Electric energy self-circulation system and device for testing semiconductor device

Abstract

The utility model relates to an electric energy self-circulation system and device for a semiconductor device test, the test system comprises a first filter circuit, a first conversion circuit, a transformation circuit, a second conversion circuit and a second filter circuit, the input alternating current of an external power supply is subjected to primary filtering, rectification, transformation, inversion and secondary filtering, and finally returns to the external power supply. The input electric energy of the system is equal to the output electric energy, a reactive electric energy self-circulation system is formed, a circuit of the test system comprises a to-be-tested component, and the device further comprises a control circuit so as to simulate the operating environment of the actual working condition of the component and test the to-be-tested component. The test system of the utility model is an electric energy self-circulation system, and does not have other extra power consumption except for the loss generated by components, thereby effectively saving the energy consumption; the testing device of the utility model can simulate the actual operation condition of the component to be tested, test the qualified condition of the component, and effectively solve the technical problem of clamping in the semiconductor testing field.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of power electronics, more particularly to a kind of electric energy self-circulation system and device for semiconductor device test. BACKGROUND

[0002] As an important step in the process of semiconductor design, production, packaging and testing, semiconductor testing is a process of distinguishing defects, verifying whether the device meets the design target and separating good products from defective products using specific equipment through testing of the semiconductor device under test.

[0003] Semiconductor testing can ensure that the production of chips meets the required yield, reduces costs, reduces waste, provides effective test data and improves design and manufacturing processes. However, domestic semiconductor testing equipment is basically based on single semiconductor static testing or dynamic testing. The existing semiconductor testing device cannot meet the actual application conditions of semiconductor, and thus cannot effectively intercept defective products, which can easily lead to defective products flowing into the downstream industry chain, causing greater economic losses. SUMMARY

[0004] The technical problem to be solved by the utility model is that the existing semiconductor testing device cannot meet the actual application conditions of semiconductor, and thus the interception effect of defective products is not good. In view of the above defects of the prior art, a kind of electric energy self-circulation system and device for semiconductor device test are provided. It can simulate the actual application conditions of semiconductor and maximize the saving of electric energy consumption by using closed-loop electric energy self-circulation system.

[0005] The utility model solves the technical problems by adopting the following technical solutions:

[0006] A kind of electric energy self-circulation system for semiconductor device test is constructed, comprising a first filter circuit, the input end of the first filter circuit is connected with external power supply, and is used to carry out first filtering to the input alternating current provided by the external power supply, so that the input alternating current is converted into first alternating current;

[0007] A first conversion circuit, the input end of the first conversion circuit is connected with the output end of the first filter circuit, and is used to rectify the first alternating current, so that the first alternating current is converted into direct current;

[0008] A second conversion circuit, the input end of the second conversion circuit is connected with the output end of the first conversion circuit, and is used to invert the direct current, so that the direct current is converted into second alternating current;

[0009] a second filter circuit, an input end of the second filter circuit being connected with an output end of the second conversion circuit, and being used for performing a second filtering on the second alternating current, so that the second alternating current is converted into an output alternating current;

[0010] an output end of the second filter circuit being connected with an input end of the external power supply or an input end of the first conversion circuit, and the output alternating current being returned to the external power supply, so as to form an electric energy self-circulation system;

[0011] the first filter circuit, the first conversion circuit, the second conversion circuit and the second filter circuit are sequentially connected and are respectively located on one or more circuit boards.

[0012] Further, the input alternating current of the system is equal to the output alternating current.

[0013] Further, when a voltage conversion circuit is included, the voltage conversion circuit is arranged between an output end of the first conversion circuit and an input end of the second conversion circuit, and is used for adjusting an input voltage of the second conversion circuit, so that the second conversion circuit operates under different input voltages.

[0014] When the voltage conversion circuit is not included, an output end of the first conversion circuit is connected with an input end of the second conversion circuit.

[0015] Further, one or more of the first conversion circuit, the voltage conversion circuit and the second conversion circuit include a to-be-tested component.

