Track mounting and debugging tool for low-temperature bonding machine

Abstract

The utility model relates to the technical field of bonding machines, and discloses a low-temperature bonding machine track mounting and debugging tool which comprises a base, a base plate is fixedly connected to the top of the base, a clamping mechanism is arranged at the bottom of the base plate, a rotating mechanism is arranged at the bottom in the base plate, and a first track is arranged on the front face of the top of the rotating mechanism. A fixing rod is fixedly connected to the back end of the first rail, a second rail is inserted into the periphery of the fixing rod, the rotating mechanism comprises a fixing plate, the fixing plate is fixedly connected to the inner bottom of the base plate, a rotating rod is rotationally connected to the inner side of the fixing plate, a worm wheel is fixedly connected to the front face of the rotating rod, and a worm is meshed with the bottom of the worm wheel. The worm gear is driven by the worm to rotate, the worm gear drives the fixing frame to rotate through the rotating rod, the fixing frame can drive the bearing plate to rotate, the bearing plate can drive the first track and the second track to rotate, and the inclination angle of the first track and the inclination angle of the second track can be adjusted.

Description

Technical Field

[0001] This utility model relates to the field of bonding machine technology, specifically a low-temperature bonding machine track installation and debugging tool. Background Technology

[0002] A cryogenic bonding machine track is a device used to perform bonding operations in a low-temperature environment, typically used in semiconductor manufacturing and packaging.

[0003] The manual bonding machine track installation and debugging tool disclosed in CN 110712168 B can complete the installation and debugging of the inner and outer tracks in a confined operating space, which greatly reduces the difficulty of installation and debugging, simplifies the operation process, and effectively improves work efficiency.

[0004] This manual bonding machine track installation and debugging tool can install the track using a tightening rod, but it lacks a device for adjusting the track tilt angle. After the track is installed, it is inconvenient and troublesome to adjust the tilt angle, so it needs improvement. Utility Model Content

[0005] The purpose of this invention is to provide a low-temperature bonding machine track installation and debugging tool to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a low-temperature bonding machine track installation and debugging tool, comprising a base, a base plate fixedly connected to the top of the base, a clamping mechanism provided at the bottom of the base plate, a rotating mechanism provided at the bottom of the base plate, a first track provided on the top front of the rotating mechanism, a fixing rod fixedly connected to the back end of the first track, and a second track inserted around the fixing rod.

[0007] The rotating mechanism includes a fixed plate, which is fixedly connected to the bottom of the substrate. A rotating rod is rotatably connected to the inner side of the fixed plate. A worm gear is fixedly connected to the front of the rotating rod. A worm is meshed with the bottom of the worm gear. A support plate is rotatably connected to the periphery of the worm. The support plate is fixedly connected to the bottom of the substrate. The worm is rotatably connected to the inner side of the substrate. A fixed frame is fixedly connected to the periphery of the rotating rod. A load-bearing plate is fixedly connected to the top of the fixed frame.

[0008] Preferably, the inner side of the support plate has a circular hole corresponding to the position of the worm, and the worm is rotatably connected to the inner side of the circular hole. Through the circular hole, the worm can rotate inside the support plate, and the support plate can support the rotation of the worm.

[0009] Preferably, a rotating hole corresponding to the position of the rotating rod is provided on the inner side of the fixed plate, and the rotating rod is rotatably connected to the inner side of the rotating hole, so that the rotating rod can rotate inside the fixed plate through the rotating hole.

[0010] Preferably, the load-bearing plate is disposed at the bottom of the first track and the second track, and the top of the load-bearing plate is in contact with the bottom of the first track and the second track, so that the load-bearing plate can provide support for the first track and the second track.

