Magnetic array auxiliary installation tool

Abstract

The utility model discloses an auxiliary installation tool for a magnetic array, and belongs to the technical field of semiconductor material processing equipment. The magnetic array auxiliary installation tool comprises a supporting shaft, a magnetic array and a magnetic array, wherein the supporting shaft is used for being arranged in the installation cylinder in a penetrating mode; the two baffles are rotationally arranged at the two ends of the supporting shaft respectively, an annular mounting space is formed between the outer wall face of the supporting shaft, the inner wall face of the mounting barrel and the two baffles, and each baffle is provided with an in-out avoiding hole; the shape of the profiling blocks is the same as that of the magnets, and the multiple profiling blocks are inserted into the annular installation space to form an annular array; and the opening size of the in-out avoiding hole only allows one profiling block or magnet to pass through. Even if the polarities of two adjacent magnets in the magnetic array repel each other, the magnetic array can be smoothly assembled in the mounting cylinder, and the mounting difficulty of the magnetic array in the beam source screening device is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing equipment technology, and in particular to a magnetic array-assisted mounting fixture. Background Technology

[0002] With the development of very large-scale integrated circuits, semiconductor surface processing technology has become increasingly sophisticated, especially in wafer surface polishing and etching, where the precision requirements are extremely high. In conventional plasma processing, gas molecules are ionized to form monoatomic ions that bombard the wafer surface, significantly injecting these ions into the wafer lattice and affecting surface smoothness and lattice quality. For example, superatomic beams have achieved excellent processing results in wafer polishing and etching. When superatoms collide with the material surface, lateral sputtering and localized thermal annealing effects occur, effectively improving surface smoothness and lattice quality. This characteristic has yielded excellent processing results in wafer surface treatment.

[0003] The process involves ionizing the initial beam source (containing superatoms and molecules) and filtering it through a beam source screening device to remove monatomic ions (formed by the ionization of molecules) while retaining superatomic ions. The beam source screening device includes an internal channel and a mounting cylinder. A magnetic array is positioned between the internal channel and the mounting cylinder, surrounding the outer wall of the internal channel. The magnetic array enhances the magnetic field strength from the inside out in the central region of the internal channel. When the ionized beam source enters the channel, the monatomic ions, under the influence of the magnetic field, deviate from the center of the internal channel and ultimately strike the inner wall of the channel, disappearing and being filtered out.

[0004] However, during the assembly of the beam source screening device, when the magnetic array is assembled into the mounting cylinder, if the polarities of two adjacent magnets repel each other, the next magnet cannot be installed, resulting in the magnetic array failing to assemble smoothly.

[0005] This section provides background information related to this application, which is not necessarily prior art. Utility Model Content

[0006] The purpose of this invention is to provide a magnetic array auxiliary installation fixture that can be successfully assembled into the installation cylinder even if the polarities of two adjacent magnets in the magnetic array are repulsive, thereby reducing the installation difficulty of the magnetic array in the beam source screening device.

[0007] To achieve the above objectives, the following technical solution is provided:

[0008] A magnetic array-assisted mounting fixture is used to circumferentially assemble multiple magnets onto the inner wall of a mounting cylinder, including:

[0009] A support shaft, which is used to pass through the mounting cylinder;

[0010] Two baffles are rotatably mounted at both ends of the support shaft. An annular mounting space is formed between the outer wall of the support shaft, the inner wall of the mounting cylinder, and the two baffles. Each baffle is provided with an inlet / outlet clearance hole.

[0011] The contour block has the same shape as the magnet, and multiple contour blocks are inserted into the annular mounting space to form an annular array;

[0012] The opening size of the passage hole is such that only one of the contour blocks or the magnet can pass through.

[0013] As an optional solution for the magnetic array-assisted installation fixture, the magnetic array-assisted installation fixture also includes;

[0014] A handle is connected to the baffle, and the radial extension length of the handle along the baffle is greater than the outer diameter of the mounting cylinder.

[0015] As an optional solution for magnetic array-assisted installation fixtures, the baffle is provided with a central through hole, and both ends of the support shaft are provided with annular limiting parts, with the central through hole of the baffle sleeved on the annular limiting parts.

