MOCVD glove box convenient to maintain and clean

Abstract

The utility model discloses an MOCVD (Metal Organic Chemical Vapor Deposition) glove box convenient to maintain and clean, which aims to solve the technical problems that the maintenance and cleaning time is long and parts in the glove box are easy to damage in the prior art. The glove box comprises a glove box body, a plurality of gloves which are arranged on the side wall of the glove box body and can stretch out and draw back inwards, and an observation device and a reaction cavity which are arranged in the glove box body, wherein the observation device comprises a suspender and a plane mirror; the plane mirror is installed on the plane mirror support and used for assisting an operator in real-time observation when the glove box body is cleaned and maintained. One end of the suspender is connected with the top of the glove box body through a spherical hinge, and the other end is connected with the plane mirror bracket; or the suspender is a deformable hose, one end of the suspender is connected with the top of the glove box body, and the other end is connected with the plane mirror bracket. The plane mirror is driven by the hanging rod to reach the corresponding position in the glove box body, so that a better observation effect is provided for maintenance and cleaning of the interior of the box body, and the probability of part damage is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of MOCVD glove box, specifically to a kind of MOCVD glove box convenient to maintain cleaning. BACKGROUND

[0002] III / V semiconductor materials can be applied to optoelectronic devices, power devices, microwave devices and many other fields, which are usually made by MOCVD equipment through vapor deposition method. MOCVD (Metal Organic Chemical Vapor Deposition) is a new type of vapor phase epitaxy growth technology developed on the basis of VPE (Vapor Phase Epitaxy), and MOCVD equipment is a process test instrument used in the field of physics and materials science, which is widely used in the production of GaN system, GaAs system, InP system and other materials, and has irreplaceability.

[0003] MOCVD glove box is an important part of MOCVD equipment, and the most core part of MOCVD equipment, the reaction cavity, is located in the glove box. The maintenance and repair of the internal components of the glove box including the reaction cavity need to be carried out in the microenvironment of the glove box, especially for the equipment for growing GaAs system and InP system. The operation in the glove box is usually completed through the gloves located on the windows on both sides of the glove box and can be extended in and out. The maintenance and repair of the glove box is the process with the most types of work, the most frequent action frequency and the most difficult operation in the operation of MOCVD equipment, which accounts for more than 50% of the downtime of the equipment. At the same time, the state of the reaction cavity in the glove box directly affects the epitaxy process, which is the most concerned part of the process personnel, so the glove box is the main work object of MOCVD engineers.

[0004] At present, the routine maintenance and repair of MOCVD glove box can be realized through the gloves located on the windows on both sides and can be extended in and out. However, for some operation details in the process, such as disassembly of the heater, cleaning of the bottom of the reaction cavity and depth measurement of the internal components of the reaction cavity, due to the deep position, the specific situation of the operation position cannot be observed by the human eye during the operation of extending the hand into the glove box, and only experience and touch of the hand can be used for confirmation, so the maintenance time is increased, and the probability of damage to the components is also increased. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the technical problems of long maintenance and cleaning time and easy damage to the internal components of the glove box in the prior art, and provides a kind of MOCVD glove box convenient to maintain cleaning.

[0006] To achieve the above-mentioned purpose, the technical scheme provided by the utility model is as follows:

[0007] The utility model provides a kind of MOCVD glove box of easy maintenance cleaning, it is special in that:

[0008] Including glove box, multiple gloves are arranged on the side wall of glove box and can be telescoped inside and outside, and observation device and reaction cavity are arranged in glove box;

[0009] The inside of the glove box is airtight cavity, and is filled with nitrogen, to protect the device in the box from water and oxygen erosion;The reaction cavity is used to provide a place for the epitaxial growth of semiconductor materials;The side wall of the glove box is provided with a transparent observation window, to facilitate the operator to observe the inside of the glove box;

[0010] The observation device includes a boom and a plane mirror;The plane mirror is mounted on a plane mirror support, to assist the operator in real-time observation when cleaning and maintaining the glove box;One end of the boom is connected to the top of the glove box through a ball hinge, and the other end is connected to the plane mirror support;Alternatively, the boom is a deformable hose, one end of which is connected to the top of the glove box, and the other end is connected to the plane mirror support.

