Electrode bar structure of plasma equipment
By using a columnar electrode rod structure and cooling water circuit design, the problem of uneven electrode excitation in existing plasma equipment has been solved, achieving efficient plasma cleaning of large batches of products and stability of electrode temperature, thus improving the cleaning effect.
Patent Information
- Application Number
- CN202520000005.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-01
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2035-01-01
AI Technical Summary
The existing electrode structure of plasma equipment cannot effectively stimulate the space of large-volume products, resulting in poor cleaning effect and failing to meet the needs of mass production.
The columnar electrode rod structure, combined with the cooling water circuit design, ensures that the electrode rod stably excites plasma gas within the chamber and is fixed by an insulating and sealed structure, forming a gas excitation that scatters from the center point to the surroundings, reducing space occupation and maintaining stable electrode temperature.
It achieves efficient plasma cleaning of mass-produced products. The electrode rod structure design reduces space occupation, and the cooling water circuit ensures stable electrode temperature, thereby improving the efficiency and stability of plasma excitation.
Smart Images
Figure CN223757490U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of plasma equipment, in particular to a kind of plasma equipment electrode stick structure. BACKGROUND
[0002] Vacuum plasma cleaning is widely used in material surface modification, etching and cleaning, plasma chemical vapor deposition, sputtering and other processes, which are applied in the key processes of processing silicon, quartz, niobium lithium compounds and other special materials such as ceramics or glass. The vacuum plasma cleaning chamber is mainly used for surface treatment of plastics, new materials and particulate matter.
[0003] Vacuum plasma cleaning is usually introduced in the following aspects: material surface energy improvement, before bonding and coating, and before silk printing. After plasma cleaning, the product can obtain better surface performance.
[0004] In existing plasma equipment, especially box-type plasma cleaning system, the electrode is mainly a metal plate or other additional plate-shaped metal frame for holding products arranged in the box, forming positive and negative electrodes in the box, injecting electric energy to excite industrial gas to form plasma gas to achieve the cleaning function of the product.
[0005] However, for irregularly placed large quantities of products, the existing electrode structure cannot achieve overall space discharge excitation and can adapt to batch cleaning with simple structure. INVENTION CONTENTS
[0006] The technical problem solved by the utility model is to provide a plasma equipment electrode stick structure with simple structure, larger space in the plasma cleaning box and more stable and efficient plasma gas excitation.
[0007] The technical solution of the utility model is as follows:
[0008] A plasma equipment electrode stick structure, wherein it comprises a columnar main body made of conductive metal, a cooling water channel is arranged on the main body, the cooling water channel comprises a water inlet channel and a drain channel, the water inlet channel extends from a water inlet at the outer end of the main body to the inner end of the main body, the drain channel is in communication with the water inlet channel at the inner end of the main body, is arranged parallel to the water inlet channel, extends to the drain outlet at the outer end of the main body, and the water inlet and the drain outlet are respectively connected with the water inlet and the drain outlet of a water cooler through a hose bundle; the outer end of the main body is provided with an electrode connecting portion and a mounting portion, an insulating sealing structure is arranged outside the mounting portion to be inserted into the mounting hole of the box of the equipment to form a sealed and insulated connecting structure; the electrode connecting portion is provided with a metal connecting point electrically connected with one pole of an external plasma radio frequency power supply.
[0009] The electrode rod structure of the plasma equipment as described above, wherein the inner end of the columnar body is a top structure of a circular surface; a limiting convex ring is arranged outside the mounting portion of the outer circumferential surface of the body, and the limiting convex ring is correspondingly clamped with the concave ring on the outer side of the insulating sealing structure; a circular flange is arranged outside the limiting convex ring to press the limiting convex ring, and the circular flange is locked to the insulating sealing structure through bolts.
[0010] The electrode rod structure of the plasma equipment as described above, wherein the water inlet channel is arranged at the central axis of the body, and the water outlet channel is an annular channel arranged outside the water inlet channel, forming a cooling water path structure that the cooling liquid is transported from the water inlet at the outer end of the body to the water outlet at the outer end of the body through the water outlet channel outside the water inlet channel.