[0016] As an optional solution for magnetic array-assisted installation fixtures, the handle is provided with a clearance notch, through which the support shaft passes.

[0017] As an optional solution for the magnetic array-assisted installation fixture, the magnetic array-assisted installation fixture also includes;

[0018] Two annular connectors are respectively installed at the two ends of the mounting cylinder. The baffle is located between the annular connectors and the magnet, and the outer diameter of the baffle is larger than the inner diameter of the annular connectors.

[0019] As an optional solution for magnetic array-assisted installation fixtures, a first connection hole is provided at both ends of the installation cylinder, and a second connection hole is provided on each of the annular connectors. A first fastener passes through the second connection hole and connects to the first connection hole.

[0020] As an optional solution for magnetic array-assisted installation fixtures, the magnet is bonded to the inner wall surface of the installation cylinder.

[0021] As an optional solution for the magnetic array-assisted installation fixture, both ends of the support shaft are provided with clearance grooves, and the magnetic array-assisted installation fixture also includes;

[0022] The clamping assembly includes a jaw, which comprises a first segment, a second segment, and a third segment. The first segment and the third segment are parallel and spaced apart at both ends of the second segment. The first segment is located outside the mounting cylinder. The third segment can pass through the inlet / outlet clearance hole into the clearance groove and is located on the lower end face of the magnet. Pulling the first segment radially along the mounting cylinder can cause the third segment to push the magnet against the inner wall surface of the mounting cylinder.

[0023] As an optional solution for magnetic array-assisted installation fixtures, the first segment is provided with a first threaded hole, and the clamping assembly further includes:

[0024] A set screw is threadedly connected to the first threaded hole. Rotating the set screw allows one end of the set screw to press against the outer wall surface of the mounting cylinder.

[0025] As an optional solution for magnetic array-assisted installation fixtures, the clamping assembly includes two jaws, and the clamping assembly further includes:

[0026] A connecting plate is provided with a plurality of second threaded holes, and the first segments of the two grippers are connected to the second threaded holes of the connecting plate by second fasteners.

[0027] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0028] The magnetic array auxiliary installation fixture provided by this utility model allows for the assembly of the magnetic array within a beam source screening device. A support shaft is inserted into the installation cylinder, and a predetermined number of contour blocks are inserted and fill the annular installation space. These contour blocks form an annular array within the annular installation space. Baffles at both ends of the support shaft are respectively positioned at opposite ends of the support shaft, allowing the contour blocks or magnets to enter and exit the annular installation space through clearance holes on the baffles. By rotating the two baffles to align the clearance holes with the contour blocks to be replaced, and pulling the corresponding contour block out of the annular installation space through the clearance hole of one baffle, a magnet is inserted into the annular installation space through the clearance hole of the other baffle. The same method is then used to replace all contour blocks with the corresponding magnets, successfully installing all the magnets of the magnetic array into the installation cylinder, thus reducing the installation difficulty of the magnetic array within the beam source screening device. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of the mounting cylinder in an embodiment of this utility model;

[0031] Figure 2 This is a schematic diagram of the structure in which the magnet is bonded to the inner wall of the mounting cylinder in an embodiment of this utility model;

[0032] Figure 3 This is a schematic diagram of the structure in this utility model embodiment where multiple contour blocks are filled between the support shaft and the mounting cylinder;

[0033] Figure 4 This is an assembly diagram of the support shaft, baffle, and annular connector in an embodiment of this utility model;

[0034] Figure 5 This is a schematic diagram of the support shaft in an embodiment of the present invention;

[0035] Figure 6 This is a schematic diagram of the baffle structure in an embodiment of the present utility model;

[0036] Figure 7 This is a schematic diagram of the structure of the annular connector in an embodiment of this utility model;

[0037] Figure 8 This is a schematic diagram of the magnetic array-assisted installation fixture assembled onto the installation cylinder in an embodiment of this utility model;

[0038] Figure 9 This is an internal schematic diagram of the magnetic array-assisted installation fixture assembled into the installation cylinder in an embodiment of this utility model;

[0039] Figure 10 This is a schematic diagram of the clamping assembly and the magnet after they are engaged in a first-view structural perspective in an embodiment of this utility model.

