Dismounting device

Abstract

The utility model provides a dismounting device, which is used for dismounting a trimming wheel of a trimmer, and comprises a first fixing frame, a second fixing frame and a third fixing frame, the second fixing frame comprises a third supporting arm and a fourth supporting arm which extend in the first direction, and a fifth supporting arm connected with the third supporting arm and the fourth supporting arm; the second fixing frame is arranged on the inner side of the first fixing frame and is movably connected with the first fixing frame in the first direction; the first fixing piece is arranged on the first supporting arm and the second supporting arm and can move in the direction close to or away from the trimmer in the second direction. According to the detaching device, the dressing wheel can be detached in the vertical direction, damage of a dresser to a positioning column of a dressing head is reduced, and the probability that metal chippings fall onto a grinding pad is reduced.

Description

Technical Field

[0001] This utility model relates to the field of chemical mechanical polishing technology, specifically to a disassembly device for disassembling the dressing wheel of a dressing tool. Background Technology

[0002] Chip manufacturing involves processes such as integrated circuit design, wafer fabrication, wafer processing, electrical measurement, dicing, packaging, and testing. Chemical mechanical polishing (CMP) is one of the five core processes in wafer fabrication. CMP is an ultra-precision surface processing technology that achieves global planarization. Figure 1 As shown, the chemical mechanical polishing (CMP) equipment includes a support head 1, a polishing disc 2, a dresser 3, and a liquid supply arm 4. A polishing pad (not shown in the figure) is disposed above the polishing disc 2.

[0003] During chemical mechanical polishing (CMP), the support head 1 holds the wafer against its bottom surface, so that the side of the wafer with the deposited layer abuts against the upper surface of the polishing pad. Under the action of the drive assembly, the support head 1 rotates in the same direction as the polishing pad and applies a downward force to the wafer. The supply arm 4 provides polishing fluid to the upper surface of the polishing pad, distributing it between the wafer and the polishing pad, allowing the wafer to complete CMP under the combined action of chemical and mechanical processes. However, as the polishing time increases, the surface of the polishing pad becomes worn down, and residual particles accumulate. Some of these particles come from abrasive particles in the polishing fluid, while others are byproducts from the thin film material removed from the wafer surface. A worn-down polishing pad cannot retain the abrasive particles from the polishing fluid, thus significantly reducing polishing efficiency. Therefore, to ensure the quality of the CMP process, a dresser 3 is needed to dress the surface of the polishing pad, restoring it to an appropriate roughness to maintain the polishing rate and stability of the polishing pad on the wafer.

[0004] like Figure 2 As shown, the dressing device 3 includes a dressing arm 31, a dressing head 32 located below the dressing arm 31, and a dressing wheel 33 located below the dressing head 32. Driven by the dressing head 31, the dressing wheel 33 presses against the surface of the polishing pad and rotates at a certain speed to remove the slurry generated by the reaction between the polishing slurry adhering to the polishing pad and the wafer surface, and to improve the surface roughness of the polishing pad. The dressing head 32 is provided with a positioning post 321, and the dressing wheel 33 is provided with a positioning hole 331 that matches the positioning post 321. When the positioning post 321 is placed in the positioning hole 331, the dressing head 32 and the dressing wheel 33 are magnetically connected together. Figure 3As shown, when disassembling the dressing wheel 33, an Allen wrench is inserted into the notch of the dressing head 32, and then downward force is applied to first separate one end of the dressing wheel 33 from the dressing head 32, and then the other end of the dressing wheel 33 is disassembled. Because the dressing wheel 33 is separated from the dressing head 32 by tilting one end of the dressing wheel 33 first, the remaining end of the dressing wheel 33 will also be tilted, which may damage the positioning post 321, causing the metal on the positioning post 321 to be scratched and producing metal shavings. The metal shavings falling onto the polishing pad can also cause polishing scratches on the wafer. Utility Model Content

[0005] To address the problems in the prior art, the purpose of this utility model is to provide a disassembly device that reduces damage to the positioning pin of the dressing head when disassembling the dressing wheel, and reduces the amount of metal debris falling onto the polishing pad during disassembly.