[0016] Further, a control circuit is further included, and the control circuit is used for controlling the first conversion circuit, the voltage conversion circuit and the second conversion circuit, so as to simulate an operating environment of an actual working condition of the to-be-tested component.

[0017] Further, the input alternating current includes at least one phase number, and phase numbers of the first conversion circuit and the second conversion circuit respectively correspond to the phase number of the input alternating current.

[0018] Further, a fuse is further included, the fuse is located between the external power supply and an input end of the first filter circuit, and the fuse is used for forming a safe isolation between the system and the external power supply.

[0019] The utility model also provides a kind of device of semiconductor device test, wherein, including shell, test component and heat dissipation component, the shell includes cabinet and upper cover, cavity is equipped in the cabinet;The test component is located in the cavity, and it is used to test the component to be measured;One end of the heat dissipation component is located in the cavity, and the other end is connected to the outside of shell, and it is used to dissipate heat for the test component;The upper cover is detachably fixedly connected with the cabinet, and is used to protect the test component and the heat dissipation component;

[0020] Further, the test component includes a first filter circuit, a first conversion circuit, a voltage conversion circuit, a second conversion circuit, a second filter circuit and a control circuit;The first filter circuit, the first conversion circuit, the voltage conversion circuit, the second conversion circuit, the second filter circuit and the control circuit are packaged on the PCB board or the cavity, respectively.

[0021] The utility model has the advantages that:

[0022] The utility model relates to a kind of electric energy self-circulation system and device of semiconductor device test, test system includes first filter circuit, first conversion circuit, voltage conversion circuit, second conversion circuit, second filter circuit, the input alternating current of external power supply is sequentially filtered once, rectified, voltage conversion, inverter and filtered twice, finally, return to external power supply, the input electric energy of system is equal to the output electric energy of system, form reactive electric energy self-circulation system, the circuit of test system includes component to be measured, the device also includes control circuit, so that the test system can simulate the operating environment of the actual working condition of the component, realize the test of component to be measured.The utility model discloses test system is electric energy self-circulation system, except the loss generated by component itself, there is no other additional power consumption, effectively save energy consumption;The utility model proposes that each circuit module is electrically connected, and is located on one or more circuit boards, and circuit board is packaged in the same cavity, effectively improve the degree of modularization, structure is simpler;The test device of the utility model can effectively simulate the actual operating condition of component to be measured, test component qualified condition, effectively solve the technical problem of neck in semiconductor test field. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the utility model will be further described below in conjunction with the drawings and embodiments, and the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other system architecture drawings or circuit topology drawings can be obtained without creative labor under the premise of these drawings:

[0024] Figure 1 It is the architecture diagram of a kind of electric energy self-circulation system without voltage conversion circuit and first filter circuit not in the cycle in the utility model one embodiment of semiconductor device test.

[0025] Figure 2 is an architecture diagram of a power self-circulation system without a transformer circuit and with the first filter circuit in the cycle for testing a semiconductor device according to an embodiment of the present application;

[0026] Figure 3 is an architecture diagram of a power self-circulation system with a transformer circuit and without the first filter circuit in the cycle for testing a semiconductor device according to an embodiment of the present application;

[0027] Figure 4 is an architecture diagram of a power self-circulation system with a transformer circuit and with the first filter circuit in the cycle for testing a semiconductor device according to an embodiment of the present application;

[0028] Figure 5 is a whole structure diagram of the device for testing a semiconductor device according to an embodiment of the present application;

[0029] Figure 6 is an exploded view of the device for testing a semiconductor device according to an embodiment of the present application;

[0030] Figure 7 is a circuit diagram of a single-phase first conversion circuit according to an embodiment of the present application;

[0031] Figure 8 is a circuit diagram of a three-phase first conversion circuit according to an embodiment of the present application;

[0032] Figure 9 is a circuit diagram of a transformer circuit according to an embodiment of the present application;

[0033] Figure 10 is a circuit diagram of a single-phase second conversion circuit according to an embodiment of the present application;

[0034] Figure 11 is a circuit diagram of a three-phase second conversion circuit according to an embodiment of the present application.

