Automatic height adjusting device for backing ring

Abstract

The utility model relates to the technical field of semiconductor wafers, and discloses an automatic height adjusting device for a backing ring, which comprises a backing ring body and a workbench plate arranged at the top of the backing ring body, and a height adjusting structure used for adjusting the height of the backing ring body is arranged at the bottom of the backing ring body. A leveling structure used for leveling a workbench disc is arranged on the backing ring body. Through cooperative use of the height adjusting structure and the leveling structure, the height of the backing ring body and the height of the workbench disc can be adjusted, even if the backing ring body is replaced, the distance between the backing ring body and a corresponding structure of the ring cutting machine can be conveniently adjusted, the leveling structure can be adjusted under the condition that the flatness does not meet the requirement after the height is adjusted properly, and the working efficiency is improved. Therefore, it is ensured that the workbench disc can be kept flat, and wafer processing is ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer technology, and in particular to an automatic height adjustment device for a gasket ring. Background Technology

[0002] As a crucial component of semiconductor circumferential dicing machines, spacers are primarily used to provide support, adjust the gap, and ensure circumferential dicing accuracy and wafer quality during the dicing process. They are typically made of high-quality elastic materials with excellent corrosion resistance, high-temperature resistance, and elastic recovery to adapt to the unique working environment and requirements of the semiconductor industry. During wafer circumferential dicing, spacers are used to adjust and control the gap and pressure between the wafer and the dicing tool, thereby ensuring circumferential dicing accuracy and wafer surface flatness. Spacers also balance and absorb external vibrations and shocks, reducing adverse effects on the equipment and protecting the wafer from damage. Simultaneously, they provide appropriate clamping force to ensure the wafer is stably fixed to the equipment during circumferential dicing, preventing displacement or slippage.

[0003] Currently, the semiconductor industry mostly uses the taiko grinding process. When removing the taiko support ring, various types of washers need to be replaced on the ring cutter to adjust the height difference between the washers and the worktable, ensuring the required height difference for the matched products and guaranteeing product yield. Therefore, how to easily adjust the height of the washers becomes crucial. Utility Model Content

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide an automatic height adjustment device for the pad ring to solve the problem of pad ring height adjustment.

[0005] To solve the above-mentioned technical problems, the present invention provides an automatic height adjustment device for a gasket, comprising a gasket body and a worktable disposed on the top of the gasket body. The bottom of the gasket body is provided with a height adjustment structure for adjusting the height of the gasket body, and a leveling structure is provided on the gasket body for leveling the worktable, so as to adjust the height and flatness of the gasket body and the worktable, thereby ensuring the stability and normal processing of the wafer.

[0006] Furthermore, the height adjustment structure includes at least three adjustment parts arranged in a circular array at the bottom of the pad ring body. Each adjustment part includes a first power component and an auxiliary lifting component connected to the pad ring body. The first power component is connected to the auxiliary lifting component to drive the auxiliary lifting component to rise and fall in the vertical direction, so as to achieve the raising and lowering of the pad ring body and the worktable while maintaining basic stability.

[0007] Furthermore, the first power component has a first output shaft distributed vertically upwards, and the auxiliary lifting part includes a nut sleeve fixedly connected to the bottom of the washer body and a screw threaded on the nut sleeve. A screw hole is provided vertically through the washer body at the position corresponding to each adjustment part. One end of the screw thread is fixedly connected to the first output shaft, and the other end passes through the nut sleeve and is screwed into the screw hole. The first power component drives the engagement between the screw thread and the nut sleeve to realize the height adjustment of the washer body and the worktable.

[0008] Furthermore, a fitting groove is recessed on the top surface of the gasket body, the leveling structure is fitted into the fitting groove, and the worktable is installed on the top surface of the leveling structure to facilitate the repeated use of the adjustment structure and the replacement of gasket bodies of different models.

[0009] Furthermore, the leveling structure includes a housing fitted into a fitting groove and a leveling part disposed within the housing. The leveling part has a leveling component that can extend out of the top of the housing to adjust the flatness of the worktable, thereby adjusting the flatness of the worktable to ensure that the worktable maintains the required state for precise and efficient wafer processing.

