Novel evaporation source

Abstract

The utility model relates to a novel evaporation source, which comprises a fixing component, a heat exchanger, a heat exchanger, a heat exchanger and a heat exchanger, and is characterized in that the fixing component is used for supporting and fixing the evaporation source; the cooling assembly is used for cooling crucibles in the evaporation source, the cooling assembly comprises a liquid cooling assembly and a mounting seat, the liquid cooling assembly is mounted on the fixing assembly, the liquid cooling assembly is used for conveying cooling liquid into the mounting seat, and the mounting seat is used for mounting the multiple crucibles; the connecting assembly is used for realizing detachable connection between the liquid cooling assembly and the mounting seat; and the adjusting assembly is installed on the fixing assembly, and the adjusting assembly is used for selecting the crucible to work. The liquid cooling assembly and the mounting base are detachably connected through the connecting assembly, parts having problems can be detached and replaced conveniently, the liquid cooling assembly and the mounting base can be detached, and the manufacturing difficulty and cost are reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to evaporation source technical field, in particular to a novel evaporation source. BACKGROUND

[0002] In vacuum evaporation coating technology, resistance evaporation coating is a common form, and its principle is based on resistance heating to heat the welding wire material in the evaporation source to the evaporation state, and then deposit on the substrate to form a uniform coating. In the existing evaporation source, in order to achieve good water cooling effect, the liquid cooling assembly and the mounting seat are connected by welding, the welding structure increases the manufacturing cost and difficulty, and the whole is not movable. Once the component has a problem or needs to be modified, the maintenance cost is further increased, so a novel evaporation source is proposed. SUMMARY

[0003] The utility model provides a novel evaporation source for solving at least one technical problem above.

[0004] The utility model provides a novel evaporation source, comprising:

[0005] The fixing assembly is used for supporting and fixing the evaporation source.

[0006] The cooling assembly is used for cooling the crucible in the evaporation source, and the cooling assembly comprises a liquid cooling assembly and a mounting seat.

[0007] The connecting assembly is used for detachably connecting the liquid cooling assembly and the mounting seat.

[0008] The adjusting assembly is installed on the fixing assembly, and is used for selecting the crucible to work.

[0009] In one embodiment, the connecting assembly comprises a first connector body, a connecting pipe and a second connector body, one end of the connecting pipe is provided with the first connector body, and the other end is provided with the second connector body, the first connector body of the connecting assembly is connected with the first connector body arranged at the bottom of the mounting seat, and the second connector body of the connecting assembly is connected with the second connector body arranged at the top of the liquid cooling assembly.

[0010] In one embodiment, the liquid cooling assembly comprises a liquid cooling pipe, an inlet pipe and an outlet pipe, the liquid cooling pipe is installed on the fixing assembly, the liquid cooling pipe is communicated with the inlet pipe and the outlet pipe, and the upper end of the liquid cooling pipe is communicated with the mounting seat through the connecting assembly.

[0011] In one embodiment, the adjusting assembly comprises a rotating guide, a connecting rod, a baffle and a crucible cover, wherein,

[0012] The rotating guide is installed on the fixing assembly, and is used to control the position of the baffle;

[0013] The lower end of the connecting rod is connected with the rotating guide after penetrating through the fixing assembly, and the upper end of the connecting rod is connected with the baffle after penetrating through the crucible cover;

[0014] The baffle is further provided with a plurality of evaporation holes;

[0015] The crucible cover is installed on the top of the mounting seat, and the crucible is accommodated in the crucible cover, the top of the crucible cover is provided with a crucible hole, and the crucible hole is used for the crucible selected for work together with the evaporation hole.

[0016] In one embodiment, the adjusting assembly further comprises a first screw, a groove, a limiting hole and a sliding groove, wherein,

[0017] The first screw is arranged at the center of the baffle;

[0018] The groove is arranged at the top of the crucible cover, and the groove is matched with the first screw to fix the baffle;

[0019] The sliding groove is arranged on the baffle, and the sliding groove is arc-shaped with the connecting rod as the center;

[0020] The limiting hole is arranged at the top of the crucible cover, the second screw is arranged in the limiting hole, and the second screw extends into the sliding groove.

