AMHS workstation transfer mechanism

Abstract

The utility model discloses an AMHS workstation transfer mechanism which comprises an adsorption device, a connection conveying device and a working platform, the adsorption device comprises an adsorption disc and a sliding table module, the sliding table module controls the adsorption disc to move front and back, the connection conveying device comprises a lifting platform, a transverse moving platform and a bearing platform, and the lifting platform is connected with the transverse moving platform. The lifting platform controls lifting of the bearing platform, the transverse moving platform controls transverse moving of the bearing platform, the bearing platform comprises a transmission belt and an in-place detector, the transmission belt is responsible for conveying material frames to the positioning jacking working groove, and the in-place detector is responsible for detecting the material frames on the goods shelf. A butt joint sensor is arranged on one side of the bearing platform, and a butt joint light reflecting plate corresponding to the butt joint sensor is arranged in the positioning jacking working groove. The system has the beneficial effects that through time sequence connection and sensing feedback of all the modules, full-process continuous operation of grabbing, transferring and positioning is achieved, and the material transferring efficiency and reliability are remarkably improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor warehousing, specifically relates to a AMHS workstation transfer mechanism. BACKGROUND

[0002] The advanced material handling system (AMHS) is a kind of highly automated material transport and storage system, mainly used in the fields such as semiconductor manufacturing, electronic component production, logistics and automated warehousing. AMHS realizes efficient, accurate and reliable material handling by integrating automated equipment, software control and data analysis technology, so as to improve production efficiency, reduce human error and reduce operating costs.

[0003] In the automated warehousing and material handling system, the accurate positioning and seamless docking of the material frame are the key to guarantee the continuous operation of the assembly line. In the prior art, the material handling device relies on mechanical limiting or single sensor to realize positioning, but in the high-speed, multi-batch operation scene, the cumulative error or environmental interference often causes the deviation of the material frame and the target station docking. For example, when the traditional device takes material from the shelf, the mechanical arm or the conveyor belt is difficult to dynamically adapt to different shelf heights and position changes, which easily causes the material frame to deviate or be stuck. When transferring to the workstation, due to the limitation of rigid structure and one-way detection logic, the docking of the material frame and the working groove needs to be adjusted repeatedly, and even the system alarm stops due to slight misalignment. Such problems not only reduce the handling efficiency, but also may cause damage to precision materials or equipment collision, which becomes the bottleneck of the efficient and stable operation of the automated warehousing system. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a AMHS workstation transfer mechanism to solve the technical problem of low transfer efficiency mentioned above.

[0005] To solve the above technical problems, the utility model provides a AMHS workstation transfer mechanism, which comprises a suction device, a connection conveying device and a workstation platform, the suction device comprises a suction disc and a sliding table module, the sliding table module controls the forward and backward movement of the suction disc, the connection conveying device comprises a lifting platform, a horizontal moving platform and a receiving platform, the lifting platform controls the lifting of the receiving platform, the horizontal moving platform controls the horizontal movement of the receiving platform, the receiving platform comprises a transmission belt and an in-place detector, the transmission belt is responsible for conveying the material frame to the positioning lifting working groove, the in-place detector is responsible for detecting the material frame on the shelf, one side of the receiving platform is provided with a docking sensor, and the positioning lifting working groove is provided with a docking reflector corresponding to the docking sensor.

[0006] Further, the receiving platform further comprises a first arrival sensor and a second arrival sensor, the first arrival sensor comprises an oblique sensor and an oblique reflector, the material frame enters and exits the detection area of the oblique sensor, the oblique sensor controls the operation of the transmission belt on the receiving platform, the material frame enters and exits the detection area of the second arrival sensor, and the second arrival sensor is responsible for closing the adsorption disc.

[0007] Further, the two side edges of the upper end of the transmission belt are provided with guide plates, the guide plates are flared obtuse angle bidirectional guide plates, and the included angle between the front end, the rear end and the middle part of the guide plate is 120°-150°.