[0010] Furthermore, a receiving cavity is formed inside the housing, and the leveling part is disposed in the receiving cavity. An annular hole in the shape of a ring is formed on the top of the housing, which runs vertically through the top surface of the housing and connects to the receiving cavity. The leveling part passes through the annular hole. The top surface of the housing is defined as a support surface for supporting the worktable. The annular hole is coaxially located in the support surface and its diameter is smaller than the diameter of the worktable, so as to adjust the flatness of the worktable by moving the position of the leveling part.

[0011] Furthermore, the leveling component includes a second power component having a second output shaft and a leveling cone connected to the second output shaft and adapted to an annular hole. The end of the leveling cone passes through the annular hole and has an arched arc surface protruding upward in the middle, for adjusting the flatness of the worktable by contacting it.

[0012] Furthermore, the leveling part includes a third power member coaxial with the housing and disposed within the receiving cavity. The third power member is used to drive the second power member to rotate around the annular hole, so as to provide the leveling part with the power to move.

[0013] Furthermore, the housing portion containing the inner side of the annular hole is defined as a movable portion, and the leveling part also includes a rotating disk. An inner cylinder is formed by stamping the center of the rotating disk upwards. The third power component is fixedly connected to the bottom wall of the receiving cavity and located inside the inner cylinder. A third output shaft of the third power component is fixedly connected to the inner cylinder, extends out of the inner cylinder, and is rotatably connected to the movable portion to support the movable portion while driving the rotating disk to rotate.

[0014] Furthermore, a hemispherical block is protruding at the center of the top surface of the movable part, and a groove is recessed on the bottom surface of the worktable to fit the hemispherical block and allow it to pass through, for positioning the worktable.

[0015] The automatic height adjustment device for the gasket ring of this utility model has at least the following beneficial effects: by using the height adjustment structure and the leveling structure in combination, the height of the gasket ring body and the worktable can be adjusted. Even after replacing the gasket ring body, it is easy to adjust the distance between it and the corresponding structure of the ring cutting machine. The leveling structure can adjust the flatness if the flatness does not meet the requirements after the height is properly adjusted, so as to ensure that the worktable can remain flat and thus ensure the processing of wafers. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is a front sectional view of the present invention;

[0019] Figure 3 for Figure 2 An enlarged view of part A shown;

[0020] Figure 4 This is an exploded view of the present invention.

[0021] The meanings of the labels in the attached diagram are as follows:

[0022] 1. Washer ring body, 11. Inner ring hole, 12. Fitting groove, 13. Step edge, 14. Screw hole, 2. Worktable, 3. Height adjustment structure, 3a. First power component, 31. Auxiliary lifting component, 32. Nut sleeve, 321. Lead screw, 322. Leveling structure, 4. Housing, 41. Receiving cavity, 411. Annular hole, 412. Movable part, 413. Hemispherical block, 414. Leveling part, 42. Leveling component, 421. Second power component, 4211. Leveling cone, 4212. Arched surface, 4213. Third power component, 422. Rotary disk, 423. Inner cylinder, 4231. Bearing, 424. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings.

[0024] Please refer to Figures 1 to 4The automatic height adjustment device for the pad ring of this utility model includes a pad ring body 1, a worktable 2 disposed on the top of the pad ring body 1, a height adjustment structure 3 disposed on the bottom of the pad ring body 1, and a leveling structure 4 disposed on the pad ring body 1. The pad ring body 1 is used to support the worktable 2, and the worktable 2 is used to support semiconductor products such as wafers. The height adjustment structure 3 is used to adjust the height of the pad ring body 1 to adjust the height difference between the worktable 2 and the corresponding structure on the ring cutting machine. The leveling structure 4 is used to adjust the flatness of the worktable 2.

[0025] In this embodiment, the washer body 1 is annular with an inner annular hole 11 inside. The washer body 1 is made of elastic material to ensure durability and absorb vibration. The inner annular hole 11 is a cylindrical hole that extends through the washer body 1 along its axial direction. To facilitate the installation of the leveling structure 4, a fitting groove 12 coaxial with the inner annular hole 11 is recessed on the top surface of the washer body 1, i.e., on one side of the washer body 1 along its axial direction. The fitting groove 12 is also cylindrical and has a diameter larger than the inner annular hole 11, so that a stepped edge 13 is formed between the fitting groove 12 and the inner annular hole 11. The leveling structure 4 is supported on the stepped edge 13 after being fitted into the fitting groove 12. In another embodiment, the washer body 1 is a cylindrical solid without an inner annular hole 11. The fitting groove 12 is also provided on the washer body 1, making the washer body 1 annular. In both of the above embodiments, the top surface height of the leveling structure 4 is consistent with the top surface height of the pad ring body 1, and the worktable 2 in both embodiments is placed on the leveling structure 4. In another embodiment, after the leveling structure 4 is installed in the fitting groove 12, the top surface height of the leveling structure 4 is lower than the top surface height of the pad ring body 1. Correspondingly, the diameter of the fitting groove 12 is smaller than the diameter of the worktable 2, so that the worktable 2 can be installed on the top surface of the pad ring body 1. The worktable 2 above the fitting groove 12 is suspended above the top of the fitting groove 12.