[0021] In one embodiment, a plurality of heating assemblies are further included, each of the crucibles is provided with the heating assembly, the heating assembly comprises a first connecting piece, the first connecting piece is installed on the top of the mounting seat, the first connecting piece is sequentially provided with a first ceramic connecting piece and the crucible from bottom to top, the outer periphery of the crucible is sleeved with a heater, the outer side of the heater is provided with a plurality of second ceramic connecting pieces, the second ceramic connecting pieces are installed on the first connecting piece, and a second connecting piece is arranged between the second ceramic connecting pieces and the heater.

[0022] In one embodiment, the fixing assembly is further provided with an electrode and a plurality of thermocouples, a connecting wire of the electrode is arranged between the second ceramic connecting piece and the second connecting piece after penetrating through the bottom of the mounting seat, each of the crucibles is provided with the thermocouple, and a connecting wire of the thermocouple sequentially penetrates through a thermocouple hole of the mounting seat, a thermocouple hole of the first connecting piece, a thermocouple hole of the first ceramic connecting piece and a thermocouple hole of the heater.

[0023] In one embodiment, the mounting base comprises a base and a plurality of partitions, the base is provided with a plurality of the crucibles, and the partitions are arranged between adjacent crucibles.

[0024] In one embodiment, the connecting rod is installed on the side of the partition after passing through the fixing assembly.

[0025] In one embodiment, the number of the crucible holes is consistent with the number of the crucibles.

[0026] Compared with the prior art, the liquid cooling assembly and the mounting base are detachably connected through the connecting assembly, the problematic components can be conveniently disassembled and replaced, the liquid cooling assembly and the mounting base can be disassembled, and the manufacturing difficulty and cost are reduced. BRIEF DESCRIPTION OF DRAWINGS

[0027] In the following, the utility model will be described in more detail based on the embodiments and with reference to the drawings.

[0028] Figure 1 is the overall structure schematic diagram of the evaporation source of the utility model;

[0029] Figure 2 is the schematic diagram of A part of Figure 1 ;

[0030] Figure 3 is the schematic diagram of the heating assembly of the utility model;

[0031] Figure 4 is the schematic diagram of B part of Figure 1 ;

[0032] Figure 5 is the exploded view of the cooling assembly of the utility model;

[0033] LIST OF REFERENCE NUMERALS:

[0034] 1, fixing assembly; 2, electrode; 3, adjusting assembly; 301, rotary introducer; 302, connecting rod; 303, first screw; 304, groove; 305, limiting hole; 306, sliding groove; 307, baffle; 308, evaporation hole; 309, crucible cover; 310, crucible hole; 4, cooling assembly; 401, liquid cooling assembly; 402, mounting base; 5, thermocouple; 6, heating assembly; 601, first connecting piece; 602, first ceramic connecting piece; 603, second ceramic connecting piece; 604, second connecting piece; 605, heater; 8, connecting assembly; 9, crucible. DETAILED DESCRIPTION

[0035] The utility model will be further described in combination with the drawings.

[0036] Please refer to Figures 1 to 5 The utility model provides a novel evaporation source especially relates to a kind of evaporation source convenient to disassemble and replace, comprising: fixed assembly 1, cooling assembly 4, connecting assembly 8 and adjusting assembly 3, fixed assembly 1 is used to support and fix evaporation source, fixed assembly 1 can be made of oxygen-free copper. Cooling assembly 4 is used to cool the crucible 9 in evaporation source, cooling assembly 4 includes liquid cooling component 401 and mounting seat 402, liquid cooling component 401 is installed on fixed assembly 1, liquid cooling component 401 is used to deliver coolant to mounting seat 402, and mounting seat 402 is used to install multiple crucible 9;In the embodiment, preferably four groups of crucible 9 are set on the circumference of mounting seat 402. Connecting assembly 8, the connecting assembly 8 is used to realize the detachable connection of the liquid cooling component 401 and the mounting seat 402. Adjusting assembly 3 is installed on fixed assembly 1, and adjusting assembly 3 is used to select crucible 9 to work.

[0037] Fixed assembly 1 in the embodiment selects six-way flange, and CF35 flange is arranged in the center of six-way flange, and liquid cooling component 401 will be communicated with mounting seat 402 by connecting assembly 8 after passing through CF35 flange.