[0040] Figure 11 This is a schematic diagram of the clamping assembly after it is engaged with the magnet in an embodiment of the present invention (the first threaded hole is not shown).

[0041] Figure label:

[0042] 100. Mounting cylinder; 101. First connecting hole; 200. Magnet;

[0043] 1. Support shaft; 2. Baffle; 3. Contouring block; 4. Handle; 41. Clearance notch; 5. Annular connector; 51. Second connecting hole; 6. First fastener; 7. Clamping jaw; 8. Set screw; 9. Connecting plate; 91. Second threaded hole; 10. Second fastener;

[0044] 11. Annular limiting part; 12. Clearance groove;

[0045] 21. Entry / exit clearance hole; 22. Center through hole; 23. Observation hole;

[0046] 71. First segment; 711. First threaded hole; 712. Third threaded hole; 72. Second segment; 73. Third segment. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0048] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0049] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0050] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0051] To ensure successful assembly into the mounting cylinder even when adjacent magnets in the magnetic array have repulsive polarities, and to reduce the installation difficulty of the magnetic array within the beam source screening device, this embodiment provides an auxiliary installation fixture for the magnetic array. The following describes the fixture in conjunction with... Figures 1 to 11The specific content of this embodiment will be described in detail.

[0052] The magnetic array-assisted installation fixture in this embodiment is used to circumferentially assemble multiple magnets 200 onto the inner wall of the mounting cylinder 100. The fixture includes a support shaft 1, two baffles 2, and multiple contour blocks 3. The support shaft 1 is inserted into the mounting cylinder 100. The two baffles 2 are rotatably mounted at both ends of the support shaft 1, forming an annular installation space between the outer wall of the support shaft 1, the inner wall of the mounting cylinder 100, and the two baffles 2. Each baffle 2 has an inlet / outlet clearance hole 21. The contour blocks 3 have the same shape as the magnets 200, and multiple contour blocks 3 are inserted into the annular installation space to form a circular array. The opening size of the inlet / outlet clearance hole 21 allows only one contour block 3 or magnet 200 to pass through.

[0053] In summary, the magnetic array auxiliary installation fixture provided in this embodiment allows for the assembly of the magnetic array within the beam source screening device. During this assembly, a support shaft 1 is inserted into the installation cylinder 100, and a predetermined number of contour blocks 3 are inserted and fill the annular installation space. These contour blocks 3 form an annular array within the annular installation space. Baffles 2 at both ends of the support shaft 1 are respectively positioned at opposite ends of the support shaft 1. Contour blocks 3 or magnets 200 can enter and exit the annular installation space through the entry / exit clearance holes 21 on the baffles 2. By rotating the two baffles 2 so that both entry / exit clearance holes 21 are aligned with the contour blocks 3 to be replaced, and by pulling the corresponding contour block 3 out of the annular installation space through the entry / exit clearance hole 21 of one baffle 2, the magnet 200 is inserted into the annular installation space through the entry / exit clearance hole 21 of the other baffle 2. Then, the same method is used to replace all contour blocks 3 with the corresponding magnets 200, successfully installing all the magnets 200 of the magnetic array into the installation cylinder 100, thus reducing the installation difficulty of the magnetic array within the beam source screening device.

[0054] Furthermore, such as Figure 8 As shown, the magnetic array-assisted installation fixture also includes a handle 4, which is connected to the baffle 2. The radial extension length of the handle 4 along the baffle 2 is greater than the outer diameter of the installation cylinder 100. The end of the handle 4 extends out of the installation cylinder 100 for easy gripping. By adding the handle 4, it is convenient to rotate the baffle 2, and the rotational torque of the handle 4 is reduced by extending the lever arm.

[0055] Furthermore, the baffle 2 is provided with a central through hole 22, and both ends of the support shaft 1 are provided with annular limiting parts 11. The central through hole 22 of the baffle 2 is fitted into the annular limiting parts 11. In this embodiment, the annular limiting part 11 can be, but is not limited to, a bearing or annular groove, to ensure that the baffle 2 can rotate relative to the support shaft 1 and to prevent the baffle 2 from falling off the support shaft 1.