[0026] In this embodiment, the worktable 2 is typically made of a hard metal, commonly stainless steel. The worktable 2 has a cylindrical structure and is typically used to support the loading and unloading of wafers or various semiconductor materials.

[0027] In this embodiment, the height adjustment structure 3 includes at least three adjustment parts 3a arranged in a circular array at the bottom of the pad ring body 1. Preferably, there are four adjustment parts 3a to maintain stable support for the pad ring body 1 with a relatively small number of adjustment parts. In another embodiment, six adjustment parts 3a are provided; the more adjustment parts 3a there are, the more stable the support. Four adjustment parts 3a can be arranged in a circular array. In another embodiment, the four adjustment parts 3a are arranged in a rectangular array with the center of the pad ring body 1 as the center. In this embodiment, the adjustment part 3a includes a first power member 31 and an auxiliary lifting part 32 connected to the pad ring body 1. The first power member 31 is connected to the auxiliary lifting part 32 to drive the auxiliary lifting part 32 to rise and fall vertically. Under the drive of the first power member 31, the auxiliary lifting part 32 drives the pad ring body 1 to rise and fall, thereby driving the worktable 2 on the pad ring body 1 to rise and fall.

[0028] In this embodiment, the first power component 31 can be a stepper motor, or it can be a rotary cylinder or other power device. Therefore, the first power component 31 has a first output shaft extending upward in a vertical direction, and the auxiliary lifting part 32 is coaxially fixedly connected to the top end of the first output shaft. The first power component 31 is a power device whose first output shaft can rotate in both directions. The auxiliary lifting part 32 includes a nut sleeve 321 fixedly connected to the bottom of the washer body 1 and a lead screw 322 screwed onto the nut sleeve 321. A screw hole 14 adapted to the lead screw 322 is vertically opened on the washer body 1 at the position corresponding to each adjustment part 3a. After one end of the lead screw 322 is fixedly connected to the first output shaft, the other end of the lead screw 322 passes through the nut sleeve 321 and is screwed into the screw hole 14. In use, the first power component 31 operates to make the first output shaft rotate, and the lead screw 322 rotates with the first output shaft. Since there are at least three auxiliary lifting parts 32, the rotation of each lead screw 322 restricts the rotation of the washer body 1. At the same time, through the threaded engagement between the lead screw 322 and the nut sleeve 321 and the screw hole 14, the lifting and lowering of the washer body 1 is achieved by controlling the forward and reverse rotation of the first output shaft and the lead screw 322.

[0029] In another embodiment, the first power component 31 can be a cylinder, and the auxiliary lifting part 32 includes a pulley and guide rope assembly (not shown in the figure). The rolling and pulling cooperation between the pulley and the guide wheel realizes the lifting and lowering of the washer body 1. In order to ensure the stability of the washer body 1, a guide rod arranged in the vertical direction can be provided, and a guide hole is provided on the washer body 1 so that the guide rod passes through the guide hole. It should be noted that, regardless of the embodiment, the operating frequency of each first power component 31 and the auxiliary lifting part 32 should be synchronized or infinitely close, or by setting gears on the lead screw 322 and winding toothed belts on each gear, fixing the main gear on the first output shaft of the first power component 31, and realizing the synchronous rotation of each lead screw 322 through the meshing and cooperation of the main gear and any gear with the toothed belt. The bottom end of the lead screw 322 is rotatably connected to a base plate through a bearing 424.

[0030] In this embodiment, the leveling structure 4 includes a housing 41 fitted into the fitting groove 12 and a leveling part 42 disposed in the housing 41. The housing 41 is fitted onto the pad ring body 1, which can ensure that each pad ring body 1 has a matching fitting groove 12 when the pad ring body 1 is replaced, so that pad ring bodies 1 of different specifications can be replaced indefinitely. The housing 41 can support the worktable 2, and the leveling part 42 is used to adjust the flatness of the worktable 2.