[0038] In order to better implement the utility model, refer to Figure 1 With Figure 5 In one embodiment, connecting assembly 8 includes first joint body, connecting pipe and second joint body, one end of connecting pipe is provided with first joint body, and the other end is provided with second joint body, the first joint body of connecting assembly 8 is connected with the first joint body arranged at the bottom of mounting seat 402, and the second joint body of connecting assembly 8 is connected with the second joint body arranged at the top of liquid cooling component 401. Connecting assembly 8 can adopt 1 / 2VCR-1 / 4VCR connecting assembly, i.e. the first joint body is 1 / 2VCR joint body, and 1 / 2VCR joint body matched with the first joint body of connecting assembly 8 is welded at the bottom of mounting seat 402. When connecting assembly 8 is connected with mounting seat 402, it is necessary to ensure that the two 1 / 2VCR joint bodies are connected, and to ensure the sealing property of the connection place, sealing gasket can be arranged between the two 1 / 2VCR joint bodies, and finally the two 1 / 2VCR joint bodies are connected through threaded assembly. Similarly, the second joint body adopts 1 / 4VCR joint body, and when connecting assembly 8 is connected with liquid cooling component 401, 1 / 4VCR joint body on liquid cooling component 401 and 1 / 4VCR joint body on connecting assembly 8 need to be installed and fixed.

[0039] In order to better implement the utility model, refer to Figure 1In one embodiment, the liquid cooling assembly 401 comprises a liquid cooling pipe, a liquid inlet pipe and a liquid outlet pipe, the liquid cooling pipe is installed on the fixing assembly 1, the liquid cooling pipe is communicated with the liquid inlet pipe and the liquid outlet pipe, the upper end of the liquid cooling pipe is communicated with the mounting seat 402 through the connecting assembly 8, the cooling liquid enters the liquid cooling pipe from the liquid inlet pipe, and is sent into the mounting seat 402 through the connecting pipe of the connecting assembly 8 to cool the crucible 9. The liquid cooling pipe can adopt a double-layer sleeve. In this embodiment, the cooling liquid for cooling the crucible 9 in the liquid cooling assembly 401 can adopt deionized water, distilled water and pure water.

[0040] In order to better implement the utility model, refer to Figure 1 And Figure 2 In one embodiment, the adjusting assembly 3 comprises a rotating guide 301, a connecting rod 302, a baffle 307 and a crucible cover 309, wherein the rotating guide 301 is installed on the fixing assembly 1, and the rotating guide 301 is used to control the position of the evaporation hole 308 on the baffle 307; the lower end of the connecting rod 302 is connected with the rotating guide 301 after penetrating through the fixing assembly 1, and the upper end of the connecting rod 302 is connected with the baffle 307 after penetrating through the crucible cover 309, in order to ensure the stability of the connection between the baffle 307 and the connecting rod 302, a horizontal rod perpendicular to the connecting rod 302 is arranged at the end of the connecting rod 302, the horizontal rod is integrally connected and fixed with the surface of the baffle 307, and the upper part of the connecting rod 302 is installed on the side edge of the partition plate; a plurality of evaporation holes 308 are further arranged on the baffle 307. The crucible cover 309 is installed on the top of the mounting seat 402, the crucible 9 is contained in the crucible cover 309, the top of the crucible cover 309 is provided with a crucible hole 310, and the crucible hole 310 and the evaporation hole 308 are used for the selected working crucible 9. Rotating the rotating guide 301 drives the connecting rod 302 to rotate, so as to drive the baffle 307 to rotate.

[0041] As Figure 2 shown, the adjusting assembly 3 further comprises a first screw 303, a groove 304, a limiting hole 305 and a sliding groove 306, wherein the first screw 303 is arranged at the center of the baffle 307, the first screw 303 adopts a glass bead screw, a plurality of grooves 304 are arranged, the grooves 304 are arranged on the top of the crucible cover 309, in this embodiment, three grooves 304 are arranged between the crucible holes 310 on the top of the crucible cover 309 and arranged in a row, the grooves 304 are matched with the first screw 303 to fix the baffle 307; the sliding groove 306 is arranged on the baffle 307 and is arc-shaped with the connecting rod 302 as the center; the limiting hole 305 is arranged on the top of the crucible cover 309, and a second screw is arranged in the limiting hole 305 and extends into the sliding groove 306.

[0042] When the connecting rod 302 drives the baffle 307 to rotate around the connecting rod 302 as the center, the second screw position is fixed, and the sliding groove 306 moves with the baffle 307 in the process of rotating, and the baffle 307 can only move in the range defined by the second screw cooperating with the sliding groove 306. In the embodiment, the baffle 307 is provided with four evaporation holes 308, two of which are located on the side of the first screw 303 close to the connecting rod 302, and the other two are located at the edge of the baffle 307, and the four evaporation holes 308 are symmetrically arranged with the straight line where the first screw 303 and the connecting rod 302 are located. The evaporation holes 308 located in the baffle 307 control the two crucibles 9 close to the connecting rod 302 to work, and the two evaporation holes 308 located at the edge of the baffle 307 control the two crucibles 9 away from the connecting rod 302 to work.