[0008] Further, the receiving platform further comprises a code reading assembly, the code reading assembly comprises a code reader and a laser sensor, and the code reading assembly is responsible for identifying the nameplate information on the material frame.

[0009] Further, the positioning and jacking working groove further comprises a positioning sensor and a conveying belt, the material frame enters and exits the detection area of the positioning sensor, and the positioning sensor is responsible for controlling the operation of the conveying belt on the positioning and jacking working groove.

[0010] Further, the upper and lower ends of the lifting platform are provided with lifting limit blocks, the lifting limit blocks are provided with Optigreen glue, the left and right ends of the transverse moving platform are provided with anti-collision buffers, and the anti-collision buffers are provided with Optigreen glue.

[0011] Further, the sliding table module comprises a servo motor, a straight rack, a straight gear, a mounting plate, a motor mounting plate, a sliding rail, and a sliding block, the upper end of the mounting plate is fixedly connected with the sliding rail, the sliding rail is installed above the sliding block, the motor mounting plate is fixedly connected to the sliding block, the servo motor is arranged on the motor mounting plate, the output end of the servo motor is provided with the straight gear, the straight gear is embedded below the straight rack, and the straight rack is fixedly connected with the mounting plate.

[0012] Compared with the prior art, the AMHS workstation transfer mechanism realizes efficient and accurate transfer of the material frame through modular design and automatic process integration. The sliding table module of the adsorption device drives the adsorption disc to quickly grab the material frame, and the lifting platform and the transverse moving platform are cooperatively adjusted, so that the receiving platform accurately docks with the rack position, and the empty waiting is reduced. The linkage control of the transmission belt and the docking sensor ensures that the material frame is automatically conveyed to the working groove along the preset path, and the manual positioning error is eliminated. The system realizes continuous operation of the whole process of "grabbing-transporting-positioning" through time sequence connection and sensing feedback of each module, and significantly improves the material transfer efficiency and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a first three-dimensional structure schematic view of the warehouse system based on AMHS.

[0014] Figure 2 for Figure 1 A magnified structural diagram of part A in the diagram.

[0015] Figure 3 This is a schematic diagram of the second three-dimensional structure of an AMHS-based warehousing system.

[0016] Figure 4 This is a top view of the AMHS-based warehousing system.

[0017] Figure 5 This is a front view structural diagram of an AMHS-based warehousing system.

[0018] Figure 6 This is a schematic diagram of the third-dimensional structure of an AMHS-based warehousing system.

[0019] Figure 7 This is a schematic diagram of the fourth three-dimensional structure of an AMHS-based warehousing system.

[0020] The components include: 1. Shelf; 2. Adsorption device; 21. Slide module; 210. Servo motor; 212. Spur rack; 213. Spur gear; 214. Mounting plate; 215. Motor mounting plate; 216. Slide rail; 217. Slider; 22. Adsorption tray; 23. Upper and lower modules; 220. Base plate; 221. Sliding plate; 222. Slide groove; 223. Pneumatic telescopic rod; 224. Limit block; 3. Connecting conveyor device; 31. Lifting platform; 310. Lifting limit block; 312. Polyurethane adhesive; 32. Horizontal moving platform; 320. 33. Anti-collision buffer; 33. Receiving platform; 331. Transmission belt; 3310. Guide plate; 332. In-place detector; 333. Positioning sensor; 3331. Conveyor belt; 334. First position sensor; 3341. Oblique projection sensor; 3342. Oblique projection reflector; 335. Second position sensor; 336. Code reading assembly; 3361. Code reader; 3362. Laser sensor; 337. Docking sensor; 3371. Docking reflector; 4. Work station; 41. Positioning and lifting working trough; 5. Material frame. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only one embodiment of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] To make the objectives, technical solutions and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments.