[0056] Furthermore, the handle 4 is provided with a clearance notch 41, through which the support shaft 1 passes. By adding the clearance notch 41, structural interference between the handle 4 and the support shaft 1 is avoided during the rotation of the handle 4. In this embodiment, the clearance notch 41 is semi-circular.

[0057] Furthermore, such as Figure 4 , Figure 7 Combination Figure 8 As shown, the magnetic array auxiliary installation fixture also includes two annular connectors 5, which are respectively installed at the two ends of the installation cylinder 100. A baffle 2 is located between the annular connectors 5 and the magnet 200, and the outer diameter of the baffle 2 is larger than the inner diameter of the annular connectors 5. By adding two annular connectors 5, the baffle 2 can be prevented from falling off the support shaft 1 during rotation.

[0058] Furthermore, such as Figure 1 , Figure 7 Combination Figure 9 As shown, a first connecting hole 101 is provided at both ends of the mounting cylinder 100, and a second connecting hole 51 is provided on each annular connector 5. The first fastener 6 passes through the second connecting hole 51 and connects to the first connecting hole 101. By adding the first connecting hole 101 and the second connecting hole 51, the connection between the annular connector 5 and the mounting cylinder 100 is ensured to be stable.

[0059] Furthermore, the magnet 200 is bonded to the inner wall of the mounting cylinder 100. This bonding method allows the magnet 200 to be connected to the mounting cylinder 100 without significantly increasing weight, contributing to lightweight design and improving overall performance and efficiency. Compared to traditional mechanical connections such as bolts or welding, bonding avoids machining processes like cutting and welding, reducing material waste and resulting in a more aesthetically pleasing product. It is suitable for applications with high aesthetic requirements, enhancing the overall quality of the product.

[0060] Furthermore, both ends of the support shaft 1 are provided with clearance grooves 12. The magnetic array auxiliary installation fixture also includes a clamping assembly, which includes a jaw 7. The jaw 7 includes a first segment 71, a second segment 72 and a third segment 73. The first segment 71 and the third segment 73 are parallel and spaced apart at both ends of the second segment 72. The first segment 71 is located outside the mounting cylinder 100. The third segment 73 can pass through the clearance hole 21 and enter the clearance groove 12 and is located on the lower end face of the magnet 200. The first segment 71 is pulled radially along the mounting cylinder 100 so that the third segment 73 pushes the magnet 200 against the inner wall surface of the mounting cylinder 100. By adding a clamp 7, when the first segment 71 of the clamp 7 is pulled radially along the mounting cylinder 100, the third segment 73 of the clamp 7 can be pressed against the inner wall of the mounting cylinder 100, so that the adhesive solidifies without bubbles, ensuring that the magnet 200 is firmly bonded to the inner wall of the mounting cylinder 100.

[0061] Furthermore, the first segment 71 is provided with a first threaded hole 711, and the clamping assembly also includes a set screw 8, which is threadedly connected to the first threaded hole 711. Rotating the set screw 8 allows one end of the set screw 8 to press against the outer wall surface of the mounting cylinder 100. Figure 9 As shown, continuing to rotate the set screw 8 can raise the clamp 7 radially along the mounting cylinder 100, thereby causing the third segment 73 of the clamp 7 to push the magnet 200 against the inner wall surface of the mounting cylinder 100.

[0062] Furthermore, the clamping assembly includes two grippers 7 and a connecting plate 9. The connecting plate 9 has multiple second threaded holes 91. The third threaded holes 712 of the first segments 71 of the two grippers 7 are connected to the second threaded holes 91 of the connecting plate 9 via second fasteners 10. Because the connecting plate 9 has multiple second threaded holes 91, the installation position of the two grippers 7 on the connecting plate 9 can be changed according to actual usage, thereby adjusting the distance between the two grippers 7. This allows for clamping of magnets 200 of different lengths, expanding the applicability of the clamping assembly.