[0031] In this embodiment, the shell 41 is cylindrical in shape to fit the fitting groove 12. The thickness of the shell 41 is preferably equal to or less than the depth of the fitting groove 12. When the thickness of the shell 41 is equal to or greater than the depth of the fitting groove 12, the shell 41 serves to support the worktable 2. When the thickness of the shell 41 is less than the depth of the fitting groove 12, if it is necessary to keep the support of the worktable 2 suspended in the middle for support from the outside, it ensures that the worktable 2 is coaxially mounted with respect to the fitting groove 12. The diameter of the housing 41 should be larger than the diameter of the fitting groove 12 so that the housing 41 can support the worktable 2. If it is necessary to ensure that the support of the worktable 2 is fully substantial, the diameter of the worktable 2 should be smaller than the diameter of the housing 41 so that the housing 41 can support the worktable 2. In order to ensure better support of the leveling part 42 for the worktable 2, the diameter of the worktable 2 is smaller than the diameter of the housing 41. However, if the worktable 2 is supported on the top surface of the housing 41, the leveling part 42 can still perform leveling of the worktable 2. The material of the housing 41 should be the same as the material of the housing 41 to ensure basic strength. In this embodiment, a receiving cavity 411 is formed inside the housing 41, and a leveling part 42 is disposed within the receiving cavity 411. An annular hole 412, which is vertically penetrating the top surface of the housing 41 and communicating with the receiving cavity 411, is formed at the top of the housing 41. The annular hole 412 and the receiving cavity 411 allow the portion of the top of the housing 41 located inside the annular hole 412 to detach from the housing 41. A movable part 413 is defined within the portion of the top of the housing 41 located inside the annular hole 412, and the movable part 413 is supported by the leveling part 42. To ensure more stable support of the worktable 2 by the housing 41, the diameter of the worktable 2 should be larger than the diameter of the movable part 413. The annular hole 412, the movable part 413, and the worktable 2 are coaxial, and the worktable 2 is supported on the top surface of the housing 41 outside the annular hole 412. The top surface of the housing 41 is defined as a support surface, which is used to support the worktable 2. The annular hole 412 is coaxial with the support surface and its diameter is smaller than the diameter of the worktable 2.

[0032] To reduce the possibility of the leveling part 42 shifting during the leveling of the worktable 2, and to quickly position the worktable 2 during installation, a hemispherical block 414 protrudes from the center of the top surface of the movable part 413. The top of the hemispherical block 414 arches upwards, and a groove is recessed at the center of the bottom surface of the worktable 2 to fit the hemispherical block 414 and allow it to pass through. The groove is a hemispherical arc surface. The worktable 2 is installed after the hemispherical block 414 passes through the groove. The fit between the hemispherical block 414 and the groove reduces the probability of the worktable 2 shifting position during leveling. Since the leveling range is not large, the fit between the hemispherical block 414 and the groove is sufficient to position the worktable 2. Furthermore, due to the low friction between the arc surfaces, the fit between the hemispherical block 414 and the groove will not significantly affect the leveling process.

[0033] In this embodiment, the leveling unit 42 includes a leveling member 421 that extends upward beyond the support surface, a third power member 422 coaxially disposed within the housing 411 in the receiving cavity 411, and a rotating disk 423. The leveling member 421 is connected to the rotating disk 423. The leveling member 421 passes through an annular hole 412 and its end protrudes outside the annular hole 412 to raise the worktable 2 at its current position. The overall flatness of the worktable 2 is adjusted by changing the height of one side of the worktable 2. The third power member 422 is used to drive the second power member 4211 to rotate around the annular hole 412 so that the leveling member 421 can raise the height of any side of the worktable 2, thereby enabling a more comprehensive adjustment of the flatness of the worktable 2. The rotating disk 423 is used to move the leveling member 421 after the third power member 422 has been activated. It should be noted that the flatness of the worktable 2 can be detected by using a laser flatness tester or other testing equipment. The use of the third power component 422 is controlled by the controller. The position and height changes of the leveling component 421 can be detected by setting sensors and sending information to the controller until the third power component 422 runs to adjust the flatness of the worktable 2 to a suitable level, or to make timely adjustments when there is a deviation in flatness.