[0035] Label explanation: 10, first conversion circuit; 20, transformer circuit; 30, second conversion circuit; 40, second filter circuit; 50, first filter circuit; 60, fuse; 1, test assembly; 2, shell; 21, upper cover; 22, case; 3, heat dissipation assembly. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0037] Please refer to the drawingsFigures 1-4 The utility model provides a kind of electric energy self-circulation system of semiconductor device test, including first filter circuit 50, first conversion circuit 10, voltage transformation circuit 20, second conversion circuit 30 and second filter circuit 40, the input end of first filter circuit 50 is connected with external power supply, and it is used to carry out first filtering to the system input alternating current provided by external power supply, to make input alternating current change into first alternating current;The input end of first conversion circuit 10 is connected with the output end of first filter circuit 50, and it is used to rectify first alternating current, to make first alternating current change into direct current;The input end of second conversion circuit 30 is connected with the output end of first conversion circuit 10, and it is used to invert direct current, to make direct current change into second alternating current;The input end of second filter circuit 40 is connected with the output end of second conversion circuit 30, and it is used to carry out second filtering to second alternating current, to make second alternating current change into system output alternating current;The output end of second filter circuit 40 is connected with the input end of external power supply or the input end of first conversion circuit 10;To make system output alternating current flow back to external power supply;To form electric energy self-circulation system.

[0038] In the embodiment, the external power supply provides system input alternating current, the input end of the first filter circuit 50 is connected with the external power supply, and is used for performing first filtering on the input alternating current, so as to convert the input alternating current into first alternating current. In a specific embodiment, the first filter circuit 50 is a first EMC (Electromagnetic Compatibility) filter circuit, which is used for filtering or attenuating interference signals to eliminate electromagnetic interference. The input end of the first conversion circuit 10 is connected with the output end of the first filter circuit 50, and is used for rectifying the first alternating current, so as to convert the first alternating current into direct current. In a specific embodiment, the first conversion circuit 10 adopts a PFC (Power Factor Correction) rectifier circuit, which is used for controlling the input current waveform to be synchronous with the input voltage waveform, improving the proportion of effective power, and realizing the conversion of AC alternating current into DC direct current. The input end of the second conversion circuit 30 is connected with the output end of the first conversion circuit 10, and is used for inverting the direct current, so as to convert the direct current into second alternating current. In a specific embodiment, the second conversion circuit 30 is used for realizing the conversion of DC direct current into AC alternating current. The input end of the second filter circuit 40 is connected with the output end of the second conversion circuit 30, and is used for performing second filtering on the second alternating current, so as to convert the second alternating current into system output alternating current. In a specific embodiment, the second filter circuit 40 also adopts an EMC (Electromagnetic Compatibility) filter circuit. The output end of the second filter circuit 40 is connected with the input end of the external power supply or the input end of the first conversion circuit 10, so that the system output alternating current flows back to the external power supply, to form an electric energy self-circulation system. In the electric energy conversion process in the system, in addition to the energy loss generated by each circuit itself, there is no other additional power consumption, and the input electric energy of the system is equal to the output electric energy of the system. Therefore, the electric energy self-circulation system is a circuit system with no additional power consumption. The to-be-tested semiconductor component is installed in the circuit included in the system, and the system is controlled by the control module, so that the system can simulate the actual working condition environment of the to-be-tested component. The system realizes the test of the to-be-tested component. If there is no error during operation, the to-be-tested component is a qualified product. Otherwise, if the system reports an error during operation, the to-be-tested component is unqualified.

[0039] The utility model discloses a test system for reactive power self-circulation system, in the electric energy transformation process in this test system, in addition to the energy loss of the energy generated in each circuit itself, no other additional power consumption, the input electric energy of system is equal to the output electric energy of system, forms the closed cycle of electric energy, and effectively saves energy consumption, the utility model discloses a test system can simulate the running environment of actual working condition of the component to be measured, and the qualified condition of component is tested while running the system, and the defective semiconductor defective product with flaw is screened in time and effectively, and greater economic loss caused by flowing into the downstream industry chain is avoided, the utility model fills the domestic semiconductor field test vacancy, and the technical problem of neck is solved to a certain extent.

