylinder body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, and significantly improves the processing efficiency and the yield.
[0040] It should be noted that the above embodiments illustrate the present application rather than limit the present application, and alternative embodiments can be designed by those skilled in the art without departing from the scope of the appended claims. In the claims, any reference symbol located between brackets should not be construed as a limitation of the claims. The word "comprising" or "including" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" before an element does not exclude the presence of multiple such elements. The use of the words first, second and third etc. does not indicate any order, and these words can be interpreted as names.
[0041] All of the features disclosed in this specification (including any accompanying claims, abstract and drawings) can be combined in any combination, except combinations where at least some of such features (whether property features, method features, or any combinations thereof) are mutually exclusive.
[0042] Any of the features disclosed in this specification (including any accompanying claims, abstract and drawings) can be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is one of alternative possibilities only.
[0043] This application is not limited to the specific embodiments formerly described. This application extends to any new feature or combination of features disclosed in this specification, as well as any new method or process of any of the steps or any new combination of steps disclosed in this specification.
Claims
1. A Lissajous fiber scanner with a support plate, characterized in that, The piezoelectric material cylinder body, the support plate and the optical fiber, The piezoelectric material cylinder body, the support plate and the optical fiber, The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode arranged correspondingly, and the front end of the piezoelectric material cylinder body is driven to vibrate left and right along the horizontal direction by the first inner electrode and the corresponding first outer electrode. The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction by the second inner electrode and the second outer electrode. The support plate is arranged along the horizontal direction, and the part of the back end of the support plate is attached to the upper surface or the lower surface of the piezoelectric material cylinder body and is fixedly connected with the piezoelectric material cylinder body, and the optical fiber is fixedly arranged at the front end of the support plate in a cantilever support manner, and the part of the support plate attached to the piezoelectric material cylinder body and the part of the piezoelectric material cylinder body coinciding with the part of the support plate in the front-back direction form a coinciding part, and the support plate and the coinciding part make the combined part have a difference between the U-order natural frequency closest to the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, V is an integer greater than 1, and U is an integer greater than V.
2. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, The natural frequency of the piezoelectric material cylinder body in the horizontal direction and the natural frequency of the piezoelectric material cylinder body in the vertical direction are the same or similar.
3. A Lissajous fiber scanner with a support plate as claimed in claim 2, characterized in that, The outer contour of the piezoelectric material cylinder body is a square, and the center hole with a square or circular contour coaxial with the outer contour is arranged in the piezoelectric material cylinder body.
4. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The difference satisfies that when the combined part is driven by a driving signal to perform Lissajous scanning, the vibration of the combined part in the horizontal direction and the vibration of the combined part in the vertical direction do not couple.
5. A Lissajous fiber scanner with a support plate as claimed in claim 4, characterized in that, The difference ranges from 10 Hz to 12 KHz.
6. A Lissajous fiber scanner with a support plate as claimed in claim 5, characterized in that The difference ranges from 1 KHz to 10 KHz.
7. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that The inner surface and the outer surface of any one side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode arranged correspondingly, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract along the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate left and right along the horizontal direction, or The inner surface and the outer surface of any one side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode arranged correspondingly, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract along the front-back direction by the first inner electrode and the corresponding first outer electrode, and the piezoelectric material of the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the piezoelectric material cylinder body is driven to vibrate left and right along the horizontal direction.
8. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The inner surface and the outer surface of any one of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode which are correspondingly matched, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-back direction by the second inner electrode and the second outer electrode, the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction, or The inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode which are correspondingly matched, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-back direction by the second inner electrode and the second outer electrode, the piezoelectric material on the upper side and the lower side synchronously and reversely stretches and contracts with the same length, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction.
9. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, When the inner surface and the outer surface of the left side and the right side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode which are correspondingly matched, the first inner electrodes on the left side and the right side of the piezoelectric material cylinder body are symmetrically arranged; when the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode which are correspondingly matched, the second inner electrodes on the upper side and the lower side of the piezoelectric material cylinder body are symmetrically arranged.