[0011] Preferably, the clamping mechanism includes a rectangular plate fixedly connected to the bottom of the substrate. A bidirectional threaded rod is rotatably connected to the inner side of the rectangular plate. A second bevel gear is fixedly connected to the outer side of the bidirectional threaded rod. A first bevel gear meshes with the right side of the second bevel gear. A linkage rod is fixedly connected to the right side of the first bevel gear. A rotating disk is fixedly connected to the right side of the linkage rod. A limiting plate is rotatably connected to the outer side of the linkage rod. The limiting plate is fixedly connected to the bottom right side of the substrate. The linkage rod is rotatably connected to the inner side of the base. A threaded plate is threadedly connected to the outer side of the bidirectional threaded rod. A sliding plate is fixedly connected to the top of the threaded plate. A connecting plate is fixedly connected to the top of the sliding plate. A support member is rotatably connected to the inner side of the connecting plate. An insert rod is fixedly connected to the inner side of the support member.

[0012] Preferably, the inner side of the limiting plate is provided with a fixing hole corresponding to the position of the linkage rod, and the linkage rod is rotatably connected to the inner side of the fixing hole. Through the fixing hole, the linkage rod can rotate inside the limiting plate, and the limiting plate can provide support for the linkage rod.

[0013] Preferably, the inner side of the connecting plate is provided with a circular groove corresponding to the movement trajectory of the support member, and the support member is slidably connected inside the circular groove. Through the circular groove, the support member can rotate inside the connecting plate.

[0014] Compared with the prior art, this utility model provides a low-temperature bonding machine track installation and debugging tool, which has the following beneficial effects:

[0015] 1. This low-temperature bonding machine track installation and debugging tool, through a set rotation mechanism, places the first track and the second track on the top of the load-bearing plate. Through the cooperation of the worm gear, worm wheel, rotating rod, and fixed frame with the load-bearing plate, the load-bearing plate can drive the first track and the second track to rotate, so that the tilt angle of the first track and the second track can be adjusted, so that the chip can better match the bonding position with the substrate during the transfer process and reduce lateral or longitudinal deviations.

[0016] 2. The low-temperature bonding machine track installation and debugging tool, through the set clamping mechanism, when it is necessary to clamp the first track and the second track, uses a rotating disk, linkage rod, first bevel gear, second bevel gear, bidirectional threaded rod, threaded plate, sliding plate, connecting plate, support and insert rod to allow the insert rod to be inserted into the inside of the first track and the second track, thereby clamping and limiting the first track and the second track. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a front view structural diagram of the present invention;

[0019] Figure 2 This is a schematic diagram of the rotating mechanism.

[0020] Figure 3 This is a schematic diagram of the clamping mechanism.

[0021] Figure 4 This is a schematic diagram of the connecting plate and the insert rod structure;

[0022] Figure 5 This is a schematic diagram of the insertion rod and support structure.

[0023] In the diagram: 1. Base; 2. Base plate; 3. First track; 4. Rotating mechanism; 41. Worm gear; 42. Worm; 43. Support plate; 44. Rotating rod; 45. Fixed plate; 46. Load-bearing plate; 47. Fixed frame; 5. Clamping mechanism; 51. Rotating disk; 52. Linkage rod; 53. Threaded plate; 54. Limiting plate; 55. First bevel gear; 56. Second bevel gear; 57. Bidirectional threaded rod; 58. Rectangular plate; 59. Slide plate; 501. Connecting plate; 502. Insert rod; 503. Support component; 6. Fixed rod. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] This utility model provides the following technical solution:

[0027] Example 1

[0028] Please see Figure 1-5 This utility model provides a technical solution: a low-temperature bonding machine track installation and debugging tool, including a base 1, a base plate 2 fixedly connected to the top of the base 1, a clamping mechanism 5 provided at the bottom of the base plate 2, a rotating mechanism 4 provided at the bottom inside the base plate 2, a first track 3 provided on the front of the top of the rotating mechanism 4, a fixing rod 6 fixedly connected to the back end of the first track 3, and a second track 7 inserted around the fixing rod 6.

