Three-axis MEMS gyroscope

Abstract

The utility model relates to a three-axis MEMS gyroscope, which comprises a driving frame, an X-axis detection module for detecting the angular velocity of an X axis, a Y-axis detection module for detecting the angular velocity of a Y axis and a Z-axis detection module for detecting the angular velocity of a Z axis, and the X-axis detection module, the Y-axis detection module and the Z-axis detection module are all mounted on the driving frame through force transmission beams. Therefore, the motion of the driving frame is sensed. According to the utility model, the motion of the driving frame is transmitted to the X-axis detection module, the Y-axis detection module and the Z-axis detection module, so that the measurement of three axial angular velocities is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of MEMS gyroscope, concretely relates to a three -axis MEMS gyroscope. BACKGROUND

[0002] The three -axis MEMS gyroscope device is mostly discrete integration, and has the problems of large device volume and high cost, which is not conducive to the development of low power consumption and miniaturization of the device. Therefore, a single -chip integrated three -axis MEMS gyroscope is needed to realize the miniaturization and integration development of the gyroscope. SUMMARY

[0003] The utility model provides a three -axis MEMS gyroscope to overcome the above -mentioned problems or at least partially solve the above -mentioned problems, and the specific scheme is as follows:

[0004] A three -axis MEMS gyroscope, including drive frame, X -axis detection module for detecting X -axis angular velocity, Y -axis detection module for detecting Y -axis angular velocity and Z -axis detection module for detecting Z -axis angular velocity, X -axis detection module, Y -axis detection module and Z -axis detection module are all installed on the drive frame through force transmission beam to induct the movement of drive frame.

[0005] Further, the Y -axis detection module is centrally installed on the drive frame, and the X -axis detection module and the Z -axis detection module are arranged on the left and right sides of the Y -axis detection module.

[0006] Further, the gyroscope further includes a detection frame, the detection frame includes an X -axis frame, a Y -axis frame and a Z -axis frame, the X -axis detection module is installed on the drive frame through the X -axis frame, the Y -axis detection module is installed on the drive frame through the Y -axis frame, and the Z -axis detection module is installed on the drive frame through the Z -axis frame.

[0007] Further, the force transmission beam includes an X -axis force transmission beam, a Y -axis force transmission beam and a Z -axis force transmission beam, the X -axis detection module is installed on the X -axis frame through the X -axis force transmission beam, the Y -axis detection module is installed on the Y -axis frame through the Y -axis force transmission beam, and the Z -axis detection module is installed on the Z -axis frame through the Z -axis force transmission beam.

[0008] Further, the X -axis force transmission beam is a straight beam, the Y -axis force transmission beam is an inclined beam, and the Z -axis force transmission beam is an H -type structure beam.

[0009] Further, the X -axis detection module, Y -axis detection module and Z -axis detection module all include two mass blocks and a lever structure, and the two mass blocks are connected through the lever structure.

[0010] Furthermore, the setting direction of the mass blocks of the X-axis detection module and the Z-axis detection module is different from that of the mass block of the Y-axis detection module.

[0011] Furthermore, the lever structure includes two support rods and a spring beam, with the two support rods connected by the spring beam.

[0012] Furthermore, each of the mass blocks is fixedly connected to one of the support rods.

[0013] Furthermore, the support rods of the X-axis detection module and the Y-axis detection module are both long support rods, while the support rod of the Z-axis detection module is a short support rod.

[0014] This utility model has the following beneficial effects:

[0015] 1. This utility model achieves the measurement of angular velocities along three axes by transmitting the motion of the drive frame to the X-axis detection module, Y-axis detection module, and Z-axis detection module.

[0016] 2. This utility model further reduces the structural size and improves the integration of the device through reasonable arrangement. Attached Figure Description

[0017] Figure 1 A schematic diagram of the structure of a three-axis MEMS gyroscope provided in an embodiment of this utility model;

[0018] Figure 2 A schematic diagram of the anchor point of a three-axis MEMS gyroscope provided for an embodiment of this utility model;

[0019] Figure 3 A schematic diagram of the beam of a three-axis MEMS gyroscope provided for an embodiment of this utility model;

[0020] Figure 4 A schematic diagram of the driving direction motion mode of a three-axis MEMS gyroscope provided in an embodiment of this utility model;

[0021] Figure 5 A schematic diagram of the motion detection direction of a three-axis MEMS gyroscope provided for an embodiment of this utility model. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only a part of the present utility model, and not all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] SeeFigure 1 The utility model discloses a three -axis MEMS gyroscope provides, including drive frame 1 for detecting X -axis angular velocity's X -axis detection module 3, for detecting Y -axis angular velocity's Y -axis detection module 5 and for detecting Z -axis angular velocity's Z -axis detection module 7, X -axis detection module 3, Y -axis detection module 5 and Z -axis detection module 7 all are installed on drive frame 1 through force transmission beam to induct drive frame 1's movement.