[0040] Please refer to Figures 1-9 When including the voltage transformation circuit 20, the voltage transformation circuit 20 is arranged between the output end of the first transformation circuit 10 and the input end of the second transformation circuit 30, and is used to adjust the input voltage of the second transformation circuit 30, so that the second transformation circuit 30 operates under different input voltages; when not including the voltage transformation circuit 20, the output end of the first transformation circuit 10 is connected to the input end of the second transformation circuit 30.

[0041] In specific implementation: the voltage transformation circuit 20 adopts DCDC circuit, which can convert the input DC voltage into the required DC voltage, in the system, the voltage transformation circuit 20 is used to adjust the DC output voltage of the first transformation circuit 10 into the input voltage required by the second transformation circuit 30, so that the second transformation circuit 30 operates under different input voltages; the voltage transformation circuit 20 can be used or not, when including the voltage transformation circuit 20, the voltage transformation circuit 20 is arranged between the output end of the first transformation circuit 10 and the input end of the second transformation circuit 30, at this time, the output end of the first transformation circuit 10 is connected to the input end of the voltage transformation circuit 20, and the output end of the voltage transformation circuit 20 is connected to the input end of the second transformation circuit 30, the system input AC alternating current is converted into DC through the first transformation circuit 10, then DC voltage conversion is realized through the voltage transformation circuit 20, finally DCAC is converted into alternating current through the second transformation circuit 30, and finally alternating current is obtained, forming a closed electric energy cycle; when not including the voltage transformation circuit 20, the output end of the first transformation circuit 10 is directly connected to the input end of the second transformation circuit 30, and DC voltage conversion is not realized through the voltage transformation circuit 20; in a specific embodiment, the voltage transformation circuit 20 can adopt but is not limited to the Buck voltage reduction type voltage transformation circuit 20, Boost voltage boosting type voltage transformation circuit 20 circuit and full-bridge circuit as shown in the figure, and the finished product device corresponding to different types of voltage transformation circuit 20 is relatively easy to obtain, so it is not described here. Figure 9

[0042] Please refer to Figures 1-4 ​Also included is a fuse 60, which is located between the external power supply and the input end of the first filter circuit 50, and is used to form a safe isolation between the system and the external power supply.

[0043] In a specific implementation, the fuse 60 is arranged at the input port of the system, i.e. between the external power supply and the input end of the first filter circuit 50, and functions to timely break the circuit when a short circuit or failure occurs in the system, so as to form a physical safe isolation between the system and the external power supply in time, and to ensure the personal safety of the maintenance personnel.

[0044] Please refer to Figures 1-4 The output end of the second filter circuit 40 is connected with the input end of the external power supply or the input end of the first conversion circuit 10, so as to return the system output alternating current to the external power supply, to form an electric energy self-circulation system, and to make the system input electric energy equal to the system output electric energy.

[0045] In a specific implementation, when the output end of the second filter circuit 40 is connected with the input end of the external power supply, the system input current of the external power supply flows through the first filter circuit 50, the first conversion circuit 10, the voltage conversion circuit 20, the second conversion circuit 30 and the second filter circuit 40 in sequence to obtain the system output current, and the system output current flows back to the external power supply; when the output end of the second filter circuit 40 is connected with the input end of the first conversion circuit 10, the system output current output by the second filter circuit 40 flows back to the external power supply after passing through the first filter circuit 50; and the output end of the second filter circuit 40 is connected before the input end of the first conversion circuit 10, so as to form an electric energy circulation.

[0046] Please refer to Figures 1-4 One or more of the first conversion circuit 10, the voltage conversion circuit 20 and the second conversion circuit 30 contains a to-be-tested component; and the control circuit controls the first conversion circuit 10, the voltage conversion circuit 20 and the second conversion circuit 30, so as to make the electric energy self-circulation system simulate the actual working condition operation environment of the semiconductor component.