[0006] This utility model embodiment provides a disassembly device for disassembling the dressing wheel of a dresser, comprising:

[0007] The first fixed frame includes a first support arm and a second support arm extending along a first direction;

[0008] The second fixing frame includes a third support arm and a fourth support arm extending along the first direction, and a fifth support arm connecting the third support arm and the fourth support arm; the second fixing frame is disposed inside the first fixing frame and is movably connected to the first fixing frame in the first direction.

[0009] The first fixing member is provided on the first support arm and the second support arm, and can move in the second direction toward or away from the trimmer.

[0010] In some embodiments, the first mounting bracket further includes a third support arm, which connects the first support arm and the second support arm.

[0011] In some embodiments, the first fastener is a stud.

[0012] In some embodiments, a second fastener is further included, disposed on the first support arm and the second support arm, and movable in a first direction toward or away from the first support arm and the second support arm to fix or release the first fastener.

[0013] In some embodiments, the first fixing member and the second fixing member are fixing posts.

[0014] In some embodiments, a limiting portion is further included, extending along the second direction toward the trimmer and disposed on the third support arm and the fourth support arm.

[0015] In some embodiments, the limiting portion is integrally formed with or movably connected to the third support arm or the fourth support arm.

[0016] In some embodiments, the first direction is perpendicular to the second direction.

[0017] In some embodiments, the first fixing frame and the second fixing frame are movably connected by a slide rail.

[0018] In some embodiments, the first fixing member has a rubber foot at one end near the second support frame.

[0019] The disassembly device provided by this utility model has the following advantages:

[0020] The first fixing bracket is fixed to the dressing head using the first fixing member, and then the second fixing member is fixed to the dressing wheel. When a vertically downward force away from the first fixing member is applied to the second fixing member, the dressing wheel and the dressing head of the dresser are separated, thereby disassembling the dressing wheel in the vertical direction, reducing the damage of the dressing device to the positioning post of the dressing head, and reducing the probability of metal chips falling onto the grinding pad. Attached Figure Description

[0021] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings.

[0022] Figure 1 A schematic diagram of a chemical mechanical polishing (CMP) apparatus is shown.

[0023] Figure 2 This is a schematic diagram of a trimmer according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of how to disassemble the dressing wheel of a dresser using an internal hexagonal tool in the prior art;

[0025] Figure 4 This is a schematic diagram of disassembling a dressing wheel using a disassembly device according to an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the first fixing member of the disassembly device according to an embodiment of the present invention not being fixed to the trimmer;

[0027] Figure 6 This is a front view of a disassembly device according to an embodiment of the present invention;

[0028] Figure 7 This is a side view of a disassembly device according to an embodiment of the present invention;

[0029] Figure 8This is a top view of a disassembly device according to an embodiment of the present invention.

[0030] Figure label:

[0031] 1. Bearing head 11. First support arm

[0032] 2 Polishing pad 12 Second support arm

[0033] 3 Dresser 13 Sixth Support Arm

[0034] 31 Adjustment arm 20 Second fixing frame

[0035] 32 Trimming head 21 Third support arm

[0036] 321 Positioning Column 22 Fourth Support Arm

[0037] 33 Dressing wheel 23 Fifth support arm

[0038] 331 Positioning hole 24 Limiting part

[0039] 4. Liquid supply arm 30. First fixing component.

[0040] 10 First Fixture Detailed Implementation

[0041] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that the invention will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted. The words “or” and “or” in the specification may mean “and” or “or”.

[0042] In this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics represented in connection with that embodiment or example, which are included in at least one embodiment or example of this application. Furthermore, the specific features, structures, materials, or characteristics represented may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate different embodiments or examples represented in this application, as well as features of different embodiments or examples.