[0043] In order to better implement the utility model, refer to Figure 3 In an embodiment, a plurality of heating assemblies 6 are further included, and each crucible 9 is provided with a heating assembly 6. The heating assembly 6 comprises a first connecting piece 601, which is installed on the top of the base of the mounting seat 402. The first connecting piece 601 is a molybdenum connecting piece. A first ceramic connecting piece 602 and a crucible 9 are sequentially installed on the top of the first connecting piece 601 from bottom to top. A heater 605 is sleeved on the outer periphery of the crucible 9. A plurality of second ceramic connecting pieces 603 are arranged on the outer side of the heater 605. The second ceramic connecting pieces 603 are installed on the first connecting piece 601. A second connecting piece 604 is arranged between the second ceramic connecting pieces 603 and the heater 605. The second ceramic connecting pieces 603 are connected to the first connecting piece 601 through screws. The crucible 9 and the heater 605 are installed on the mounting seat 402 through the first connecting piece 601, the first ceramic connecting piece 602 and the second ceramic connecting piece 603.

[0044] The heater 605 is a pyrolytic boron nitride composite pyrolytic graphite heater (PBN-PG), which can heat the crucible 9 to 800 DEG C. Compared with common metal heating wires, the PBN-PG has less gas emission and does not need to be made into an insulating part, which is insulated from the remaining conductive parts in the evaporation source. The second connecting piece 604 is a pyrolytic graphite connecting piece.

[0045] As Figure 4As shown, the fixing assembly 1 is further provided with an electrode 2 and a plurality of thermocouples 5, the connecting wire of the electrode 2 is arranged between the second ceramic connecting piece 603 and the second connecting piece 604 after passing through the bottom of the mounting seat 402, the second connecting piece 604, the exposed pyrolytic graphite part of the PBN-PG and the connecting wire of the electrode 2 are fixed together, the electrode 2 is electrically connected with the control system. Each crucible 9 is provided with a thermocouple 5, the connecting wire of the thermocouple 5 passes through the thermocouple hole of the mounting seat 402, the thermocouple hole of the first connecting piece 601, the thermocouple hole of the first ceramic connecting piece 602 and the thermocouple hole of the heater 605 in sequence, the thermocouple 5 is electrically connected with the control system, and the thermocouple 5 is used for measuring the temperature of the crucible 9. The connecting wire of the thermocouple 5 is sleeved with a double-hole ceramic tube for insulation.

[0046] In order to better implement the utility model, referring to Figure 3 In an embodiment, the mounting seat 402 comprises a base and a plurality of partitions, the base is provided with a plurality of crucibles 9, and the partitions are arranged between adjacent crucibles 9. The base and the partitions are integrally processed by oxygen-free copper, so that the mounting seat 402 is integrally formed, and the water cooling effect is not affected by the separate arrangement of the base and the partitions.

[0047] In order to better implement the utility model, referring to Figure 3 In an embodiment, the connecting rod 302 is installed on the side surface of the partition after passing through the fixing assembly 1.

[0048] Based on the above-mentioned novel evaporation source, the working principle is as follows:

[0049] The liquid cooling assembly 401 is installed on the fixing assembly 1, the upper end of the liquid cooling assembly 401 is communicated with the mounting seat 402 through the connecting assembly 8, the cooling liquid is introduced from the liquid inlet pipe of the liquid cooling assembly 401, and the cooling liquid is introduced into the mounting seat 402 through the liquid cooling pipe and the connecting pipe of the connecting assembly 8 to cool the crucible 9. When the crucible 9 is selected to work, the rotary guide feeder 301 is rotated to drive the connecting rod 302 to rotate, so as to drive the baffle 307 to rotate, the sliding groove 306 on the baffle 307 limits the whole rotation angle of the baffle 307, when a certain crucible 9 is selected to work, the evaporation hole 308 corresponding to the crucible 9 is aligned with the corresponding crucible hole 310, and the position of the baffle 307 is locked through the cooperation of the first screw 303 and the groove 304, so as to select different crucibles 9 to work. When the evaporation source works, the electrode 2 is used to control the heater 605 to heat the crucible 9, and the thermocouple 5 is used to measure the temperature of the working crucible 9.