[0029] The rotating mechanism 4 includes a fixed plate 45, which is fixedly connected to the bottom of the base plate 2. A rotating rod 44 is rotatably connected to the inner side of the fixed plate 45. A worm gear 41 is fixedly connected to the front of the rotating rod 44. A worm 42 is meshed at the bottom of the worm gear 41. A support plate 43 is rotatably connected to the outer periphery of the worm 42. The support plate 43 is fixedly connected to the bottom of the base plate 2. The worm 42 is rotatably connected to the inner side of the base plate 2. A fixed frame 47 is fixedly connected to the outer periphery of the rotating rod 44. A load-bearing plate 46 is fixedly connected to the top of the fixed frame 47.

[0030] Furthermore, a circular hole corresponding to the position of the worm 42 is provided on the inner side of the support plate 43, and the worm 42 is rotatably connected to the inner side of the circular hole. Through the circular hole, the worm 42 can rotate inside the support plate 43, and the support plate 43 can support the rotation of the worm 42.

[0031] Furthermore, a rotating hole corresponding to the position of the rotating rod 44 is opened on the inner side of the fixing plate 45, and the rotating rod 44 is rotatably connected to the inner side of the rotating hole. Through the opened rotating hole, the rotating rod 44 can rotate inside the fixing plate 45.

[0032] Furthermore, the load-bearing plate 46 is disposed at the bottom of the first track 3 and the second track 7, and the top of the load-bearing plate 46 is in contact with the bottom of the first track 3 and the second track 7. The load-bearing plate 46 can provide support for the first track 3 and the second track 7.

[0033] Example 2

[0034] Please see Figure 1-5 Furthermore, based on Embodiment 1, the clamping mechanism 5 further includes a rectangular plate 58, which is fixedly connected to the bottom of the base plate 2. A bidirectional threaded rod 57 is rotatably connected to the inner side of the rectangular plate 58. A second bevel gear 56 is fixedly connected to the outer side of the bidirectional threaded rod 57. A first bevel gear 55 meshes with the right side of the second bevel gear 56. A linkage rod 52 is fixedly connected to the right side of the first bevel gear 55. A rotating disk 51 is fixedly connected to the right side of the linkage rod 52. A limiting plate 54 is rotatably connected to the outer side of the linkage rod 52. The limiting plate 54 is fixedly connected to the bottom right side of the base plate 2. The linkage rod 52 is rotatably connected to the inner side of the base 1. A threaded plate 53 is threadedly connected to the outer side of the bidirectional threaded rod 57. A sliding plate 59 is fixedly connected to the top of the threaded plate 53. A connecting plate 501 is fixedly connected to the top of the sliding plate 59. A support member 503 is rotatably connected to the inner side of the connecting plate 501. An insert rod 502 is fixedly connected to the inner side of the support member 503.

[0035] Furthermore, a fixing hole corresponding to the position of the linkage rod 52 is provided on the inner side of the limiting plate 54, and the linkage rod 52 is rotatably connected to the inner side of the fixing hole. Through the fixing hole, the linkage rod 52 can rotate inside the limiting plate 54, and the limiting plate 54 can support the linkage rod 52.

[0036] Furthermore, a circular groove corresponding to the movement trajectory of the support member 503 is provided on the inner side of the connecting plate 501, and the support member 503 is slidably connected to the inside of the circular groove. Through the circular groove, the support member 503 can rotate inside the connecting plate 501.

[0037] In actual operation, when this device is used, the first track 3 and the second track 7 are placed on the top of the load-bearing plate 46. The rotating disk 51 drives the linkage rod 52 to rotate, which in turn drives the second bevel gear 56 to rotate through the first bevel gear 55. The second bevel gear 56 drives the threaded plate 53 to move through the bidirectional threaded rod 57. The threaded plate 53 drives the connecting plate 501 to move through the sliding plate 59. The connecting plate 501 drives the insertion rod 502 to insert into the inside of the first track 3 and the second track 7 through the support member 503, thereby clamping and limiting the first track 3 and the second track 7.