[0063] Optionally, an observation hole 23 is also provided on the baffle 2 to facilitate viewing the magnet 200 inside the mounting cylinder 100. In some applications, the gripper 7 can also be inserted into the clearance groove 12 of the support shaft 1 through the observation hole 23.

[0064] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A magnetic array assisted mounting tool for assembling a plurality of magnets (200) circumferentially to an inner wall surface of a mounting cylinder (100), characterized in that, The utility model relates to a magnetic array auxiliary installation tool, including: Supporting shaft (1) for being arranged in the installation cylinder (100); Two baffle plates (2) are rotatably arranged at the two ends of the supporting shaft (1), and the outer wall surface of the supporting shaft (1), the inner wall surface of the installation cylinder (100) and the two baffle plates (2) form an annular mounting space, and each baffle plate (2) is provided with an access avoiding hole (21); Profiling block (3) is same with the shape of the magnet (200), and a plurality of profiling blocks (3) are inserted into the annular mounting space to form an annular array; Wherein, the opening size of the access avoiding hole (21) is only for one profiling block (3) or the magnet (200) to pass through.

2. The magnetic array assisted mounting tool of claim 1, wherein, The magnetic array auxiliary installation tool further includes: Handle (4) is connected with the baffle plate (2), and the radial extension length of the handle (4) along the baffle plate (2) is greater than the outer diameter of the installation cylinder (100).

3. The magnetic array assisted mounting tool of claim 2, wherein, The baffle plate (2) is provided with a center through hole (22), and the two ends of the supporting shaft (1) are provided with annular limiting portions (11), and the center through hole (22) of the baffle plate (2) is sleeved on the annular limiting portion (11).

4. The magnetic array assisted mounting tool of claim 3, wherein, The handle (4) is provided with an avoiding notch (41), and the supporting shaft (1) passes through the avoiding notch (41).

5. The magnetic array assisted mounting tool of claim 1, wherein, The magnetic array auxiliary installation tool further includes: Two annular connecting pieces (5) are respectively installed at the two ports of the installation cylinder (100), the baffle plate (2) is located between the annular connecting piece (5) and the magnet (200), and the outer diameter of the baffle plate (2) is greater than the inner diameter of the annular connecting piece (5).

6. The magnetic array assisted mounting tool of claim 5, wherein, First connecting holes (101) are arranged at the two ports of the installation cylinder (100), second connecting holes (51) are arranged on each annular connecting piece (5), and first fasteners (6) pass through the second connecting holes (51) and are connected with the first connecting holes (101).

7. The magnetic array assisted mounting tool of any of claims 1-6, wherein, The magnet (200) is bonded with the inner wall surface of the installation cylinder (100).

8. The magnetic array assisted mounting tool of claim 7, wherein, The two ends of the supporting shaft (1) are provided with avoiding grooves (12), and the magnetic array auxiliary installation tool further includes: Clamping assembly, including jaw (7), the jaw (7) includes first subsection (71), second subsection (72) and third subsection (73), the first subsection (71) and the third subsection (73) are parallel and are arranged at the two ends of the second subsection (72), the first subsection (71) is located outside the installation cylinder (100), the third subsection (73) can pass through the access avoiding hole (21) and enter the avoiding groove (12) and be located at the lower end surface of the magnet (200), and pulling the first subsection (71) along the radial direction of the installation cylinder (100) can make the third subsection (73) push the magnet (200) and press towards the inner wall surface of the installation cylinder (100).

9. The magnetic array assisted mounting tool of claim 8, wherein, First threaded hole (711) is arranged on the first subsection (71), and the clamping assembly further includes: A jackscrew (8) is threadedly connected with the first threaded hole (711), and rotating the jackscrew (8) can make one end of the jackscrew (8) abut against the outer wall surface of the mounting cylinder (100).

10. The magnetic array assisted mounting tool of claim 8, wherein, The clamping assembly comprises two clamping jaws (7), and the clamping assembly further comprises: A connecting plate (9) is provided with a plurality of second threaded holes (91), and the first segments (71) of the two clamping jaws (7) are connected with the second threaded holes (91) of the connecting plate (9) through second fasteners (10).

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