[0023] In the following description, references to "an embodiment," "an embodiment," "an example," "example," etc., indicate that the described embodiment or example may include a particular feature, structure, characteristic, property, element, or limitation, but not every embodiment or example necessarily includes that particular feature, structure, characteristic, property, element, or limitation. Furthermore, the repeated use of the phrase "an embodiment according to this application," while possibly referring to the same embodiment, does not necessarily refer to the same embodiment.

[0024] In this embodiment: as Figure 1 As shown, the device includes an adsorption device 2, a connecting conveyor device 3, and a workstation 4. The adsorption device 2 is responsible for gripping, the connecting conveyor device 3 is responsible for multi-dimensional movement, and the workstation 4 provides final positioning. The entire device realizes full automation of the adsorption, handling, and positioning of materials (material frame 5). The adsorption device 2 includes an adsorption plate 22 and a sliding table module 21. The sliding table module 21 controls the forward and backward movement of the adsorption plate 22. The linear movement of the sliding table module 21 achieves precise positioning of the adsorption plate 22 and ensures gripping stability. The suction cup is a vacuum suction cup.

[0025] The connecting conveyor device 3 includes a lifting platform 31, a transverse platform 32, and a receiving platform 33. The lifting platform 31 controls the lifting of the receiving platform 33, and the transverse platform 32 controls the transverse movement of the receiving platform 33. Through the lifting platform 31 and the transverse platform 32, the receiving platform 33 can cooperate with the material frame 5 on the shelf 1 to achieve three-dimensional spatial positioning (XYZ axis) of the receiving platform 33, adapting to shelves 1 of different heights and positions. The transverse platform 32 uses linear guide rails + servo motor 210, and the transverse stroke is designed according to the width of the shelf 1.

[0026] The receiving platform 33 includes a transmission belt 331 and an on-site detector 332. The transmission belt 331 is responsible for conveying the material frame 5 to the positioning and lifting working groove 41. The on-site detector 332 is responsible for detecting whether there is a material frame 5 on the shelf 1 and automatically detecting the status of the material frame 5 on the shelf 1 to avoid empty grabbing or collision.

[0027] A docking sensor 337 is provided on one side of the receiving platform 33, and a docking reflector 3371 is provided in the positioning and lifting working groove 41 corresponding to the docking sensor 337. When the material frame 5 is picked up on the receiving platform 33, the lifting platform 31 and the transverse platform 32 will move the receiving platform 33 to the front of the empty positioning and lifting working groove 41. When the docking sensor 337 completes docking with the docking reflector 3371, the lifting platform 31 and the transverse platform 32 stop moving. Millimeter-level positioning accuracy is achieved through optical signal alignment to ensure seamless docking between the receiving platform 33 and the working groove.

[0028] The receiving platform 33 also includes a first positioning sensor 334 and a second positioning sensor 335. The first positioning sensor 334 includes an oblique projection sensor 3341 and an oblique projection reflector 3342. When the material frame 5 enters the detection area of ​​the oblique projection sensor 3341, the oblique projection sensor 3341 starts the transmission belt 331 on the receiving platform 33 to run. When the material frame 5 leaves the detection area of ​​the oblique projection sensor 3341, the oblique projection sensor 3341 stops the transmission belt 331 on the receiving platform 33 to run. The transmission belt 331 is automatically started and stopped according to the position of the material frame 5 to prevent idling and material deviation.

[0029] The material frame 5 enters the detection area of ​​the second positioning sensor 335, which closes the adsorption plate 22. Then, the adsorption plate 22 is moved upward by the upper and lower modules 23. The receiving platform 33 is connected to the adsorption device 2 through the upper and lower modules 23. The upper and lower modules 23 include a base plate 220 and a sliding plate 221. The base plate 220 is vertically set on one side of the receiving platform 33. The sliding plate 221 cooperates with the sliding groove 222 on the base plate 220. A pneumatic telescopic rod 223 is set in the middle of the base plate 220. A limit block 224 is fixedly set on the pneumatic telescopic rod 223. The limit block 224 is located below the sliding plate 221. The pneumatic telescopic rod 223 drives the sliding plate 221 to move up and down, thereby driving the adsorption device 2 to move up and down. This facilitates the material frame 5 to move back and forth on the receiving platform 33, ensuring that the adsorption plate 22 is released in time and avoids interference with subsequent actions after the material frame 5 is in position.