[0034] The leveling component 421 includes a second power component 4211 with a second output shaft and a leveling cone 4212 connected to the second output shaft and adapted to the annular hole 412. The second power component 4211 is fixedly connected to the top surface of the rotating disk 423 and faces the annular hole 412 in the vertical direction. The second output shaft of the second power component 4211 extends upward and can extend and retract relative to the second power component 4211 itself in the vertical direction. The end of the leveling cone 4212 away from the second output shaft passes into the annular hole 412. When the second power component 4211 is running, the second output shaft extends upward from the second power component 4211 to drive the leveling cone 4212 to gradually pass out of the annular hole 412 and contact the worktable 2. The height is adjusted as needed so that the end of the leveling cone 4212 passes out a suitable length to achieve the purpose of adjusting the flatness of the worktable 2.

[0035] In this embodiment, the second power component 4211 can be a linear motor or a telescopic cylinder with a telescopic second output shaft. The height of the second power component 4211 should be less than the depth between the top surface of the rotating disk 423 and the top surface of the receiving cavity 411, thereby preventing the second power component 4211 itself from affecting the use of the leveling cone 4212. The leveling cone 4212 is made of a rigid material. The bottom end of the leveling cone 4212 is fixedly connected to the second output shaft. The top end of the leveling cone 4212 faces upward and has an arched arc surface 4213 protruding upward in the middle, so that the end of the leveling cone 4212 is conical or bullet-shaped. The leveling cone 4212 is cylindrical in shape, and its maximum diameter is smaller than the width of the annular hole 412, so that the leveling cone 4212 can be movably inserted into the annular hole 412. The arched surface 4213 allows the leveling cone 4212 to contact the worktable 2 in a point-to-point manner, reducing friction and obstruction while facilitating the adjustment of the worktable 2's degree of freedom by the leveling cone 4212.

[0036] In the initial state, the second output shaft of the second power component 4211 is in a retracted state, the end of the leveling cone 4212 is located inside the annular hole 412, and the bottom surface of the worktable 2 is entirely supported on the support surface. When it is necessary to adjust the flatness, the third power component 422 and the rotating disk 423 drive the second power component 4211 and the leveling cone 4212 to rotate to a suitable position below the worktable 2. Through the operation of the second power component 4211, the second output shaft extends upward so that the leveling cone 4212 passes through the annular hole 412 and pushes the side of the worktable 2 that contacts the leveling cone 4212 upward to achieve the leveling effect.

[0037] In this embodiment, the third power component 422 has a rotatable third output shaft. The third power component 422 can be a rotary cylinder, a conventional stepper motor, or a servo motor. The third power component 422 is fixedly installed at the bottom of the receiving cavity 411 and located at the center of the cavity 411. The output shaft of the third power component 422 extends upwards, and a counterweight (not shown in the figure) can be provided at the end of the third output shaft. The mating block is fixedly connected to the bottom surface of the movable part 413 or embedded in the movable part 413. A bearing 424 is fixedly provided at the bottom of the counterweight, and the third output shaft is connected to the bearing 424, so that the third output shaft can rotate relative to the movable part 413 while supporting the movable part 413. To prevent the worktable 2 from rotating with the movable part 413, the top surface of the movable part 413 is lower than the height of the supporting surface.

[0038] In another embodiment, several connecting strips (not shown in the figure) arranged in a circular array around the annular hole 412 can be provided inside the annular hole 412. The two ends of the connecting strips are fixedly connected to the movable part 413 and the housing 41, respectively. There is a movable space between adjacent connecting strips for the leveling cone 4212 to move through. The connecting strips fix the movable part 413 to the housing 41. The connecting strip is located at the top of the annular hole 412 and there is a space below the connecting strip for the end of the leveling cone 4212 to be located in the annular hole 412. When leveling is required, the third power member 422 drives the leveling cone 4212 to move to the corresponding movable space, and the second power member 4211 can then drive the leveling cone 4212 to pass through the movable space for leveling.

[0039] In this embodiment, the rotating disk 423 has a disc-shaped structure. An inner cylinder 4231 is formed at the center of the rotating disk 423, which is used for the third power member 422 to move through. The third output shaft is fixedly passed through the center of the inner cylinder 4231 in the vertical direction. The third power member 422 is located in the inner cylinder 4231. The mating block and the bearing 424 are both located directly above the contents.