[0047] In a specific implementation, at least one or more of the first conversion circuit 10, the voltage conversion circuit 20, and the second conversion circuit 30 contains a to-be-tested component, and in a specific embodiment, the to-be-tested component includes a semiconductor component such as an IGBT (Insulate-Gate Bipolar Transistor) made of a semiconductor material such as SiC (Silicon Carbide), GaN (Gallium Nitride), and a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor); the control circuit is electrically connected to and controls the first conversion circuit 10, the voltage conversion circuit 20, and the second conversion circuit 30, so that the electric energy self-circulation system can simulate the operating environment of the actual working condition of the to-be-tested semiconductor component. The actual working condition of the semiconductor component refers to the parameters loaded by the semiconductor component when the semiconductor component is used in an actual electronic product. The operation of the to-be-tested component in the system corresponds to the operation of the component in the electronic product. The system operation realizes the testing of the reliability and other performance indicators of the to-be-tested component. When the system operation reports an error, it means that the to-be-tested component product is unqualified.

[0048] Please refer to Figures 1-11 , the system input AC power includes at least one phase, and the number of phases of the first conversion circuit 10 and the second conversion circuit 30 respectively corresponds to the number of phases of the input AC power.

[0049] In a specific implementation, the system input AC power can be but is not limited to single-phase AC power and three-phase AC power, and the number of phases of the first conversion circuit 10 and the second conversion circuit 30 respectively corresponds to the number of phases of the input AC power. When the system input AC power is single-phase AC power, the first conversion circuit 10 should be a single-phase first conversion circuit 10, and the second conversion circuit 30 should also be a single-phase second conversion circuit 30. In a specific embodiment, the single-phase first conversion circuit 10 can be but is not limited to a single-phase interleaved PFC circuit and a single-phase totem PFC circuit as shown in Figure 7 , and the single-phase second conversion circuit 30 can be but is not limited to a circuit as shown in Figure 10 ; when the system input AC power is three-phase AC power, the first conversion circuit 10 should be a three-phase first conversion circuit 10, and the second conversion circuit 30 should also be a three-phase second conversion circuit 30. In a specific embodiment, the three-phase first conversion circuit 10 can be but is not limited to a Vienna PFC circuit and a three-phase totem PFC circuit as shown in Figure 8 ; the three-phase second conversion circuit 30 can be but is not limited to a circuit as shown in Figure 11 ; different types of first conversion circuits 10 and second conversion circuits 30 correspond to finished products that are relatively easy to obtain, so they are not described here.

[0050] Please refer to Figures 5-6 The utility model discloses an embodiment of a kind of semiconductor device testing device, including shell 2, test component 1 and heat dissipation component 3, test component 1 includes PCB board, first filter circuit 50, first conversion circuit 10, voltage conversion circuit 20, second conversion circuit 30, second filter circuit 40 and control circuit are encapsulated on PCB board respectively;Cavity is equipped in cabinet 22;Shell 2 includes cabinet 22 and upper cover 21, test component 1 is located in cavity, and it is used for testing to be tested component;Heat dissipation component 3 one end is located in cavity, the other end is connected shell 2 outside, and it is used for heat dissipation to test component 1;Upper cover 21 and cabinet 22 detachable fixed connection, and it is used for protecting test component 1 and heat dissipation component 3.

[0051] When implementing: including shell 2, test component 1 and heat dissipation component 3, first filter circuit 50, first conversion circuit 10, voltage conversion circuit 20, second conversion circuit 30, second filter circuit 40 and control circuit can be integrated and encapsulated as separate device first, then encapsulated on PCB (Printed Circuit Board) to realize electrical connection, or directly encapsulated on PCB board, to form test component 1;Shell 2 includes cabinet 22 and upper cover 21, cavity is equipped in cabinet 22, and test component 1 is installed in the cavity of cabinet 22;Heat dissipation component 3 one end is located in cavity, the other end is connected shell 2 outside, and it is used for heat dissipation to test component 1, in a specific embodiment, heat dissipation component 3 can adopt heat dissipation fan;Upper cover 21 and cabinet 22 detachable fixed connection, and it is used for protecting test component 1 and heat dissipation component 3;In a specific embodiment, it further includes data interface, for test component 1 and computer data transmission and communication.