[0011] Further, the boom is a rigid telescopic boom, one end of which is connected to the top of the glove box through a ball hinge, and the other end is also connected to the plane mirror support through a ball hinge, and the ball hinge is located at the middle position of the back of the plane mirror support.

[0012] Further, a support is provided on the inner wall of the top of the glove box, and one end of the boom is connected to the lower end of the support through a ball hinge.

[0013] Further, the plane mirror and the plane mirror support are rectangular or circular.

[0014] The boom is a deformable hose, one end of which is connected to the top of the glove box, and the other end is connected to the top edge of the plane mirror support.

[0015] Further, the boom is a stainless steel universal hose.

[0016] Further, the plane mirror and the plane mirror support are rectangular structures, wherein the size of the plane mirror is 5-15 cm x 5-15 cm, and the size of the plane mirror support is adapted to the size of the plane mirror.

[0017] Compared with the prior art, the utility model has the following beneficial effects:

[0018] 1、The MOCVD glove box of easy maintenance cleaning provided by the utility model increases a set of observation device in the glove box, the observation device includes a boom and a plane mirror, the plane mirror can be driven to the corresponding position in the glove box through the boom, thereby providing better observation effect for the maintenance and cleaning of the inside of the glove box, and further reducing the probability of component damage.

[0019] 2. The MOCVD glove box convenient to maintain and clean, when the boom is a rigid telescopic boom, one end thereof is connected with the top of the glove box body through a spherical hinge, the other end thereof is also connected with the plane mirror support through a spherical hinge, so that observation of any position and any angle around the reaction cavity can be realized, and visual blind area can be avoided.

[0020] 3. The MOCVD glove box convenient to maintain and clean, when the boom is a deformable hose, one end thereof is connected with the top of the glove box body, the other end thereof is connected with the plane mirror support, which has certain rigidity and can be adjusted in shape to be fixed at any position, so that use is more convenient, and the efficiency of maintenance and cleaning is improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structure schematic view of an embodiment of the MOCVD glove box convenient to maintain and clean.

[0022] Figure 2 is a structure schematic view of the embodiment of the MOCVD glove box convenient to maintain and clean in a state when the plane mirror is moved to another position by the boom in a use process.

[0023] The reference signs are as follows:

[0024] 1-glove box body, 2-reaction cavity, 3-boom, 4-plane mirror, 5-observation window. DETAILED DESCRIPTION

[0025] In order for those skilled in the art to better understand the technical scheme of the present application, the technical scheme of the present application will be described clearly and completely in combination with the drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments.

[0026] With reference to Figure 1 , the embodiment provides a MOCVD glove box convenient to maintain and clean, which comprises a glove box body 1, a plurality of gloves arranged on the side wall of the glove box body 1 and capable of telescoping in and out, and an observation device and a reaction cavity 2 arranged in the glove box body 1.

[0027] The inside of the glove box body 1 is a closed cavity and is filled with nitrogen, which is used to protect devices in the box from water and oxygen corrosion. The reaction cavity 2 is used to provide a place for epitaxial growth of semiconductor materials, such as growth of GaAs system and InP system. The side wall of the glove box body 1 is provided with a transparent observation window 5, an operator can perform corresponding operation by putting hands into the glove box body 1 through the gloves, and the inside state of the glove box body 1 can be observed in real time through the observation window 5.

[0028] The observation device comprises a boom 3 and a plane mirror 4; wherein the plane mirror 4 is installed on a plane mirror support, for assisting the operator to observe in real time when cleaning and maintaining the glove box 1.

[0029] The boom 3 can be a rigid telescopic boom, one end of which is connected to the top of the glove box 1 through a spherical hinge, and the other end is connected to the plane mirror support through a spherical hinge, which is located in the middle of the back of the plane mirror support. Generally, a support is arranged on the inner wall of the top of the glove box 1 (i.e. directly above the reaction chamber 2), and one end of the boom 3 is connected to the lower end of the support through a spherical hinge, so that the boom 3 can be rotated to the corresponding angle according to the needs, and then the plane mirror 4 is rotated to the corresponding observation angle.