[0050] Although the utility model has been described with reference to the preferred embodiments, various modifications can be made to it without departing from the scope of the utility model and equivalent replacements can be made to the components therein. In particular, the technical features mentioned in each embodiment can be combined in any manner as long as there is no structural conflict. The utility model is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A novel evaporation source, characterized in that, The utility model relates to a kind of evaporation source fixing device, including: Fixed component, the fixed component is used to support and fix the evaporation source; Cooling component, the cooling component is used to cool down crucible in the evaporation source, the cooling component includes liquid cooling component and mounting seat, the liquid cooling component is installed on the fixed component, the liquid cooling component is used to deliver cooling liquid into the mounting seat, the mounting seat is used to install multiple the crucible; Connecting component, the connecting component is used to realize the detachable connection of the liquid cooling component and the mounting seat; And Adjusting component, the adjusting component is installed on the fixed component, the adjusting component is used to select the crucible to work.

2. The novel evaporation source of claim 1, characterized in that The connecting component includes first joint body, connecting pipe and second joint body, one end of the connecting pipe is provided with the first joint body, the other end is provided with the second joint body, the first joint body of the connecting component is connected with the first joint body arranged at the bottom of the mounting seat, the second joint body of the connecting component is connected with the second joint body arranged at the top of the liquid cooling component.

3. The novel evaporation source of claim 1, characterized in that The liquid cooling component includes liquid cooling pipe, liquid inlet pipe and liquid outlet pipe, the liquid cooling pipe is installed on the fixed component, the liquid cooling pipe is communicated with the liquid inlet pipe and the liquid outlet pipe, the upper end of the liquid cooling pipe is communicated with the mounting seat through connecting component.

4. The novel evaporation source according to any of claims 1 to 3, characterized in that The adjusting component includes rotating introducer, connecting rod, baffle and crucible cover, wherein, The rotating introducer is installed on the fixed component, and the rotating introducer is used to control the position of the baffle; The lower end of the connecting rod is connected with the rotating introducer after penetrating through the fixed component, and the upper end of the connecting rod is connected with the baffle after penetrating through the crucible cover; The baffle is further provided with a plurality of evaporation holes; The crucible cover is installed at the top of the mounting seat, and the crucible is contained in the crucible cover, the top of the crucible cover is provided with a crucible hole, and the crucible hole is used for selecting the working crucible with the evaporation hole.

5. The novel evaporation source of claim 4, characterized in that The adjusting component further includes a first screw, a groove, a limiting hole and a sliding groove, wherein, The first screw is arranged at the center of the baffle; The groove is provided with a plurality of grooves, and the groove is arranged at the top of the crucible cover. The sliding groove is arranged on the baffle, and the sliding groove is arc-shaped with the connecting rod as the center; The limiting hole is arranged at the top of the crucible cover, and the second screw is arranged in the limiting hole, and the second screw extends into the sliding groove.

6. The novel evaporation source according to any of claims 1 to 3, characterized in that Further including a plurality of heating components, each of the crucibles is provided with the heating component, the heating component includes a first connecting piece, the first connecting piece is installed at the top of the mounting seat, and the first connecting piece is sequentially provided with a first ceramic connecting piece and the crucible from bottom to top, the outer periphery of the crucible is provided with a heater, the outer side of the heater is provided with a plurality of second ceramic connecting pieces, the second ceramic connecting pieces are installed on the first connecting piece, and the second ceramic connecting pieces are provided with a second connecting piece between the heater.

7. The novel evaporation source of claim 6, characterized in that The fixing assembly is further provided with electrodes and a plurality of thermocouples. Connection wires of the electrodes are arranged between the second ceramic connecting piece and the second connecting piece after passing through the bottom of the mounting seat. Each of the crucibles is provided with a thermocouple. Connection wires of the thermocouples pass through, in sequence, a thermocouple hole of the mounting seat, a thermocouple hole of the first connecting piece, a thermocouple hole of the first ceramic connecting piece and a thermocouple hole of the heater.

8. The novel evaporation source according to any of claims 1 to 3, characterized in that The mounting seat comprises a base and a plurality of partitions. The base is provided with a plurality of the crucibles. The partitions are arranged between adjacent crucibles.

9. The novel evaporation source of claim 4, characterized in that The connecting rod is arranged on the side surface of the partition after passing through the fixing assembly.

10. The novel evaporation source of claim 4, characterized in that The number of the crucible holes is consistent with the number of the crucibles.

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