[0011] The electrode rod structure of the plasma equipment as described above, wherein the water inlet channel and the water outlet channel are arranged side by side on the left and right, respectively, and the water inlet channel extends to the inner end of the body and communicates with the inner end of the water outlet channel, forming a cooling water path structure that the cooling liquid is transported from the water inlet at one side of the outer end of the body to the water outlet at the outer end of the body through the water outlet channel outside the water inlet channel.
[0012] The electrode rod structure of the plasma equipment as described above, wherein the water inlet is arranged at the bottom of the outer end of the body, and the water outlet is arranged on the outer circumferential side surface of the outer end of the body.
[0013] As known from the above description, the electrode rod structure of the plasma equipment of the present application can achieve the following effects compared with the prior art:
[0014] The electrode rod structure of the plasma equipment of the present application is an electrode structure with a columnar body, which is a clever design for a large number of electronic shell products to be cleaned. After the electrode rod is arranged on the cleaning tank and is inserted and fixed, a structure is formed that a central point in the tank scatters industrial gas into the tank in the direction of other electrodes, which reduces the occupation of space and forms a sufficient plasma excitation range. At the same time, the cooling water path structure can effectively ensure that the body of the electrode rod always maintains a set temperature, avoids over-temperature, and makes the plasma excitation run stably and efficiently. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 The structure of the preferred embodiment of the present application is shown in the figure.
[0016] Explanation of main element symbols:
[0017] The utility model discloses:
[0018] 1: main body 2: insulating seal structure 3: mounting portion
[0019] 4: water inlet 5: drain port 6: limit convex ring
[0020] 7: flange 8: drainage channel 9: water inlet channel Specific implementation
[0021] In order to have more clear understanding to the technical features, object and effect of the utility model, now the specific implementation of the utility model is explained with the reference to the drawings.
[0022] The utility model discloses a kind of electrode rod structures of plasma equipment, preferably in its preferred embodiment, please refer to Figure 1 As shown, preferably, the electrode rod structure of the plasma equipment includes the cylindrical main body 1 made of conductive metal, the main body 1 is provided with a cooling water channel, the cooling water channel includes a water inlet channel 9 and a drainage channel 8, the water inlet channel 9 extends from the water inlet 4 at the outer end of the main body 1 to the inner end of the main body 1, the drainage channel 8 is communicated with the water inlet channel 9 at the inner end of the main body 1, and is arranged in parallel with the water inlet channel 9, and extends to the drain port 5 at the outer end of the main body 1, the water inlet 4 and the drain port 5 are connected to the water inlet and the water outlet of a water cooler through a hose bundle respectively;The outer end of the main body 1 is provided with an electrode connecting portion and a mounting portion 3, the mounting portion 3 is provided with an insulating seal structure 2 outside, which is inserted into the box mounting hole of the equipment to form a sealed and insulated connecting structure;The electrode connecting portion is provided with a metal connecting point electrically connected to one pole of an external plasma radio frequency power supply. As shown, the electrode rod is used for inserting into the box side wall of the plasma cleaning equipment, and the outer end is arranged outside the box side wall and extends into the box to form a protruding electrode in the space part of the box. Through corresponding cooperation with another electrode on the multiple side walls of the box, the process gas in the box is ionized and excited to form a plasma gas, which cleans the surface of the product. Among them, the electrode rod is mounted on the box through sealing insulation, and a cooling water channel structure is also provided, so that the use of the electrode rod can be kept at a stable temperature level, ensuring the stability and efficiency of the plasma gas excitation.
[0023] The electrode stick structure of the plasma equipment of the utility model has the advantages that the electrode stick is locked to the insulating sealing structure through the flange, and the electrode stick is stable and will not fall off.
[0024] The electrode stick structure of the plasma equipment of the utility model has the advantages that the electrode stick is locked to the insulating sealing structure through the flange, and the electrode stick is stable and will not fall off.