[0030] Guide plates 3310 are provided on both sides of the upper end of the transmission belt 331. The guide plates 3310 are flared obtuse angle bidirectional guide plates 3310. The included angle between the front and rear ends and the middle of the guide plate 3310 is 120° to 150°, which allows the material frame 5 to enter in both directions and prevents it from deviating. It is convenient to pick up and put down the material frame 5. The flared design guides the material frame 5 to be centered, preventing it from deviating or jamming during belt transportation.

[0031] The receiving platform 33 also includes a code reading component 336, which includes a code reader 3361 and a laser sensor 3362. The code reading component 336 is responsible for identifying the nameplate information on the material frame 5, automatically identifying the material identity, and realizing traceability management and error prevention.

[0032] The positioning and lifting working trough 41 also includes a positioning sensor 333 and a conveyor belt 3331. When the material frame 5 enters the detection area of ​​the positioning sensor 333, the positioning sensor 333 starts the conveyor belt 3331 on the positioning and lifting working trough 41 to run. When the material frame 5 leaves the detection area of ​​the positioning sensor 333, the positioning sensor 333 stops the operation of the conveyor belt 3331 on the positioning and lifting working trough 41, thus accurately controlling the start and stop position of the material frame 5 in the working trough and ensuring the docking accuracy with downstream equipment.

[0033] Lifting platform 31 is provided with lifting limit blocks 310 at both the upper and lower ends. The lifting limit blocks 310 are covered with urethane 312. The flexible urethane 312 coating is used to protect the lifting platform 31 from vibration and to protect precision materials from damage. The horizontal moving platform 32 is provided with anti-collision buffers 320 at both the left and right ends. The anti-collision buffers 320 are covered with urethane 312. The flexible material absorbs the impact energy and prevents hard collisions from damaging the equipment and materials.

[0034] The slide module 21 includes a servo motor 210, a rack 212, a spur gear 213, a mounting plate 214, a motor mounting plate 215, a slide rail 216, and a slider 217. The upper end of the mounting plate 214 is fixedly connected to the slide rail 216, and the slider 217 is mounted above the slide rail 216. The motor mounting plate 215 is fixedly connected to the slider 217, and the servo motor 210 is mounted on the motor mounting plate 215. The output end of the servo motor 210 is equipped with a spur gear 213, which engages with the rack 212 below. The rack 212 is fixedly connected to the mounting plate 214. The servo motor 210 drives the adsorption plate 22 to move back and forth, thus adsorbing the material frame 5. High-precision linear motion is achieved through rack and pinion transmission, ensuring stable gripping by the adsorption plate 22.

[0035] Workflow: The in-situ detector 332 scans the shelf 1. If the material frame 5 is detected, the subsequent action is triggered. If there is no material frame 5, an alarm is triggered. The slide module 21 drives the adsorption plate 22 to move forward to the side of the shelf 1 to stand by (through the transmission of spur gear 213-spur rack 212, the stroke is controlled by the encoder of servo motor 210).

[0036] The lifting platform 31 raises the receiving platform 33 to the height of the target shelf 1, and the lateral moving platform 32 moves laterally to the position of the target shelf 1; the sliding module 21 pushes the adsorption plate 22 to contact the surface of the material frame 5 and completes adsorption, the sliding module 21 retracts, and pulls the material frame 5 from the shelf 1 to above the receiving platform 33. After the second positioning sensor 335 detects that the material frame 5 has completely entered the receiving platform 33, the adsorption plate 22 releases the material frame 5; the sliding module 21 drives the adsorption plate 22 to move upward (to avoid interfering with the movement of the material frame 5).