[0024] Preferably, the Y-axis detection module 5 is centrally installed on the drive frame, and the X-axis detection module 3 and the Z-axis detection module 7 are arranged on the left and right sides of the Y-axis detection module 5.

[0025] The utility model discloses a three -axis MEMS gyroscope provides, including drive frame 1 for detecting X -axis angular velocity's X -axis detection module 3, for detecting Y -axis angular velocity's Y -axis detection module 5 and for detecting Z -axis angular velocity's Z -axis detection module 7, X -axis detection module 3, Y -axis detection module 5 and Z -axis detection module 7 all are installed on drive frame 1 through force transmission beam to induct drive frame 1's movement.

[0026] Preferably, the gyroscope further comprises a detection frame, the detection frame comprising an X-axis frame 2, a Y-axis frame 4 and a Z-axis frame 6; the X-axis detection module 3 is installed on the drive frame 1 through the X-axis frame 2; the Y-axis detection module 5 is installed on the drive frame 1 through the Y-axis frame 4; and the Z-axis detection module 7 is installed on the drive frame 1 through the Z-axis frame 6.

[0027] Preferably, the force transmission beam comprises an X-axis force transmission beam, a Y-axis force transmission beam and a Z-axis force transmission beam; the X-axis detection module 3 is installed on the X-axis frame 2 through the X-axis force transmission beam; the Y-axis detection module 5 is installed on the Y-axis frame 4 through the Y-axis force transmission beam; and the Z-axis detection module 7 is installed on the Z-axis frame 6 through the Z-axis force transmission beam.

[0028] Preferably, the X-axis force transmission beam is a straight beam, the Y-axis force transmission beam is an inclined beam, and the Z-axis force transmission beam is an H-shaped structural beam.

[0029] Preferably, the X-axis detection module 3, the Y-axis detection module 5 and the Z-axis detection module 7 each comprise two mass blocks and a lever structure, and the two mass blocks are connected through the lever structure.

[0030] Preferably, the X-axis detection module 3, the Y-axis detection module 5 and the Z-axis detection module 7 each comprise two mass blocks and a lever structure, and the two mass blocks are connected through the lever structure.

[0031] Preferably, the lever structure comprises two support rods and a spring beam, and the two support rods are connected through the spring beam.

[0032] Each of the mass blocks is fixedly connected with a support rod, the support rods of the X-axis detection module 3 and the Y-axis detection module 5 are long support rods, and the support rod of the Z-axis detection module 7 is a short support rod.

[0033] Referring to Figure 1 As shown in the figure, the three-axis MEMS gyroscope anchor point schematic diagram provided by the embodiment of the utility model shows a driving frame support anchor point 8, an X-axis frame support anchor point 9, a torsional pendulum beam support anchor point 10 and a Y-axis frame support anchor point 11 and the like.

[0034] Referring to Figure 3As shown, the three-axis MEMS gyroscope beam schematic diagram provided by the embodiment of the utility model, wherein drive frame support beam 12, X axis frame support beam 13 are the support beam of drive frame 1 and X axis frame 2 respectively, its function is to make drive frame 1 and X axis frame can reciprocate along X axis.X axis spring beam 14, its function is to support X axis detection module 3, and make it can reciprocate along Y axis (wherein, the gyroscope is based on Coriolis force, the axis of driving movement direction, detection movement direction and detection angular velocity is perpendicular to each other, for example, to detect the angular velocity around X axis, the driving direction can only be Y axis or Z axis, but the driving direction is generally in-plane movement, that is Y axis, detecting Y axis angular velocity is the same, assuming that the driving movement direction is Y axis, then the detection movement direction is Z axis generally said X axis gyroscope, and his function is to detect the angular velocity of X axis);X axis force transmission beam 15, its function is to transmit the movement of drive frame 1 to X axis detection module 3, so that it receives the reciprocating force along Y axis (at this time, the driving movement is drive frame 1 along Y axis movement);X axis detection module includes X axis detection module support rod 16, X axis spring beam 14 and X axis mass block;X axis detection module support rod 16, its function is to connect X axis mass block and X axis spring beam 14, the first lever structure formed by X axis detection module support rod 16 and X axis spring beam 14, the reciprocating force along Y axis received by X axis mass block is transmitted to the first lever structure, and X axis mass block can be moved away from the plane. Wherein, Y axis force transmission beam includes first Y axis force transmission beam 17 and second Y axis force transmission beam 19, first Y axis force transmission beam 17, its function is to transmit the movement of drive frame 1 to Y axis frame 4, so that Y axis frame 4 generates reciprocating movement along Y axis;Y axis frame support beam 18 is used for supporting Y axis frame together with force transmission beam 17, and Y axis frame can realize reverse reciprocating movement. Second Y axis force transmission beam 19, its function is to transmit the movement of Y axis frame 4 to Y axis mass block, so that it receives the reciprocating force along X axis;Y axis detection module includes Y axis detection module support rod 21, Y axis spring beam 20 and Y axis mass block, Y axis detection module support rod 21, its function is to connect Y axis mass block and Y axis spring beam 20, the second lever structure formed by Y axis detection module support rod 21 and Y axis spring beam 20, the reciprocating force along X axis received by Y axis mass block is transmitted to the second lever structure, and Y axis mass block can be moved away from the plane.The Z-axis detection module comprises a Z-axis detection module support rod 23, a Z-axis spring beam 22 and a Z-axis mass block, the Z-axis spring beam 22 is used for supporting the Z-axis detection module 7 and enabling the Z-axis detection module 7 to reciprocate along the Y-axis; the Z-axis detection module support rod 23 is used for connecting the Z-axis mass block and the Z-axis spring beam 22, the Z-axis detection module support rod 23 and the Z-axis spring beam 22 form a third lever structure, force along the Y-axis reciprocated by the Z-axis mass block is transmitted to the third lever structure, and the Z-axis detection module 7 can swing in a horizontal plane, and the Z-axis force transmission beam 24 is used for transmitting the movement of the driving frame 1 to the Z-axis detection module, so that the Z-axis detection module is subjected to force along the Y-axis reciprocated.