[0043] Furthermore, the terms "first" and "second" are used for illustrative purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the representation of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0044] To address the problems in the prior art, this utility model provides a disassembly device, comprising: a first fixing frame, including a first support arm and a second support arm extending along a first direction; a second fixing frame, including a third support arm, a fourth support arm extending along the first direction, and a fifth support arm connecting the third support arm and the fourth support arm; the second fixing frame is disposed inside the first fixing frame and is movably connected to the first fixing frame in the first direction; a first fixing member is disposed on the first support arm and the second support arm, and can move in the second direction toward or away from the dressing head of the dresser. In this technical solution, the first fixing member is used to fix the first fixing frame to the dressing head, and then the second fixing member is fixed to the dressing wheel. When a vertically downward force away from the first fixing member is applied to the second fixing frame, the dressing wheel and the dressing head of the dresser are separated, realizing the disassembly of the dressing wheel in the vertical direction, reducing the damage of the dressing tool to the positioning post of the dressing head, and reducing the probability of metal debris falling onto the grinding pad.

[0045] The disassembly device provided by this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the illustrated embodiments are not intended to limit the scope of protection of this utility model.

[0046] like Figures 4 to 8 As shown, the disassembly device provided in this embodiment of the invention includes a first fixing frame 10, a second fixing frame 20, and a first fixing member 30.

[0047] Specifically, the first fixing frame 10 includes a first support arm 11 and a second support arm 12 extending along a first direction. The second fixing frame 20 includes a third support arm 21 and a fourth support arm 22 extending along the first direction, and a fifth support arm 23 connecting the third support arm 21 and the fourth support arm 22; the second fixing frame 20 is disposed inside the first fixing frame 10 and is movably connected to the first fixing frame 10 in the first direction. The first fixing member 30 is disposed on the first support arm 11 and the second support arm 12 and is movable in the second direction toward or away from the trimmer.

[0048] Here, the first direction is the vertical direction as seen from the paper, and the second direction is the horizontal direction as seen from the paper. In this embodiment, the first direction is perpendicular to the second direction.

[0049] like Figure 4 and Figure 5As shown, when disassembling the dressing wheel 33 on the dressing tool 3, the first fixing bracket 10 is fixed to the outer surface of the dressing head 32, and the second fixing bracket 20 is fixed to the outer surface of the dressing wheel. That is, the first fixing bracket 10 is fixedly connected to the dressing head 32, and the second fixing bracket 20 is fixedly connected to the dressing wheel 33. When the second fixing bracket 20 is moved downward, the dressing wheel 33 and the second fixing bracket 20 are simultaneously subjected to a downward pulling force. When the downward pulling force is greater than a certain fixed value, the dressing wheel 33 can be separated from the dressing head 32, that is, the dressing wheel 33 is removed from the dressing head 32. Since the first fixing bracket 10 and the second fixing bracket 20 are movably connected along the first direction, and the first fixing bracket 10 is fixed on the dressing head 32, the first fixing bracket 10 can keep the second fixing bracket 20 moving in the first direction when it moves downwards, without deviation. This achieves separation of the dressing wheel 33 from the dressing head 32 in the first direction. The dressing wheel 33 can be separated from the two positioning posts 321 of the dressing head 32 without deviating from the first direction. Therefore, damage to the positioning posts 321 of the dresser can be reduced, and the probability of metal debris and contamination of the polishing pad when disassembling the dressing wheel 33 can be reduced.

[0050] Furthermore, such as Figures 4 to 8 As shown, in this embodiment, the disassembly device further includes a sixth support arm 13, which is disposed between the first support arm 11 and the second support arm 12 to provide good connection strength for the first support arm 11 and the second support arm 12, so that the first support arm 11 and the second support arm 12 are not easily deformed, and to ensure that the first fixing frame 10 and the second fixing frame 20 are movably connected in the first direction.

[0051] Furthermore, in some embodiments, the first fixing member 30 can be a stud, which can move towards the trimming head 32. When one end of the stud abuts against the trimming head 32, the trimming head 32 is fixedly connected to the first fixing frame 10. It should be noted that the position of the first fixing member 30 abutting against the trimming head 32 is not limited to the position shown in the figure. For example, it can be at the cut of the trimming head 32. Those skilled in the art can set the specific position of the first fixing member 30 abutting against the trimming head 32 according to actual needs.