[0038] The worm gear 42 drives the worm wheel 41 to rotate, which in turn drives the fixed frame 47 to rotate via the rotating rod 44. The fixed frame 47 then drives the load-bearing plate 46 to rotate, which in turn drives the first track 3 and the second track 7 to rotate, allowing the tilt angle of the first track 3 and the second track 7 to be adjusted.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A cryogenic bonding machine track installation commissioning tool comprising a base (1) characterised in that: The base (1) top fixedly connected with the base plate (2), the base plate (2) bottom is provided with clamping mechanism (5), the base plate (2) inner bottom is provided with rotating mechanism (4), the rotating mechanism (4) top front is provided with first track (3), the first track (3) back end fixedly connected with fixed rod (6), the fixed rod (6) outer periphery is inserted with second track (7); The rotating mechanism (4) includes a fixed plate (45), the fixed plate (45) is fixedly connected to the inner bottom of the base plate (2), the inner side of the fixed plate (45) is rotatably connected with a rotating rod (44), the front of the rotating rod (44) is fixedly connected with a worm wheel (41), the bottom of the worm wheel (41) is engaged with a worm (42), the outer periphery of the worm (42) is rotatably connected with a support plate (43), the support plate (43) is fixedly connected to the inner bottom of the base plate (2), the worm (42) is rotatably connected to the inner side of the base plate (2), the outer periphery of the rotating rod (44) is fixedly connected with a fixed frame (47), the top of the fixed frame (47) is fixedly connected with a bearing plate (46).

2. The track installation and adjustment tool for a cryogenic bonding machine of claim 1, wherein: The inner side of the support plate (43) is provided with a circular hole corresponding to the position of the worm (42), and the worm (42) is rotatably connected to the inner side of the circular hole.

3. The track mounting and adjustment tool for a cryogenic bonding machine of claim 1, wherein: The inner side of the fixed plate (45) is provided with a rotating hole corresponding to the position of the rotating rod (44), and the rotating rod (44) is rotatably connected to the inner side of the rotating hole.

4. The track mounting and adjustment tool for a cryogenic bonding machine of claim 1, wherein: The bearing plate (46) is provided at the bottom of the first track (3) and the second track (7), and the top of the bearing plate (46) is in close contact with the bottom of the first track (3) and the second track (7).

5. The tool of claim 1, wherein: The clamping mechanism (5) includes a rectangular plate (58), the rectangular plate (58) is fixedly connected to the bottom of the base plate (2), the inner side of the rectangular plate (58) is rotatably connected with a two-way threaded rod (57), the outer periphery of the two-way threaded rod (57) is fixedly connected with a second bevel gear (56), the right side of the second bevel gear (56) is engaged with a first bevel gear (55), the right side of the first bevel gear (55) is fixedly connected with a linkage rod (52), the right side of the linkage rod (52) is fixedly connected with a rotating disc (51), the outer periphery of the linkage rod (52) is rotatably connected with a limiting plate (54), the limiting plate (54) is fixedly connected to the bottom right side of the base plate (2), the linkage rod (52) is rotatably connected to the inner side of the base (1), the outer periphery of the two-way threaded rod (57) is threadedly connected with a threaded plate (53), the top of the threaded plate (53) is fixedly connected with a sliding plate (59), the top of the sliding plate (59) is fixedly connected with a connecting plate (501), the inner side of the connecting plate (501) is rotatably connected with a support (503), the inner side of the support (503) is fixedly connected with a plug rod (502).

6. The track mounting and adjustment tool for a cryogenic bonding machine of claim 5, wherein: The inner side of the limiting plate (54) is provided with a fixed hole corresponding to the position of the linkage rod (52), and the linkage rod (52) is rotatably connected to the inner side of the fixed hole.

7. The track mounting and adjustment tool for a cryogenic bonding machine of claim 5, wherein: The inner side of the connecting plate (501) is provided with a circular groove corresponding to the motion trail of the support (503), and the support (503) is slidably connected inside the circular groove.

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