[0030] Alternatively, the boom 3 can also be a deformable hose, one end of which is connected to the top of the glove box 1, and the other end is connected to the edge of the plane mirror support. In this case, the boom 3 can move the plane mirror 4 to a distance of 0.1m-3m from the top of the glove box 1, so that the plane mirror 4 can be deep into the reaction chamber 2, and the plane mirror 4 can be retracted to the top of the glove box 1 along with the boom 3, which does not affect the use of other parts in the glove box 1 after cleaning.

[0031] Preferably, the boom 3 is a stainless steel universal hose, which can also be a stainless steel shaped hose, or can be selected according to the actual situation. The length of the boom 3 is determined according to the internal size of the glove box 1, to ensure that the plane mirror 4 can be moved to any position in the glove box 1 (including the inside of the reaction chamber 2).

[0032] In this embodiment, the plane mirror 4 and the plane mirror support are rectangular or circular. When the plane mirror 4 is rectangular, the size of the plane mirror 4 is generally (5-15) cm x (5-15) cm. Of course, the plane mirror 4 can also be designed to other corresponding structures and sizes according to the actual needs and the internal size of the glove box 1, and the size of the plane mirror support is adapted to the size of the plane mirror 4.

[0033] Preferably, the plane mirror 4 of the present embodiment can be made of glass, which is more affordable and has lower replacement cost.

[0034] The utility model discloses a MOCVD glove box convenient to maintain and clean, through adding a set of observation device in glove box body 1, installs the boom 3 to the top inside glove box body 1, installs the plane mirror 4 at the bottom of boom 3. Boom 3 angle and position can be manually adjusted according to need, and the plane mirror 4 can be moved with boom 3 arbitrarily, also can be fixed in any position, and the operator outside glove box body 1 can observe any position inside glove box body 1 and reaction cavity 2 through the mirror surface reflection of plane mirror 4, provides better observation effect for the internal maintenance and cleaning of glove box body 1 and reaction cavity 2, and further improves the efficiency and safety of operation, reduces the probability of component damage.

[0035] Based on the above embodiments, all other embodiments obtained by those of ordinary skill in the art without creative labor shall belong to the protection scope of the utility model.

Claims

1. A MOCVD glove box convenient for maintenance and cleaning, characterized in that: it comprises a glove box body (1), a plurality of gloves arranged on the side wall of the glove box body (1) and capable of being retracted in and out, and an observation device and a reaction cavity (2) arranged in the glove box body (1); the inside of the glove box body (1) is a closed cavity and is filled with nitrogen, so as to protect the devices in the box from water and oxygen corrosion; the reaction cavity (2) is used for providing a place for epitaxial growth of semiconductor materials; a transparent observation window (5) is arranged on the side wall of the glove box body (1), so as to facilitate the operator to observe the inside of the glove box body (1); the observation device comprises a boom (3) and a plane mirror (4); the plane mirror (4) is installed on a plane mirror support and is used for assisting the operator to observe in real time when cleaning and maintaining the glove box body (1); one end of the boom (3) is connected to the top of the glove box body (1) through a spherical hinge, and the other end is connected to the plane mirror support; or the boom (3) is a deformable hose, one end of which is connected to the top of the glove box body (1), and the other end is connected to the plane mirror support.

2. The MOCVD glove box convenient for maintenance and cleaning according to claim 1, characterized in that: the boom (3) is a rigid telescopic boom, one end of which is connected to the top of the glove box body (1) through a spherical hinge, and the other end is also connected to the plane mirror support through a spherical hinge, and the spherical hinge is located at the middle position of the back of the plane mirror support.

3. The MOCVD glove box convenient for maintenance and cleaning according to claim 1 or 2, characterized in that: a support is arranged on the inner wall of the top of the glove box body (1), and one end of the boom (3) is connected to the lower end of the support through a spherical hinge.

4. The MOCVD glove box convenient for maintenance and cleaning according to claim 1, characterized in that: the plane mirror (4) and the plane mirror support are rectangular or circular; 5. The MOCVD glove box convenient for maintenance and cleaning according to claim 4, characterized in that: the boom (3) is a stainless steel universal hose.

6. The MOCVD glove box convenient for maintenance and cleaning according to claim 5, characterized in that: the plane mirror (4) and the plane mirror support are rectangular structures, wherein the size of the plane mirror (4) is 5-15 cm x 5-15 cm, and the size of the plane mirror support is matched with the size of the plane mirror (4). ​ ​ ​ ​ ​ ​ ​ ​ ​

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