[0035] Referring to Figure 4 As shown in the figure, the three-axis MEMS gyroscope driving direction movement mode provided by the embodiment of the utility model is shown, the structure makes the driving frame 1 produce stretching or contraction movement by applying the same-phase voltage to the driving comb teeth, and makes each detection module do simple harmonic vibration through each force transmission beam; wherein the comb teeth are dense tooth shapes on the structure, realize a function of making the frame move along the Y-axis by applying voltage.

[0036] Referring to Figure 5 As shown in the figure, the three-axis MEMS gyroscope detection direction movement mode provided by the embodiment of the utility model is shown, when each sensitive axis has angular rate input, the X-axis mass block and the X-axis mass block do off-plane seesaw movement, relative displacement is generated between the X-axis mass block and the detection electrode plate, and the capacitance electrode plate gap is changed; the Z-axis mass block does in-plane torsional pendulum movement, relative displacement is generated between the Z-axis mass block and the detection electrode plate, the capacitance electrode plate facing area is changed, and the angular rate size is detected through the capacitance change amount.

[0037] The above only describes the preferred embodiments of the utility model, and does not limit the utility model, any modification, equivalent replacement, improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A three-axis MEMS gyroscope, characterized by, The gyroscope comprises a driving frame, an X-axis detection module for detecting X-axis angular velocity, a Y-axis detection module for detecting Y-axis angular velocity, and a Z-axis detection module for detecting Z-axis angular velocity, wherein the X-axis detection module, the Y-axis detection module and the Z-axis detection module are installed on the driving frame through force transmission beams to sense the movement of the driving frame.

2. The tri-axis MEMS gyroscope of claim 1, wherein, The Y-axis detection module is centrally installed on the driving frame, and the X-axis detection module and the Z-axis detection module are arranged on the left and right sides of the Y-axis detection module.

3. The tri-axis MEMS gyroscope of claim 1, wherein, The gyroscope further comprises a detection frame, wherein the detection frame comprises an X-axis frame, a Y-axis frame and a Z-axis frame; the X-axis detection module is installed on the driving frame through the X-axis frame; The Y-axis detection module is installed on the driving frame through the Y-axis frame; and the Z-axis detection module is installed on the driving frame through the Z-axis frame.

4. The tri-axis MEMS gyroscope of claim 3, wherein, The force transmission beams comprise an X-axis force transmission beam, a Y-axis force transmission beam and a Z-axis force transmission beam; the X-axis detection module is installed on the X-axis frame through the X-axis force transmission beam; the Y-axis detection module is installed on the Y-axis frame through the Y-axis force transmission beam; and the Z-axis detection module is installed on the Z-axis frame through the Z-axis force transmission beam.

5. The tri-axis MEMS gyroscope of claim 4, wherein, The X-axis force transmission beam is a straight beam, the Y-axis force transmission beam is an inclined beam, and the Z-axis force transmission beam is an H-shaped structural beam.

6. The tri-axis MEMS gyroscope of claim 1, wherein, The X-axis detection module, the Y-axis detection module and the Z-axis detection module each comprise two mass blocks and a lever structure, and the two mass blocks are connected through the lever structure.

7. The tri-axis MEMS gyroscope of claim 6, wherein, The setting directions of the mass blocks of the X-axis detection module and the Z-axis detection module are different from the setting direction of the mass blocks of the Y-axis detection module.

8. The tri-axis MEMS gyroscope of claim 6, wherein, The lever structure comprises two support rods and a spring beam, and the two support rods are connected through the spring beam.

9. The tri-axis MEMS gyroscope of claim 8, wherein, Each of the mass blocks is fixedly connected with one of the support rods.

10. The tri-axis MEMS gyroscope of claim 8, wherein, The support rods of the X-axis detection module and the Y-axis detection module are long support rods, and the support rod of the Z-axis detection module is a short support rod.

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