[0037] The lifting platform 31 moves to support the platform 33 to the height of the positioning and lifting working groove 41. The horizontal moving platform 32 moves laterally to the position of the positioning and lifting working groove 41. When the intensity of the reflected signal emitted by the docking sensor 337 reaches the threshold, it is determined that it is aligned with the docking reflector 3371, and the support platform 33 stops moving.

[0038] When the material frame 5 enters the detection area of ​​the oblique injection sensor 3341, it triggers the drive belt 331 to start, sending the material frame 5 into the positioning and lifting working groove 41 at a speed of 0.8 m / s. When the material frame 5 leaves the oblique injection sensor 3341, the drive belt 331 stops.

[0039] The flared guide plate 3310 (135° angle) guides the material frame 5 to the center.

[0040] When the material frame 5 enters the detection area of ​​the positioning sensor 333, it triggers the start of the conveyor belt 3331 until the material frame 5 is completely in the positioning lifting working groove 41. After the material frame 5 leaves the detection area of ​​the positioning sensor 333, the conveyor belt 3331 stops moving.

[0041] The system detects the demand for the next material box 5 and repeats the above process, supporting continuous operation.

[0042] The above description of the disclosed embodiments enables those skilled in the art to implement or use this invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, this invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An AMHS workstation transfer mechanism, characterized by: Including adsorption device, interface conveying device and workstation platform, the adsorption device includes adsorption disc and sliding table module, the sliding table module controls the back and forth movement of adsorption disc, the interface conveying device includes lifting platform, horizontal moving platform and receiving platform, the lifting platform controls the lifting of receiving platform, the horizontal moving platform controls the horizontal movement of receiving platform, the receiving platform includes transmission belt and in-place detector, the transmission belt is responsible for conveying material frame to positioning jacking working groove, the in-place detector is responsible for detecting material frame on shelf, one side of the receiving platform is provided with butt joint sensor, the positioning jacking working groove is provided with butt joint reflector corresponding to butt joint sensor. 2.The AMHS workstation transfer mechanism of claim 1, wherein: The receiving platform further includes first and second to position sensors, the first to position sensor includes oblique sensor and oblique reflector, the material frame enters and exits the detection area of oblique sensor, the oblique sensor controls the operation of transmission belt on receiving platform, the material frame enters and exits the detection area of second to position sensor, and the second to position sensor is responsible for closing adsorption disc. 3.The AMHS station transfer mechanism of claim 1, wherein: The both sides of the upper end of the transmission belt are provided with guide plates, the guide plates are flared obtuse angle bidirectional guide plates, and the included angle between the front end and the middle part of the guide plate is 120-150 degrees.

4. The AMHS station transfer mechanism of claim 1, wherein: The receiving platform further includes a code reading assembly, the code reading assembly includes a code reader and a laser sensor, and the code reading assembly is responsible for identifying the nameplate information on the material frame.

5. The AMHS station transfer mechanism of claim 1, wherein: The positioning jacking working groove further includes a positioning sensor and a conveying belt, the material frame enters and exits the detection area of the positioning sensor, and the positioning sensor is responsible for controlling the operation of the conveying belt on the positioning jacking working groove.

6. The AMHS station transfer mechanism of claim 1, wherein: The upper and lower ends of the lifting platform are provided with lifting limit blocks, the lifting limit blocks are provided with optimus glue, the left and right ends of the horizontal moving platform are provided with anti-collision buffers, and the anti-collision buffers are provided with optimus glue.

7. The AMHS station transfer mechanism of claim 1, wherein: The sliding table module includes a servo motor, a straight rack, a straight gear, a mounting plate, a motor mounting plate, a sliding rail, and a sliding block, the upper end of the mounting plate is fixedly connected with the sliding rail, the sliding rail is installed with the sliding block above, the sliding block is fixedly connected with the motor mounting plate, the motor mounting plate is provided with the servo motor, the output end of the servo motor is provided with the straight gear, the straight gear is embedded below the straight rack, and the straight rack is fixedly connected with the mounting plate.

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