[0025] The electrode stick structure of the plasma equipment of the utility model has the advantages that the electrode stick is locked to the insulating sealing structure through the flange, and the electrode stick is stable and will not fall off.
[0026] The electrode stick structure of the plasma equipment of the utility model has the advantages that the electrode stick is locked to the insulating sealing structure through the flange, and the electrode stick is stable and will not fall off. The electrode stick structure of the plasma equipment of the utility model has the advantages that the electrode stick is locked to the insulating sealing structure through the flange, and the electrode stick is stable and will not fall off.
[0027] The utility model discloses a plasma equipment electrode stick structure, a kind of electrode structure with the columnar main body 1, it is a ingenious design to the electronic shell product of large quantities of surface to be washed, by the electrode stick is set in the box of washing, after being inserted and sealed and fixed well, it can form the structure of the other electrode of the direction scattering of a center point in the box inside to the surrounding, reach the structure of the industrial gas of excitation filling in box inside, reduce the occupation of space, and can form the effect of sufficient plasma excitation range again.Simultaneously, the cooling water path structure that it is set, can effectively guarantee that the main body 1 of electrode stick always remains in a set temperature, avoid overtemperature, make the excitation operation of plasma stable and efficient.
[0028] The above merely describes the specific embodiment of the utility model schematically, and is not used to limit the range of the utility model. Any equivalent change and modification made by any person skilled in the art without departing from the concept and principle of the utility model should belong to the protection range of the utility model.
Claims
1. A plasma apparatus electrode rod structure, characterized by, The application relates to a cylindrical body made of a conductive metal, which is provided with a cooling water channel, the cooling water channel comprising a water inlet channel and a water outlet channel, the water inlet channel extending from a water inlet at the outer end of the body to the inner end of the body, and the water outlet channel being in communication with the water inlet channel at the inner end of the body, being arranged in parallel with the water inlet channel, and extending to a water outlet at the outer end of the body, the water inlet and the water outlet being connected to the water inlet and the water outlet of a cold water machine via a hose bundle; the outer end of the body is provided with an electrode connecting part and a mounting part, the mounting part being provided with an insulating sealing structure outside, which is inserted into a mounting hole of a box of equipment to form a sealed and insulated connecting structure; the electrode connecting part is provided with a metal connecting point which is electrically connected to one pole of an external plasma radio frequency power source.
2. The plasma apparatus electrode rod structure as claimed in claim 1, wherein The inner end of the cylindrical body is a top structure with a circular surface; the mounting part of the outer circumferential surface of the body is provided with a limiting convex ring which is correspondingly clamped with a concave ring on the outer side end of the insulating sealing structure; the limiting convex ring is provided with a circular flange outside, the circular flange is used for pressing the limiting convex ring, and the circular flange is locked to the insulating sealing structure via bolts.
3. The plasma apparatus electrode rod structure as claimed in claim 2, wherein The water inlet channel is arranged at the central axis of the body, and the water outlet channel is an annular channel which is arranged around the water inlet channel, thereby forming a cooling water channel structure in which cooling liquid is transported from the water inlet at the center of the outer end of the body, enters the water outlet channel on the outer circumferential side of the water inlet channel after being transported to the inner end of the body, and is returned to the water outlet at the outer end of the body.
4. The plasma processing apparatus electrode rod structure of claim 2, wherein, The water inlet channel and the water outlet channel are arranged in parallel on the left and right sides, the water inlet channel extends to the inner end of the body, and the water outlet channel is in communication with the inner end of the body, thereby forming a cooling water channel structure in which cooling liquid is transported from the water inlet at one side of the outer end of the body, enters the water outlet channel on the side of the water inlet channel after being transported to the inner end of the body, and is returned to the water outlet at the outer end of the body.
5. The plasma processing apparatus electrode rod structure of claim 3 or 4, wherein, The water inlet is arranged at the bottom of the outer end of the body, and the water outlet is arranged on the outer circumferential side of the outer end of the body.