[0040] The working method of one embodiment of the automatic height adjustment device for the pad ring of this utility model is as follows: After the leveling structure 4 is installed in the fitting groove 12, the worktable 2 is placed on the support surface so that the hemispherical block 414 is aligned with the groove. Then, the first power component 31 operates to adjust the height difference between the pad ring body 1 and the worktable 2 according to the ring cutting machine. After adjusting to a suitable position, the first power component 31 stops operating. The flatness of the worktable surface is measured using a flatness testing instrument. For unevenness, the controller calculates according to the signal sent by the flatness testing instrument. Then, the controller controls the third power component 422 to drive the rotating disk 423 and the second power component 4211 to rotate until they move to a suitable position. Then, the third power component 422 stops operating. The second power component 4211 operates so that the leveling cone 4212 gradually contacts the worktable 2 through the annular hole 412 until the leveling cone 4212 gradually lifts one side of the worktable 2 so that the lifted side is tilted upwards. During this process, the flatness testing instrument continuously detects and sends data to the controller until the worktable 2 is leveled.

Claims

1. A gasket automatic height adjustment device, comprising a gasket body and a worktable disc arranged on the top of the gasket body, characterized in that: The bottom of the grommet body is provided with a height adjusting structure for adjusting the height of the grommet body, and a leveling structure for leveling the workbench plate is arranged on the grommet body.

2. The grommet automatic height adjustment device of claim 1, wherein: The height adjusting structure comprises at least three adjusting portions arranged in an annular array on the bottom of the grommet body, each adjusting portion comprising a first power member and an auxiliary lifting portion connected to the grommet body, and the first power member is connected to the auxiliary lifting portion for driving the auxiliary lifting portion to lift along the vertical direction.

3. The grommet auto-height adjustment device of claim 2, wherein: The first power member has a first output shaft arranged upward along the vertical direction, the auxiliary lifting portion comprises a nut sleeve fixedly connected to the bottom of the grommet body and a lead screw screwed on the nut sleeve, and a screw hole is vertically formed through the grommet body at a position corresponding to each adjusting portion, one end of the lead screw is fixedly connected to the first output shaft, and the other end penetrates through the nut sleeve and is screwed into the screw hole.

4. The grommet automatic height adjustment device of claim 1, wherein: A fitting groove is concavely arranged on the top surface of the grommet body, the leveling structure is fitted in the fitting groove, and the workbench plate is mounted on the top surface of the leveling structure.

5. The grommet auto-height adjustment device of claim 4, wherein: The leveling structure comprises a housing fitted in the fitting groove and a leveling portion arranged in the housing, and the leveling portion has a leveling member capable of protruding out of the top of the housing for adjusting the flatness of the workbench plate.

6. The grommet auto-height adjustment device of claim 5, wherein: A receiving cavity is formed in the housing, the leveling portion is arranged in the receiving cavity, a circular annular hole is vertically formed through the top surface of the housing and communicates with the receiving cavity, the leveling member penetrates into the annular hole, the top surface of the housing is defined as a support surface for supporting the workbench plate, the annular hole is coaxially arranged in the support surface and has a diameter smaller than that of the workbench plate.

7. The grommet auto-height adjustment device of claim 6, wherein: The leveling member comprises a second power member having a second output shaft and a leveling cone connected to the second output shaft and adapted to the annular hole, the end of the leveling cone penetrates into the annular hole and has a central portion protruding upward as an arc surface.

8. The grommet auto-height adjustment device of claim 7, wherein: The leveling portion comprises a third power member coaxially arranged in the housing and in the receiving cavity, and the third power member is used to drive the second power member to rotate around the annular hole.

9. The grommet auto-height adjustment device of claim 8, wherein: The part of the housing inside the annular hole is defined as a movable part, and the leveling portion further comprises a rotating disc, a inner cylinder is punched upward at the center of the rotating disc, the third power member is fixedly connected to the bottom wall of the receiving cavity and located in the inner cylinder, and a third output shaft of the third power member is fixedly connected to the inner cylinder, penetrates out of the inner cylinder and is rotationally connected to the movable part.

10. The grommet auto-height adjustment device of claim 9, wherein: A hemispherical block is protrudingly arranged at the center of the top surface of the movable part, and a groove is concavely arranged on the bottom surface of the workbench plate and adapted to the hemispherical block for penetrating into the groove.

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