[0052] It should be noted that, in this paper, the term "including", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, device, article or method including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or includes elements inherent to such process, device, article or method. Without more limitation, the element defined by the statement "including a" does not exclude the existence of another same element in the process, device, article or method including the element.

[0053] The above only describes the preferred embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structure or equivalent process transformation using the contents of the present application specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An electrical energy self-cycling system for semiconductor device testing, characterized by, The system comprises a first filter circuit, an input end of the first filter circuit being connected with an external power supply and being used for performing first filtering on input alternating current provided by the external power supply so as to transform the input alternating current into first alternating current; a first conversion circuit, an input end of the first conversion circuit being connected with an output end of the first filter circuit and being used for rectifying the first alternating current so as to transform the first alternating current into direct current; a second conversion circuit, an input end of the second conversion circuit being connected with an output end of the first conversion circuit and being used for inverting the direct current so as to transform the direct current into second alternating current; a second filter circuit, an input end of the second filter circuit being connected with an output end of the second conversion circuit and being used for performing second filtering on the second alternating current so as to transform the second alternating current into output alternating current; an output end of the second filter circuit being connected with an input end of the external power supply or an input end of the first conversion circuit, and the output alternating current being returned to the external power supply so as to form an electric energy self-circulation system; the first filter circuit, the first conversion circuit, the second conversion circuit and the second filter circuit are sequentially and electrically connected and are respectively located on one or more circuit boards.

2. The electrical energy self-cycling system for semiconductor device testing of claim 1, wherein, The input alternating current of the system is equal to the output alternating current.

3. The electrical energy self-cycling system for semiconductor device testing of claim 1, wherein, When a voltage conversion circuit is included, the voltage conversion circuit is arranged between an output end of the first conversion circuit and an input end of the second conversion circuit and is used for adjusting an input voltage of the second conversion circuit so that the second conversion circuit operates under different input voltages. When no voltage conversion circuit is included, an output end of the first conversion circuit is connected with an input end of the second conversion circuit.

4. The electrical energy self-recycling system for semiconductor device testing of claim 3, wherein, One or more of the first conversion circuit, the voltage conversion circuit and the second conversion circuit comprises a to-be-tested component.

5. The electrical energy self-cycling system for semiconductor device testing of claim 4, wherein, A control circuit is further included, the control circuit being used for controlling the first conversion circuit, the voltage conversion circuit and the second conversion circuit so as to simulate an operating environment of an actual working condition of the to-be-tested component.

6. The electrical energy self-recycling system for semiconductor device testing of claim 5, wherein, The input alternating current comprises at least one phase number, and phase numbers of the first conversion circuit and the second conversion circuit respectively correspond to the phase number of the input alternating current.

7. The electrical energy self-recycling system for semiconductor device testing of claim 1, wherein, A fuse is further included, the fuse being located between the external power supply and an input end of the first filter circuit, and the fuse being used for forming safe isolation between the system and the external power supply.

8. An apparatus for testing a semiconductor device, characterized by The system comprises a shell, a test assembly and a heat dissipation assembly, the shell comprising a case and an upper cover, the case being internally provided with a cavity; the test assembly is arranged in the cavity and is used for testing a to-be-tested component; one end of the heat dissipation assembly is located in the cavity, and the other end is connected with an outer side of the shell and is used for dissipating heat of the test assembly; the upper cover is detachably and fixedly connected with the case and is used for protecting the test assembly and the heat dissipation assembly.

9. The apparatus for testing of semiconductor devices according to claim 8, wherein, The test assembly comprises a first filter circuit, a first conversion circuit, a voltage conversion circuit, a second conversion circuit, a second filter circuit and a control circuit; the first filter circuit, the first conversion circuit, the voltage conversion circuit, the second conversion circuit, the second filter circuit and the control circuit are respectively packaged on a PCB board or the cavity.

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