[0052] Furthermore, in some other embodiments, the disassembly device further includes a second fixing member disposed on the first support arm 11 and the second support arm 12, which can move in a first direction toward or away from the first support arm 11 and the second support arm 12 to fix the first fixing member 30.

[0053] For example, the first fixing member 30 and the second fixing member are fixing posts. The first fixing member 30 is provided with a connecting hole. When the second fixing member moves into the connecting hole along the first direction, the first fixing member 30 can no longer move towards or away from the trimmer, that is, the second fixing member firmly fixes the first fixing member 30. When the second fixing member is removed from the connecting hole, the first fixing member can move freely again.

[0054] Furthermore, in some embodiments, the first fixing member 30 is provided with a rubber foot (not shown in the figure) at one end near the trimming head 32 to prevent the first fixing member 30 from damaging the trimming head 32.

[0055] Furthermore, such as Figures 4 to 8 As shown, the second fixing frame 20 also includes a limiting part 24 extending along the second direction, disposed at one end of the third support arm 21 near the first fixing member 30 and at one end of the fourth support arm 22 near the first fixing member 30. The limiting part 24 can be installed on the end face of the dressing wheel 33 near the dressing head. When the second fixing frame is pulled down, the limiting part 24 can apply a downward force to the end face of the dressing wheel 33, thereby improving the efficiency of disassembly.

[0056] It should be noted that the limiting part 24 can be integrally formed with the third support arm 21 or the fourth support arm 22, or can be movably connected. No specific limitation is made here. Whether the limiting part 24 is integrally formed or movably connected will affect the order of installation and disassembly of the device.

[0057] Furthermore, in some embodiments, the first fixing frame 10 and the second fixing frame 20 are movably connected by a slide rail.

[0058] In summary, the disassembly device for the trimmer provided by this utility model has the following advantages:

[0059] The first fixing bracket is fixed to the dressing head using the first fixing member, and then the second fixing member is fixed to the dressing wheel. When a vertically downward force away from the first fixing member is applied to the second fixing member, the dressing wheel and the dressing head of the dresser are separated, thereby disassembling the dressing wheel in the vertical direction, reducing the damage of the dressing device to the positioning post of the dressing head, and reducing the probability of metal chips falling onto the grinding pad.

[0060] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications or substitutions should be considered within the protection scope of the present invention.

Claims

1. A dismounting device for dismounting a dressing wheel of a dressing machine, characterized in that, The first fixed frame comprises a first support arm and a second support arm extending in a first direction; The second fixed frame comprises a third support arm and a fourth support arm extending in the first direction, and a fifth support arm connecting the third support arm and the fourth support arm; the second fixed frame is arranged on the inner side of the first fixed frame and is movably connected with the first fixed frame in the first direction; The first fixed member is arranged on the first support arm and the second support arm and is movable in a second direction towards or away from the trimmer. The first fixed frame further comprises a sixth support arm connecting the first support arm and the second support arm.

2. The disassembly device according to claim 1, characterized in that The first fixed member is a threaded stud.

3. The disassembly device according to claim 1, characterized in that The second fixed member is arranged on the first support arm and the second support arm and is movable in the first direction towards or away from the first support arm and the second support arm to fix or release the first fixed member.

4. The disassembly device according to claim 1, characterized in that The first fixed member and the second fixed member are fixed studs.

5. The disassembly device according to claim 4, characterized in that The limiting part extends in the second direction towards the trimmer and is arranged on the third support arm and the fourth support arm.

6. The disassembly device according to claim 1, characterized in that The limiting part is integrally formed with or movably connected with the third support arm or the fourth support arm.

7. The disassembly device according to claim 6, characterized in that The first direction is perpendicular to the second direction.

8. The disassembly device of claim 1, wherein The first fixed frame and the second fixed frame are movably connected through a sliding rail.

9. The disassembly device according to claim 1, characterized in that The end of the first fixed member close to the trimmer is provided with a rubber foot.

10. The disassembly device according to claim 1, characterized in that ​

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